• 제목/요약/키워드: Fabrication

검색결과 13,150건 처리시간 0.046초

Selective fabrication and etching of vertically aligned Si nanowires for MEMS

  • Kar, Jyoti Prakash;Moon, Kyeong-Ju;Das, Sachindra Nath;Kim, Sung-Yeon;Xiong, Junjie;Choi, Ji-Hyuk;Lee, Tae-Il;Myoung, Jae-Min
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2010년도 춘계학술발표대회
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    • pp.27.2-27.2
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    • 2010
  • In recent years, there is a strong requirement of low cost, stable microelectro mechanical systems (MEMS) for resonators, microswitches and sensors. Most of these devices consist of freely suspended microcantilevers, which are usually made by the etching of some sacrificial materials. Herein, we have attempted to use Si nanowires, inherited from the parent Si wafer, as a sacrificial material due to its porosity, low cost and ease of fabrication. Prior to the fabrication of the Si nanowires silver nanoparticles were continuously formed on the surface of Si wafer. Vertically aligned Si nanowires were fabricated from the parent Si wafers by aqueous chemical route at $50^{\circ}C$. Afterwards, the morphological and structural characteristics of the Si nanowires were investigated. The morphology of nanowires was strongly modulated by the resistivity of the parent wafer. The 3-step etching of nanowires in diluted KOH solution was carried out at room temperature in order to control the fast etching. A layer of $Si_3N_4$ (300 nm) was used for the selective fabrication of nanowires. Finally, a freely suspended bridge of zinc oxide (ZnO) was fabricated after the removal of nanowires from the parent wafer. At present, we believe that this technique may provide a platform for the inexpensive fabrication of futuristic MEMS.

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Fabrication and Characterization of Wide Uranium Foils by Planar Flow Casting Method

  • Kim, Ki-Hwan;Park, Jae-Soon;Lee, Byung-Chul;Kim, Chang-Kyu
    • 한국주조공학회지
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    • 제27권5호
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    • pp.224-227
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    • 2007
  • 원자로에 장전되는 $^{99}Mo$ 조사표적을 제조하기 위한 우라늄박판은, 박판 품질, 생산성, 경제성 문제로 인해, 기존의 열간압연방법에 의해 실험실 규모로는 제조가 가능하나, 상용 규모로는 제조되기 어려운 실정이므로, 새로운 제조방법의 개발이 요구되고 있다. 이와 같은 상황에서, $^{99m}Tc$의 모핵종인 방사선 동위원소$^{99}Mo$ 생산하기 위하여 planar flow casting (PFC) 법에 의해 다결정질 우라늄박판에 대한 새로운 제조방법이 연구되었다. $100{\sim}150\;{\mu}m$의 두께 및 너비 약 50mm의 연속적인 다결정질 우라늄박판이 하나의 batch에서 5m 이상의 길이로 제조되었다. 우라늄박판은 불순물이 거의 없었으며 양호한 표면조도를 가지고 있었다. 우라늄박판의 냉각를 접촉표면은 자유표면 보다 매끈한 자유표면을 가지고 있었다. 우라늄박판은 제조공정변수와는 상관없이 ${\alpha}-U$ 상을 가진 약 10 ${\mu}m$ 이하의 미세한 다결정립을 가지고 있었다.

Direct 반송방식에 기반을 둔 300mm FAB Line 시뮬레이션 (Direct Carrier System Based 300mm FAB Line Simulation)

  • 이홍순;한영신;이칠기
    • 한국시뮬레이션학회논문지
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    • 제15권2호
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    • pp.51-57
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    • 2006
  • 현재 반도체 산업은 200mm 웨이퍼에서 300mm 웨이퍼 공정으로 기술이 변화하고 있다. 300mm 웨이퍼 제조업체들은 Fabrication Line (FAB Line) 자동화를 비용절감 실현의 방책으로 사용하고 있다. 또한 기술의 확산, 시장 경쟁력의 격화 등으로 생산성 향상에 의한 원가절감이 반도체 산업 성장의 근본요인이 되고 있다. 대부분의 반도체 업체들은 생산성을 높이기 위해 average cycle time을 줄이는데 총력을 기울이고 있다. 본 논문에서는 average cycle time을 줄이는 데 중점을 두고, 300mm 반도체 제조공정을 시뮬레이션 하였다.

