• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.94-94
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• 2011

본 논문은 "차세대 반도체용 진공공정의 실시간 측정/진단/제어 기술개발"과제의 제 3 세부과제 "스마트형 진공 배기 진단 제어 시스템 개발"의 주요 연구 실적을 소개한다. 본 세부과제는 (1)진공펌프 및 배기 시스템의 다중 상태변수 측정 장치 개발, (2)공정별 펌프 상태 및 공정 조건 data base 구축 및 진단 알고리즘 개발(e-Diagnostics Level 2 FDC 수준), (3)공정별 펌프 상태 변수 측정을 통한 자기 진단 기술 개발(e-Diagnostics Level 2 FDC 수준), 그리고 (4)측정/통신 PMS (Pump Monitoring System) 개발(통신속도 56k bps 이상, e-Diagnostics Level 0~1)을 최종 목표로 추진되어 왔다. 첫 번째 주요실적은 진공배기시스템의 다중 상태변수 측정 및 평가 장치를 성공적으로 개발하였다. 본 장치는 현장에서 진공펌프의 배기속도를 3% 이내로 정밀하게 측정할 수 있는 소닉 노즐을 이용한 배기속도 측정 장치 및 기술을 성공적으로 개발 완료하였다. 그리고 측정 가능한 상태변수는 20종에 달하며 이들을 이용하여 진공펌프의 성능인자 15종과 특성치 9종을 종합적으로 평가할 수 있는 능력을 갖추었다. 두 번째 주요실적은 공정별 진공배기시스템의 자기진단 및 예지보수 기수 개발이다. 연구에서 개발된 적응형 인자모델을 이용한 상태진단 기술은 이미 학회 논문으로 소개되었으며 본 기법은 기존의 시계열 상태변수를 이용한 기존의 상태진단 기법보다 메모리 소요량을 100배로 줄였으며 그리고 연산양은 10% 이하로 줄인 획기적인 기법이라 할 수 있다. 세 번째 주요실적은 상태변수 측정, 통신, 제어 및 공정적응 기능 통합형(smart) PMS(pumper monitoring system) 개발이다. 본 장치는 CAN통신 기법을 새로이 채택하였으며 한 대의 PC로 64대의 단위 진공펌프들의 운전 상태변수를 실시간으로 수집할 수 있도록 하였다. 그리고 운전 중인 개별 진공펌프들의 운전 상태진단은 적응형 인자모델을 이용한 상태진단 기술을 응적용함으로써 매우 정확한 상태진단을 매 batch마다 수행할 수 있는 기능을 제공한다.

• Journal of Environmental Impact Assessment
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• v.22 no.4
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• pp.319-327
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• 2013

This study was conducted to identify runoff characteristics of pollutants using flow duration curve(FDC) and load duration curve(LDC) in Youngbon A watershed during 2009~2011. A flow rate and pollutant load in the study watershed were estimated by equation of stage-discharge and discharge-loads rating curve. From these methods, BOD, T-N, and T-P have evaluated whether water quality standards would have attained. Results showed that BOD loads of about 50% plotted above the LDC, while T-N and T-P loads of about 50% plotted below the curve. It means that BOD of about 50% have exceeded the water quality criteria, while T-N and T-P of about 50% have complied with the water quality standards. Meanwhile, BOD, TN and T-P loads plotted above the LDC of low flows, implying that they were more affected by point pollution sources than nonpoint pollution sources in the study watershed.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.413-413
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• 2010

In semiconductor manufacturing field, all equipments have various sensors to diagnosis the situations of processes. For increasing the accuracy of diagnosis, hundreds of sensors are emplyed. As sensors provide millions of data, the process diagnosis from them are unrealistic. Besides, in some cases, the results from some data which have same conditions are different. We want to find some information, such as data and knowledge, from the data. Nowadays, fault detection and classification (FDC) has been concerned to increasing the yield. Certain faults and no-faults can be classified by various FDC tools. The uncertainty in semiconductor manufacturing, no-faulty in faulty and faulty in no-faulty, has been caused the productivity to decreased. From the uncertainty, the rough set theory is a viable approach for extraction of meaningful knowledge and making predictions. Reduction of data sets, finding hidden data patterns, and generation of decision rules contrasts other approaches such as regression analysis and neural networks. In this research, a RGB sensor was used for diagnosis plasma instead of optical emission spectroscopy (OES). RGB data has just three variables (red, green and blue), while OES data has thousands of variables. RGB data, however, is difficult to analyze by human's eyes. Same outputs in a variable show different outcomes. In other words, RGB data includes the uncertainty. In this research, by rough set theory, decision rules were generated. In decision rules, we could find the hidden data patterns from the uncertainty. RGB sensor can diagnosis the change of plasma condition as over 90% accuracy by the rough set theory. Although we only present a preliminary research result, in this paper, we will continuously develop uncertainty problem solving data mining algorithm for the application of semiconductor process diagnosis.

