• 제목/요약/키워드: Fe-Al compound

검색결과 109건 처리시간 0.024초

FeRAM 소자 제작 중에 발생하는 Pt/Al 반응 기구 (Pt/Al Reaction Mechanism in the FeRAM Device Integration)

  • 조경원;홍태환;권순용;최시경
    • 한국재료학회지
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    • 제14권10호
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    • pp.688-695
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    • 2004
  • The capacitor contact barrier(CCB) layers have been introduced in the FeRAM integration to prevent the Pt/Al reaction during the back-end processes. Therefore, the interdiffusion and intermetallic formation in $Pt(1500{\AA})/Al(3000{\AA})$ film stacks were investigated over the annealing temperature range of $100\sim500^{\circ}C$. The interdiffusion in Pt/Al interface started at $300^{\circ}C$ and the stack was completlely intermixed after annealing over $400^{\circ}C$ in nitrogen ambient for 1 hour. Both XRD and SBM analyses revealed that the Pt/Al interdiffusion formed a single phase of $RtAl_2$ intermetallic compound. On the other hand, in the presence of TiN($1000{\AA}$) barrier layer at the Pt/Al interface, the intermetallic formation was completely suppressed even after the annealing at $500^{\circ}C$. These were in good agreement with the predicted effect of the TiN diffusion barrier layer. But the conventional TiN CCB layer could not perfectly block the Pt/Al reaction during the back-end processes of the FeRAM integration with the maximum annealing temperature of $420^{\circ}C$. The difference in the TiN barrier properties could be explained by the voids generated on the Pt electrode surface during the integration. The voids were acted as the starting point of the Pt/Al reaction in real FeRAM structure.

APPLICATION OF DISPROPORTIONATION REACTION TO SURFACE TREATMENT

  • Oki, Takeo
    • 한국표면공학회지
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    • 제29권5호
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    • pp.478-481
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    • 1996
  • Disproportionation reaction is very important and interesting reaction to be applied to such surface treatment as metal, alloy, compound coating, a surface etching and so on. In gaseous system, the reaction of Al chloride is applied to Al and Al alloy coating, and the similar reaction of Ti chloride is also used for Ti, Ti alloy and Ti compound coating. As for aqueous system, this reaction is utilized to such metal coat as Sn etc. and metal etching such as Cu, Fe and so on. Also in molten salts system, this reaction has many application for surface treatment like metal, alloy and compound coatings for corrosion, wear, heat resistance and so forth. For instance, carbide film, nitride film, boride film, alloy film, quite new different film from the components of substrate material are coated in single and multiple component film system by the disproportionation reaction.

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Fly Ash를 이용한$\beta$-Sialon 분말합성 (Synthesis of $\beta$-Sialon Powder from Fly Ash)

  • 최희숙;노재승;서동수
    • 한국세라믹학회지
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    • 제33권8호
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    • pp.871-876
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    • 1996
  • It is believed that fly ash could be suitable for preparing the sialon by carbothermal reduction method because the total amount of SiO2 and Al2O3 is above 80% and the unburned residual carbon is above 5% within the fly ash. The effects of reaction temperature (1350, 1400, 145$0^{\circ}C$) reaction time (1, 5, 10 hours) and the amount of carbon additions (C/SiO2=2, 3, 4 mole) on the $\beta$-sialon synthesis were obserbed, It was conformed that $\beta$-sialon (Z=2.15~2.18) was formed as major phase under all of the synthesis conditions and small amount of Si2ON2 SiC, AlN and Si3N4 was formed depending on the synthesis conditions. FeSix intermetal-lic compound was formed above 140$0^{\circ}C$ reaction temperature due to the large amount of iron oxides within the raw fly ash.

