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CMOS 소자 응용을 위한 Plasma doping과 Silicide 형성

  • Choe, Jang-Hun;Do, Seung-U;Seo, Yeong-Ho;Lee, Yong-Hyeon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.456-456
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    • 2010
  • CMOS 소자가 서브마이크론($0.1\;{\mu}m$) 이하로 스케일다운 되면서 단채널 효과(short channel effect), 게이트 산화막(gate oxide)의 누설전류(leakage current)의 증가와 높은 직렬저항(series resistance) 등의 문제가 발생한다. CMOS 소자의 구동전류(drive current)를 높이고, 단채널 효과를 줄이기 위한 가장 효율적인 방법은 소스 및 드레인의 얕은 접합(shallow junction) 형성과 직렬 저항을 줄이는 것이다. 플라즈마 도핑 방법은 플라즈마 밀도 컨트롤, 주입 바이어스 전압 조절 등을 통해 저 에너지 이온주입법보다 기판 손상 및 표면 결함의 생성을 억제하면서 고농도로 얕은 접합을 형성할 수 있다. 그리고 얕은 접합을 형성하기 위해 주입된 불순물의 활성화와 확산을 위해 후속 열처리 공정은 높은 온도에서 짧은 시간 열처리하여 불순물 물질의 활성화를 높여주면서 열처리로 인한 접합 깊이를 얕게 해야 한다. 그러나 접합의 깊이가 줄어듦에 따라서 소스 및 드레인의 표면 저항(sheet resistance)과 접촉저항(contact resistance)이 급격하게 증가하는 문제점이 있다. 이러한 표면저항과 접촉저항을 줄이기 위한 방안으로 실리사이드 박막(silicide thin film)을 형성하는 방법이 사용되고 있다. 본 논문에서는 (100) p-type 웨이퍼 He(90 %) 가스로 희석된 $PH_3$(10 %) 가스를 사용하여 플라즈마 도핑을 실시하였다. 10 mTorr의 압력에서 200 W RF 파워를 인가하여 플라즈마를 생성하였고 도핑은 바이어스 전압 -1 kV에서 60 초 동안 실시하였다. 얕은 접합을 형성하기 위한 불순물의 활성화는 ArF(193 nm) excimer laser를 통해 $460\;mJ/cm^2$의 에니지로 열처리를 실시하였다. 그리고 낮은 접촉비저항과 표면저항을 얻기 위해 metal sputter를 통해 TiN/Ti를 $800/400\;{\AA}$ 증착하고 metal RTP를 사용하여 실리사이드 형성 온도를 $650{\sim}800^{\circ}C$까지 60 초 동안 열처리를 실시하여 $TiSi_2$ 박막을 형성하였다. 그리고 $TiSi_2$의 두께를 측정하기 위해 TEM(Transmission Electron Microscopy)을 측정하였다. 화학적 결합상태를 분석하기 위해 XPS(X-ray photoelectronic)와 XRD(X-ray diffraction)를 측정하였다. 접촉비저항, 접촉저항과 표면저항을 분석하기 위해 TLM(Transfer Length Method) 패턴을 제작하여 I-V 특성을 측정하였다. TEM 측정결과 $TiSi_2$의 두께는 약 $580{\AA}$ 정도이고 morphology는 안정적이고 실리사이드 집괴 현상은 발견되지 않았다. XPS와 XRD 분석결과 실리사이드 형성 온도가 $700^{\circ}C$에서 C54 형태의 $TiSi_2$ 박막이 형성되었고 가장 낮은 접촉비저항과 접촉저항 값을 가진다.

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Weed Occurrence in Organic Apple Orchards by Different Cover Crops (유기재배 사과과원의 피복작물별 잡초발생)

  • Oh, Young-Ju;Song, Yang-Ik;Kang, Seok-Beom;Hong, Sun-Hee;Choi, Jin-Ho;Paik, Weon-Ki
    • Weed & Turfgrass Science
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    • v.1 no.4
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    • pp.24-30
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    • 2012
  • This study was conducted to select the cover crops in organic apple orchard by estimating the coverage of each cover crops and time-periodic weed occurrence. Seeding of Festuca myuros and Trifolium repens showed high contents of soil organic matter and phosphorus as compared with control. Seeding of Trifolium sp., Hordeum vulgare and Secale cereal reduced relatively occurrence of weed in May and S. cereal among others showed the greatest effect in June. In July, seeding F. arundinaceae and Poa pratensis showed low coverage and a lot of weeds occurred in their field. Fifty one species were occurred as weeds and it needs to removal of high and broadleaf weeds such as Chenopodium ficifolium, C. album var. centrorubru and Humulus japonicus in spring to increase the rate of ground cover. P. pratensis having the lowest cover rate showed the similar dry weight of weeds as compared with control. Trifolium sp. and Persicaria hydropiper had a high correlation with contents of soil organic matter and C. album var. centrorubru had a correlation with contents of soil phosphorus by CCA analysis.