• Journal of Veterinary Clinics
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• v.33 no.5
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• pp.270-273
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• 2016

This study was undertaken to identify differences between atopic and non-atopic dogs in three rapid screening immunodot assays as well as the ability of the assays to predict the results of intradermal skin testing (IDST) or Favrot diagnostic criteria (FDC). Twenty-nine dogs diagnosed with canine atopic dermatitis (CAD) were selected as the atopic group. Twenty-five dogs without CAD were included as the non-atopic group. Three types of immunodot assays were conducted on all serum samples from both groups: Allercept E-screen 2nd generation (ES2G), Canine Allergic Tendency Reference Test (ALERT), and Asan Easy Test Canine IgE (AETC). IDST, which included 39 allergens, and immunodot assays were performed concurrently in 13 dogs from the atopic group and compared. While there were no significant differences in positivity between the two groups in the evaluation of ALERT (P = 0.435) and AETC (P = 0.313), positivity in ES2G testing was significantly higher in the non-atopic group than the atopic group (P = 0.038). The ES2G, ALERT, and AETC results showed fair (${\kappa}=0.235$), slight (${\kappa}=0.133$), and slight (${\kappa}=0.014$) accordance with IDST, respectively. The outcomes of ES2G, ALERT, and AETC indicated poor (${\kappa}=-0.211$), slight (${\kappa}=0.106$), and slight (${\kappa}=0.087$) agreement with FDC. In conclusion, rapid screening immunodot assays were not useful for the diagnosis of CAD. These assays may provide a supplementary method for predicting the results of IDST in atopic dogs.

• Journal of Korean Ophthalmic Optics Society
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• v.13 no.3
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• pp.79-87
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• 2008

Purpose: This study measured Y-intercept that means a fixation disparity, X-intercept that means a associated phoria and slope of a fixation disparity curve (FDC), which are variables of dissociated phoria and the FDC. We searched for the result value and examined the direction, distribution pattern and a variable that give an most affect on dissociated phoria and the FDC at distance and near. Also this study examined that there were statistically significant differences between distance and near, comparing the result value. Methods: We measured the dissociated phoria and the fixation disparity for 51 subjects at distance and near in June, 2007. All subjects ranged from 20 to 25 years of age (average 21.72${\pm}$1.88 years old) and had no eye disease. At distance the dissociated phoria measured with the distance MIM card (muscle imbalance measure card, Bernell co., USA), and the fixation disparity measured with the modified Mallett Far Unit (Bernell co., USA). At near the dissociated phoria measured with the near MIM card (muscle imbalance measure card, Bernell co., USA), and the fixation disparity measured with the Wesson fixation disparity card (American Optical co., USA). Results: The percentage distribution of types of fixation disparity curves was that at distance prevalence of Type I (74.6%) was the highest, followed by Type IV (17.6%) and Type II (3.9%), Type III (3.9%) and that at near prevalence of Type I (53.0%) was the highest, followed by Type III (29.4%), Type IV (13.7%) and Type II (3.9%). 2. There were significantly correlation in dissociated phoria, fixation disparity (Y-intercept) and associated phoria (X-intercept). 3. The fixation disparity at distance was most affected by associated phoria (X-intercept) (p=0.000). The distance dissociated phoria was most affected by fixation disparity (Y-intercept) (p=0.342), but the influence was weak. 4. The fixation disparity at near was most affected by associated phoria (X-intercept) (p=0.000). The near also dissociated phoria was most affected by associated phoria (X-intercept) (p=0.009). The result that compared the each variables with the same variables at distance and near had statistically significant on paired t-test for among dissociated phoria (t=7.529, p=0.000), X-intercept (t=5.860, p=0.000), the Y-intercept (t=4.640, p=0.000) but slope of the FDC did not differ significant (t=1.336 p=0.188). Conclusions: Relationship of fixation disparity and Heterophoria had close correlation at distance and near.

