• Journal of Industrial Technology
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• v.39 no.1
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• pp.27-31
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• 2019

Semiconductor logistics systems are facing difficulties in increasing production as production processes become more complicated due to the upgrading of fine processes. Therefore, the purpose of the research is to design predictive models that can predict traffic during the pre-planning stage, identify the risk zones that occur during the production process, and prevent them in advance. As a solution, we build FABs using automode simulation to collect data. Then, the traffic prediction model of the areas of interest is constructed using deep learning techniques (keras - multistory conceptron structure). The design of the predictive model gave an estimate of the traffic in the area of interest with an accuracy of about 87%. The expected effect can be used as an indicator for making decisions by proactively identifying congestion risk areas during the Fab Design or Factory Expansion Planning stage, as the maximum traffic per section is predicted.

• Metals and materials international
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• v.24 no.6
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• pp.1285-1292
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• 2018

Microstructural properties of as-grown and annealed CoCrFeMnNi high entropy alloy (HEA) oxynitride thin films were investigated. The CoCrFeMnNi HEA oxynitride thin film was grown by magnetron sputtering method using an air gas, and annealed under the argon plus air flow for 5 h at $800^{\circ}C$. The as-grown film was homogeneous and uniform composed of nanometer-sized crystalline regions mixed with amorphous-like phase. The crystalline phase in the as-grown film was face centered cubic structure with the lattice constant of 0.4242 nm. Significant microstructural changes were observed after the annealing process. First, it was fully recrystallized and grain growth happened. Second, Ni-rich region was observed in nanometer-scale range. Third, phase change happened and it was determined to be $Fe_3O_4$ spinel structure with the lattice constant of 0.8326 nm. Hardness and Young's modulus of the as-grown film were 4.1 and 150.5 GPa, while those were 9.4 and 156.4 GPa for the annealed film, respectively.

• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.98-102
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• 2021

GaOOH is obtained via hydrothermal synthesis procedure. The formed GaOOH is turned into α-Ga₂O₃ at 500℃ annealing. As the annealing temperatures increase the α-Ga₂O₃ is in part turned into β-Ga₂O₃ and fully turned into β-Ga₂O₃ after 1100℃. XPS and PL results reveal that heterojunction interface between α-Ga₂O₃ and β-Ga₂O₃ become maxim at 500℃ annealing condition, which result in the highest photocatalytic activity. The presence of heterojunction interface slows down the recombination process by separating photogenerated electron-hole pairs and thereby enhance the overall photocatalytic activity.

• Journal of the Semiconductor & Display Technology
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• v.22 no.1
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• pp.1-5
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• 2023

Most of the production process is performed in a cleanroom in the case of facilities that produce semiconductor chips or display panels. Therefore, environmental management of cleanrooms is very important for product yield and quality control. Among them, airborne particles are a representative management item enough to be the standard for the actual cleanroom rating, and it is a part of the Fab or Facility monitoring system, and the sequential particle monitoring system is mainly used. However, this method has a problem in that measurement efficiency decreases as the length of the sampling tube increases. In addition, a statistically significant test of deterioration in efficiency has rarely been performed. Therefore, in this study, the statistically significant test between the number of particles measured by InSitu and the number of particles measured for each sampling tube ends(Remote). Through this, the efficiency degradation problem of the sequential particle monitoring system was confirmed by a statistical method.

• Safety and Health at Work
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• v.2 no.3
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• pp.210-217
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• 2011

Objectives: The purpose of this study was to measure the concentration of volatile organic compound (VOC)s originated from the chemicals used and/or derived from the original parental chemicals in the photolithography processes of semiconductor manufacturing factories. Methods: A total of four photolithography processes in 4 Fabs at three different semiconductor manufacturing factories in Korea were selected for this study. This study investigated the types of chemicals used and generated during the photolithography process of each Fab, and the concentration levels of VOCs for each Fab. Results: A variety of organic compounds such as ketone, alcohol, and acetate compounds as well as aromatic compounds were used as solvents and developing agents in the processes. Also, the generation of by-products, such as toluene and phenol, was identified through a thermal decomposition experiment performed on a photoresist. The VOC concentration levels in the processes were lower than 5% of the threshold limit value (TLV)s. However, the air contaminated with chemical substances generated during the processes was re-circulated through the ventilation system, thereby affecting the airborne VOC concentrations in the photolithography processes. Conclusion: Tens of organic compounds were being used in the photolithography processes, though the types of chemical used varied with the factory. Also, by-products, such as aromatic compounds, could be generated during photoresist patterning by exposure to light. Although the airborne VOC concentrations resulting from the processes were lower than 5% of the TLVs, employees still could be exposed directly or indirectly to various types of VOCs.

