• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.25 no.11A
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• pp.1661-1671
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• 2000

본 고에서는 한국통신(Korea Telecom) IMT-2000 시험시스템(이하: Trial system 라고 함) 단말기용 전력증폭단으로 적용하기 위한 다단구동증폭기 및 전력증폭기를 GaAs MMIC로 설계 구현하는 기술을 제시하였다. 설계된 구동증폭기는 3단으로구성하여 RF(Radia Frequency) 송신신호(1955$\pm$70MHz)대역에서 2단 (중간단)의 이득 조정범위가 40 dB이상이 될 수 있도록 능동부품인 MESFET를 Cascade 형으로 구성하고 MESFET의 게이트(gate)에 조정전압을 인가하는 증폭기를 설계하여 GaAs MMIC화 1 침(크기4$\times$5 mm)으로 제작하였다. 아울러, 본 논문에서는 제시한 구동증폭기는 동작주파수 대역폭 범위기 3.5배이고 출력전력은 15dBmm 이며, 출력전력이득이 25~27dB이고 반사계수는 -15~20dB이며 이득평탄도 3dB(동작주파수 대역폭내)로써 Trial system용 단말기의 최종단인 전력증폭단의 출력단 특성을 효과적으로 나타내었다. 그리고, 전력 증폭기는 2개의 입력단에서 출력되는 신호를 분배하는 전력분배기와 병렬구조인 4개의 증폭단에서 출력되는 출력신호를 외부에서 접속하는 전력결합기를 접소하여 구성하였으며 RF(Radio Frequency) 주파수(1955 $\pm$70NHz)에서 대역폭을 4배로 설계하여 광대역인 대역폭을 구현하였고 출력전력은 570mW이며, 출력부가효율(PAE; Power Added Efficency)가 -15$\pm$20dB이고, 이득 평탄도(Gain flatness)는 동작주파수 대역내에서 0.5dB이며 입출력 전압정재파비(Input & Output VSWR)가 13이하인 고출력 전력증포기를 GaAs MMIC화 1칩 (크기; 3$\times$4mm)으로 제작하였다.의 다양성이나 편리성으로 변화하는 것이 국적을 바꾸는 것보다 어려운 시 대가 멀지 않은 미래에 도래할 것이다. 신세기 통신 과 SK 텔레콤에는 현재 1,300만명이 넘 는 고객이 있으며. 이들 고객은 어 이상 음성통화 중심의 이동전화 고객이 아니라 신세기 통신과 SK텔레콤이 함께 구축해 나갈 거대란 무선 네트워크 사회에서 정보화 시대를 살아 갈 회원들이다. '컨텐츠의 시대'가 개막되는 것이며, 신세기통신과 SK텔레콤은 선의의 경쟁 과 협력을 통해 이동인터넷 서비스의 컨텐츠를 개발해 나가게 될 것이다. 3배가 높았다. 효소 활성에 필수적인 물의 양에 따른 DIAION WA30의 라세미화 효율에 관하여 실험한 결과, 물의 양이 증가할수록 그 효율은 감소하였다. DIAION WA30을 라세미화 촉매로 사용하여 아이소옥탄 내에서 라세믹 나프록센 2,2,2-트리플로로에틸 씨오에스터의 효소적 DKR 반응을 수행해 보았다. 그 결과 DIAION WA30을 사용하지 않은 경우에 비해 반응 전환율과 생성물의 광학 순도는 급격히 향상되었다. 전통적 광학분할 반응의 최대 50%라는 전환율의 제한이 본 연구에서 찾은 DIAION WA30을 첨가함으로써 성공적으로 극복되었다. 또한 고체 염기촉매인 DIAION WA30의 사용은 라세미화 촉매의 회수 및 재사용이 가능하게 해준다.해준다.다. TN5 세포주를 0.2 L 규모 (1 L spinner flask)oJl에서 세포간의 응집현상 없이 부유배양에 적응,배양시킨 후 세포성장 시기에 따른 발현을 조사한 결과 1 MOI의 감염조건 하에서는 $0.6\times10^6$cell/mL의 early exponential시기의 세포밀도에서 72시간 배양하였을 대 최대 발현양을 나타내었다. 나타내었다. $\beta$4 integrin의 표현이 침투 능력을 높이는 역할을 하나 이때에는 laminin과 같은 리간드와의 특이

• Cartoon and Animation Studies
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• s.49
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• pp.697-712
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• 2017

