• Title/Summary/Keyword: Etching Process

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Characteristics of Bearing Capacity under Square Footing on Two-layered Sand (2개층 사질토지반에서 정방형 기초의 지지력 특성)

  • 김병탁;김영수;이종현
    • Journal of the Korean Geotechnical Society
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    • v.17 no.4
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    • pp.289-299
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    • 2001
  • 본 연구는 균질 및 2개층 비균질지반에서 사질토지반 상에 놓인 정방형 기초의 극한지지력과 침하에 대하여 고찰하였다. 본 연구는 얕은기초의 거동에 대한 정방형 기초의 크기, 지반 상대밀도, 기초 폭에 대한 상부층의 두께 비(H/B), 상부층 아래 경계면의 경사($\theta$) 그리고 지반강성비의 영향을 규명하기 위하여 모형실험을 수행하였다. 동일 상대밀도에서 지지력 계수($N_{{\gamma}}$)는 일정하지 않으며 기초 폭에 직접적으로 관련되며 지지력계수는 기초 폭이 증가함에 따라 감소하였다. 기초크기의 영향과 구속압력의 영향을 고려하는 Ueno 방법에 의한 극한지지력의 예측값은 고전적인 지지력 산정식보다 더 잘 일치하며 그 값은 실험값의 65% 이상으로 나타났다. $\theta$=$0^{\circ}$인 2개층 지반의 결과에 근거하여, 극한지지력에 대한 하부층 지반의 영향을 무시할 수 있는 한계 상부층 두께는 기초 폭의 2배로 결정되었다. 그러나, 73%의 상부층 상대밀도인 경우는 침하비($\delta$B) 0.05 이하에서만 이 결과가 유효하였다. 경계면이 경사진 2개층 지반의 결과에 근거하여, 상부층의 상대밀도가 느슨할수록 그리고 상부층의 두께가 클수록 극한지지력에 대한 경계면 경사의 영향은 크지 않는 것으로 나타났다. 경계면의 경사가 증가함에 따른 극한침하량의 변화는 경계면이 수평인 경우($\theta$=$0^{\circ}$)를 기준으로 0.82~1.2(상부층 $D_{r}$=73%인 경우) 그리고 0.9~1.07(상부층 $D_{r}$=50%인 경우) 정도로 나타났다.Markup Language 문서로부터 무선 마크업 언어 문서로 자동 변환된 텍스트를 인코딩하는 경우와 같이 특정한 응용 분야에서는 일반 문자열에 대한 확장 인코딩 기법을 적용할 필요가 있을 수 있다.mical etch-stop method for the etching of Si in TMAH:IPA;pyrazine solutions provides a powerful and versatile alternative process for fabricating high-yield Si micro-membranes. the RSC circle, but also to the logistics system in the SLC circle. Thus, the RSLC model can maximize combat synergy effects by integrating the RSC and the SLC. With a similar logic, this paper develops "A Revised System of Systems with Logistics (RSSL)" which combines "A New system of Systems" and logistics. These tow models proposed here help explain several issues such as logistics environment in future warfare, MOE(Measure of Effectiveness( on logistics performance, and COA(Course of Actions) for decreasing mass and increasing velocity. In particular, velocity in logistics is emphasized.

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An Intelligent Monitoring System of Semiconductor Processing Equipment using Multiple Time-Series Pattern Recognition (다중 시계열 패턴인식을 이용한 반도체 생산장치의 지능형 감시시스템)

  • Lee, Joong-Jae;Kwon, O-Bum;Kim, Gye-Young
    • The KIPS Transactions:PartD
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    • v.11D no.3
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    • pp.709-716
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    • 2004
  • This paper describes an intelligent real-time monitoring system of a semiconductor processing equipment, which determines normal or not for a wafer in processing, using multiple time-series pattern recognition. The proposed system consists of three phases, initialization, learning and real-time prediction. The initialization phase sets the weights and tile effective steps for all parameters of a monitoring equipment. The learning phase clusters time series patterns, which are producted and fathered for processing wafers by the equipment, using LBG algorithm. Each pattern has an ACI which is measured by a tester at the end of a process The real-time prediction phase corresponds a time series entered by real-time with the clustered patterns using Dynamic Time Warping, and finds the best matched pattern. Then it calculates a predicted ACI from a combination of the ACI, the difference and the weights. Finally it determines Spec in or out for the wafer. The proposed system is tested on the data acquired from etching device. The results show that the error between the estimated ACI and the actual measurement ACI is remarkably reduced according to the number of learning increases.

