리니어 모터의 위치 정밀도 향상에 관한 연구

A Study on Enhancement of the Position Accuracy of a Linear Motor

There are various sources causing a position error in a linear motor. This paper focuses on error sources from rotational motions of a table and friction. Rotational errors occur due to imperfections during manufacturing and/or assembly of guide ways, and cause a position error at locations of interest. Friction is another factor deteriorating the position error due to its highly nonlinear behavior. The position error of the linear motor was about 20∼30$\mu\textrm{m}$. After compensating the position errors due to rotational error motions and friction. the remaining errors become about 6～8$\mu\textrm{m}$ and 2～3$\mu\textrm{m}$, respectively. It is shown that the positional accuracy of a linear can be greatly improved by compensating the two error sources.