In recent years, film and animation for cinematic release have embraced stereoscopic vision and the three-dimensional depth it creates for the viewer. The maturation of consumer-level virtual reality (VR) technology simultaneously spurred a wave of media productions set within 3D space, ranging from computer games to pornographic videos, to Academy Award-nominated animated VR short film Pearl. All of these works rely on stereoscopic fusion through stereopsis, that is, the perception of depth produced by the brain from left and right images with the amount of binocular parallax that corresponds to our eyes. They aim to emulate normal human vision. Within more experimental practices however, a fully rendered 3D space might not always be desirable. In my own abstract animation work, I tend to favour 2D flatness and the relative obfuscation of spatial relations it affords, as this underlines the visual abstraction I am pursuing. Not being able to immediately understand what is in front and what is behind can strengthen the desired effects. In 2015, Jeffrey Shaw challenged me to create a stereoscopic work for Animamix Biennale 2015-16, which he co-curated. This prompted me to question how stereoscopy, rather than hyper-defining space within three dimensions, might itself be used to achieve a confusion of spatial perception. And in turn, how abstract and experimental moving image practices can benefit from stereoscopy to open up new visual and narrative opportunities, if used in ways that break with, or go beyond stereoscopic fusion. Noteworthy works which exemplify a range of non-traditional, expanded approaches to binocular vision will be discussed below, followed by a brief introduction of the stereoscopic animation loop III=III which I created for Animamix Biennale. The techniques employed in these works might serve as a toolkit for artists interested in exploring a more experimental, expanded engagement with stereoscopy.

• Journal of Physiology & Pathology in Korean Medicine
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• v.24 no.4
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• pp.722-726
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• 2010

This study was to examine the neuroticism related to psychological characteristics of each Sasang types using SCL-90-R with 107 students from College of Oriental Medicine, Daeguhaani University. We did ANOVA analysis with seven neuroticism-related sub-scales and found significant differences in somatization (F=3.701, p=0.028) and hostility (F=4.396, p=0.015). The post-hoc analysis showed that the So-Yang type ($23.17{\pm}8.95$) has significantly (p=0.048, p=0.012) higher score than Tae-Eum ($19.25{\pm}5.97$) and So-Yang($19.25{\pm}5.76$) type in somatization. In hostility, the So-yang type ($11.31{\pm}3.98$) has significantly (p=0.011, p=0.015) higher score than Tae-Eum ($8.80{\pm}2.61$) and So-Eum ($9.44{\pm}3.35$) type. The ANOVA analysis with female subjects found significant differences in anxiety (F=3.88, p=0.03) and hostility (F=5.04, p=0.01). The post-hoc analysis showed that the So-Yang type ($20.36{\pm}5.44$, $12.36{\pm}3.82$) has significantly (p=0.043, p=0.015) higher score compared to the So-Eum type ($15.46{\pm}3.36$, $8.69{\pm}2.06$) in anxiety and hostility. The profile analysis using seven neuroticism-related subscalesof SCL-90-R did not revealed significant differences (Flatness with Greenhouse-Geisser (F=202.347, p=0.0001), Parallelism with Greenhouse-Geisser (F=1.428, p=0.191)). We discussed the implications of neuroticism in Sasang typology and SCL-90-R somatization, anxiety and hostility scales. This study showed opposite results compared to the previous studies that So-Eum type has higher neuroticism compared to the So-Yang and Tae-Eum type. The reason for this discrepancy between this and previous studies, and differences between male and female should be examined thoroughly with larger and balanced sample.

• Journal of Fashion Business
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• v.12 no.2
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• pp.87-99
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• 2008

This study aims to classify lower trunk body types of Chinese men in their middle age (30s and 40s) and suggest the standard for them to design slacks pattern. Mollison's relation deviations were used to analyze the direct measurement items in this research compared to those of Size Korea 2004. Though Korean middle-aged men were higher in most items than Chinese counterparts, all items except mid-thigh circumference and side hip length were merely within the range of ${\pm}1\sigma$. According to the results of size classification by absolute values, factor analysis extracted to 2 factors(horizontal size of lower body and vertical size of lower body), and cluster analysis brought about 3 types(type1: tall and thin trunk (36.9%), type 2 : normal height and thick trunk(45.5%), and type 3 : short and normal trunk(17.6%) with some significant differences among them. Also, the results of shape classification by index values, they were extracted 4 factors (waist-hip flatness, waist-hip cross section, vertical waist-groin and hip-surface length) by factor analysis and revealed 3 types(type 1: different waist-hip width, thick, long waist, long upper hip, and short hip-surface length(27.8%), type 2 : different waist-hip width, flat, short upper hip, high hip and groin, and average hip-surface length(29.4%), and type 3: small waist-hip width, thick, average upper hip, and short hip-surface length (42.8%)) with significant differences among them by cluster analysis. The results of standard body types by shape-size combination, 19subjects(10.16%) under these values are regarded as standard body types. Significance was not seen in all items in the t-test results between the total group and the standard group. The latter had lower variation coefficients and smaller individual differences than the former. However, in-depth research is required for generalization since this research is limited to a small number of subjects in Ningbo of Zhejiang.

