• 제목/요약/키워드: Fabrication Error

검색결과 264건 처리시간 0.027초

도파폭 공정오차에 따른 광도파 특성변화와 소자성능 저하 (AWG device characteristic dependence on the fabrication error limit)

  • 박순룡;오범환
    • 한국광학회지
    • /
    • 제10권4호
    • /
    • pp.342-347
    • /
    • 1999
  • 광소자의 소형화와 집적화 노력에 따라 광도파로의 도파폭과 곡률 반경이 작아지면서, 그 경계조건을 만족하는 도파모드와 전파상수의 변화가 심하게 되었다. 특히, 도파폭의 좁아지면서 제작 공정상의 폭조절 오차한계 내의 작은 변화에도 전파상수가 크게 변화하게 되어, 배열도파로(Arrayed Waveguide Grating, AWG)소자에서는 각 도파로 진행광의 위상이 설계와 심하게 달라지고 소자의 성능에 영향이 커지게 되었다. 광소자의 소형화에 따라 심각해지는 이러한 근사설계 오차에 의한 영향을 정량적으로 분석하고 대처하기 위해, 여기서는 유효굴절률법(Effective Index Method)과 해석적 함수해(Analytic Solution Method)를 이요하여 여러 도파로 구조를 해석하여 전파특성 변수를 얻어내었다. 또한, 이를 적용하여 자체 제작한 고기능 전산시늉기를 통해 각종 InP-, Silica-AWG 소자의 성능을 모사하였다. 모사 결과는 실제 제작된 전형적인 소자와 비교하여 매우 유사한 경향을 나타내었으며, Ridge-type Inp-AWG 소자의 경우, 도파폭의 허용공차가 0.02$\mu\textrm{m}$ 이내로 개선될 때, AWG 소자의 신호대잡음비(SNR)가 약 -25dB 이상 가능하게 되며 Rib-type Silica-AWG 소자의 경우는 도파폭 허용공차가 0.1$\mu\textrm{m}$ 정도이기만 해도 약 -30dB 이상 가능한 것으로 모사되었다.

  • PDF

6.0~18.0 GHz 주파수용 광대역 DFD 위상 상관기 설계 및 제작 (Design and Fabrication of Wideband DFD Phase Correlator for 6.0~18.0 GHz Frequency)

  • 최원;구경헌
    • 한국항행학회논문지
    • /
    • 제18권4호
    • /
    • pp.341-346
    • /
    • 2014
  • 본 논문은 6.0~18.0 GHz 대역에서 동작하는 광대역 디지털 주파수 변별기(DFD, digital frequency discriminator)의 위상 상관기(phase correlator)를 설계하고 제작하였으며, 제작된 DFD 위상 상관기의 I와 Q 신호를 측정하고, 주파수 변별 오차를 분석하였다. 믹서형 위상 상관기의 동작 특성에 대한 해석적 관계식을 유도하였으며, 위상 상관기에 포함되는 IQ 믹서(mixer)와 8-way 전력분배기(power divider)는 RF 시뮬레이션 툴(tool)을 이용하여 모델링하였다. 설계된 위상 상관기는 제작되어 측정하였다. 제작된 위상 상관기의 I와 Q 출력신호를 측정하여 제시하였으며, 측정된 I와 Q 출력신호를 이용하여 위상오차(phase error)와 주파수 변별오차(frequency discrimination error)를 나타내었다. 위상 상관기의 평균 위상오차(phase error)는 $4.81^{\circ}$, RMS(root mean square)이고, 주파수 변별 오차는 1.49 MHz, RMS 이다.

공정영향을 고려한 비연성 진동형 마이크로 자이로스코프의 강건 최적 설계 (Robust Optimal Design of a Decoupled Vibratory Microgyroscope Considering Fabrication Influence)

  • 정희문;하성규
    • 대한기계학회논문집A
    • /
    • 제28권8호
    • /
    • pp.1065-1074
    • /
    • 2004
  • A robust optimal design considering fabrication influence has been performed for the decoupled vibratory microgyroscope fabricated by the bulk micromachining. For the analysis of the gyroscope, a design tool has been developed, by which user can perform the system level design considering electric signal process and the fabrication influence as well as mechanical characteristics. An initial design of the gyroscope is performed satisfying the performances of scale factor (or sensitivity) and phase delay, which depend on the frequency difference between driving and sensing resonant frequencies. The objective functions are formulated in order to reduce the variances of the frequency difference and the frequency in itself by fabrication error. To certify the results, the standard deviations are calculated through the Monte Caries Simulation (MCS) and compared initial deviation that is measured fabricated gyroscope chip.

집속이온빔을 이용한 미세구조물 가공의 형상정밀도 향상 (A New Approach to Reduce Geometric Error in FIB Fabrication of Micro Structures)

  • 김경석;정재원;민병권;이상조;박철우;이종항
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 2005년도 춘계학술대회 논문집
    • /
    • pp.1186-1189
    • /
    • 2005
  • Focused Ion Beam machining is an attractive approach to produce nano-scale 3D structures. However, like other beam-based manufacturing processes, the redeposition of the sputtered material during the machining deteriorates the geometric accuracy of ion beam machining. In this research a new approach to reduce the geometric error in FIB machining is introduced. The observed redeposition phenomena have been compared with existing theoretical model. Although the redeposition effect has good repeatability the prediction of exact amount of geometric error in ion beam machining is difficult. Therefore, proposed method utilizes process control approach. Developed algorithm measures the redeposition amount after every production cycle and modifies next process plan. The method has been implemented to a real FIB machine and the experimental results demonstrated considerable improvement of five micrometer-sized pocket machining.