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대면적 3 차원 마이크로 형상제작을 위한 스테이지 스캐닝 시스템을 이용한 이광자 흡수 광조형 공정 개발 (Development of Large-area Two-photon Stereolithography Process for the Fabrication of Large Three-dimensional Microstructures)

  • 임태우;손용;이신욱;공홍진;박상후;양동열
    • 한국정밀공학회지
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    • 제25권1호
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    • pp.122-129
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    • 2008
  • Two-photon stereolithography is recognized as a promising process for the fabrication of three-dimensional (3D) microstructures with 100 nm resolution. Generally, beam-scanning system has been used in the conventional process of two-photon stereolithography, which is limited to the fabrication of micro-prototypes in small area of several tens micrometers. For the applications to 3D high-functional micro-devices, the fabrication area of the process is required to be enlarged. In this paper, large-area two-photon stereolithography (L-TPS) employing stage scanning system has been developed. Continuous scanning method is suggested to improve the fabrication speed and parameter study is conducted. An objective lens of high numerical aperture (N.A.) and high strength material were employed in this system. Through this work, 3D microstructures of $600*600*100\;{\mu}m$ were fabricated.

화학공정을 이용한 초전도 나노 분말 활성 (Fabrication of High Tc Superconducting Nano Powder Using Chemical Process)

  • 이상헌;김찬중;장건익
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.547-548
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    • 2006
  • In order to realize the commercial application of HTSC materials, it is necessary to develop the fabrication process of high Tc oxide superconductor materials with desired shape and for practical application and high critical current density as well as good mechanical strength which can withstand high lorenz force generated at high magnetic field. Much studies have been concentrated to develop the fabrication technique for high critical current density but still there are a lot of gap which should be overcome for large scale application of HTSC materials at liquid nitrogen temperature. Recently some new fabrication techniques have been developed for YBaCuO bulk superconductor with high mechanical strength and critical current density. In this project, the establishment of fabrication condition and additive effects of second elements were examined so as to improve the related properties to the practical use of YBaCuO superconductor, and we reported the production of the YBaCuO high Tc superconductor by the pyrolysis method.

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최적설계 기법을 이용한 초정밀 비구면 렌즈 가공기 베드의 구조설계 (Structural Design of the Bed Which Supports Micro Aspherical Lens Fabrication System Using the Design Optimization Technique)

  • 이일랑;박수진;이규봉;이석우;유용균;곽병만;백승엽
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.851-856
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    • 2005
  • The precision fabrication of aspherical lenses is increasingly required for the latest applications of compact and high resolution video-recording or camera systems. Micro-optical components, including micro-spherical or aspherical lenses and reflecting mirrors, are generally required to be manufactured with high shape accuracy, extremely low surface roughness and no surface damage. To meet the needs of the precision fabrication system, a bed which supports the micro aspherical lens fabrication machines stably and safely is required. In this study, the thickness of the ribs of the bed is optimized using the CAD integrated optimal design system, a virtual DS program.

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'아마데우스' 이온빔 나노 패터닝 소프트웨어와 나노 가공 특성 ('AMADEUS' Software for ion Beam Nano Patterning and Characteristics of Nano Fabrication)

  • 김흥배
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.322-325
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    • 2005
  • The shrinking critical dimensions of modern technology place a heavy requirement on optimizing feature shapes at the micro- and nano scale. In addition, the use of ion beams in the nano-scale world is greatly increased by technology development. Especially, Focused ion Beam (FIB) has a great potential to fabricate the device in nano-scale. Nevertheless, FIB has several limitations, surface swelling in low ion dose regime, precipitation of incident ions, and the re-deposition effect due to the sputtered atoms. In recent years, many approaches and research results show that the re-deposition effect is the most outstanding effect to overcome or reduce in fabrication of micro and nano devices. A 2D string based simulation software AMADEUS-2D $(\underline{A}dvanced\;\underline{M}odeling\;and\;\underline{D}esign\;\underline{E}nvironment\;for\;\underline{S}putter\;Processes)$ for ion milling and FIB direct fabrication has been developed. It is capable of simulating ion beam sputtering and re-deposition. In this paper, the 2D FIB simulation is demonstrated and the characteristics of ion beam induced direct fabrication is analyzed according to various parameters. Several examples, single pixel, multi scan box region, and re-deposited sidewall formation, are given.

