• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.7
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• pp.709-716
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• 2013

A fan filter unit (FFU) is a device which supplies clean air from the ceiling in a clean room. With an increase in its size, velocity variation occurs within the exhaust plane and this damage the product quality or productivity. Hence, a guide vane is installed inside the device to enhance the velocity uniformity. Because the vane reduces the flow rate for a given pumping power, an optimum design is required to achieve velocity uniformity while minimizing the flow rate reduction at the same time. To find a geometry that satisfies these requirements, a series of numerical simulations has been conducted while changing the angle and length of the guide vanes. By changing the geometry of the side guide vane, the velocity uniformity increased by 3.7% and the flow rate decreased by 1.5%. For the center guide vane, the velocity uniformity increased by 2.9% and the flow rate decreased by 0.7%.

• Air Cleaning Technology
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• v.3 no.3 s.11
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• pp.12-25
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• 1990

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.04a
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• pp.121-121
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• 2014

본 연구에서는 반도체 제조의 Diffusion 공정설비의 FFU (Fan Filter Unit) 진동에 의해 발생한 wafer 불량 현상을 규명 및 개선하였다. EFEM(Equipment Front End Module)의 Loading 부에 장착된 FOUP(Front Opening Unified Pod)에 들어 있는 Wafer 들이 설비 EFEM 하부로 떨어져 깨지거나 FOUP 내에서 겹침 현상이 발생하는 것을 확인하였다. 이에 생산현장의 모든 Diffusion 공정 설비를 조사하였으며, 그 결과 A 사(社)의 특정 설비에서만 발생되는 현상임을 확인하였다. 해당 A사(社)설비군에서만 월 평균 10 건의 Slot Mapping Error 가 발생하였으며, 이로 인해 Wafer가 재 제조된 매수가 월 평균 53 매로 확인되었다. 따라서 본 연구는 A 사(社)설비에서 발생하는 Mapping Error 의 원인 규명 및 개선을 위해 추진되었다. 총 12 개의 항목을 불량 발생 원인 후보 군으로 선정 후 예비 진단한 결과 FFU(Fan Filter Unit)에 의한 문제 발생 가능성이 가장 높을 것으로 추정되었다. 이에 따라 4 개의 서로 다른 물리적 환경/조건에서 진동을 측정하였으며, 최종 평가 결과 Motor 와 Blade 의 불균형에서 기인한 진동이 설비의 loader 부에 직접적으로 영향을 주는 것을 확인하였다. 진동 문제를 해결하기 위해 고 RPM blade 에서 저 RPM 및 유량 감소를 보완할 수 있는 신규모델로 교체하였다. 신규 Module(blade/motor) 장착 후 Load port 에서의 진동 측정 결과 개선 전 대비 91% 감소하였으며, 결과적으로 Slot mapping error 발생 건수가 50% 이상 감소되는 효과와 Wafer 재 제조 매수도 월 평균 약 43% 감소하는 효과를 얻을 수 있었다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.05a
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• pp.778-784
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• 2002

FFU are used increasingly by the microeleceronics industry to provide clean recirculating air for the fabrication of integrated circuits and laminar flow air. There may be several hundred ffu in a large cleanroom, covering 100% of the ceiling area. Hence, there is of often knowledge in the inside and outside of the country the flu give rise to noise & vibration trouble to microelectronics industry. Noise ＆ Vibration control for satisfication about noise ＆ vibration criteria in TFT-LCD factory cleanroom be in need of exact noise & vibration data of accurence from utility & equipment that can be exert a bad influence upon cleanroom. In this pater, hence we found out noise and vibration properities of ffu by using experimental method. And, we performed noise ＆ vibration analysis about noise it vibration level in cleanroom using semiempirical method for quantative approach about noise ＆ vibration level in cleanroom.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.15 no.9
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• pp.751-761
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• 2003

We performed the numerical analysis on the airflow characteristics in the two type of cleanroom systems, which are the axial fan type (AFT) and the fan filter unit (FFU). A computational fluid dynamic model was applied to investigate and compare the nonuniformity, the deflection angle and the air ventilation effectiveness of the two designs of cleanrooms when dampers are adjusted and not adjusted. And the flow-resistance models of the various components were used in this simulation. We know that the airflow characteristics of the cleanrooms are largely affected by damper adjusting And we also find out that the FFU system is superior to the AFT system through the comparison of the cleanroom performance indices.

• Journal of Conservation Science
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• v.36 no.1
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• pp.28-36
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• 2020

The storage environment of a Japanese woodblock print collection was assessed for organic acids. The active air sampling method was used to collect organic acid emissions in the low microgram range from areas of a selected woodblock print with different pigments, following which an off-gassing mitigation strategy based on the fan filter unit(FFU) system was investigated. Research findings revealed that the off-gassing behavior of woodblock prints is significantly impacted by storage practices and to a lesser degree by the pigments. The FFU system can be used as a mitigation strategy, but the permanence of the results depends on the storage conditions.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.231-235
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• 2005

Recently, some semiconductor and LCD manufacturers require equipment suppliers to serve the data of composite noise for clean room. In this study, we evaluate the composite noise of clean room by numerically and experimentally. The value of experimental result is more higher than calculated one as much as 1$\sim$2dB(A).

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.1
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• pp.6-11
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• 2009

Flow field in a roller conveyor system, induced from the movement of a cassette in which glasses for flat panel display are loaded, is numerically studied in this paper. Contamination on the glass surface by dust particles produced from mechanical friction between roller and cassette is predicted from the analysis results of flow fields. Results show that a large swirl flow is formed under the moving cassette with constant speed. This swirl flow is confined only under the cassette because two main streams from the backward and the fan filter unit on the top ceiling are sufficiently strong. Therefore, it can be said that possibility of the contamination by the particles originated from the friction is relatively low. It is also revealed that flow direction between glass plates is changed according to the speed of the cassette movement due to the shear force of glass plates.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1507-1512
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• 2009

Flow field in a roller conveyor system, induced from the movement of a cassette in which glasses for flat panel display are loaded, is numerically studied in this paper. Contamination on the glass surface by dust particles produced from mechanical friction between roller and cassette is predicted from the analysis results of flow fields. Results show that a large swirl flow is formed under the moving cassette with constant speed. This swirl flow is confined only under the cassette because two main streams from the backward and the fan filter unit on the top ceiling are sufficiently strong. Therefore, it can be said that possibility of the contamination by the particles originated from the friction is relatively low. It is also revealed that flow direction between glass plates is changed according to the speed of the cassette movement due to the shear force of glass plates.

• Particle and aerosol research
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• v.14 no.4
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• pp.181-189
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• 2018

In this study, the risk rates of different contamination sources of the contaminant in a minienvironment were analyzed through Computational Fluid Dynamics (CFD) simulation. The airflow pattern characteristics can only predict the qualitative variation of contaminant concentration, but cannot evaluate the quantitative variations in the risk rate of sources. From the results, the ambient contamination sources mainly affect wafers in the Front Opening Unified Pod (FOUP), whereas the internal contamination sources mainly affect wafers laid on the robot arm in the minienvironment. And the purging plenum system is very useful in protecting the wafers in the FOUP from contaminants transferred from the Fan Filter Unit (FFU). However, this system is unable to protect the wafers on the robot arm from internal contaminants and the wafers in the FOUP from sources of the interface between the FOUP and the minienvironment.