• 제목/요약/키워드: FESEM

검색결과 338건 처리시간 0.024초

DC 마그네트론 동시방전 시스템을 이용하여 증착한 GAZO 박막의 특성 평가 (Characterisecs of GAZO Films Deposited by DC Magnetron Co-Sputtering System)

  • ;박세훈;송풍근
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2009년도 춘계학술대회 논문집
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    • pp.187-187
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    • 2009
  • GAZO 박막의 증착은 $Ga_{2}O_{3}$의 첨가량 (6.65wt%) GZO 타겟과 $Al_{2}O_{3}$의 첨가량 (2.0wt%) AZO 타겟이 각각 장착된 2개의 캐소드를 이용한 DC 마그네트론 동시방전법에 의하여 non-alkali glass 기판위에 다양한 조건(파워, 기판온도, $H_2$ 참가량)에서 행하였다. GAZO박막의 전기적 특성은 Hall Effect measurements를 사용하여 측정 하였으며, 구조적 특성, 박막의 화학적 조성 및 광학적 특성은 XRD(X-ray diffraction), FESEM(Filed Emission Scanning Electron Microscope) 및 UV-Vis Spectrophotometer를 사용하여 평가 하였다. Al을 도입함으로써 캐리어밀도의 증가에 의해 GZO 박막의 특성은 개선됨을 확인 할 수 있었다.

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Cost effective and low energy consuming hydrothermal synthesis of Ni based MOF

  • Israr, Farrukh;Kim, Duk Kyung;Kim, Yeongmin;Oh, Seung Jin;Ng, Kim Choon;Chun, Wongee
    • 에너지공학
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    • 제24권2호
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    • pp.51-54
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    • 2015
  • The mesoporous metal organic framework structure of Ni-BTC was successfully synthesized in a low temperature and short operation time via hydrothermal synthesis process. Such operational route virtuously consumed less electrical and thermal energy. It proved time saving along with acceptable product yield (38%). The product was characterized through FESEM, FT-IR, XRD and $N_2$ gas adsorption measurement. Hightemperature stability of synthesized MOF was gauged by diffraction indexing of XRD patterns of as synthesized and heat treated samples of MOFs. The mathematically calculated particle size of Ni-BTC was found to be 42nm.

극저온 볼밀링 공정을 이용한 탄소나노튜브의 분산특성 연구 (A Study on the Dispersion Characteristics of Carbon Nanotubes using Cryogenic Ball Milling Process)

  • 이지훈;이경엽
    • 한국정밀공학회지
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    • 제27권7호
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    • pp.49-54
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    • 2010
  • The cryogenic ball milling was performed on carbon nanotubes (CNTs) at an extremely low temperature to increase the dispersion of CNTs. The effects of milling speed and time on the deagglomeration and structural changes of CNTs were studied. FESEM was used to analyze the dispersion and the change of particle size before and after milling process. Transmission electron microscopic (TEM) analysis was also investigated the effect of cryogenic ball milling on the morphological characteristics of CNTs. The structural changes by the cryogenic ball milling process were further confirmed by x-ray diffraction (XRD) and Raman spectroscopic analysis. The results showed that the agglomeration of CNTs was significantly reduced and amorphous structure was observed at high milling speed. However, the milling time has no great effect on the dispersion property and structural change of CNTs compared with milling speed.

Sputtering of Multifunctional AlN Passivation Layer for Thermal Inkjet Printhead

  • 박민호;김상호
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.50-50
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    • 2011
  • The aluminum nitride films were prepared by RF magnetron sputtering using an AlN ceramic target. The crystallinity, grain size, Al-N bonding and thermal conductivity were investigated in dependence on the plasma power densities (4.93, 7.40, 9.87 W/$cm^2$) during sputtering. High thermal conductivity is important properties of A1N passivation layer for functioning properly in thermal inkjet printhead. The crytallinity, grain size, Al-N bonding formation and chemical composition were observed using X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), fourier transform infrared (FTIR) and X-ray photoelectron spectroscopy (XPS), respectively. The AlN thin film was changed from amorphous to crystalline as the power density was increased, and the largest grain size appeared at medium power density. The near stoichiometry Al-N bonding ratio was acquired at medium power density. So, we know that the AlN thin film had better thermal conductivity with crystalline phase and near stoichometry Al-N bonding ratio at 7.40 W/$cm^2$ power density.

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RF magnetron sputtering 방법으로 제작한 NiCr 박막의 전기적특성 (Electrical properties of NiCr thin films deposited by rf magnetron sputtering)

  • 김대연;권정호;정연학;이재신
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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    • pp.411-415
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    • 2002
  • Precision resistors were prepared by controlling the concentration of Ni and Cr deposited on cylindrical alumina substrates (diameter: 1.7mm, length: 5.5mm). Deposited films were analyzed with FESEM, AES, and AFM. As the amount of Cr in the film increases, the TCR was shifted to negative direction.