Microstructural Change of Porous Surface Implant conditioned with Tetracycline-hydrochloride (염산티트라싸이클린의 적용시간에 따른 다공성 임프란트 표면 미세구조의 변화)

  • Jeong, Jae-Wook;Herr, Yeek;Kwon, Young-Hyuk;Park, Joon-Bong;Chung, Jong-Hyuk
    • Journal of Periodontal and Implant Science
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    • v.36 no.2
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    • pp.319-334
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    • 2006
  • Mechanical and chemical methods are the two ways to treat the implant surfaces. By using mechanical method, it is difficult to eliminate bacteria and by-products from the rough implant surface and it can also cause the structural change to the implant surface. Therefore, chemical method is widely used in order to preserve and detoxicate the implant surface more effectively. The purpose of this study is to evaluate the effect of tetracylcline-hydrochloride(TC-HCI) on the change of implant surface microstructure according to application time. Implants with pure titanium machined surface, SLA surface and porous surface were used in this study. Implant surface was rubbed with sponge soaked in 50mg/ml TC-HCI solution for $\frac{1}{2}$ min., 1 min., $1\frac{1}{2}$ min., 2 min., and $2\frac{1}{2}$ min. respectively in the test group and with no treatment in the control group. Then, specimens were processed for scanning electron microscopic observation. 1. Both test and control group showed a few shallow grooves and ridges in pure titanium machined surface implants. There were not significant differences between two groups. 2. In the SLA surfaces, the control specimen showed that the macro roughness was achieved by large-grit sandblasting. Subsequently, the acid-etching process created the micro roughness, which thus was superimposed on the macro roughness. Irrespective of the application time of 50mg/ml TC-HCI solution, in general, test specimens were similar to control. 3. In the porous surfaces, the control specimen showed spherical particles of titanium alloy and its surface have a few shallow ridges. The roughness of surfaces conditioned with tetracycline-HCI was lessened and seen crater-like irregular surfaces relative to the application time. In conclusion, pure titanium machined surfaces and SLA surfaces weren't changed irrespective of the application time of tetracycline-HCI solution. But the porous surfaces conditioned with tetracycline-HCI solution began to be slightly changed from 2 min. This results are expected to be applied to the regenerative procedures for peri-implantitis treatment.

A study on the oxide etching using multi-dipole type magnetically enhanced inductively coupled plasmas (자장강화된 유도결합형 플라즈마를 이용한 산화막 식각에 대한 연구)

  • 안경준;김현수;우형철;유지범;염근영
    • Journal of the Korean Vacuum Society
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    • v.7 no.4
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    • pp.403-409
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    • 1998
  • In this study, the effects of multi-dipole type of magnets on the characteristics of the inductively coupled plasmas and $SiO_2$ etch properties were investigated. As the magnets, 4 pairs of permanent magnets were used and, to etch $SiO_2, C_2F_6, CHF_3, C_4F_8, H_2$, and their combinations were used. The characteristics of the magnetized inductively coupled plasmas were investigated using a Langmuir probe and an optical emission spectrometer, and $SiO_2$ etch rates and the etch selectivity over photoresist were measured using a stylus profilometer. The use of multi-dipole magnets increased the uniformity of the ion density over the substrate location even though no significant increase of ion density was observed with the magnets. The use of the magnets also increased the electron temperature and radical densities while reducing the plasma potential. When $SiO_2$ was etched using the fluorocarbon gases, the significant increase of $SiO_2$ etch rates and also the increase of etch uniformity over the substrate were obtained using the magnets. In case of gas combinations with hydrogen, $C_4F_8/H_2$ showed the highest etch rates and etch selectivities over photoresist among the gas combinations with hydrogen used in the experiment. By optimizing process parameters at 1000 Watts of inductive power with the magnets, the highest $SiO_2$ etch rate of 8000 $\AA$/min could be obtained for 50% $C_4F_8/50% H_2$.