Infection status with the metacercariae of heterophyid flukes in the brackishwater fish from Haenam-gun, Chollanam-do, Korea (전남 해남군산 반염수어의 이형흡충류 피낭유충 감염상)

  • 손운목;한경근
    • Parasites, Hosts and Diseases
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    • v.32 no.3
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    • pp.163-170
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    • 1994
  • An epidemiological survey was performed to know the infection status of heterophyid fluke metacercariae in the brackish water fishes purchased from a local market in Haenam-gun, Chollanam-do, Korea from November to December, 1991. A total 20 out of 30 shads (Konosiw punctatus) examined were infected with the metacercariae of H. continua (average number of larvae per an infected fish: 2.71). Of 20 perches (Lateolabroxjoponicurs), 19 were Infected with the metacercariae of H. continua (average number per an infected fish: 17.21. Of 30 mullets (Mugil cepholus) examined, 11 were Infected with the metacercariae of H. nocens (average number per an Infected fish: 51.5), 10 mullets harboured 31 and 349 metacercariae of f summa and 5. lucatum respectively. Of 30 gobies (Acnnthogobin jlcvimonus) examined, 3 were infEcted with the metacercariae of H. nucens (average number per an Infected fish: 32.0), 8 with those of H. continua (average number per an infected flesh: 12.6) and 3 with those of 5. JuscntuwL From the above results, It has been confirmed that the brackish water Ash from Haenam-gun, Chollanam-do are infected with numerous metacercarlae of H. nocens, H. continua, P. summo and S. fuscatum.

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Cohort profile: National Investigation of Birth Cohort in Korea study 2008 (NICKs-2008)

  • Kim, Ju Hee;Lee, Jung Eun;Shim, So Min;Ha, Eun Kyo;Yon, Dong Keon;Kim, Ok Hyang;Baek, Ji Hyeon;Koh, Hyun Yong;Chae, Kyu Young;Lee, Seung Won;Han, Man Yong
    • Clinical and Experimental Pediatrics
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    • v.64 no.9
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    • pp.480-488
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    • 2021
  • Background: An adequate large-scale pediatric cohort based on nationwide administrative data is lacking in Korea. Purpose: This study established the National Investigation of Birth Cohort in Korea study 2008 (NICKs-2008) based on data from a nationwide population-based health screening program and data on healthcare utilization for children. Methods: The NICKs-2008 study consisted of the Korean National Health Insurance System (NHIS) and the National Health Screening Program for Infants and Children (NHSPIC) databases comprising children born in 2008 (n=469,248) and 2009 (n=448,459) in the Republic of Korea. The NHIS database contains data on age, sex, residential area, income, healthcare utilization (International Classification of Diseases10 codes, procedure codes, and drug classification codes), and healthcare providers. The NHSPIC consists of 7 screening rounds. These screening sessions comprised physical examination, developmental screening (rounds 2-7), a general health questionnaire, and age-specific anticipatory guidance. Results: During the 10-year follow-up, 2,718 children (0.3%) died, including more boys than girls (hazard ratio, 1.145; P<0.001). A total of 848,048 children participated in at least 1 of the 7 rounds of the NHSPIC, while 96,046 participated in all 7 screening programs. A total of 823 infants (0.1%) weighed less than 1,000 g, 3,177 (0.4%) weighed 1,000-1,499 g, 37,166 (4.4%) weighed 1,500-2,499 g, 773,081 (91.4%) weighed 2,500-4,000 g, and 32,016 (5.1%) weighed over 4,000 g. There were 23,404 premature babies (5.5%) in 2008 compared to 23,368 (5.6%) in 2009. The developmental screening test indicated appropriate development in 95%-98% of children, follow-up requirements for 1%-4% of children, and recommendations for further evaluation for 1% of children. Conclusion: The NICKs-2008, which integrates data from the NHIS and NHSPIC databases, can be used to analyze disease onset prior to hospitalization based on information such as lifestyle, eating habits, and risk factors.