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열처리된 A3003 알루미늄합금 용접부의 미세조직 및 기계적 특성 (Microstructrue and Mechanical Properties of A3003 Aluminium Alloy Welds by Heat-treatment)

  • 이일천;송영종;국진선;윤동주;김병일
    • Journal of Welding and Joining
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    • 제25권5호
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    • pp.51-57
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    • 2007
  • The present work was aimed to examine the variation of microstructure and mechanical properties by annealing($100{\sim}620^{\circ}C$, $2{\sim}8hr$) in A3003 Al alloy welded pipes. The A3003 Al alloy pipes with 34 mm in external diameter and 1.3 mm in thickness were manufactured by high frequency induction welding with the V shaped convergence angle $6.7^{\circ}$ and power input 50 kW. The tensile and yield strength decreased with increasing the annealing temperature remarkably, but elongation increased remarkably. Vickers hardness in welds decreased with increasing the annealing temperature remarkably. The primary intermetallic compound of $Al_{12}(Fe,\;Mn)_2Si$ was precipitated in welds as the same base metal. In a certain experimental condition, the welds line in A3003 alloys disappeared at $450^{\circ}C$ for 2 hr because of the same mechanical property and structure between welds and base metal.

Effect of Aluminum and Silicon on Atmospheric Corrosion of Low-alloying Steel under Containing NaHSO3 Wet/dry Environment

  • Chen Xinhua;Dong Junhua;Han Enhou;Ke Wei
    • Corrosion Science and Technology
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    • 제7권6호
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    • pp.315-318
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    • 2008
  • The atmospheric corrosion performance of Al-alloying, Si-alloying and Al-Si-alloying steel were studied by wet/dry cyclic corrosion tests (CCT) at $30^{\circ}C$ and 60% relative humidity (RH). The corrosion electrolyte used for CCT was 0.052 wt% $NaHSO_{3}$ (pH~4) solution. The result of gravimetry demonstrated that Al-Si-bearing steels showed lower corrosion resistance than other rusted steels. But the rusted 0.7%Si-alloying steel showed a better corrosion resistance than rusted mild steel. Polarization curves demonstrated that Al-/Si-alloying and Al-Si-alloying improved the rest potential of steel at the initial stage; and accelerated the cathodic reduction and anodic dissolution after a rust layer formed on the surfaces of steels. XRD results showed that Al-Si-alloying decreased the volume fraction of $Fe_{3}O_{4}$ and $\alpha-FeOOH$. The recycle of acid accelerated the corrosion of steel at the initial stage. After the rust layer formed on the steel, the leak of rust destabilized the rust layer due to the dissolution of compound containing Al (such as $FeAl_{2}O_{4}$, $(Fe,\;Si)_{2}(Fe,\;Al)O_{4}$). Al-Si-alloying is hence not suitable for improving the anti-corrosion resistance of steel in industrial atmosphere.

Ni-Al계 금속간화합물 코팅에 미치는 고주파유도 가열 조건의 영향 (Effects of Induction Heating Conditions on Ni-Al Based Intermetallic Compound Coating)

  • 이한영;김태준;조용재
    • 대한금속재료학회지
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    • 제48권2호
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    • pp.141-147
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    • 2010
  • An Ni-Al intermetallic coating has been produced by induction heating on mild steel. The effect of the induction heating conditions on the microstructure of the coating has been investigated. The reaction synthesis of the intermetallic compounds was promoted while increasing the heating rate and the holding time at reaction temperature. Especially, an NiAl phase corresponding to the initial composition of mixed powder was predominantly formed. However, the synthesis at low reaction temperatures occurred by solid state diffusion during the holding time and an Fe-Al reaction layer was formed at the interface with the substrate, regardless of the heating rate. The combustion synthesis of the intermetallic compound occurred at a temperature higher than 1023 K and resulted in an almost single phase NiAl structure.

비탄성 변형이론을 이용한 $Fe_3$Al 금속간화합물의 소성변형 기구 고찰 (A Study of Plastic Deformation Mechanisms in $Fe_3$Al Intermetallics Alloys by Inelastic Deformation Theory)

  • 정호철
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 1999년도 춘계학술대회논문집
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    • pp.180-183
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    • 1999
  • It is well known that Fe3Al intermetallic compound shows an anomalous peak of the yield strength at about 50$0^{\circ}C$ and then decrease at higher temperatures The dislocation structure was examined by transmission electron microscopy and high temperatures. The dislocation structure was examined by transmission electron microscopy and high temperature mechanical properties were examined by tensile and load relaxation tests. The flow stress curves obtained from load relaxation tests were then analyzed in terms of internal variable deformation theory. it was found that the flow curves consisted of three micro-deformation mechanisms -i. e inelastic deformation mode plastic deformation mode and dislocation creep deformation mode depending on both dislocation structure and deformation temperature. The flow curves could be well described by the constitutive equations of these three micro-deformation mechanisms based on the internal variable deformation theory.