• Electronics and Telecommunications Trends
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• v.26 no.4
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• pp.175-181
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• 2011

이동망 착신독점력 규제를 위해 각국 규제당국은 이동망 착신접속료(Mobile Termination Rate: MTR)를 원가기준으로 규제하고 있다. 원가기준으로는 과거 FDC 방식이 채택되어 왔으나 2002년 영국이 "LRIC+" 방식으로 MTR을 결정한 이래 "LRIC+" 방식이 EU를 비롯한 OECD 주요국의 MTR 산정방식으로 보편화되어 왔다. 그러나 2009년 EU에서 순수증분비용(Pure Long Run Incremental Cost) 방식으로 착신접속료 규제방식 변경을 권고하는 권고안을 채택함으로써 EU 가맹국은 Pure LRIC 방식으로 MTR을 변경하여야 한다. 본 고에서는 Pure LRIC 방식 채택을 권하는 EU 권고안 채택 배경, Pure LRIC 산정 방법론, EU 권고안에 대한 각국의 이행계획을 살펴보며, Pure LRIC 채택이 가져올 영향을 살펴보고자 한다.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.4
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• pp.67-71
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• 2012

The purpose of this study is to investigate cutting characteristics and wear behavior in FCD500 ductile cast iron turning with different cutting tools, tungsten-carbide and CBN. Mechanical property, cutting characteristics and the application to the real industrial area is the final purpose. FDC500 ductile cast iron is now widely used in the various commercial vehicle parts for increased machine abilities which accrue more tensile strength with lower hardness. Several studies have been fulfilled for the material and heat-treatment area, but few with the cutting characteristics and wear behavior in the turning area.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.147.1-147.1
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• 2014

대부분의 반도체공정은 플라즈마 기술을 활용함에 따라서 진공공정장비 부품은 플라즈마 이온, 활성기체, 고온 공정에 노출 된다. 또한 장시간 플라즈마 공정에 노출이 되면서 부품 내구성이 떨어지기 때문에 내플라즈마성이 강한 재료를 코팅하여 사용하고 있다. 하지만 코팅재료의 종류, 코팅방법에 따라서 내부식성이 각각 다르고 장시간 설비 활용 시 코팅재료가 부식되어 공정특성이 변함에도 불구하고 현재 Fault Detection and Classification (FDC) 기술에서는 모니터링이 어려운 문제점이 있다. 본 연구에서는 공정특성을 플라즈마 임피던스 변수로 모니터링 하여 코팅부품의 상태에 따른 플라즈마 공정변화를 모니터링 가능한 신규 플라즈마 공정모사용 평가 장비를 소개하고자한다.

• Proceedings of the Botanical Society of Korea Conference
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• 1985.08b
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• pp.23-33
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• 1985

Plant cell culture is emerging to express bioactive foreign proteins because it has several advantages in that it is safe, economical, genetically stable and eukaryotic expression system comparing with other expression systems. However several limitations such as slow growth rate, low expression level and lack of well established down stream process need to be answered. As a preliminary approach to produce the immunologically interested molecules through the plant cell culture, we tested if granulocyte-macrophage colony stimulating factors (GM-CSFs) from both murine (mGM-CSF) and human (hGM-CSF) are produced as a biologically active form through plant cell culture. The murine and human GM-CSF genes were cloned into the plant expression vector, pBI121, and Ti-plasmid mediated transformation of tobacco leaves was conducted using Agrobacterium tumefaciens harboring both recombinant GM-CSF (rGM-CSF) genes. Cell suspension culture was established from the leaf-derived calli of transgenic tobacco plant. Northern blot analysis indicated the expression of the introduced mGM-CSF gene in both transgenic plant and cell suspension cultures. In addition, the biological activities of both murine and human GM-CSF from plant cell culture were confirmed by measuring the proliferation of the GM-CSF dependent FDC-PI and TF-1 cells, respectively.

• JSTS:Journal of Semiconductor Technology and Science
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• v.11 no.1
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• pp.1-5
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• 2011

To enter next process control, numerous approaches, including run-to-run (R2R) process control and fault detection and classification (FDC) have been suggested in semiconductor manufacturing industry as a facilitation of advanced process control. This paper introduces a novel type of optical plasma process monitoring system, called plasma eyes chromatic system (PECSTM) and presents its potential for the purpose of fault detection. Qualitatively comparison of optically acquired signal levels vs. process parameter modifications are successfully demonstrated, and we expect that PECSTM signal can be a useful indication of onset of process change in real-time for advanced process control (APC).