• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.145-145
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• 2008

High-k materials have been paid much more attention for their characteristics with high permittivity to reduce the leakage current through the scaled gate oxide. Among the high-k materials, $ZrO_2$ is one of the most attractive ones combing such favorable properties as a high dielectric constant (k= 20 ~ 25), wide band gap (5 ~ 7 eV) as well as a close thermal expansion coefficient with Si that results in good thermal stability of the $ZrO_2$/Si structure. During the etching process, plasma etching has been widely used to define fine-line patterns, selectively remove materials over topography, planarize surfaces, and trip photoresist. About the high-k materials etching, the relation between the etch characteristics of high-k dielectric materials and plasma properties is required to be studied more to match standard processing procedure with low damaged removal process. Among several etching techniques, we chose the inductively coupled plasma (ICP) for high-density plasma, easy control of ion energy and flux, low ownership and simple structure. And the $BCl_3$ was included in the gas due to the effective extraction of oxygen in the form of $BCl_xO_y$ compounds. During the etching process, the wafer surface temperature is an important parameter, until now, there is less study on temperature parameter. In this study, the etch mechanism of $ZrO_2$ thin film was investigated in function of $Cl_2$ addition to $BCl_3$/Ar gas mixture ratio, RF power and DC-bias power based on substrate temperature increased from $10^{\circ}C$ to $80^{\circ}C$. The variations of relative volume densities for the particles were measured with optical emission spectroscopy (OES). The surface imagination was measured by scanning emission spectroscope (SEM). The chemical state of film was investigated using energy dispersive X-ray (EDX).

• 인터넷정보학회논문지
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• 제15권6호
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• pp.107-115
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• 2014

최근 소셜 미디어 사용의 증가, 산업간 융합의 확대, 다양한 스마트 기기의 보급을 통한 인터넷의 이용이 증가하면서 수많은 데이터를 발생시키고 있다. 이들 데이터들은 크기가 매우 크고, 형식이 다양하며, 순환속도가 매우 빨라 기존의 데이터 처리기술만으로는 관리와 분석이 어려운 실정이다. 즉, 수십 테라에 이르는 데이터의 폭증 및 데이터의 다양화에 따라 빠르게 분석하는 기술이 미흡하며, 이러한 문제점들을 해결하기 위한 새로운 기술적 방안이 절실히 요구되고 있다. 이러한 빅데이터의 처리기술에 대한 많은 연구가 최근 활성화 되고 있으며, 본 연구에서는 이러한 관점에서 빅데이터 플랫폼의 효과적인 인덱싱 엔진의 설계 및 구현에 관하여 기술한다. 즉, 기존의 데이터 처리기술의 범위를 초과하는 대규모의 데이터 집합을 효율적으로 관리하고, 인덱싱을 통한 검색속도의 향상으로 데이터 분석 시 소요되는 시간 단축을 연구목표로 한다. 본 연구의 실험을 위해서는 대규모 SNMP(Simple Network Management Prtocool) 로그 데이터를 사용하였으며, 효율적 데이터의 인덱싱을 통한 빠른 검색으로 데이터 분석시의 시간을 최대한 단축하고자 하였다. 또한 분석된 데이터의 표현의 가시화를 통하여 사용자의 데이터 분석에도 도움이 될 것으로 기대한다.

• 환경위생공학
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• 제7권2호
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• pp.1-10
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• 1992

