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http://dx.doi.org/10.5370/KIEEP.2010.59.4.450

The Performance Modeling of a VGA Bolometer with Self-Aligned Structure  

Park, Seung-Man (호서대학교 국방과학기술학과)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers P / v.59, no.4, 2010 , pp. 450-455 More about this Journal
Abstract
The performance modeling of a $25{\mu}m$ pitch VGA ${\mu}$-bolometer with the self-aligned thermal resistor structure is carried out. The self-aligned thermal resistor can be utilized for the maximizing the thermal resistance and the fill factor of a bolometer, so the performance improvement can be expected. From the results of the performance modeling of the micro-bolometer with self-align thermal resistor for a $25{\mu}m$ pitch $640{\times}480$ microbolometer designed with $0.6{\mu}m$ minimum feature size, the drastic improvements of NETD from 38.7 mK to 19.1 mK, responsivity of 1.9 times are expected with a self aligned thermal resistor structure. The main reason for the performance improvements with a self-aligned thermal resistor structure comes from the increasement of the thermal resistance.
Keywords
Bolometer Performance Modeling; Self-Aligned Structure; NETD; Responsivity;
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