Sensory characteristics and preferences of rice-based distilled soju aged in different types of containers using Check-All-That-Apply (CATA) (숙성 기간과 저장용기를 달리한 쌀 증류식 소주의 Check-All-That-Apply (CATA)를 활용한 감각특성 및 기호도 분석)

  • Kim, Wan-Keun;Lee, Seung-Joo
    • Korean Journal of Food Science and Technology
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    • v.54 no.3
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    • pp.362-368
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    • 2022
  • The sensory characteristics of nine rice-based distilled soju were determined using check-all-that-apply (CATA) profiling. A total of 53 consumers evaluated the soju for two appearance attributes, nine aroma attributes, nine flavor/taste attributes, four mouth-feel related sensory attributes, and overall desirability. The total sum of CATA terms indicated that 14 characteristics showed frequency differences of over 10 and that there were significant differences among nine samples for eleven sensory attributes as determined using Cochran's q test (p<0.05). Based on correspondence analysis of CATA data, the samples were primarily separated by the first dimension, which accounted for 89% of the total variance among samples. The "brown color," "fruit taste," and "grain aroma" characteristics had higher frequencies than those for the "white color," "acetone aroma," and 'alcohol taste" characteristics. Overall, there was a higher preference for oak-aged samples than for samples aged in other containers. "sweet aroma', 'fruit aroma," and "sweet taste" seemed to positively affect consumer preferences, while "bitter taste," "alcohol taste," and "acetone aroma" appeared to negatively affect consumer preferences as determined by principal coordinate analysis.

Double-Chambered Right Ventricle in an Old Standard Poodle Dog

  • Yunho Jeong;Yoonhwan Kim;Eunchan Lee;Ju-Hyun An;Sooyoung Choi;Jin-Young Chung;Jin-Ok Ahn
    • Journal of Veterinary Clinics
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    • v.40 no.2
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    • pp.130-134
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    • 2023
  • A 12-year-old Standard Poodle presented with intermittent weakness and occasional dyspnea at the Veterinary Medicine Teaching Hospital of Kangwon National University. A grade of 4 out of 6 systolic murmur with an irregular tachycardic rhythm was auscultated on both sides of the chest. Systolic blood pressure was 140 mmHg. Panting was noticed in the hospital, but there was no crackle sound. Blood analysis revealed mild increases in liver panel levels (alanine aminotransferase 149 [reference interval, 19-70] U/L; and alkaline phosphatase, 185 [reference interval, 15-127] U/L) and severe increases in cardiac biomarker levels (n-terminal pro-brain natriuretic peptide, 4169 [reference interval, 50-900] pmol/L; and cardiac troponin I, 0.22 [reference interval, 0.03-0.12] ng/mL). On electrocardiography, irregularly irregular supraventricular tachycardic rhythm with an f-wave and no distinct p-wave was observed. Generalized cardiomegaly with an enlarged right atrium and left ventricle was confirmed on thoracic radiography. Moreover, hepatomegaly and an enlarged caudal vena cava were observed. Echocardiographic evaluation revealed a fibromuscular diaphragm in the right ventricle. Because of the obstructive lesion in the right ventricle, the right atrium and ventricle were enlarged (right atrial area index, 38.82 cm2/m2 [reference interval, 4.2-10.2 cm2/m2]; right ventricle end-diastolic area index, 14.152 cm2/m2 [reference interval, 4.9-10.92 cm2/m2]). Accordingly, the patient was diagnosed with double-chambered right ventricle (DCRV). Pimobendan, furosemide, enalapril, diltiazem, and S-adenosylmethionine (SAMe) were prescribed, and all symptoms were relieved. DCRV is a right-sided congenital heart defect resembling pulmonic valve stenosis. If symptoms are not severe, medical therapy can be facilitated without surgery or the balloon dilation.

Studies on Factors affecting on Reproductive traits of the Pig Farms managed by EDP System (전산관리 양돈농가의 번식성적에 미치는 요인에 관한 연구)

