• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.111-111
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• 1999

반도체 소자의 고집적화 및 고속화에 따라 다층 금속배선에서의 RC 지연이 전체 지연의 주된 요소로 되고 있다. 이런 RC 진연을 줄이기 위해서 현재 다층 금속배선의 층간 절연막으로 사용하고 있는 SiO2 박막(k~3.9)을 보다 낮은 유전상수(low-k)를 가지는 물질로 대체할 것이 요구된다. 층간 절연막으로서 가져야 할 가장 중요한 것은 낮은 유전상수와 높은 열적안정성($\geq$45$0^{\circ}C$)이다. 본 연구에서는 Toluene을 precursor로 사용한 PECVD방법으로 low-k 유사중합체 유기박막을 성장시켰으며 부동한 온도에서 성장된 박막의 특성을 비교하여 증착온도가 박막의 특성에 미치는 영향에 대하여 조사하였다. 유사중합체 유기박막은 platinum(Pt)기판과 silicon 기판위에 같이 증착되었다. Precursor는 4$0^{\circ}C$로 유지된 bubbler에 담겨지고 증발된 precursor molecules는 Argon(Ar:99.999%) carrier 가스에 의해 process reactor 내부로 유입된다. Plasma는 RF(13.56MHz generator로 연결된 susceptor 주위에 발생시켰다. Silicon 기판위에 증착한 시편으로 Fourier transform infrared (FTIR) spectra 및 열적 안정성을 측정하였고, Pt 기판위에 증착한 시편으로 Al/유기박막/Pt 구조의 capacitor를 만들어 열적안정성을 측정하였고, Pt 기판위에 증착한 시편으로는 Al/유기박막/Pt 구조의 capacitor를 만들어 K값 및 절연성을 측정하였다. Capacitance는 1MHz 주파수에서 측정하였다. 열적안정성은 30분동안 Ar 분위기에서 annealing하기 전후의 증착막의 두께의 변화를 측정함으로써 조사하였으며 유기박막의 두께는 surface profilometer로 측정하였다. 증착온도가 45$^{\circ}C$에서 15$0^{\circ}C$, 25$0^{\circ}C$로 높아짐에 따라 k값은 높아졌지만 대신 열적안정성은 좋아졌다. plasma power 30W인 경우 45$^{\circ}C$에서 증착했을 때 유전상수는 2.80으로 낮았지만 40$0^{\circ}C$에서 30분 동안 열처리한 후 두께가 49% 감소하였다. 그러나 25$0^{\circ}C$에서 증착했을 때 유전상수는 3.10으로 좀 높아졌지만 열적으로는 40$0^{\circ}C$까지 안정하였으며 45$0^{\circ}C$에서도 두께의 감소는 8%에 불과했다.

• Carbon letters
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• v.10 no.2
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• pp.114-122
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• 2009

Crushed, depitted peach stones were impregnated activated with 50% $H_3PO_4$ followed by pyrolysis at $500^{\circ}C$. Two activated carbons were produced, one under its own evolved gases during pyrolysis, and the second conducted with air flow throughout the carbonization stage. Physicochemical properties were investigated by several procedures; carbon yield, ash content, elemental chemical analysis, TG/DTG and FTIR spectra. Porosity characteristics were determined by the conventional $N_2$ adsorption at 77 K, and data analyzed to get the major texture parameters of surface area and pore volume. Highly developed activated carbons were obtained, essentially microporous, with slight effect of air on the porous structure. Oxygen was observed to be markedly incorporated in the carbon matrix during the air treatment process. Cation exchange capacity towards Cu (II) and Cd (II) was tested in batch single ion experimental mode, which proved to be slow and a function of carbon dose, time and initial ion concentration. Copper was up taken more favorably than cadmium, under same conditions, and adsorption of both cations was remarkably enhanced as a consequence of the air treatment procedure. Sequestration of the metal ions was explained on basis of the combined effect of the oxygen functional groups and the phosphorous-containing compounds; both contributing to the total surface acidity character.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.18 no.3
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• pp.27-33
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• 2004

The catalytic effect of waterworks sludge on NOx removal in $BaTiO_3$pellets and sludge pellets combined packed-bed plasma reactor with plate-plate electrode geometry is measured for the various conditions. NOx removal rate is about 90[%] at $BaTiO_3$-sludge combined reactor used fresh sludge. $NO_2$ and $O_3$ as byproducts are significantly generated in only $BaTiO_3$ packed-bed plasma reactor, however, in $BaTiO_3$-sludge combined packed-bed reactor, $NO_2$ and $O_3$ are completely removed while $CO_2$ as by-products are observed from FTIR spectra. $NO_2$ and $O_3$ seem to react with metallic molecules, metal oxide, and organic compounds that are generally chlorophyll included in sludge. NOx removal rate increases with $O_2$ concentration increasing. Removal rates $NO_2$ and $O_3$ are independent of operating time and repetition measurement times.