Since 1960's along with industrialization and urbanization, economic growth has been . achieved, however, at the same time, environmental condition has been seriously deteriorated. . Currently, volume of wastewater has been increasing at annual rate of 7% in sewage and 20% in industrial wastewater. However, the nation's sewage treatment serves only 33% of the municipal wastewater as of 1991. Major portion of air pollutants comes from combustion of oil and coal which comprise 81% of total energy use and emission gases from motor vehicles increasing at an accelerated rate. It is known that Korea generates the highest amount of waste per capta. Nevertheless, it is not sufficient to reduce the volume of waste by means of resources recovery and recycling. Recognizing the importance of global environmental problems such as ozone layer depletion, global warming and acid rain, international society has been making various efforts since the 1972 Stockholm conference. In particular, it is expected that the Rio conference which has adopted the Rio declaration and Agenda 21 will form a crucial turning point of the emerging new world order after the Cold War confrontation. To cope with such issues as domestic pollution and global environmental problems, the fundamental national policy aims at harmonizing "environmental protection and sustainable development". The Ministry of Environment has recently set up a mid-term comprehensive plan which includes annual targets for environmental protection. According to the government plan, gradual improvement of various environmental conditions and specific measures to achieve them is planned in time frame. Additional sewage treatment plants will be constructed in urban areas with the target to treat 65% of the nation's municipal sewage by 1996. Supply of clean fuels such as LNG will also be expanded starting from large cities as a cleaner substitute energy for coal and oil. In parallel with expansion of LNG, emphasis will be placed on installation of stack monitoring system. Due to the relatively limited land, government's basic policy for solid waste treatment is to develop large scale landfill facilities rather than small sized ones. Thirty three regional areas have been designated for the purpose of waste management. For each of these regions, big scale landfill site is going to be developed. To increase the rate of waste recycling the government is planning to reinforce separate collection system and to provide industries with economic incentives. As a part of meeting the changing situation on global environmental problems after UNCED, and accommodation regulatory measures stipulated in the global environmental conventions and protocols, national policy will try to alter industrial and economic structure so as to mitigate the increasing trends of energy consumption, by encouraging energy conservation and efficiency. In this regard, more attention will be given to the policy on the development of the cleaner technology. Ultimately, these policies and programs will contribute greatly to improving the current state of national public health.

• 대한기계학회논문집A
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• 제36권2호
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• pp.187-194
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• 2012

일반적으로 복합재의 강도에 대한 크기 효과는 입자강화 알루미늄 복합재 제조시, 입자와 기지재를 압밀한 후 냉각할 때 입자와 기지재 사이의 열팽창계수 차에 의하여 기지재에 펀칭되는 기하적 필수 전위와, 변형 중 입자와 기지재사이의 탄소성 강성도 차로 인해 발생하는 변형률 구배 소성으로 인한 기하적 필수 전위가 주로 영향을 미치는 것으로 알려져 있다. 본 논문에서는 이러한 두 종류의 기하적 필수 전위를 전위 소성 이론에 입각하여 강도로 환산한 후 계층적으로 입자 주위 유한요소 영역에 할당하여 동일한 체적비에서 입자의 크기에 따라 변화하는 복합재의 파손 거동을 효과적으로 예측하였다. 이 방법을 적용함으로써 구형입자의 경우 간단한 축대칭 유한요소 모델링과 실험데이터를 연계하여 입자강화 복합재의 입자 크기 의존 강도 및 파손 효과를 수월하게 예측할 수 있음을 보였다. 또한 서로 다른 입자의 체적비 및 크기에 대하여SiC강화 알루미늄 2124-T4 복합재의 강도와 파손 거동이 분명한 차이가 있음을 보인다.

• 한국항해학회지
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• 제19권2호
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• pp.77-97
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• 1995

The protection of the marine environment is one of the main international legal problems in recent years. In parallel with the industrial development, a great quantity of chemical materials were used and in consequence, mass transportation of oil and other dangerous materials was required on the one hand, and discharge of industrial wasters drew also the attention on the other hand. Furthermore, oil tankers accidents, mass use of nuclear materials, sea-bed exploration and exploitation stimulated further deep human concern on the marine environment. The expansion of international concern to new and more dangerous sources of marine pollution regarded more strict and legal control on the Oil Tanker(DWT 95, 000tons, Cb=0.805) model. Calculation results are compared to the international, especially regional level. In particular, this study is concerned with the preservation of the Northeast Asian Seas surrounded by Japan, the Russian Far East, South Korea, North Korea, China and Taiwan. These adjacent countries must intensify cooperation regarding the prevention, reduction and control of the contamination of the sea. And this cooperation between the States concerned should, as much as possible, be aimed at maximizing the effectiveness of measures to prevent or abate transboundary environmental pollution. To achieve this purpose, States concerned should be imposed upon duties such as duty to assess the environmental impact, duty to inform, duty to consult and duty to assist on the basis of general principle of international law, international customary law and other various resolutions of international bodies. Depending on the nature and extent of actual or potential transboundary pollution with the use of a natural resource or the environment in general the establishment of some form of institutionalized cooperation between the States concerned may become useful or indispensable. The functions of this Organization are, inter alia, to keep the implementation of the Convention and the protocals under continuous observation, to make recommendations on regional or sub-regional rules and standards to be elaborated and on measures to be taken by the Contracting Parties, to be notified of any grave and imminent danger from pollution or threat of pollution by the Contracting Parties and to promote in close cooperation with appropriate governmental bodies additional measures to protect the marine environment of the Northeast Asian Seas, and so on. Above mentioned countries, first of all, are located within the Northeast Asian Seas geographically and, therefore, take responsibilities of preserving the clean sea against marine interferences regardless of any difference of the social, political and economic systems. They must be followed under the UNCLOS and other marine conventions. Under the present circumstances, Northeast Asian Seas will become dead seas in case that there is no instant and prompt action against pollution. Hence we have an absolute obligation to promote the development of the mandatory international environmental law, which in turn can faciliate more effective implementation of the regional cooperation by the neighbouring states within this area.

