• Industrial Engineering and Management Systems
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• v.14 no.4
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• pp.392-400
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• 2015

Monitoring of plasma etch processes for fault detection is one of the hallmark procedures in semiconductor manufacturing. Optical emission spectroscopy (OES) has been considered as a gold standard for modeling plasma etching processes for on-line diagnosis and monitoring. However, statistical quantitative methods for processing the OES data are still lacking. There is an urgent need for a statistical quantitative method to deal with high-dimensional OES data for improving the quality of etched wafers. Therefore, we propose a robust relevance vector machine (RRVM) for regression with statistical quantitative features for modeling etch rate and uniformity in plasma etch processes by using OES data. For effectively dealing with the OES data complexity, we identify seven statistical features for extraction from raw OES data by reducing the data dimensionality. The experimental results demonstrate that the proposed approach is more suitable for high-accuracy monitoring of plasma etch responses obtained from OES.

• The KIPS Transactions:PartA
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• v.8A no.1
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• pp.63-69
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• 2001

In this paper, we present an interactive 3D character modeling and animation including a data management tool for editing the animation. It includes an animation editor for changing animation sequences according to the modified structure of 3D object in the object structure editor. The animation tool has the feature that it can produce motion data independently of any modeling tool including our modeling tool. Differently from conventional 3D graphics tools that model objects based on geometrically calculated data, our tool models 3D geometric and animation data by approximating to the real object using 2D image interactively. There are some applications that do not need precise representation, but an easier way to obtain an approximated model looking similar to the real object. Our tool is appropriate for such applications. This paper has focused on the data management for enhancing the automatin and convenience when editing a motion or when mapping a motion to the other character.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.59 no.4
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• pp.450-455
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• 2010

The performance modeling of a $25{\mu}m$ pitch VGA ${\mu}$-bolometer with the self-aligned thermal resistor structure is carried out. The self-aligned thermal resistor can be utilized for the maximizing the thermal resistance and the fill factor of a bolometer, so the performance improvement can be expected. From the results of the performance modeling of the micro-bolometer with self-align thermal resistor for a $25{\mu}m$ pitch $640{\times}480$ microbolometer designed with $0.6{\mu}m$ minimum feature size, the drastic improvements of NETD from 38.7 mK to 19.1 mK, responsivity of 1.9 times are expected with a self aligned thermal resistor structure. The main reason for the performance improvements with a self-aligned thermal resistor structure comes from the increasement of the thermal resistance.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.11
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• pp.180-188
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• 1998

Z-map is a special form of discrete nonparametric representation in which the height values at grid points on the xy-plane are stored as a 2D array z[i.j]. While z-map is the simplest form of representing sculptured surfaces and it is the most versatile scheme for modeling nonparametric objects, its practical application in industry (eg, tool-path generation) aroused much controversy over its weaknesses ; accuracy, singularity (eg, vertical wall), and some excessive storage needs. Although z-map has such limitations, much research on the application of z-map can be found in various articles. However, research on the systematic analysis of sculptured surface shape representation via z-map model is rather rare. Presented in this paper are the following: shape modeling power of the simple z-map model, exact (within tolerance) B-map representation of sculptured surfaces which have some feature-shapes such as vertical-walls and real sharp-edges by adopting some complementary B-map models, and some application examples.

• The Bulletin of The Korean Astronomical Society
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• v.43 no.2
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• pp.40.3-40.3
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• 2018

This dissertation presents the results on two-dimensional Redshift space distortion (hereafter RSD) analyses of the large-scale structure of the universe using spectroscopic data and on improvement of modeling of the RSD effect. RSD is an effect caused by galaxies' peculiar velocity on their clustering feature in observation along the line of sight and is thus intimately connected to the growth rate of the structure in the universe, from which we can test the origin of cosmic acceleration and Einstein's theory of gravity at cosmic scales in the end. However, there are several challenges in modeling precise and accurate RSD effect, such as non-linearities and the existence of an exotic component, e.g. massive neutrino. As part of endeavors for modeling more precise and accurate galaxy clustering in redshift space, this dissertation includes a series of works for this issue. (More detailed descriptions were omitted.)