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The Characteristics of the Wafer Bonding between InP Wafers and $\textrm{Si}_3\textrm{N}_4$/InP (Direct Wafer Bonding법에 의한 InP 기판과 $\textrm{Si}_3\textrm{N}_4$/InP의 접합특성)

  • Kim, Seon-Un;Sin, Dong-Seok;Lee, Jeong-Yong;Choe, In-Hun
    • Korean Journal of Materials Research
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    • v.8 no.10
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    • pp.890-897
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    • 1998
  • The direct wafer bonding between n-InP(001) wafer and the ${Si}_3N_4$(200 nm) film grown on the InP wafer by PECVD method was investigated. The surface states of InP wafer and ${Si}_3N_4$/InP which strongly depend upon the direct wafer bonding strength between them when they are brought into contact, were characterized by the contact angle measurement technique and atomic force microscopy. When InP wafer was etched by $50{\%}$ HF, contact angle was $5^{\circ}$ and RMS roughness was $1.54{\AA}$. When ${Si}_3N_4$ was etched by ammonia solution, RMS roughness was $3.11{\AA}$. The considerable amount of initial bonding strength between InP wafer and ${Si}_3N_4$/InP was observed when the two wafer was contacted after the etching process by $50{\%}$ HF and ammonia solution respectively. The bonded specimen was heat treated in $H^2$ or $N^2$, ambient at the temperature of $580^{\circ}C$-$680^{\circ}C$ for lhr. The bonding state was confirmed by SAT(Scannig Acoustic Tomography). The bonding strength was measured by shear force measurement of ${Si}_3N_4$/InP to InP wafer increased up to the same level of PECVD interface. The direct wafer bonding interface and ${Si}_3N_4$/InP PECVD interface were chracterized by TEM and AES.

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Failure Analysis of Ferroelectric $(Bi,La)_4Ti_3O_{12}$ Capacitor in Fabricating High Density FeRAM Device (고밀도 강유전체 메모리 소자 제작 시 발생하는 $(Bi,La)_4Ti_3O_{12}$ 커패시터의 불량 분석)

  • Kim, Young-Min;Jang, Gun-Eik;Kim, Nam-Kyeong;Yeom, Seung-Jin;Hong, Suk-Kyoung;Kweon, Soon-Yong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.257-257
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    • 2007
  • 고밀도 FeRAM (Ferroe!ectric Random Access Memory) 소자를 개발하기 위해서는 강유전체 물질을 이용한 안정적인 스텍형의 커패시터 개발이 필수적이다. 특히 $(Bi,La)_4Ti_3O_{12}$ (BLT) 강유전체 물질을 이용하는 경우에는 낮은 열처리 온도에서도 균질하고 높은 값의 잔류 분극 값을 확보하는 것이 가장 중요한 과제 중의 하나이다. 불행히도, BLT 물질은 a-축으로는 약 $50\;{\mu}C/cm^2$ 정도의 높은 잔류 분극 값을 갖지만, c-축 방향으로는 $4\;{\mu}C/cm^2$ 정도의 낮은 잔류 분극 값을 나타내는 동의 강한 비등방성 특성을 보인다. 따라서 BLT 박막에서 각각 입자들의 크기 및 결정 방향성을 세밀하게 제어하는 것은 무엇보다 중요하다. 본 연구에서는 16 Mb의 1T/1C (1-transistor/1-capacitor) 형의 FeRAM 소자를 BLT 박막을 적용하여 제작하였다. 솔-젤 (sol-gel) 용액을 이용하여 스핀코팅법으로 BLT 박막을 증착하고, 후속 열처리 공정을 RTP (rapid thermal process) 공정을 이용하여 수행하였다. 커패시터의 하부 전극 및 상부 전극은 각각 Pt/IrOx/lr 및 Pt을 적용하였다. 반응성 이온 에칭 (RIE: reactive ion etching) 공정을 이용하여 커패시터를 형성시킨 후, 32k-array (unit capacitor: $0.68\;{\mu}m$) 패턴에서 측정한 스위칭 분극 (dP=P*-P^) 값은 약 $16\;{\mu}C/cm^2$ 정도이고, 웨이퍼 내에서의 균일도도 2.8% 정도로 매우 우수한 특성을 보였다. 그러나 단위 셀들의 특성을 평가하기 위하여 bit-line의 전압을 측정한 결과, 약 10% 정도의 커패시터에서 불량이 발생하였다. 그리고 이러한 불량 젤들은 매우 불규칙적으로 분포함을 확인할 수 있었다. 이러한 불량 원인을 파악하기 위하여 양호한 젤과 불량이 발생한 셀에서의 BLT 박막의 미세구조를 분석하였다. 양호한 셀의 BLT 박막 입자들은 불량한 셀에 비하여 작고 비교적 균일한 크기를 갖고 있었다. 이에 비하여 불량한 셀에서의 BLT 박막에는 과대 성장한 입자들이 존재하고 이에 따라서 입자 크기가 매우 불균질한 것으로 확인되었다. 또 이러한 과대 성장한 입자들은 거의 모두 c-축 배향성을 나타내었다. 이상의 실험 결과들로부터, BLT 박막을 이용하여 제작한 FeRAM 소자에서 발생하는 불규칙한 셀 불량의 주된 원인은 c-축 배향성을 갖는 과대 성장한 입자의 생성임을 알 수 있었다. 즉 BLT 박막을 이용하여 FeRAM 소자를 제작하는 경우, 균일한 크기의 입자 및 c-축 배향성의 입자 억제가 매우 중요한 기술적 요소임을 알 수 있었다.