• Asia-Pacific Journal of Business Venturing and Entrepreneurship
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• v.9 no.2
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• pp.87-95
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• 2014

The High-price development & testing tools and IP infratstructures are required for the development of system semi-conductors, but SMEs have not ability to prepare for them. Recently in terms of the miniaturization and the advancement of semiconductor process, the cost of the semi-conductor development have shown the rising tendency and the market-based design tools used are requied to be upgraded due to the advancement in the environment and technology. On the contray, many other contries such as Taiwan, Japan, China, and User are supporting this system semi-conductor industry. Korean government is trying to build the research infrastructure for system semi-conductor industry that aims to reduce the costs of the design infrastructure investment, to support the companies of system semi-conductor development and to incubate the fab-less start-ups. This study analyzes the feasibility of the project, by using the AHP analysis and the results shows that this project is considered feasible because the AHP overall score is evaluated as 0.840, the overall score is greater than or equal to 0.55.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.145-148
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• 2003

Recently, the recycle of CMP (chemical mechanical polishing) slurries have been positively considered in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in CMP process. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are one of the most important components. Especially, the abrasive particles of slurry are needed in order to achieve a good removal rate. However, the cost of abrasives, is still very high. In this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slury, As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.8
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• pp.180-186
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• 2002

Hot Plate is the major unit that it used to remove damp of wafer surface, to strength adhesion of photoresist (PR) and to bake coated PR in FAB process of semiconductor. The badness of Hot Plate (HP) has directly influence upon the performance of wafer, it is necessary to guarantee the performance of HP. In this study, a reliability evaluation system has been designed and developed, which is to measure and to estimate thermal uniformity and flatness of HP in range of temperature 0~$250^\circC$. This system has included the techniques which measures and analyzes thermal uniformity using infrared thermal vision, and which compensates measuring error of flatness using laser displacement sensor For measuring flatness, a measurement stage of 3 axes are developed which adapts the precision encoder. The allowable error of this system in respect of thermal uniformity is less $than\pm0.1^\circC$ and in respect of flatness is less $than\pm$1mm . It is expected that the developed system can measure from $\Phi200mm\;(wafer 8＂)\;to\;\Phi300mm$ (wafer 12＂) and also can be used in performance test of the Cool Plate and industrial heater, etc.

• The Journal of the Korea Contents Association
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• v.16 no.2
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• pp.117-128
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• 2016

The growing socio-economic effect caused by science and technology requires public to participate in policy-making process, which makes government to boost public understanding of science(PUS). Government has also exerted to construct infra for PUS. However results are not so meaningful. The government-funded science museum has mainly provided the program for students. Besides, science broadcasting channel has recorded the worst viewing rate. Meanwhile, some of the private sector-manufactured contents have attracted public attention in recent years, which is realized by considering elements such as an interesting topic selection, use of outside experts, two-way communication system, level adjusting for public through flexible running system. This study analyze podcast based program, face to face lectures, display contents by private industry, fab lab etc. on the base of the reciprocal PUS model to sort out the reason they have successful results. Futhermore, it argues that government should intensify support for private sector and create synergy effect by cultivate collaboration system between government and private sector to enhance the efficiency of PUS and offers public policy to realize the plan.

• Journal of the Society of Disaster Information
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• v.10 no.3
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• pp.408-418
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• 2014

This study is to clarify the effect of security majoring students' loyalty on department to future direction and job choice to suggest basic data for supporting student to prepare more active school life and future. The research object is security majoring male/female students among Y university in Gyeonggi-do Y city, K university in Gyeongsangbuk-do G city, k university in Gyeonggi-do S city between 1 Fab 2012 to 20 Aug 2012 and we randomly extracted the sample. In this research, we performed exploratory factor analysis and used principal components analysis and selected varimax direct rotation method to prove the reasonability of the contents. We then use the Cronbach's ${\alpha}$ value to measure the trust coefficient and during the process, the repeated or questions lack of correlation were deleted with judgment of researcher to improve trusty and reasonability.