• Progress in Superconductivity
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• v.3 no.1
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• pp.13-16
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• 2001

We have measured the reflectivity of superconducting infinite-layer compounds $Sr_{0.9}$ $Ln_{0.1}$ Cu $O_2$ (Ln=La, Gd, Sm) with $T_{c}$ : 39 K using a Fourier-transform infrared spectrometer. We have identified the optical phonon modes from their infrared reflectivity and conductivity spectra and have proposed possible displacement patterns. The La- and the Gd-doped compounds exhibited only four ($2A_{2u}$ $+2E_{u}$) out of the five ($2A_{2u}$ $3E_{u}$) infrared-active phonons predicted by a group theoretical analysis whereas the Sm-doped compound exhibited all five modes. For the La-doped sample, we investigated the temperature dependence of the optical response functions in a wide temperature range of 7 - 300 K. In FIR region, the reflectivity is apparently enhanced below ~120 $cm^{-1}$ as temperature decreases across $T_{c}$. The value of $2$\Delta$/k_{B}$ $T_{c}$ is about 4.5, which is consistent with maximum gap value of d-wave $high- T_{c}$ cuprates.> c/ cuprates.uprates.s.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2002.05a
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• pp.193-197
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• 2002

The tribological properties and van der Waals attractive forces and the thermal stability of films are very important characteristics of highly hydrophobic fluorocarbon (FC) films for the long-term reliability of nano system. The effect of thermal annealing on films and van der Waals attractive forces and friction coefficient of films have been investigate d in this study. It was coated Al wafer which was treated O2 and Ar that ocatfluorocyclobutane ($C_4_{8}$) and Ar were supplied to the CVD chamber in the ratio of 2:3 for deposition of FC Films. Static contact angle and dynamic contact angle were used to characterize FC films. Thickness of films was measured by variable angle spectroscopy ellipsometer (VASE). Nanotribological data was got by atomic force microscopy (AFM) to measure roughness, lateral force microscopy (LFM) to measure friction force, and force vs. distance (FD) curve to evaluate adhesion force. FC films were cured in N2 and vacuum. The film showed the slight changes in its properties after 3 hr annealing. FTIR ATR studies showed the decrease of C-F peak intensity in the spectra as the annealing time increased. A significant decrease of film thickness has been observed. The friction force of Al surface was at least thirty times higher than ones with FC films. The adhesive force of bare Al was greater than 100 nN. After deposit FC films adhesive force was decreased to 40 nN. The adhesive force of films was decreased down to 10 nN after 24 hr annealing. During 24 hr annealing in $N_2$and vacuum at $100^{\circ}C$ film properties were not changed so much.

• Journal of Sericultural and Entomological Science
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• v.46 no.1
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• pp.28-31
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• 2004

Bombyx mori silk fibroin/hyaluronic acid blend films were prepared by mixing aqueous solution of B. mori silk fibroin and hyaluronic acid. According to the FTIR spectra, no interaction between silk fibroin and hyaluronic acid was found. The conformation of silk fibroin in blend films was changed from random coil to $\beta$-sheet structure by treatment of EDC ethanol solution. Thermal degradation peak of silk fibroin and hyaluronic acid was also not altered by blending each other. The average swelling ratio of silk fibroin/hyaluronic acid blend films was 70. Therefore, silk fibroin/hyaluronic acid blend films might be one of possible wound dressing materials.

• Membrane and Water Treatment
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• v.7 no.1
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• pp.23-38
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• 2016

Batch adsorption of methyl orange (MO) from aqueous solution using three kinds of anion exchange membranes BI, BIII and DF-120B having different ion exchange capacities (IECs) and water uptakes ($W_R$) was investigated at room temperature. The FTIR spectra of anion exchange membranes was analysed before and after the adsorption of MO dye to investigate the intractions between dye molecules and anion exchange membranes. The effect of various parameters such as contact time, initial dye concentration and molarity of NaCl on the adsorption capacity was studied. The adsorption capacity found to be increased with contact time and initial dye concentration but decreased with ionic strength. The adsorption of MO on BI, BIII and DF-120B followed pseudo-first-order kinetics and the nonlinear forms of Freundlich and Langmuir were used to predict the isotherm parameters. This study demonstrates that anion exchange membranes could be used as useful adsorbents for removal of MO dye from wastewater.

