• Journal of Environmental Science International
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• v.27 no.6
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• pp.437-445
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• 2018

Laser induced-exciplex-fluorescence (EXCIPLEX) proposed by Melton is used to visualize fuel vapor in spray combustion. However, in the EXCIPLEX method based on TMPD/naphthalene system, the TMPD : naphthalene ratio is strictly restricted to 1 : 9. In addition, fluorescence intensity due to the vapor phase is extremely weak. To overcome these drawbacks, we propose a new laser-induced-excimer fluorescence (EXCIMER) method to visualize the liquid and vapor phases simultaneously. The spatial distributions of liquid and vapor in fuel spray suspended by ultrasonic waves are compared using the EXCIPLEX and EXCIMER methods. The correlation between fuel vapor concentration and fluorescence intensity is experimentally investigated by measuring the fluorescence intensity of saturated vapor formed over liquid fuel at a controlled temperature. These experimental results indicate that the EXCIMER method is effective for evaluating fuel vapor visualization in spray combustion. Furthermore, the quantitative distribution of fuel vapor concentration can be correctly estimated by the EXCIMER method.

• ETRI Journal
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• v.11 no.4
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• pp.139-149
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• 1989

Excimer laser를 이용한 투영노광기술은 '80년대 초 $0.5\mum$ 이하의 패턴 형성에 시도된 이래 점진적인 발전을 이루어 왔으며 기존 광노광기술의 연장선상에서 64M bit DRAM 제조를위한 핵심 노광기술이 될 것이다. 본 논문에서는 차세대 노광장비로서의 excimer stepper가 갖는 중요성을 고찰하고 대량생산을 위한 노광장비의 개발방향을 제시하였다. 먼저단파장화에 의한 투과도 저하로 인하여 발생하는 투영광학계의 문제점을 살펴보고 이에 따른 광원의 요구조건을 도출하였다. 그리고excimer stepper를 광원, 조명계, 투영계, 정렬계, stage계 및 제어계등 기능별로 분류한 후 각각의 문제점 및 설계조건을 제시하였다.

• Proceeding of EDISON Challenge
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• 2014.03a
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• pp.275-285
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• 2014

Dipyrene-based fluorescent chemosensor(분자 1)가 개발되었다. 분자 1은 여러 금속이온 중 $Cu^{2+}$와 $Hg^{2+}$의 fluorescent chemosensor로서 센싱할 수 있고, excimer-switch off mechanism에 따라 $Cu^{2+}$와 $Hg^{2+}$ 금속이온을 감지한다. Ground state와 excited state에 대한 DFT와 TD-DFT 방법을 통해 분자 1의 $Hg^{2+}$에 대한 형광 turn on/off을 확인하고, 구조변화에 따른 molecular orbital을 계산하였다. 계산결과 분자 1은 excited state에서 excimer를 형성할 수 있으나 $1+Hg^{2+}$는 excimer를 형성하지 못함을 알 수 있었다. 여기서 우리는 분자 1과 $Hg^{2+}$ 금속이온 결합에 대하여 실험값과 비교 분석하여 그 메커니즘 조사하였다.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.319-321
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• 2004

We report on progress in developing high-power excimer lasers as well as UV-optics for creating low-temperature poly silicon (LTPS). A new high-power excimer laser offers 315 Watts with high pulse to pulse energy stability. Larger substrates can now be processed in better quality with either the SLS process or the new optics for line beam excimer laser annealing.

• Bulletin of the Korean Chemical Society
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• v.7 no.1
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• pp.42-45
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• 1986

Quenching of excimer fluorescence from polystyrene-acrylic acid copolymers containing $Eu^{3+}$ has been studied in tetrahydrofuran solution using simple aromatic hydrocarbons as quenchers under steady-state conditions. Aromatic hydrocarbons quenched collisionally the excimer fluorescence and their rate constants of quenching were determined. The magnitude of quenching constant is interpreted in terms of the cube root of the molar volume of quencher. Cycloalkanes were not effective in quenching the excimer fluorescence possibly due to different solubility characteristics from aromatic hydrocarbons.

• Bulletin of the Korean Chemical Society
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• v.17 no.2
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• pp.158-162
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• 1996

The steady-state emission and fluorescence lifetimes of 1,3-dipyrenylpropane were measured in silicate sol-gel and xerogel matrices. In sol solution, the fluorescence emission spectra of monomer and excimer resemble those in hydrocarbon solvents. In gel and xerogel condition, however, the fluorescence spectra exhibit significant change, largely confirming the intramolecular motions in gel pores are influenced by microviscosity. The rate constants for intramolecular excimer formation were obtained from the measured fluorescence lifetimes and the rate processes for excimer forming in silicate sol-gel are described by a simple kinetic scheme.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.10a
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• pp.435-435
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• 2005

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1407-1411
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• 2003

Due to the heat confinement in the shallow region of the target for a short time scale, pulsed laser annealing has received increasing interest for the fabrication of poly-Si thin film transistors(TFTs) on glass as a low cost substrate in the flat panel displays. The formation and growth mechanisms of poly silicon(poly-Si) grains in thin films are investigated using an excimer laser crystallization system. To understand the crystallization mechanism, the grain formations are observed by FESEM analysis. The optical reflectance and transmittance during the crystallization process are measured using HeNe laser optics. A two-step ELC(Excimer Laser Crystallization) process is applied to enhance the grain formation uniformity.

• Laser Solutions
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• v.6 no.2
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• pp.35-41
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• 2003

In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation by excimer laser radiation could be used successfully to make 3-D microstructure of PET. The mechanism for ablative decomposition of PET with KrF excimer laser(λ: 248nm, pulse duration: 5ns) was explained by photochemical process. And this process showed PET to be adopted in polymer master for nickel mold insert. Nickel electroforming by using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.2
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• pp.33-39
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• 2003

A new microlens fabrication technique, the excimer laser lithography is developed. This bases on the pulsed laser irradiation and the transfer of a chromium-on-quartz reticle on to the polymer surface with a proper projection optics system. An excimer laser lithography system with 1/4 and 1/20 demagnification ratios was constructed first, and the photoablation characteristics of the PMMA and Polyimide were experimentally examined using this system. For two different shapes of microlenses, a spherical lens and a cylindrical lens, fabrication techniques were investigated. One for the spherical lens is a combination of the mask pattern projection and fraction effect. The other for the cylindrical lens is a combination of the mask pattern projection and the relative movement of a specimen. The result shows that various shapes of micro optical components can be easily fabricated by the excimer laser lithography.