• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.32.2-32.2
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• 2011

반도체 생산공정에서 CMP (Chemical-mechanical planarization) 공정은 우수한 전기전도성 재료인 Cu의 사용과 다층구조의 소자를 형성하기 위해서 도입되었으며, 최근 소자의 집적도가 증가함에 따라 CMP 공정 비중은 점점 높아지고 있다. Cu CMP 공정에서 연마제인 슬러리는 금속 표면과의 물리적 화학적 반응을 동시에 사용하여 표면을 연마하게 되며, 연마특성을 향상시키기 위해 산화제, 부식방지제, 분산제 및 다양한 계면활성제가 첨가된다. 하지만 슬러리는 Cu 표면을 평탄화하는 동시에 오염입자, 유기오염물, 스크레치, 표면부식 등을 발생시키며 결과적으로 소자의 결함을 야기시킨다. 특히 부식방지제로 사용되는 BTA (Benzotriazole)은 Cu CMP 공정 중 Cu-BTA 형태로 표면에 흡착되어 오염원으로 작용하며 입자오염을 증가시시고 건조공정에서 물반점 등의 표면 결함을 발생시킨다. 이러한 문제점을 해결하기 위해 Cu 표면에서 식각과 부식반응을 최소화하며, 오염입자 제거 및 유기오염물을 효과적으로 제거하기 위한 Post-CMP 세정 공정과 세정액 개발이 요구된다. 본 연구에서는 오염입자 및 유기물 제거와 동시에 표면 거칠기와 부식현상을 제어할 수 있는 post Cu CMP 세정액을 개발 평가하였다. 오염입자 및 유기오염물을 제거하기 위해서 염기성 용액인 TMAH 사용하였으며, Cu 이온을 용해할 수 있는 Chelating agent와 표면 부식을 억제하는 부식 방지제를 사용하여 세정액을 합성하였다. 접촉각 측정과 FESEM(field Emission Scanning Electron Microscope) 분석을 통하여 CMP 공정에서 발생하는 유기오염물과 오염입자의 흡착과 제거를 확인하였으며 Cu 웨이퍼 세정 전후의 표면 거칠기의 변화와 식각량을 AFM(Atomic Force Microscope)과 4-point probe를 사용하여 각각 평가하였다. 또한 세정액 내에서의 연마입자의 zeta-potential을 측정 및 조절하여 세정력을 향상시켰다. 개발된 세정액과 Cu 표면에서의 화학반응 및 부식방지력은 potentiostat를 이용한 전기화학 분석법을 통해서 chelating agent와 부식방지제의 농도를 최적화 시켰다. 개발된 세정액을 적용함으로써 Cu-BTA 형태의 유기오염물과 오염입자들이 효과적으로 제거됨을 확인하였다.

• Journal of Environmental Science International
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• v.23 no.6
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• pp.1175-1182
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• 2014

In this study, we examined the effect of cathode from electrolysis reactor for treating ballast water. We are going to select a suitable cathode for seawater electrolysis after considering the effect on the generation of the oxidant of cathode and the electrode deposition materials adhering to the surface of cathode. Anode is Ru-Ti-Pd electrode and cathode are Ti, Pt, JP520 (Ni-Pt-Ce) electrodes. Using the cathode of the three types, experiments were conducted to examine the effects of TRO (total residual oxidants) generation concentration and RNO (N, N-Dimethyl-4-nitrosoaniline, indicator of the generation of OH radical) degradation concentration (in 1, 35 psu), ohmic drop, FESEM(field emission scanning electron microscope) observation of cathode surface and EDX (energy dispersive X-ray spectroscopy) measurements of attached fouling material. The results showed that TRO generation concentration and RNO degradation concentration in according to each type of cathode are not different. The attached fouling materials were observed on the surface of Ti and the JP520 electrode by the observation of SEM after electrolysis for two hours, but it was not observed on the surface of Pt electrode. When considering the surface ohmic drop of cathode and the attached fouling materials, Pt electrode was judged as the excellent cathode.

• Journal of the Korean Ceramic Society
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• v.54 no.1
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• pp.23-27
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• 2017

A series of $CeO_2-TiO_2$ composite samples with different Ce/Ti molar ratios were prepared by the paper template. Powder X-ray diffraction (XRD) and transmission electron microscopy (TEM) were used to confirm a face-centered cubic lattice of $CeO_2$ with Ce/Ti =8:2 or 9:1 and a two phase mixture of anatase titania and face-centered cubic ceria with Ce/Ti = 7 : 3. The field emission scanning electron microscopy (FESEM) results suggest that the products are micron braid structures consisting of fibers with diameters in a range of $1-6{\mu}m$ and lengths of several hundred micrometers. $N_2$ absorption-desorption testing shows that the composite at Ce/Ti molar fraction of 8 : 2 has the largest BET surface area (about $81m^2{\cdot}g^{-1}$). Compared to the pure $CeO_2$ sample, the composites show superior catalytic activity for $H_2$ reduction and CO oxidation. For the micron braid structure $CeO_2-TiO_2$ composite (Ce/Ti = 8 : 2), due to the high surface area and the solid solution with appropriate $Ti^{4+}$ incorporation, the CO conversion at about $280^{\circ}C$ was above 50% and at $400^{\circ}C$ was 100%.