• Advances in nano research
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• v.7 no.4
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• pp.233-240
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• 2019

The present research work reports in-vitro anti-cancer activity of biologically synthesized ZnO nanoparticles (ZnO NPs) against human carcinoma cells viz SCC-40, SK-MEL-2 and SCC-29B using Sulforhodamine-B (SRB) Assay. ZnO NPs were synthesized by a unique and novel biological route using Temperature-gradient phenomenon where the extract of combination of Catharanthus roseus (L.) G. Don (C. roseus), Azadirachta indica (A. indica), Ficus religiosa (F. religiosa) and NaOH solution were used as synthesis medium. The morphology of the ZnO NPs was characterized by Transmission Electron Microscopy (TEM). TEM images reveal that particle size of the samples reduces from 76 nm to 53 nm with the increase in reaction temperature and 68 nm to 38 nm with the increase in molar concentration of NaOH respectively. XRD study confirms the presence of elements and reduction in crystallite size with increase in reaction temperature and NaOH concentration. The diffraction peaks show broadening and a slight shift towards lower Bragg angle ($2{\theta}$) which represents the reduction in crystallite size as well as presence of uniform strain. The FTIR spectra of the extract show transmittance peak fingerprint of Zn-O bond and presence of bioactive molecules These NPs exhibit inhibition greater than 50% for SCC-40, SK-MEL-2 and SCC-29B cell lines and more than 50% cell kill for SCC-29B cells at concentrations < $80{\mu}g/ml$. Nanoparticles with smallest size have shown better anti-cancer activity and peculiar cell-selectivity. The combination of extracts of these plants with ZnO NPs can be used in targeted drug delivery as an effective anti-cancer agent, a potential application in cancer treatment.

• Advances in nano research
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• v.10 no.1
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• pp.77-90
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• 2021

In the present study, novel chitosan coated magnetic magnetite (Fe3O4) nanoparticles were successfully biosynthesized from mushroom, Agaricus campestris, extract. The obtained bio-nanocomposite material was used to investigate ultra-fast and highly efficient for removal of Ni2+ ions in a fixed-bed column. Chitosan was treated as polyelectrolyte complex with Fe3O4 nanoparticles and a Fungal Bio-Nanocomposite Material (FBNM) was derived. The FBNM was characterized by using X-Ray Diffractometer (XRD), Scanning Electron Microscopy-Energy Dispersive X-Ray Spectroscopy (SEM-EDS), Fourier Transform Infrared spectra (FTIR) and Thermogravimetric Analysis (TGA) techniques and under varied experimental conditions. The influence of some important operating conditions including pH, flow rate and initial Ni2+ concentration on the uptake of Ni2+ solution was also optimized using a synthetic water sample. A Central Composite Design (CCD) combined with Response Surface Modeling (RSM) was carried out to maximize Ni2+ removal using FBNM for adsorption process. A regression model was derived using CCD to predict the responses and analysis of variance (ANOVA) and lack of fit test was used to check model adequacy. It was observed that the quadratic model, which was controlled and proposed, was originated from experimental design data. The FBNM maximum adsorption capacity was determined as 59.8 mg g-1. Finally, developed method was applied to soft drinks to determine Ni2+ levels. Reusability of FBNM was tested, and the adsorption and desorption capacities were not affected after eight cycles. The paper suggests that the FBNM is a promising recyclable nanoadsorbent for the removal of Ni2+ from various soft drinks.

• Journal of Microbiology and Biotechnology
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• v.32 no.12
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• pp.1589-1598
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• 2022

Microfibrillated cellulose (MFC) is a valuable material with wide industrial applications, particularly for the food and cosmetics industries, owing to its excellent physiochemical properties. Here, we prepared high-solid microfibrillated cellulose (HMFC) from the centrifugation of Gelidium amansiiderived MFC right after fibrillation. Dispersion properties, morphology, and structural changes were monitored during processing. HMFC has a five-fold higher solid concentration than MFC without significant changes to dispersion properties. SEM images and FTIR spectra of HMFC revealed a stable surface and structure against centrifugal forces. HMFC exhibited 2,2'-azino-bis (3-ethylbenzothiazoline6-sulfonic acid) (ABTS) radical scavenging activity, although it could not scavenge 2,2-diphenyl-1- picrylhydrazyl (DPPH). Moreover, HMFC inhibited the generation of LPS-induced excessive nitrite and radial oxygen species in murine macrophage RAW264.7 cells. Additionally, HMFC suppressed LPS-induced Keap-1 expression in the cytosol but did not alter iNOS expression. HMFC also attenuated the UVB-induced phosphorylation of p38, c-Jun N-terminal kinase (JNK) 1/2, and extracellular-signal-regulated kinase (ERK) 1/2, as well as the phosphorylation of c-Jun in the immortalized human skin keratinocyte HaCaT cells. Therefore, the application of centrifugation is suitable for producing high-solid MFC as a candidate material for anti-inflammatory and antioxidative marine cosmeceuticals.