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A Study on the Distribution and Changes of Sand Dune at the Lower Reach of Duman River, North Korea (두만강 하류 사구의 분포와 변화에 관한 연구)

  • Lee Min-Boo;Kim Nam-Shin;Lee Gwang-Ryul;Han Uk;Jin, Shizhu
    • Journal of the Korean Geographical Society
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    • v.41 no.3 s.114
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    • pp.331-345
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    • 2006
  • This study deals with geomorphological process of the sand dune landform including the distribution and surface environments, characteristics of sediments, origins and moving processes in lower reach and mouth delta of Duman River, Northeast Korea and China. The methodology of the study includes image analysis of Landsat TM(1992.10) and ETM(2000.9) and Spot(2005.4) for analysis of land cover, 2 times field survey for recognition of landform and acquisition of sediments raw data materials, and grain analysis and exoscopy about raw data materials. The geomorphic elements from satellite image analysis are composed of the delta, sand spit, active and stable dune, sand bar and riparian vegetated zone. Results of the grain analysis indicate the sediments originated from marine coastal zone than riverine one. This means that present sand dune not so much reflect present climatic and geomorphic environments. Result of the exoscopy analysis show that ratio of quartz, which is comparatively resistant to environment, is highest as $65{\sim}83%$ out of sediments. But the surface of the $30{\sim}40%$ of mineral grains was coated by yellow-colored stained materials, due to chemical weathering. Some grains show rough skin, looking as acicular, network structure and etching pits, affected by physical and chemical weathering.

Electrochemical Characteristics of 2-Dimensional Titanium Carbide(MXene)/Silicon Anode Composite Prepared by Electrostatic Self-assembly (정전기적 자가결합법으로 제조된 2차원 티타늄 카바이드(MXene)/실리콘 음극 복합소재의 전기화학적 특성)

  • Dong Min Kim;Jong Dae Lee
    • Korean Chemical Engineering Research
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    • v.62 no.3
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    • pp.262-268
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    • 2024
  • In this study, the MXene/Si composite was prepared by electrostacic assembly with 2-dimensional structured titanium carbide (MXene) and nano silicon for anode material of high-performance lithium-ion battery. Ti3C2Tx MXene was synthesized by etching the Ti3AlC2 MAX with LiF/HCl, and the surface of nano silicon was charged to positively using CTAB (Cetyltrimethylammonium bromide). The MXene/Si anode composite was successfully manufactured by simple mixing process of synthesized MXene and charged silicon. The physical and electrochemical properties of prepared composite were investigated with MXene-silicon composition ratio, and the surface of electrode after cycles was analyzed to evaluate stability of the electrode. The MXene/Si composites demonstrated high initial discharge capacities of 1962.9, 2395.2 and 2504.3 mAh/g as the silicon composition ratio increased to 2, 3 and 4 compared to MXene, respectively. MXene/Si-4, which is MXene and silicon ratio with 1 : 4, exhibited 1387.5 mAh/g of reversible capacity, 74.5% of capacity retention at 100 cycles and high capacity of 700.5 mAh/g at high rate of 4.0 C. As the results, the MXene/Si composite prepared by electrostatic-assenbly could be applied to anode materials for high-performance LIBs.

IN VITRO STUDY ON THE EFFECTS OF THE FLOURIDE ON THE REMINERALIZATION OF ACID ETCHED ENAMEL (불소가 산부식된 법랑질의 재석회화에 미치는 영향에 관한 연구)