• 한국암반공학회:학술대회논문집
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• 한국암반공학회 2008년도 춘계학술발표회 논문집
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• pp.51-68
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• 2008

고속열차의 터널 진입시 발생하는 압력파는 압축파의 형태로 터널내부를 전파하여 터널출구에 도달할 때에는 펄스형태의 충격성 압출파로 방사된다. 터널에서 방사된 압축파는 특정한 방향으로 전파되는 것이 아니라 전방향으로 확산되며, 압축파의 크기가 크면 주변 환경에 대한 환경소음 및 진동문제를 야기하게 되는데, 이를 미기압파(Micro Pressure wave)라 한다. 이러한 미기압파는 열차의 주행속도, 터널연장, 터널 및 열차의 단면적 등에 의존하므로 고속철도 터널의 적정단면을 결정하기 위하여 반드시 고려해야 된다. 이에, 본 논문에서는 호남고속철도 단면결정사례를 통하여 단면규모별 수치해석결과에 의한 미기압 기준 만족여부 및 최적단면선정과정을 소개하였다. 호남고속철도의 단면결정사례에서는 경부고속철도 화신 5 터널에서 터널내 압력 및 터널 출구에서의 미기압을 실측하여, 수치시뮬레이션의 입력조건으로 사용된 각종 매개변수 등의 적정성을 비교 검증하였으며, 모형실험을 통하여 합리적인 미기압과 저감대책을 제시하였다.

• 패션비즈니스
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• 제14권4호
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• pp.91-101
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• 2010

This paper has the purpose of suggesting a development-method on the fashion products that would secure the competitiveness in the global markets through creating supersensitive practical products on the basis of developing originative fashion-goods being made of jacquard that is fine quality of couture. This paper has collected data through the cases of the developed nations in fashion, precedent studies and all the related literature on the subject. The results of this researching are as following: The first, it is expected that the necessity of developing new fashion products would be appealed toward the prestige group of consumers who are seeking for the fine quality and super-sensitivity in female fashion in Korea, and it is the current situation that the products made of jacquard are gradually expanding not only in the area of apparel, fashion goods and interior but also another areas. The current situation of the global market suggests the necessary strategy of survival, that is, the development of supersensitive materials and creative products which would be able to keep the high quality and lower the selling price through cost reduction. The second, the suggestion of the direction in developing the products of the female fashion made of jacquard has two points - the development of the texture that would realize a unique form and the development of the material that would be able to realize planar pattern and three dimensional pattern which are woven with thin and light materials with various solidity and delicacy through various techniques of mixing and three dimensional expression. The third, the expected ripple effect and utilization generated from the development of fashion products are as followings: As material characteristics of jacquard, It needs the specialization of various techniques and specialized production system in using jacquard, and the specialized technique and system would make it possible to produce not only the higher value-added products through expressing affluent colors and delicate design but also competitive products through cutting the process and cost, eventually, it would lead to the expansion of the jacquard market of super-sensitive prestige. Therefore, it is remarkable that various development of products toward the global market and the prestige female fashion market can suggest the vision that make the national fashion industry develop into the higher value-added knowledge industry integrating technology and culture.