• Proceedings of the Korean Society for Bioinformatics Conference
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• 2003.10a
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• pp.147-154
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• 2003

Microarray information system is a complex system to manage, analyze and interpretate microarray gene expression data. Establishment of well-defined development process is very essential for understanding the complexity and organization of the system. We performed object-oriented analysis using Unified Modeling Language (UML) in specifying, visualizing and documenting microarray information system. The object-oriented analysis consists of three major steps: (i) use case modeling to describe various functionalities from the user's perspective (ii) dynamic modeling to illustrate behavioral aspects of the system (iii) object modeling to represent structural aspects of the system. As a result of our modeling activities we provide the UML diagrams showing various views of the microarray information system. We believe that the object-oriented analysis ensures effective documentations and communication of information system requirements. Another useful feature of object-oriented technique is structural continuity to standard microarray data model MAGE-OM (Microarray Gene Expression Object Model). The proposed modeling e(forts can be applicable for integration of biomedical information system.

• 한국지구물리탐사학회:학술대회논문집
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• 2003.11a
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• pp.684-689
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• 2003

One field identified by an inverse method is one of multiple candidate solutions those are independently obtained through a specific estimation technique. While averaging of optimized fields can provide a better description of the spatial feature of an unknown field, it deteriorates the flow and transport characteristics of the optimized fields. As a result, the averaged field is not suited for modeling aquifer performances. Based on genetic algorithm, an optimal field synthesis technique is developed, which combines diversely optimized fields into a refined group of fields. Each field in the population is paired, and a sub-region of each field is exchanged by crossover operation to create a group of synthesized fields of enhanced modeling capability. The population of the fields is evolved till the synthesized fields become sufficiently similar. Applications of the optimal field synthesis to synthetic cases indicate that the objective functions of the fields assessing the modeling capabilities are further reduced after the optimal field synthesis. The identified fields from various inverse techniques may yield a range of modeling results under varied flow situations. The uncertainty is narrowed down through the optimal field synthesis and the associated modeling results converge on that of the reference field. The developed inverse modeling facilitates the construction of a reliable simulation model and hence trustworthy predictions of the future performances.

• The Journal of the Korea Contents Association
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• v.8 no.1
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• pp.212-227
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• 2008

Since 3D face can be rotated freely in 3D space and illumination effects can be modeled properly, 3D face modeling Is more precise and realistic in face pose, illumination, and expression than 2D face modeling. Thus, 3D modeling is necessitated much in face recognition, game, avatar, and etc. In this paper, we propose a 3D face modeling method based on 3D morphable shape modeling. The proposed 3D modeling method first constructs a 3D morphable shape model out of 3D face scan data obtained using a 3D scanner Next, the proposed method extracts and matches feature points of the face from 2D image sequence containing a face to be modeled, and then estimates 3D vertex coordinates of the feature points using a factorization based SfM technique. Then, the proposed method obtains a 3D shape model of the face to be modeled by fitting the 3D vertices to the constructed 3D morphable shape model. Also, the proposed method makes a cylindrical texture map using 2D face image sequence. Finally, the proposed method builds a 3D face model by rendering the 3D face shape model with the cylindrical texture map. Through building processes of 3D face model by the proposed method, it is shown that the proposed method is relatively easy, fast and precise than the previous 3D face model methods.

• Proceedings of the Korean Operations and Management Science Society Conference
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• 1997.10a
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• pp.41-44
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• 1997

This paper is to provide an integration approach between design and process planning for mechanical parts, using feature recognition. We develop a method to extract each individual feature of an object from 3D modeling data using face-edge graph based algorithm and then propose an approach to recognize the volumic form features using heuristic rules. we demonstrate the proposed approaches are effective for such basic shapes as pocket, slot, through hole, etc.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.10a
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• pp.281-285
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• 2001

The design of injection molded polymeric parts has been done empirically, since it requires profound knowledge about the moldability and causal effects on the properties of the part, which are not available to designers through current CAD systems. An interactive computer-based design system is developed in order to realize the concept of rational design for the productivity and quality of mold making. The knowledge-based CAD system is constructed by adding the knowledge-base module for mold feature synthesis and appropriate CAE programs for mold design analysis in order to provide designers, at the initial design stage, with comprehensive process knowledge for feature synthesis performance analysis and feature-based geometric modeling. A knowledge-based CAD system is a new tool which enables the concurrent design with integrated and balanced design decisions at the initial design stage of injection molding.