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Effect of Collector Temperature on the Porous Structure of Electrospun Fibers

  • Kim Chi Hun;Jung Yoon Ho;Kim Hak Yong;Lee Douk Rae;Dharmaraj Nallasamy;Choi Kyung Eun
    • Macromolecular Research
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    • 제14권1호
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    • pp.59-65
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    • 2006
  • We report a new approach to fabricate electrospun polymer nonwoven mats with porous surface morphology by varying the collector temperature during electrospinning. Polymers such as poly(L-lactide) (PLLA), polystyrene (PS), and poly(vinyl acetate) (PVAc) were dissolved in volatile solvents, namely methylene chloride (Me) and tetrahydrofuran (THF), and subjected to electrospinning. The temperature of the collector in the electrospinning device was varied by a heating system. The resulting nonwoven mats were characterized by using scanning electron microscopy (SEM), field emission SEM (FESEM), and atomic force microscopy (AFM). We observed that the surface morphology, porous structure, and the properties such as pore size, depth, shape, and distribution of the nonwoven mats were greatly influenced by the collector temperature.

Fabrication and Magnetic Properties of Co Nanostructures in AAO Membranes

  • Jung, J.S.;Malkinski, L.;Lim, J.H.;Yu, M.;O'Connor, C.J.;Lee, H.O.;Kim, E.M.
    • Bulletin of the Korean Chemical Society
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    • 제29권4호
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    • pp.758-760
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    • 2008
  • Nanoporous AAO (Anodic Aluminum Oxide) membranes have many advantages as a template for variety of magnetic materials. Materials can be embedded into the pores by electrodeposition, sputtering or magnetic-field-assisted infiltration of magnetic nanoparticles. This work focuses on the fabrication of the magnetic structures in the AAO templates by electrodeposition. Our method allows the controlled growth of Co nanostructures within the porous alumina membrane in the form of dots, rods and long wires. The shape of Co nanostructures has been investigated by field emission scanning electron microscope (FESEM). The magnetic hysteresis loops of Co nanostructures were measured using SQUID at 5 K and 300 K. The magnetic properties of the Co nanostructures are proportional to their aspect ratios and can be controlled by changing the aspect ratios.

마이크로 압전 소자용 후막 PZT의 제조 및 물성 평가 (Fabrication and Characterizations of Thick PZT Films for Micro Piezoelectric Devices)

  • 박준식;박광범;윤대원;박효덕;강성군;최태훈;이낙규;나경환
    • 소성∙가공
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    • 제11권7호
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    • pp.569-574
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    • 2002
  • Recently, thick PZT films are required for the cases of micro piezoelectric devices with high driving force, high breakdown voltage and high sensitivity, and so on. In this work, thick PZT films were fabricated by Sol-Gel multi-coating method. Microstructures, and electrical properties of films were investigated by XRD, FESEM, impedance analyzer, and P-E hysteresis. PZT films with 2.7$mu extrm{m}$ to 4.4${\mu}{\textrm}{m}$ thickness were fabricated. Dielectric constant, loss, remnant polarization and coercive field of them were 880~1650 at 1kHz, 2~3% at 1kHz, 26~32 $\mu$C/$ extrm{cm}^2$, and 33~60kV/cm, respectively. Also a transverse piezoelectric coefficient $(e_{31,f})$ measurement system was fabricated and tested for thick film samples.

Optical and Electrical Properties of Indium Doped PEDOT:PSS

  • Kim, Byoung-Ju;Kang, Kwang-Sun
    • Current Photovoltaic Research
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    • 제5권4호
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    • pp.109-112
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    • 2017
  • Various wt. ratios of indium were doped to the poly(3,4-ethylenedioxythiophene)-poly(styreneswulfonate) (PEDOT:PSS) to enhance the conductivity and transmittance. The transmittance of the films increased with increasing the amount of indium. The field emission scanning electron microscope (FESEM) image of 2.54 wt. % of indium doped PEDOT:PSS film shows large number of aggregated indium particles. However, more than 2.54 wt. % of indium doped PEDOT:PSS films showed reduced aggregated indium particles. Moreover, 4.47 wt. % of indium doped PEDOT:PSS film showed no aggregated particles. The resistivity of pure PEDOT:PSS film showed $880k{\Omega}{\cdot}cm$. The resistivity of 1.03 wt. % indium doped film reduced approximately 26 times compared with pure PEDOT:PSS film. The resistivity of indium doped film further reduced with increasing the amount of indium, which showed approximately $0.55k{\Omega}{\cdot}cm$ for the PEDOT:PSS film doped 4.47 wt. % of indium.

다양한 기판에 제작한 ITO 박막의 실온 특성 변화 (Properties of ITO thin film's aging change prepared on the various substrate)

  • 김상모;임유승;손인환;김경환
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.403-404
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    • 2008
  • In this study, we prepared ITO thin film on glass, polycarbonate (PC) and polyethersulfone (PES) substrate in Facing Targets sputtering (FTS) system. Properties of as-deposited thin films's aging change were investigated as a function of time placed in the air. The electrical and optical properties of as-deposited thin films were employed by a four point probe and an UV/VIS spectrometer, an X-ray diffractometer (XRD), a Field Emission Scanning Electron Microscope(FESEM) and a Hall Effect measurement. As a result, as time went by, transmittance of all films did not change but resistivity of films was decreasing.

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