  • PDF

SLS에서의 정밀도 향상을 위한 실험적 연구 (An Experimental Study for Accuracy Enhancement of SLS)

  • 신동훈;전병철;김재도
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 2000년도 추계학술대회 논문집
    • /
    • pp.943-946
    • /
    • 2000
  • Selective laser sintering(SLS) is a solid freeform fabrication process whereby a part is built layerwise by scanning a powder bed. The properties of metal powder are dependent on the heat, it is not easy to do the exact error compensation with analysis and estimation by modeling. This paper suggests that the error is compensated by experimental method and then the accuracy of shape is enhanced by revising of STL file. Also bonding force is measured by an experiment with change of process path.

  • PDF

전사방식 마이크로 광 조형에서 복합 재료의 미세구조물 제작을 위한 수지 교한 시스템 개발 (Development of Material Switching System for Microstructure with Multiple Material in Projection Microstereolithography)

  • 조광호;박인백;하영명;김민섭;이석희
    • 한국정밀공학회지
    • /
    • 제28권8호
    • /
    • pp.1000-1007
    • /
    • 2011
  • For enlarging the applications of microstereolithography, the use of diverse materials is required. In this study, the material switching system (MSS) for projection microstereolithography apparatus is proposed. The MSS consists of three part; resin level control, resin dispensing control, and vat level control. Curing characteristic of materials used in fabrication has been identified. Through repeated fabrication of test models, the critical fabrication error is investigated and a possible solution to this error is suggested. The developed system can be applied to improve the strength of microstructure and extended to fabricate an array of microstructures with multiple materials.

유전자 알고리즘을 이용한 광조형장치의 작업변수 결정 (Determining Variables of Fabrication for Stereolithograpy)

  • 전근수;백인환
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 2000년도 추계학술대회 논문집
    • /
    • pp.910-913
    • /
    • 2000
  • In this research we investigate geometric issues involved while using a particular rapid prototyping system, called Stereolithography(SLA). SLA create prototypes layer by layer, each layer being formed by scanning a laser beam across the x, y surface of a vat of liquid monomer mix. The performance of SLA is influenced by orientation and layer thickness of designed fabrication. The number of layer and the area needed support is influenced by the orientation and layer thickness of designed fabrication. The step influence and volume error is influenced by slice thickness. We minimize the support are, the number of layer and cusp height. These variables of fabrication is minimized using genetic algorithm. The time for genetic algorithm is as little as we can accept. So we calculate support area and cusp height simply.

  • PDF

한국전력연구소 초전도 MRI 마그네트 시스템 제작 기술 (Fabrication techniques of superconducting magnet system for MRI in KERI)

  • 고락길;배준한;심기덕;진홍범;이언용;권영길;류강식
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2000년도 하계학술대회 논문집 B
    • /
    • pp.597-599
    • /
    • 2000
  • Fabrication of superconducting magnet system needs high-degree technical know-how, which require not only a lot of investment of man-power and finance but also that of long time. Until now, we have met many technical problems and it have been solved by trial and error. In fact, we have got chance to come into contact with researches into the magnet design for MRI easily but did not contact with the process of fabrication and the techniques. We introduced process of fabrication and techniques for MRI magnet system until before the superconducting magnet combine with cryostat in Korea Electrotechnology Research Institute.

  • PDF

전해 가공 방법을 이용한 다중 마이크로 전극 제작 (Electrochemical Fabrication of Multi Microelectrodes)

  • 권순근;임형준;김수현;곽윤근
    • 대한기계학회:학술대회논문집
    • /
    • 대한기계학회 2004년도 춘계학술대회
    • /
    • pp.1136-1141
    • /
    • 2004
  • In recent years, demands on microelectrode have been greatly enhanced because of its potential applications and mass production of microelectrodes is needed. An electrochemical fabrication is used as an method for the simple and cheap fabrication of multi microelectrodes. In this paper, one dimensional microelectrode array is used for fabricating of multi electrodes. A diffusion layer which is formed near the electrode surface has an effect on the shape error of multi microelectrodes. The optimal distance between electrodes to minimize shape errors of multi electrodes is investigated. Multi microelectrodes which has several tens of and hundreds of micrometer in diameter are fabricated at a time.

  • PDF

프리팹 교량의 DfMA를 위한 디지털엔지니어링 모델 정의 (Definition of Digital Engineering Models for DfMA of Prefabricated Bridges)

  • 두이-쿠엉 응구옌;노기태;심창수
    • 한국BIM학회 논문집
    • /
    • 제12권1호
    • /
    • pp.10-22
    • /
    • 2022
  • Prefabricated bridges require strict management of tolerance during fabrication and assembly. In this paper, digital engineering models for prefabricated bridge components such as deck, girder, pier, abutment are suggested to support information delivery through the life-cycle of the bridge. Rule-based modeling is used to define geometry of the members considering variable dimensions due to fabrication and assembly error. DfMA(design for manufacturing and assembly) provides the rules for ease of fabrication and assembly. The digital engineering model consists of geometry, constraints and corresponding parameters for each phase. Alignment and control points are defined to manage tolerances of the prefabricated bridge during fabrication and assembly. Quality control by digital measurement of dimensions was also considered in the model definition. A pilot bridge was defined virtually to validate the suggested digital engineering models. The digital engineering models for DfMA showed excellent potential to realize prefabricated bridges.