  • Kim, Jin-Han;Lee, Ki-Soo
    • The korean journal of orthodontics
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    • v.26 no.4
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    • pp.389-399
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    • 1996
  • Remineralization of acid-etched enamel across the time has been one of the curiosities in the context of the orthodontic biomechanics(Arends J. et al., IRL Press, 1, 1985), nevertheless, is so far controversial. It was the aim of this study to observe the remineralization patterns of acid-etched enamel across the time and whether the existence of fluoride might carry out any modifications. The intact buccal surfaces of the first bicuspids which was extracted for orthodontic treatment were ground smooth, and etched with a 38w/w% phosphoric acid for 60 seconds, The surface was observed by the scanning electron microscope and surface microhardness was measured after immersion in the fluoride or non-fluoride containing remineralizing solution for 0 hour, 12 hours, 1 day, 3 days, 7 days, 14 days, 28 days, and 42 days. The following results and conclusions were drawn; 1. Surface microhardness increased in both fluoride containing and non-fluoride containing solution group with time lapse. 2. In fluoride containing solution group, the surface microhardness sharply increased at the 12 hours group, on the other hand, surface microhardness increased at 3 days in non-fluoride containing solution group. 3. The difference in microhardness value between two groups manifested gradual decrease. 4. Scanning electron microphotographs disclosed that the fluoride containing solution group generated spiculate sub-stances in the 12 hours group, which was increased in number and size with time lapse. 7 days later, spherical composure was began to be produced, The spiculate substances so much increased in number that the etched enamel surface looked like flat in 42 days. 5. In non fluoride-containing solution group, there was no surface change at 42 days, perceivable in scanning electron microphotographs which could be defined as remineralization though the surface was a little rougher than the incipient etched surface. These results demonstrate that the action of the fluoride is exceedingly pertinent in the remineralization of acid-etched enamel and the remineralization process goes uninterruptedly with time lapse.

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The Effect of EDTA, Tetracycline-HCl, and Citric Acid on Diseased Root Surfaces; The SEM Study (EDTA, 염산 테트라싸이클린, 구연산 처치가 치근면에 미치는 영향)

  • Ahn, Seong-Hee;Chai, Jung-Kiu;Kim, Chong-Kwan;Cho, Kyoo-Sung
    • Journal of Periodontal and Implant Science
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    • v.29 no.3
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    • pp.561-578
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    • 1999
  • The goal of periodontal therapy is the periodontal regeneration by the removal of microorganisms and their toxic products from the periodontally diseased root surface. To achieve periodontal regeneration, root conditioning as an adjunct to root planing has been done. There are low pH etchants such as citric acid, tetracycline-HCl, and EDTA solution which is a neutral chelating agent. The purpose of present study was to examine the effect of root conditioning by citric acid, tetracycline HCl, and EDTA. Total 35 root specimens(6${\times}$3${\times}$2mm) were prepared from the periodontally diseased teeth, scaled and root planed. The specimens were treated with normal saline for 1 minute, saturated citric acid(pH 1) for 3 minutes, 50mg/ml tetracycline-HCl(pH 2) for 5 minutes, 15% EDTA(pH 7) for 5 minutes using rubbing technique. The specimens were examined under scanning electron microscopy at 1000, and 3000 magnification. On the microphotographs taken at 1000 magnification, the numbers of opened and patent dentinal tubules per unit area(10,640${\mu}m^2$) were counted. And the diameters of opened dentinal tubules per unit are (10,640${\mu}m^2$) were measured. The differences of number and diameter among all groups were statistically analyzed by Kruskal Wallis Test. The results were as follows; 1. In the specimens applied with normal saline(control group), the root surface was finely cracked, and was covered by irregular smear layer. Neither exposed dentinal tubules nor any patent dentinal tubules could be seen. 2. In the specimens applied with saturated citric acid(experimental 1 group), the globular collagen fibers were exposed around the peritubular space, and many dentinal tubules were revealed. 3. In the specimens applied with tetracycline-HCl(experimental 2 group), the process-like collagen fibers were exposed around the peritubular space, and some dentinal tubules were revealed. 4. In the specimens applied with 15% EDTA(experimental 3 group), the root surface was covered by the collagenous fibrillar network, and many dentinal tubules were revealed. 5. The numbers of opened and patent dentinal tubules were significantly more in exp. 1 group and exp. 3 group than in exp. 2 group(P<0.05). But there was no significant difference between exp. 1 group and exp. 3 group. In control group, the number of opened and patent dentinal tubules could not be counted because any dentinal tubules couldn't be seen. 6 . The diameter of opened dentinal tubules was significantly smaller in exp. 1 group and exp. 3 group than in exp. 2 group(P<0.05). But there was no significant difference between exp. 1 group and exp. 3 group. In control group, the diameter of opened dentinal tubules could not be measured because any dentinal tubules couldn't be seen. The results demonstrate that root conditioning with citric acid, tetracycline- HCl, and EDTA is more effective in periodontal healing than only root planing, and 15% EDTA solution can replace low pH etching agents such as citric acid, tetracycline-HCl for root conditioning.

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