• Journal of the Korean Ceramic Society
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• v.53 no.2
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• pp.253-257
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• 2016

We added 0 ~ 5 wt% $YBO_3:Eu^{3+}$ nano powders in a scattering layer of a working electrode to improve the energy conversion efficiency (ECE) of a dye sensitized solar cell (DSSC). FESEM and XRD were used to characterize the microstructure and phase. PL and micro Raman were used to determine the fluorescence and the composition of $YBO_3:Eu^{3+}$ phosphor. A solar simulator and a potentiostat were used to confirm the photovoltaic properties of the DSSC with $YBO_3:Eu^{3+}$. From the results of the microstructure and phase of the fabricated $YBO_3:Eu^{3+}$ nano powders, we identified $YBO_3:Eu^{3+}$ having particle size less than 100 nm. Based on the microstructure and micro Raman results, we confirmed the existence of $YBO_3:Eu^{3+}$ in the scattering layer and found that it was dispersed uniformly. Through photovoltaic properties results, the maximum ECE was shown to be 5.20%, which can be compared to the value of 5.00% without $YBO_3:Eu^{3+}$. As these results are derived from conversion of light in the UV range into visible light by employing $YBO_3:Eu^{3+}$ in the scattering layer, these indicate that the ECE of a DSSC can be enhanced by employing an appropriate amount of $YBO_3:Eu^{3+}$.

• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.41-47
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• 2010

The effects of thermal treatment on CNTs, which were coated with a-$CN_x$ thin film, were investigated and related to variations of chemical bonding and morphologies of CNTs and also properties of field emission induced by thermal treatment. CNTs were directly grown on nano-sized conical-type tungsten tips via the inductively coupled plasma-chemical vapor deposition (ICP-CVD) system, and a-$CN_x$ films were coated on the CNTs using an RF magnetron sputtering system. Thermal treatment on a-$CN_x$ coated CNT-emitters was performed using a rapid thermal annealing (RTA) system by varying temperature ($300-700^{\circ}C$). Morphologies and microstructures of a-$CN_x$/CNTs hetero-structured emitters were analyzed by FESEM and HRTEM. Chemical composition and atomic bonding structures were analyzed by EDX, Raman spectroscopy, and XPS. The field emission properties of the a-$CN_x$/CNTs hetero-structured emitters were measured using a high vacuum (below $10^{-7}$ Torr) field-emission measurement system. For characterization of emission stability, the fluctuation and degradation of the emission current were monitored in terms of operation time. The results were compared with a-$CN_x$ coated CNT-emitters that were not thermally heated as well as with the conventional non-coated CNT-emitters.

• Polymer(Korea)
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• v.38 no.2
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• pp.150-155
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• 2014

Polycaprolactone (PCL) is a synthetic biodegradable polymer with excellent mechanical properties. $TiO_2$ (titanium dioxide) has a hydrophilic, high density and excellent biocompatibility. In this work, we produced three-dimensional porous scaffolds with PCL and $TiO_2$ nanoparticles using a salt-leaching method. Physical properties of the scaffolds were analyzed by FE-SEM, FTIR, TGA and compressive strength. Interestingly, the addition of $TiO_2$ nanoparticles decreased the water absorption and swelling ratio of the porous scaffolds. However, the compressive strength was increased by $TiO_2$. CCK-8 assay, which is generally used for the analysis of cell growth, shows that $TiO_2$ nanoparticles have no cytotoxicity. Taken together, we suggest that the PLC/$TiO_2$-scaffold can be used for biomedical applications.

• Journal of the Korean institute of surface engineering
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• v.51 no.2
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• pp.126-132
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• 2018

SnS thin films with different substrate temperatures ($150 {\sim}300^{\circ}C$) as process parameters were grown on soda-lime glass substrates by RF magnetron sputtering. The effects of substrate temperature on the structural and optical properties of SnS thin films were investigated by X-ray diffraction (XRD), Raman spectroscopy (Raman), field-emission scanning electron microscopy (FESEM), energy dispersive X-ray spectroscopy (EDS), and Ultraviolet-visible-near infrared spectrophotometer (UV-Vis-NIR). All of the SnS thin films prepared at various substrate temperatures were polycrystalline orthorhombic structures with (111) planes preferentially oriented. The diffraction intensity of the (111) plane and the crystallite size were improved with increasing substrate temperature. The three major peaks (189, 222, $289cm^{-1}$) identified in Raman were exactly the same as the Raman spectra of monocrystalline SnS. From the XRD and Raman results, it was confirmed that all of the SnS thin films were formed into a single SnS phase without impurity phases such as $SnS_2$ and $Sn_2S_3$. In the optical transmittance spectrum, the critical wavelength of the absorption edge shifted to the long wavelength region as the substrate temperature increased. The optical bandgap was 1.67 eV at the substrate temperature of $150^{\circ}C$, 1.57 eV at $200^{\circ}C$, 1.50 eV at $250^{\circ}C$, and 1.44 eV at $300^{\circ}C$.

