• Transactions on Electrical and Electronic Materials
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• v.4 no.4
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• pp.13-17
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• 2003

This paper deals with the edge effect in thin insulating films, focusing on their dependence on film thickness. The finding is that the electric field is lowered at the edge as the film thickness is reduced, which, in turn, is closely related to dielectric breakdown voltage. In order to analyze this phenomenon, a simple capacitor model is introduced with which dependence of dielectric breakdown voltage around the electrode edge on the film thickness is explained. Due to analytical difficulty to get the expression of electrical field strength at the edge, an equivalent circuit approach is used to find the voltage expression first and then the electric field expression using it. The relation gets to an agreement with the experimental findings shown in the paper. This outcome may be extended to solve similar problems in multi-layer insulating films.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.1409-1411
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• 2006

A new rod-like liquid crystalline monomer having divinyl terminal groups was synthesized and polymerized by using thiol-ene UV polymerization technique. High quality thin film with good retardation value was prepared on a rubbed alignment layer without the inert gas purging. The retardation value of the resulting film was controlled by experimental conditions such as spin speed, concentration, and spin time. From the retardation value and thickness measurement, ${\bigtriangleup}n$ was calculated to be 0.169 for the resulting film having thickness of 815.1 nm.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.776-778
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• 2003

In the paper, the novel linear ultrasonic motor for precision position control was designed and fabricated. It was composed of two piezoelectric actuators with longitudinal ultrasonic fluctuations and shaking beam. When two AC electric fields ($Usin{\omega}t$, $Ucos{\omega}t$) were applied in two piezoelectric actuators respectively, the middle part of shaking beam had an elliptical trajectory. According to experimental results, good symmetrical characteristic of two piezoelectric actuators were obtained.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.29A no.8
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• pp.63-70
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• 1992

Deposition properties and film characteristics of Remote PECVD silicon dioxide were investigated. Using $N_{2}O/SiH_{4}$, the effects of changing the process conditions` the pressure, the substrate temperature, and the gas mixing ration, on the film quality were observed. A comparison of film qualites of the Remote PECVD SiO$_2$ with that of a Direct PECVD SiO$_2$ was made. The experimental results show that the Remote PECVD SiO$_2$ has better electrical, physical, and annealing properties than the Direct PECVD oxide.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.6
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• pp.849-856
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• 2003

A three-dimensional constitutive model for polarization switching in ferroelectric materials is used to predict the formation of switching zones in an atomic force microscopy(AFM) tip/ferroelectric thin film/bottom electrode system via finite element simulation. Initially the ferrolectric film is poled upward and the bottom electrode is grounded. A strong dc field is imposed on a fixed point of the top surface of the film through the AFM tip. A small switching zone with downward polarization is nucleated and grows with time. It is found that initially the shape of the switched zone is that of a bulgy dagger, but later turn to the shape of a reversed cup with the lower part wider than the upper part. It can also be concluded that the size of switching zones increases with the period of applied electric potential. The present results are qualitatively consistent with experimental observations.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.11 no.4
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• pp.31-36
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• 2001

A spin coater is a machine to coat wafer or LCD display with thin film. Vibration in the spin coater may be one of main troubles in the coating process. In this paper, we focus on the difference between two spin coaters. Vibration sources are identified by experimental approach and are compared to find the difference between the two spin coaters. Also, the particle concentration is observed by laser particle counter (LPC) for the two spin coaters, when the spin coaxers are working. It is also considered whether the defect rate is proportional to the particle concentration. The result shows that particle generation in the coating process is related to excessive vibration of the spin coater shaft and the particles influence the defect rate of the thin film product.

• Rapid Communication in Photoscience
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• v.2 no.1
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• pp.1-8
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• 2013

Transparent $TiO_2$ films in various thicknesses were prepared by sol-gel and MOCVD method, respectively, and their photocatalytic activities in decomposing gaseous 2-propanol were evaluated. The surfaces and grain structures of the prepared films were characterized by FESEM, XRD, and AFM. It was found that the photocatalytic activities of $TiO_2$ films were greatly dependent on the film thickness and surface roughness: The photocatalytic activity increases with the increase of film thickness, while it decreases with the increase of surface roughness. We have proposed that these phenomena originate from the transfer of photogenerated electron and hole pairs from the bulk to the surface of $TiO_2$ film. Several experimental evidences supporting this mechanism have also been provided.

• The KSFM Journal of Fluid Machinery
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• v.17 no.2
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• pp.12-23
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• 2014

A parametric study on anti-vortex holes for turbine blade cooling was investigated numerically. Three-dimensional Reynolds-averaged Navier-Stokes equations and shear stress transport turbulence model were used for analysis of anti-vortex film cooling. Validation of numerical results was carried out comparing with experimental data. The cooling performance of anti-vortex holes was assessed by two geometric variables, the ratio of diameters of holes and the lateral distances between the primary hole and anti-vortex hole at blowing ratios of 0.5 and 1.0. The results showed that the spatially-averaged film-cooling effectiveness increases as the ratio of the diameters increases and the distance between the primary hole and anti-vortex hole decreases.

• Journal of Sensor Science and Technology
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• v.16 no.5
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• pp.355-360
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• 2007

Highly sensitive thick film ethanol gas sensors based on a nanocrystalline $In_{2}O_{3}$ were fabricated by painting method on alumina substrates. The crystal structure of the $In_{2}O_{3}$ powder was characterised by XRD analysis. The microstructure of the films were characterised using FE-SEM. The experimental results of the ethanol gas sensing characteristics indicated that the undoped $In_{2}O_{3}$ thick film has a high sensitivity. The sensitivity of the film heat treated at $400^{\circ}C$ for 2 hrs. was as high as 32.73 at an operating temperature of $200^{\circ}C$ to 1000 ppm ethanol gas in air.

• Tribology and Lubricants
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• v.17 no.6
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• pp.476-481
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• 2001

This paper has been presented the hydrodynamic effect by the journal speed, eccentricity and source positions in order to overcome the defects of air bearing such as low stiffness and damping coefficient. Choosing the two row source position of air bearing is different from existed investigations in the side of pressure distribution of air film because of the high speed of journal and the wedge effects by the eccentricity. These optimal chooses of the two row source positions enable us to improve the performance of the film reaction force and loading force as making the high speed spindle. In this paper, The pressure behavior in theory of air film according to the eccentricity of journal and the source positions analyzed. The theoretical analysis have been identified by experiments. The results of investigated characteristics may be applied to precision devices like ultra-precision grinding machine and ultra high speed milling.