• Journal of Hydrogen and New Energy
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• v.9 no.1
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• pp.16-24
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• 1998

Recently Zr-based $AB_2$ type hydrogen absorbing alloy has received much attention as a negative electrode material for the Ni-MH batteries because of its high capacity. In this study $ZrV_{0.1}Mn_{0.7}Ni_{1.2}$ alloy was chosen and the effects of heat treatment and a partial substitution of the Mo in Mn site on the various electrode properties were investigated. The alloys was prepared by arc melting (as-cast sample). Some of them were heat treated at $1,100^{\circ}C$ for 4 hours. After this they were differentiated by the different cooling rates of slow cooling and quenching. Various electrode characteristics such as activation process, high rate dischargeability and self discharge characteristic were investigated with the three types of electrodes. It was found that heat treated alloys resulted in an increase in plateau flatness of P-C isotherms however both discharge capacity and high rate capability were decreased. And the partial substitution of Mo for Mn in $ZrV_{0.1}Mn_{0.7}Ni_{1.2}$ alloy improved the self-discharge characteristic without the loss of discharge capacity (300mAh/g).

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.17 no.3 s.106
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• pp.239-248
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• 2006

In this paper, the cryogenically cooled low noise amplifier module for radio telescope receiver front-end using pHE-MT MMIC is designed and fabricated. In the selection of MMIC, the MMIC fabricated with the pHEMTS providing successful cryogenic operation are chosen. They are mounted in the housing using the thin film substrate. In the design of the housing, the absorber and the elimination of the gap between the carrier and the housing as well removed the unnecessary oscillations by its structure. The mismatch is improved by ribbon-tuning to provide the best performance at room temperature. The fabricated module shows the gain of $35dB{\pm}1dB$ and the noise figure of $2.37{\sim}2.57dB$ at room temperature over $21.5{\sim}23.5GHz$. In the cryogenic temperature of $15^{\circ}K$ cooled by He gas, the measured gain was above 35 dB and flatness ${\pm}2dB$ and the noise temperatures of $28{\sim}37^{\circ}K$.

• Progress in Medical Physics
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• v.12 no.2
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• pp.125-131
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• 2001

We was investigate the dosimetric characteristics of the virtual wedge and it compared to the conventional fixed wedge. Also we was evaluate the quality factor of the experimental multi-channel dosimetry system for virtual wedge. Recently virtual wedge technique and wedge fraction methods are available through the computer controlled asymmetric collimator or the independent jaw in medical linear accelerator for radiation therapy. The dosimetric characteristics are interpreted by radiation field analyzer RFA-7 system and PTW-UNIDOS system. Experimental multi-channel dosimetry system for virtual wedge was consists of the electrometer, the solid detector and array phantom. The solid detectors were constructed using commercially diodes for the assessment of quality assurance in radiotherapy. And it was used for the point dose measuring and field size scanning. The semiconductor detector and ion chamber were positioned at a dmax, 5 cm, 10 cm, 20 cm depth and its specific ratio was determined using a scanning data. Wedge angles in fixed and virtual type are compared with measurements in water phantom and it is shown that the wedge angle 15$^{\circ}$, 30$^{\circ}$, 45$^{\circ}$were agree within 1$^{\circ}$ degree in 6, 10 MV photon beams. In PDD and beam flatness, experimental multi-channel disimetry system was capable of reproduceing the measured values usually to within $\pm$2.1% the statistical uncertainties of the data. It was used to describe dosimetric characteristics of virtual wedge in clinical photon beams. Also we was evaluate optimal use of the virtual wedge and improve the quality factor of the experimental multi-channel dosimetry system for virtual wedge.

• Korean Journal of Optics and Photonics
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• v.19 no.1
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• pp.54-59
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• 2008

We report on the measurements of absorption spectra from acetylene ($^{12}C_2H_2$) and hydrogen cyanide ($H^{13}C^{14}N$) for wavelength reference in the C-band (conventional band) region using a supercontinuum optical source generated from a mode-locked $Cr^{4+}$:YAG laser. The center wavelength of the mode-locked $Cr^{4+}$:YAG laser was 1510 nm and the pulse duration was 75 fs at 100 MHz repetition rate. The supercontinuum source achieved a flatness of ${\pm}5dB$ over a wavelength range of more than 400 nm, using a 20 m long photonic crystal fiber. The measured absorption spectra from acetylene ($^{12}C_2H_2$) and hydrogen cyanide ($H^{13}C^{14}N$) had more than 50 lines and were analyzed for wavelength standardization.

• Korean Journal of Optics and Photonics
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• v.28 no.1
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• pp.9-15
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• 2017

We precisely measured and analyzed the dynamics of peptide-antibody interactions, using an ellipsometric biosensor based on a silicon substrate. To reduce the signal error due to the imperfect flatness of the substrate for extremely low concentrations of peptide, we fabricated the biosensor with a silicon substrate coated with Dextran SAM, instead of a glass prism coated with a thin metallic thin film. At an injection speed of $100{\mu}l/min$ of buffer liquid, we detected the dynamics of antibody-Dextran SAM or peptide-antibody fixed on biosensor, respectively. We detected the dynamics of antibody-Dextran SAM interactions down to a low concentration of 5 ng per liter, and we precisely measured the dynamics of association and dissociation of peptide and antibody down to 100 nM of peptide. We obtained the rate constants for association and dissociation from fitting the data by using deduced dynamical equation. As a result, we obtained an equilibrium constant for dissociation of 97 nM of peptide-antibody complex, which belongs to Class I.