• 한국지역지리학회지
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• 제3권2호
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• pp.151-162
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• 1997

본 연구는 전통적인 농업입지론에 기초한 생산지향 모델에서 시장원리를 고려하여 토지이용에서 변화와 농작물 가격의 변화를 고찰하기 위한 이론 연구이다. 본 연구에서 제시된 균형모델은 생산비용, 운송률, 수요의 측면에서 생산지향모델과 비교된다. 시장(도시)의 규모가 농업토지이용에 미치는 영향을 시나리오를 통해 분석하였다. 또한 제시된 균형모델이 농업에서 불확실성이란 요소를 그 모델에서 어떻게 수용하는가를 제시하였다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.140-140
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• 2018

The 3D interconnect technologies have been appeared, as the density of Integrated Circuit (IC) devices increases. Through Silicon Via (TSV) process is an important technology in the 3D interconnect technologies. And the process is used to form a vertically electrical connection through silicon dies. This TSV process has some advantages that short length of interconnection, high interconnection density, low electrical resistance, and low power consumption. Because of these advantages, TSVs could improve the device performance higher. The fabrication process of TSV has several steps such as TSV etching, insulator deposition, seed layer deposition, metallization, planarization, and assembly. Among them, TSV metallization (i.e. TSV filling) was core process in the fabrication process of TSV because TSV metallization determines the performance and reliability of the TSV interconnect. TSVs were commonly filled with metals by using the simple electrochemical deposition method. However, since the aspect ratio of TSVs was become a higher, it was easy to occur voids and copper filling of TSVs became more difficult. Using some additives like an accelerator, suppressor and leveler for the void-free filling of TSVs, deposition rate of bottom could be fast whereas deposition of side walls could be inhibited. The suppressor was adsorbed surface of via easily because of its higher molecular weight than the accelerator. However, for high aspect ratio TSV fillers, the growth of the top of via can be accelerated because the suppressor is replaced by an accelerator. The substitution of the accelerator and the suppressor caused the side wall growth and defect generation. The suppressor was used as Single additive electrodeposition of TSV to overcome the constraints. At the electrochemical deposition of high aspect ratio of TSVs, the suppressor as single additive could effectively suppress the growth of the top surface and the void-free bottom-up filling became possible. Generally, copper was used to fill TSVs since its low resistivity could reduce the RC delay of the interconnection. However, because of the large Coefficients of Thermal Expansion (CTE) mismatch between silicon and copper, stress was induced to the silicon around the TSVs at the annealing process. The Keep Out Zone (KOZ), the stressed area in the silicon, could affect carrier mobility and could cause degradation of the device performance. Cobalt can be used as an alternative material because the CTE of cobalt was lower than that of copper. Therefore, using cobalt could reduce KOZ and improve device performance. In this study, high-aspect ratio TSVs were filled with cobalt using the electrochemical deposition. And the filling performance was enhanced by using the suppressor as single additive. Electrochemical analysis explains the effect of suppressor in the cobalt filling bath and the effect of filling behavior at condition such as current type was investigated.

• 한국초등수학교육학회지
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• 제20권2호
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• pp.193-213
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• 2016

초등수학에서 보수 개념은 위치적 십진 기수법 체계를 이해하고 덧셈과 뺄셈 연산을 완성하기 위해 필요한 기본적인 개념이다. 본 연구는 초등학교 1학년 학생을 대상으로 보수 개념을 신장시키기 위한 놀이 중심의 단계별 프로그램을 개발하여 적용한 것으로, 개발된 프로그램의 수업을 단계별로 실시하면서 학생들의 연산 능력과 수학적 태도의 변화를 관찰한 것이다. 먼저 보수 개념을 학습하기 위한 조작 교구 및 놀이 학습 프로그램은 5단계(총 11차시)로 개발하였다. 보수 개념 신장을 위한 프로그램의 개발과 조직은 디에네스(Dienes)의 놀이 학습 단계 이론에 근거하여 각 차시와 수업 내용을 구성하여 개발하였다. 본 연구는 프로그램의 각 단계별 수업의 과정과 학생들의 반응, 연구자의 관점 등을 종합하여 기술하고 이로부터 학생들의 연산 능력에서의 변화와 수학에 대한 태도 변화를 함께 살펴본 것이다. 수업을 진행하면서 학생들의 연산 능력과 수학적 태도 두 측면에서 모두 긍정적인 변화를 이끌어낼 수 있었는데, 따라서 1학년 수학에서부터 보수 개념을 효과적이고 체계적으로 신장시킬 수 있는 프로그램을 조직화하고 지도할 필요성을 제기한다.