• 한국신재생에너지학회:학술대회논문집
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• 2009.11a
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• pp.171-171
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• 2009

The electrodes are usually made of a porous mixture of carbon-supported platinum and ionomers. $SnO_2$ particles provide as supports that have been used for DMFCs, and it have high catalytic activities toward methanol oxidation. The main advantage of $SnO_2$ supported electrodes is that it has strong chemical interactions with metallic components. The high activity to a synergistic bifunctional mechanism in which Pt provides the adsorption sites for CO, while oxygen adsorbs dissociative on $SnO_2$. The reaction between the adsorbed species occurs at the Pt/$SnO_2$ boundary. The morphological observations were characterized by FESEM and transmission electron microscopy (TEM). $SnO_2$ particles crystallinity was analyzed by the X-ray diffraction (XRD). The surface bonded state of the $SnO_2$ particles and electrode materials were observed by the X-ray photoelectron spectroscopy (XPS). The electric properties of the Pt/$SnO_2$ catalyst for methanol oxidation have been investigated by the cyclic voltametry (CV) in 0.1M $H_2SO_4$ and 0.1M MeOH aqueous solution. The peak current density of methanol oxidation was increased as the $SnO_2$ content in the anode catalysts increased. Pt/$SnO_2$ catalysts improve the removal of CO ads species formed on the platinum surface during methanol electro-oxidation.

• 한국신재생에너지학회:학술대회논문집
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• 2009.11a
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• pp.158-158
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• 2009

The electrophoretic deposition(EPD) technique with a wide range of novel applications in the processing of advanced ceramic materials and coatings, has recently gained increasing interest both in academic and industrial sector not only because of the high versatility of its use with different materials and their combinations but also because of its cost-effectiveness requiring simple apparatus. Compared to other advanced shaping techniques, the EPD process is very versatile since it can be modified easily for a specific application. For example, deposition can be made on flat, cylinderical or any other shaped substrate with only minor charge in electrode design and positioning[1]. The synthesis of the nano-sized Ce0.2Sm0.8O1.9(SDC)particles prepared by aurea based low temperature hydrothermal process was investigated in this study[2].When we made the SDC nanoparticles, changed the time of synthesis of the SDC. The SDC nanoparticles were characterized with field-emission scanning electron microscope(FESEM), energy dispersive X-ray analysis(EDX), and X-ray diffraction(XRD). And also we researched the results of our investigation on electrophoretic deposition(EPD) of the SDC particles from its suspension in acetone solution onto a non-conducting NiO-SDC substrate. In principle, it is possible to carry out electrophoretic deposition on non-conducting substrates. In this case, the EPD of SDC particles on a NiO-SDC substrate was made possible through the use of a adequately porous substrate. The continuous pores in the substrates, when saturated with the solvent, helped in establishing a "conductive path" between the electrode and the particles in suspension[3-4]. Deposition rate was found to increase its increasing deposition time and voltage. After annealing the samples $1400^{\circ}C$, we observed that deposited substrate.

• 한국신재생에너지학회:학술대회논문집
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• 2009.11a
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• pp.381-381
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• 2009

염료감응형 태양전지의 효율 향상을 위한 다양한 방법들 중 $TiO_2$ 나노 파우더의 표면 개질 및 페이스트의 분산성 향상을 위한 연구가 활발하게 진행되고 있다. 기존 나노 파우더의 표면 개질법으로는 액상 공정인 졸겔법이 있으나 표면 처리 공정에서의 응집현상은 아직 해결해야 할 과제 중 하나이다. 이에 본 연구에서는 진공증착방법인 ALD법을 이용하여 염료감응형 태양전지용 $TiO_2$ 나노 파우더의 $SiO_2$ 산화물 표면처리를 통한 분산특성을 파악하였다. 기존 ALD법의 경우 reactor의 온도가 $300{\sim}500^{\circ}C$ 정도의 고온에서 공정이 이루어졌지만 본 실험에서는 2차 아민계촉매(pyridine)을 사용하여 reactor의 온도를 $30^{\circ}C$정도의 저온공정에서 $SiO_2$ 산화물을 코팅을 하였다. MO source로는 액체상태의 TEOS$(Si(OC_2H_5)_4)$를, 반응가스로는 $H_2O$를 사용하였고, 불활성 기체인 Ar 가스는 purge 가스로 각각 사용 하였다. ALD 공정에 의해 표면처리 된 $TiO_2$ 나노 파우더의 분산특성은 각 공정 cycle에 따라 FESEM을 통하여 입자의 형상 및 분산성을 확인하였으며 입도 분석기를 통하여 부피의 변화 및 분산 특성을 확인하였다. 공정 cycle 이 증가함에 따라 입자간의 응집현상이 개선되는 것을 확인 할 수 있었으며, 100cycles에서 응집현상이 가장 많이 감소하는 것을 확인할 수 있었다. 또한 표면 처리된 $SiO_2$ 산화막은 XRD를 통한 결정 분석 및 EDX를 통한 정성 분석을 통하여 확인하였다.