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Reinvestigation of Dion-Jacobson Phases CsCa2Nb2MO9 (M = Fe and Al)

  • Hong, Young-Sik
    • Bulletin of the Korean Chemical Society
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    • 제27권6호
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    • pp.853-856
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    • 2006
  • Dion-Jacobson phases $CsCa_2Nb_2FeO_9$ and $CsCa_2Nb_2AlO_9$ were reinvestigated by the Rietveld analysis of powder X-ray diffraction (XRD) method, scanning electron microscopy (SEM), and energy dispersive X-ray spectroscopy (EDS). These nominal compounds, previously known as the oxygen-deficient layered perovskites with the sequences of $NbO_6-MO_4-NbO_6$ in tripled slab, in fact, were mixed phases of n = 3 Dion-Jacobson phases and impurities such as $Ca_2NbFeO_6$ and $Ca_3Al_2O_6$. The difference of morphology and chemical in-homogeneity between Dion-Jacobson phases and impurities could be clearly identified by scanning electron microscopy with energy-dispersive X-ray spectroscopy. The chemical composition of $CsCa_2Nb_2FeO_9$ was calculated into $Cs_{0.59}Ca_{2.64}Nb_{2.92}Fe_{0.81}$ in small agglomerate crystals and $Cs_{0.95}Ca_{1.97}Nb_{3.08}Fe_{0.15}$ in long plate-like crystals.

무산세 열연 용융아연도금강판의 도금밀착성에 미치는 도금욕 Al농도의 영향 (Effect of Al content on coating adhesion of hot rolled galvanized iron manufactured without pickling process)

  • 전선호;최진원
    • 한국표면공학회지
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    • 제32권1호
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    • pp.31-42
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    • 1999
  • The effect was investigated that aluminium in the zinc bath has on the coating adhesion of Hot-rolled Galvanized Iron(HGI) manufactured without pickling process. It is thought that the coating adhesion of HGI manufactured without pickling process is good due to the fact that increasing aluminium content in the zinc bath makes zinc and aluminium diffuse to the cracks or pores in the scale formed through the reduction heat treatment, and Fe-Zn-Al compound with good ductility is formed in the scale layer and plays a role of anchor between zinc coating and substrate. It is possible that HGI with the good coating adhesion was produced without pickling treatment in the zinc bath with more that 3wt% of Al content even at the $550^{\circ}C$ of conventional reduction heating temperature. In creasing the temperature of heating section and aluminium content in the zinc bath prevents the Zn-Fe alloy. The corrosion resistance of HGI manufactured without pickling process is excellent because of the mixed reaction of zinc sacrifice and aluminium passivity film.

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Hf가 첨가된 Fe-30at.%A1-5at.%Cr 합금의 미세조직 및 열간압연가공 특성 (Effects of Hf Addition on Microstructure and Hot Workability of Fe-30at.%A1-5at.%Cr Alloy)

  • 윤계림;이도재;백대화;이경구
    • 한국주조공학회지
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    • 제21권6호
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    • pp.336-342
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    • 2001
  • This study was carried out to examine the effects of adding 0.3at.%Hf in Fe-30at.%Al-5at.%Cr alloy on the variation of microstructures and hot workability. The effect of hot rolling on mechanical properties was estimated by measuring the elongation and tensile strength after rolling at 800 and 1000 respectively. Microstructure of Fe-30at.%Al-5at.%Cr alloy was consisted of large equiaxed grains and it was changed to quasi-equiaxed or columnar structures by adding 0.3at.%Hf to Fe-30at.%Al-5at.%Cr alloy. Every specimens showed a decreased tensile strength after hot rolling compared to that of before rolling. The elongation was increased by hot rolling. Remarkable changes in elongation by hot rollong was observed such as from 1.4% to 4.5% elongation at the specimen of 0.3at.%Hf added to Fe-30at.%Al-5at.%Cr. Fe-30at.%Al-5at.%Cr alloy showed typical cleavage fracture on tensile failure and hot rolling has negligible effects on fracture mode in this alloy. However at the alloy containing Hf fracture mode was changed by hot rolling from intergranular to mixed intergranular and transgranular fracture mode.

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