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왁스 밀링 방법 및 디지털 광 프로젝션 방법으로 제작된 3본 금속 구조물의 적합도 비교 (Comparison the fit of three-unit metal framework fabricated by wax milling method and digital light projection method)

  • 이정환;안재석
    • 대한치과기공학회지
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    • 제41권1호
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    • pp.9-19
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    • 2019
  • Purpose: This study was conducted to comparative evaluate the marginal and internal gap of three-unit metal frameworks(Co-Cr) fabricated by wax milling method and digital light projection method of CAD/CAM systems. Methods: All the specimens were fabricated by three different fabrication methods: conventional wax up with casting(CWC), milled wax block with casting(MWC), digital light projection with casting(DLPC) (n=10 each). The marginal and internal fits of specimens were examined using a replica technique. The light-body silicone thickness was measured at 8 reference points(each abutment: 16 measurements). All measurements were conducted by a stereomicroscope. Digital photo were taken at $150{\times}$ magnification and then analyzed using a measurement software. The Mann-Whitney test was used for analyzing the results. Results: Statistically significant differences were found between the fabrication methods(p<0.001). The mean(SD) is ${\mu}m$ for fabrication methods, the mean marginal fit were recorded respectively, CWC 63(38), MWC group 50(33), DLPC 103(54) and the mean internal fit CWC 96(47), MWC group 116(41), DLPC 138(66). Conclusion : The marginal and internal fit were statistically different according to the fabrication methods(p<0.001). In all fabrication methods, the greatest misfit was found the occlusal area of all specimens.

Recent Progress of the DUPIC Fuel Fabrication in Korea

  • Lee, J.W.;Kim, W.K.;Lee, Jae-W.;Park, G.I.;YANG, M.S.
    • 한국방사성폐기물학회:학술대회논문집
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    • 한국방사성폐기물학회 2004년도 Proceedings of the 4th Korea-China Joint Workshop on Nuclear Waste Management
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    • pp.170-181
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    • 2004
  • DUPIC powder and pellets were successfully fabricated in accordance with the quality assurance program described in the Quality Assurance Manual for DUPIC fuel fabrication, which was developed on the basis of the CAN3-Z299.2-85 standard. This manual describes the quality management system applicable to the activities performed for DUPIC fuel fabrication. It covers the work processes, policies and procedures used for planning, executing, and verifying the work carried out for DUPIC fuel fabrication. It is important that a Quality Program is in place before the fabrication of the fuel for irradiation testing. In order to qualify the DUPIC pellet manufacturing processes, 3 series of experiments for the pre-qualification and 3 series for the qualification were performed. In these experiments, the optimum process conditions were established. Then, under the control of the QA program, 8 series of production runs were performed to make the qualified DUPIC pellets in a batch size of 1 kg. In these production runs, DUPIC fuel pellets satisfying the standard CANDU fuel pellet specifications could be successfully produced.

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Practical training "from production to design" using digital fabrication tools in university education

  • Sei HAYASHI;Tomoyuki GONDO
    • 국제학술발표논문집
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    • The 10th International Conference on Construction Engineering and Project Management
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    • pp.1104-1111
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    • 2024
  • In recent years, the development of digital design methods and structural analysis has made it possible to design complex building shapes. However, the construction of such buildings requires advanced knowledge of production, interaction with actual craftsmen, and verification of construction methods through mock-ups. Despite this, however, design education in Japanese universities is often limited to proposals at the predesign and schematic design stages, and students have few opportunities to study the design development and construction stages. However, in recent years, computer numerical control (CNC) machine tools have become relatively inexpensive and can be handled easily, even by beginners. Therefore, practical training programs intended to familiarize students with manufacturing techniques using such machines are becoming increasingly popular at Japanese universities. This paper reports on the content of a practical training program intended to provide students with practical experience from production to design in the field of manufacturing by using CNC machine tools and other digital fabrication equipment to create a mock-up of a complex curved surface for a building and simulate the process of construction production in the design development and construction management. It is difficult to create curved surfaces using only digital fabrication, and manual processes, such as bending wooden boards along curved surfaces, are required. Therefore, students were required to combine digital fabrication knowledge with hands-on manufacturing skills, including hand-bending and experiential learning, which helped students think about the necessary processes for constructing the shapes they designed.