  • Kim, H.S.;Kim, B.W.;Kim, H.C.;Lee, K.W.;Ha, J.K.;Jeon, J.T.;Lee, J.G.
    • Journal of Animal Science and Technology
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    • v.45 no.6
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    • pp.917-922
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    • 2003
  • This study was conducted to investigate effects of farm, type of sow Landrace${\times}$Yorkshire, LY; Yorkshire${\times}$ Landrace, YL; Yorkshire${\times}$Yorkshire, YY and multi-cross bred sow, MBS), parity, farrowing year, farrowing season and mating method on reproductive traits such as total number born per litter, number of born alive per litter, number of weaned per litter, number of mummified per litter, number of stillbirth. The Reproductive Records of 3,387 litters from January, 1999 to September, 2002 were obtained from four pig farms managed by Electronic Data Processing(EDP) system. Reproductive performances for two types of F1 Sows(YL and LY) were estimated as 11.34${\pm}$0.266 and 11.57${\pm}$0.263 heads for total number of born per litter, 10.56${\pm}$0.216 and 11.81${\pm}$0.251 heads for number of born alive per litter, and 10.05${\pm}$0.131 and 9.96${\pm}$0.153 heads for number of weaned per litter, respectively. These records are significantly higher(P〈0.05) than those of YY and MBS. However, number of mummified per litter, number of stillborn per litter, number of dead by diarrhea per litter, number of dead by other reasons during lactating period per litter and estrus interval did not show significant difference between types of sows. There were more total number of born per litter and number of weaned per litter in year 2001 than other year. As year passed, number of dead by crush per litter, number of dead by diarrhea per litter and number of dead by other reasons during lactating period per litter reduced from 0.18${\pm}$0.023 to 0.07${\pm}$0.022 head, 0.12${\pm}$0.21 to 0.02${\pm}$0.020 head and 0.43${\pm}$0.041 to 0.22${\pm}$0.040 head, respectively and weaning rate increased from 0.94${\pm}$0.005% to 0.97${\pm}$0.005%. The total number of born per litter and number of born alive per litter were higher(P〈0.05) in the case of mating twice than mating once. The number of weaned per litter, number of mummified per litter and number of stillborn per litter were not significant(P〈0.05) between mating methods. Estrus interval was shorter on the occasion of twice artificial insemination(5.24${\pm}$0.153days) than twice natural mating(6.51${\pm}$0.466days).

Pressure Drop Predictions Using Multiple Regression Model in Pulse Jet Type Bag Filter Without Venturi (다중회귀모형을 이용한 벤츄리가 없는 충격기류식 여과집진장치 압력손실 예측)

  • Suh, Jeong-Min;Park, Jeong-Ho;Cho, Jae-Hwan;Jin, Kyung-Ho;Jung, Moon-Sub;Yi, Pyong-In;Hong, Sung-Chul;Sivakumar, S.;Choi, Kum-Chan
    • Journal of Environmental Science International
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    • v.23 no.12
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    • pp.2045-2056
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    • 2014
  • In this study, pressure drop was measured in the pulse jet bag filter without venturi on which 16 numbers of filter bags (Ø$140{\times}850{\ell}$) are installed according to operation condition(filtration velocity, inlet dust concentration, pulse pressure, and pulse interval) using coke dust from steel mill. The obtained 180 pressure drop test data were used to predict pressure drop with multiple regression model so that pressure drop data can be used for effective operation condition and as basic data for economical design. The prediction results showed that when filtration velocity was increased by 1%, pressure drop was increased by 2.2% which indicated that filtration velocity among operation condition was attributed on the pressure drop the most. Pressure was dropped by 1.53% when pulse pressure was increased by 1% which also confirmed that pulse pressure was the major factor affecting on the pressure drop next to filtration velocity. Meanwhile, pressure drops were found increased by 0.3% and 0.37%, respectively when inlet dust concentration and pulse interval were increased by 1% implying that the effects of inlet dust concentration and pulse interval were less as compared with those changes of filtration velocity and pulse pressure. Therefore, the larger effect on the pressure drop the pulse jet bag filter was found in the order of filtration velocity($V_f$), pulse pressure($P_p$), inlet dust concentration($C_i$), pulse interval($P_i$). Also, the prediction result of filtration velocity, inlet dust concentration, pulse pressure, and pulse interval which showed the largest effect on the pressure drop indicated that stable operation can be executed with filtration velocity less than 1.5 m/min and inlet dust concentration less than $4g/m^3$. However, it was regarded that pulse pressure and pulse interval need to be adjusted when inlet dust concentration is higher than $4g/m^3$. When filtration velocity and pulse pressure were examined, operation was possible regardless of changes in pulse pressure if filtration velocity was at 1.5 m/min. If filtration velocity was increased to 2 m/min. operation would be possible only when pulse pressure was set at higher than $5.8kgf/cm^2$. Also, the prediction result of pressure drop with filtration velocity and pulse interval showed that operation with pulse interval less than 50 sec. should be carried out under filtration velocity at 1.5 m/min. While, pulse interval should be set at lower than 11 sec. if filtration velocity was set at 2 m/min. Under the conditions of filtration velocity lower than 1 m/min and high pulse pressure higher than $7kgf/cm^2$, though pressure drop would be less, in this case, economic feasibility would be low due to increased in installation and operation cost since scale of dust collection equipment becomes larger and life of filtration bag becomes shortened due to high pulse pressure.

