• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• Journal of Power Electronics
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• 제9권5호
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• pp.748-756
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• 2009

This paper presents a compensation algorithm for position error due to an amplitude imbalance between resolver output signals. Resolvers are typically used to obtain absolute position information for motor drive systems in severe environments. Position error is caused by an amplitude imbalance of the resolver output signals. As a result, the d- and q-axis currents of synchronous reference frame have periodic ripples in the stator fundamental frequency in permanent magnet synchronous motor (PMSM) drive systems. Therefore, this paper proposes a compensation algorithm to reduce the position error generated by the amplitude imbalance. The proposed method does not require any additional hardware, and reduces computation time with a simple integral operation according to rotor position. In addition, the position error can be directly compensated for by the estimated position error. The effectiveness of the proposed compensation algorithm is verified through several simulations and experiments.

• 제어로봇시스템학회논문지
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• 제9권10호
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• pp.774-781
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• 2003

The important factors that cause position error in X-Y robot are inertial force, frictions and spring distortion in screw or coupling. We have to estimate these factors precisely to correct position errors, Which is very difficult. In this paper, we makes systems to inspect metal stencil which is used to print solder paste on pads of SMD of PCB with low precision X-Y robot and vision system. To correct position error that is caused by low precision X-Y robot, we defines position error vector that is formed with position of objects that exist in reference and camera image. We apply MHT(Modified Hough Transformation) for the aim of determining the dominant position error vector. We modify reference image using extracted dominant position error vector and obtain reference image that is the same with camera image. Effectiveness and performance of this method are verified by simulation and experiment.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1155-1160
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• 2007

This paper presents position error for the robot localization system using the ultrasonic wave. The distance between the receiver and a beacon can be computed by using the difference between times of flight. The distance information measured by ultrasonic wave has errors. The position is calculated by distances, and this error is caused by distance errors. The position error is different from receiver¡s position. And the position is also calculated by beacon location. This paper calculates worst case position error within measuring area, and finds beacons location to reduce the position error.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1828-1831
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• 2003

There are various sources causing a position error in a linear motor. This paper focuses on error sources from rotational motions of a table and friction. Rotational errors occur due to imperfections during manufacturing and/or assembly of guide ways, and cause a position error at locations of interest. Friction is another factor deteriorating the position error due to its highly nonlinear behavior. The position error of the linear motor was about 20∼30$\mu\textrm{m}$. After compensating the position errors due to rotational error motions and friction. the remaining errors become about 6～8$\mu\textrm{m}$ and 2～3$\mu\textrm{m}$, respectively. It is shown that the positional accuracy of a linear can be greatly improved by compensating the two error sources.

• Journal of Electrical Engineering and Technology
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• 제11권4호
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• pp.889-897
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• 2016

This paper presents an improved approach for compensating rotor position signal displacement in brushless DC (BLDC) motors with misaligned hall-effect sensors. Typically, the hall-effect sensors in BLDC motors are located in each phase and positioned exactly 120 electrical degrees apart. However, limitations in mechanical tolerances make it difficult to place hall-effect sensors at the correct location. In this paper, a position error compensator to counteract the hall-effect sensor positioning error is proposed. The proposed position error compensator uses least squares error analysis to adjust the relative position error and back-EMF information to reduce the absolute offset error. The effectiveness of the proposed approach is verified through several experiments.

• 한국항해항만학회지
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• 제29권7호
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• pp.611-614
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• 2005

This paper is to develop the position error equation of in the free-gyro positioning system by using two free gyros. First, the determination of a position is analyzed on the ellipsoid of the Earth and the type of the errors is defined Finally the position error equation is introduced and developed, based on the definition of the type of errors which may be involved in the FPS.

• International Journal of Aeronautical and Space Sciences
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• 제18권1호
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• pp.118-128
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• 2017

In this study, we propose a real time inertial navigation system/global positioning system (INS/GPS) integrated smoothing algorithm based on an extended Kalman filter (EKF) and a position damping loop (PDL) for synthetic aperture radar (SAR). Integrated navigation algorithms usually induce discontinuities due to error correction update by the Kalman filter, which are as detrimental to the performance of SAR as the relative position error. The proposed smoothing algorithm suppresses these discontinuities and also reduces the relative position error in real time. An EKF estimates the navigation errors and sensor biases, and all the errors except for the position error are corrected directly and instantly. A PDL activated during SAR operation period imposes damping effects on the position error estimates, where the estimated position error is corrected smoothly and gradually, which contributes to the real time smoothing and small relative position errors. The residual errors are re-estimated by the EKF to maintain the estimation performance and the stability of the overall loop. The performance improvements were confirmed by Monte Carlo simulations. The simulation results showed that the discontinuities were reduced by 99.8% and the relative position error by 48% compared with a conventional EKF without a smoothing loop, thereby satisfying the basic performance requirements for SAR operation. The proposed algorithm may be applicable to low cost SAR systems which use a conventional INS/GPS without changing their hardware configurations.

• 한국항해항만학회지
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• 제37권4호
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• pp.329-335
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• 2013

This paper is to develop the position error equations including the attitude errors, the errors of nadir and ship's heading, and the errors of ship's position in the free-gyro positioning and directional system. In doing so, the determination of ship's position by two free gyro vectors was discussed and the algorithmic design of the free-gyro positioning and directional system was introduced briefly. Next, the errors of transformation matrices of the gyro and body frames, i.e. attitude errors, were examined and the attitude equations were also derived. The perturbations of the errors of the nadir angle including ship's heading were investigated in each stage from the sensor of rate of motion of the spin axis to the nadir angle obtained. Finally, the perturbation error equations of ship's position used the nadir angles were derived in the form of a linear error model and the concept of FDOP was also suggested by using covariance of position error.

• 한국정밀공학회지
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• 제16권8호
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• pp.122-129
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• 1999

A 5-axis CNC machine tool is more useful compared with a 3-axis machine tool, because the position and the orientation of a tool tip can be controlled simultaneously. Unlike the 3-axis machine tool, the 5-axis machine tool has the volumetric position error and volumetric orientation error due to the quasi-static error of each machine tool joint which is a major source of machined part error. So, the generalized error synthesis model of the 5-axis CNC machine tool was developed to predict and to compensate for the volumetric position error and the volumetric orientation error. It was proposed that a compensation algorithm to correct simultaneously the volumetric position error and the volumetric orientation error of the 5-axis CNC machine by error inverse kinematic.