Epidemiology and clinical characteristics of headache comorbidity with epilepsy in children and adolescents (소아청소년 간질 환자에서 동반된 두통의 역학과 임상적 특징)

  • Rho, Young Il
    • Clinical and Experimental Pediatrics
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    • v.50 no.7
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    • pp.672-677
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    • 2007
  • Purpose : To assess the prevalence and characteristics of headache comorbidity with epilepsy in children and adolescents in a specialty epilepsy clinic. Methods : Two hundred twenty nine consecutive patients attending the Chosun University Hospital Pediatric Epilepsy Clinic (mean age $10.0{\pm}4.1\;years$, range 4-17, M:F ratio 1.1:1.0) were interviewed with a standardized headache questionnaire. Headache was classified according to the International Classification of Headache Disorders, 2nd Edition and epilepsy was classified according to the International League Against Epilepsy. Disability was assessed using pediatric migraine disability assessment (PedMIDAS). Results : Of the 229 epilepsy patients, 86 (37.6%) had co-morbid headache. Of the headache patients, 64 (74.4%) had migraine (65.6%- migraine without aura, 20.3% - migraine with aura, 14.1% - probable migraine). The mean headache frequency was $7.2{\pm}8.4$ per month, mean duration was $2.2{\pm}4.0$ hours, mean severity was $5.2{\pm}2.2$ out of 10, and mean PedMIDAS score was $13.0{\pm}35.4$. The proportion of females was not higher in epilepsy with headache patients (48.8%) compared to epilepsy patients alone (48.0%). In the patients with migraine, 48.4% had complex partial seizures, 17.2% had simple partial seizures, and 34.4% had generalized seizures (P=0.368). A postictal association of migraine was reported in 18.8% with 17.2% reporting a preictal headache, and 7.8% reporting an ictal headache. Conclusion : The prevalence of headache in pediatric epilepsy is higher than that in general pediatric population, suggesting a co-morbidity of headache in epilepsy patients with migraine being the most frequent headache disorder. Altered cerebral excitability resulting in an increased occurrence of spreading depression may explain the headache comorbidity with epilepsy. Further studies are needed to assess the etiology of this co-morbidity as well as assess the frequency, duration, severity and disability response to antiepileptic drugs.

PROSPECTIVE CLINICAL EVALUATION OF THREE DIFFERENT BONDING SYSTEMS IN CLASS V RESIN RESTORATIONS WITH OR WITHOUT MECHANICAL RETENTION (접착제와 와동형성의 차이에 따른 5급 복합레진 수복의 전향적 임상연구)

  • Lee Kyung-Wook;Choung Sae-Joon;Han Young-Chul;Son Ho-Hyun;Um Chung-Moon;Oh Myoung-Hwan;Cho Byeong-Hoon
    • Restorative Dentistry and Endodontics
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    • v.31 no.4
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    • pp.300-311
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    • 2006
  • The purpose of this study is to evaluate prospectively the effect of different bonding systems and retention grooves on the clinical performance of resin restorations in non-carious cervical lesions (NCCLs). Thirty-nine healthy adults who had at least 2 NCCLs in their premolar areas were included in this study. One hundred and fifty teeth were equally assigned to six groups: (A) Scotchbond Multi-Purpose (SBMP, 3M ESPE, St. Paul, MN, USA, 4th generation bonding system) without retention grooves; (B) SBMP with retention grooves; (C) BC Plus (Vericom Co., Anyang, Gyeonggido, Korea, 5th generation bonding system) without retention grooves; (D) BC Plus with retention grooves; (E) Adper Prompt (3M ESPE, Seefeld, Germany, 6th generation bonding system) without retention grooves; (F) Adper Prompt with retention grooves. All cavities were filled with a hybrid composite resin. Denfil (Vericom Co., Anyang, Gyeonggido, Korea) by one operator. Restorations were evaluated at baseline and at 6-month recall, according to the modified USPHS (United States Public Health Service) criteria. Additionally, clinical photographs were taken and epoxy resin replicas were made for SEM evaluation. At 6-month recall, there were some differences in the number of alpha ratings among the experimental groups. But, despite the differences in the number of alpha ratings, there was no significant difference among the 3 adhesive systems (p < 0.05). There was also no significant difference between the groups with or without mechanical retention (p < 0.05). Follow-ups for longer periods than 6 months are needed to verify the clinical performance of different bonding systems and retention grooves.