• 제목/요약/키워드: Engineering process

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기계학습 알고리즘을 이용한 반도체 테스트공정의 불량 예측 (Defect Prediction Using Machine Learning Algorithm in Semiconductor Test Process)

  • 장수열;조만식;조슬기;문병무
    • 한국전기전자재료학회논문지
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    • 제31권7호
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    • pp.450-454
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    • 2018
  • Because of the rapidly changing environment and high uncertainties, the semiconductor industry is in need of appropriate forecasting technology. In particular, both the cost and time in the test process are increasing because the process becomes complicated and there are more factors to consider. In this paper, we propose a prediction model that predicts a final "good" or "bad" on the basis of preconditioning test data generated in the semiconductor test process. The proposed prediction model solves the classification and regression problems that are often dealt with in the semiconductor process and constructs a reliable prediction model. We also implemented a prediction model through various machine learning algorithms. We compared the performance of the prediction models constructed through each algorithm. Actual data of the semiconductor test process was used for accurate prediction model construction and effective test verification.

EPD 신호궤적을 이용한 플라즈마 식각공정의 실시간 이상검출 (Real-time malfunction detection of plasma etching process using EPD signal traces)

  • 차상엽;이석주;고택범;우광방
    • 제어로봇시스템학회논문지
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    • 제4권2호
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    • pp.246-255
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    • 1998
  • This paper presents a novel method for real-time malfunction detection of plasma etching process using EPD signal traces. First, many reference EPD signal traces are collected using monochromator and data acquisition system in normal etching processes. Critical points are defined by applying differentiation and zero-crossing method to the collected reference signal traces. Critical parameters such as intensity, slope, time, peak, overshoot, etc., determined by critical points, and frame attributes transformed signal-to symbol of reference signal traces are saved. Also, UCL(Upper Control Limit) and LCL(Lower Control Limit) are obtained by mean and standard deviation of critical parameters. Then, test EPD signal traces are collected in the actual processes, and frame attributes and critical parameters are obtained using the above mentioned method. Process malfunctions are detected in real-time by applying SPC(Statistical Process Control) method to critical parameters. the Real-time malfunction detection method presented in this paper was applied to actual processes and the results indicated that it was proved to be able to supplement disadvantages of existing quality control check inspecting or testing random-selected devices and detect process malfunctions correctly in real-time.

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침적식 화학적 제염 공정 시 원자로 냉각재 펌프용 스테인리스강의 안전성 평가 (Evaluation on Safety of Stainless Steels in Chemical Decontamination Process with Immersion Type of Reactor Coolant Pump for Nuclear Reactor)

  • 김성종;한민수;김기준;장석기
    • Corrosion Science and Technology
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    • 제10권5호
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    • pp.167-174
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    • 2011
  • Due to commercialization of nuclear power, most countries have taken interest in decontamination process of nuclear power plant and tried to develop a optimum process. Because open literature of the decontamination process are rare, it is hard to obtain skills on decontamination of foreign country and it is necessarily to develop proper chemical decontamination process system in Korea. In this study, applicable possibility in chemical decontamination for reactor coolant pump (RCP) was investigated for the various stainless steels. The stainless steel (STS) 304 showed the best electrochemical properties for corrosion resistance and the lowest weight loss ratio in chemical decontamination process with immersion type than other materials. However, the pitting corrosion was generated in both STS 415 and STS 431 with the increasing numbers of cycle. The intergranular corrosion in STS 431 was sporadically observed. The sizes of their pitting corrosion also increased with increasing cycle numbers.

마이크로 밀링과 X-선 리소그래피 공정을 이용한 다층 마이크로 구조물 제작 공정 개발 (Development of a Novel Fabrication Process for Multi-layered Microstructures using a Micro Milling and Deep X-ray Lithography)

  • 김종현;장석상;임근배
    • 한국정밀공학회지
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    • 제31권3호
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    • pp.269-275
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    • 2014
  • Conventional machining technologies such as a milling process have limitations in accuracy to fabricate microstructures. Deep X-ray lithography using the synchrotron radiation is a promising micromachining process with an excellent accuracy, whereas there are difficulties in the fabrication of multi-layered structures. Therefore, it is mainly used for fabricating simple mono-layered microstructures with a high aspect ratio. In this study, a novel technology for fabricating multi-layered microstructures is proposed by combining two processes. In advance, an X-ray resist material is cut and machined into various shapes and heights by the micro milling process. Subsequent X-ray irradiation process facilitates the fabrication of multi-layered microstructures. The proposed technology can overcome the limitation of the pattern accuracy in conventional milling process and the difficulty of the multi-layered machining in x-ray process. The usefulness of the proposed technology is demonstrated in this study by applying the technique in the realization of various multi-layered microstructures.

실험계획법을 이용한 세슘보조 스퍼터링 공정의 특성분석 (Characterization of Cesium Assisted Sputtering Process Using Design of Experiment)

  • 민철홍;박성진;윤능구;김태선
    • 한국표면공학회지
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    • 제40권4호
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    • pp.165-169
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    • 2007
  • Compared to conventional Indium Tin Oxide (ITO) film deposition methods, cesium (Cs) assisted sputtering offers higher film characteristics in terms of electrical, mechanical and optical properties. However, it showed highly non-linear characteristics between process input factors and equipment responses. Therefore, to maximize film quality, optimization of manufacturing process is essential and process characterization is the first step for process optimization. For this, we designed 2 level design of experiment (DOE) to analyze ITO film characteristics including film thickness, resistivity and transmittance. DC power, pressure, carrier flow, Cs temperature and substrate temperature were selected for process input variables. Through statistical effect analysis methods, relation between three types of ITO film characteristics and five kinds of process inputs are successfully characterized and eventually, it can be used to optimize Cs assisted sputtering processes for various types of film deposition.

변동성을 고려한 탑재프로세스 모델링과 시뮬레이션에 관한 연구 (A Study on the Erection Process Modeling and Simulation considering Variability)

  • 임현규;이용길;김병철;우종훈
    • 대한조선학회논문집
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    • 제53권2호
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    • pp.101-107
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    • 2016
  • Generally, the shipbuilding industry has finite resources and limited workspace. Due to finite resources, limited workspace and state of block preparation, erection process in shipbuilding industry is frequently delayed than erection process scheduling which is planned at long-term plan stage. In this study, considering variability of block reserve ratio, the degree of delay in real erection process is measured and compared to scheduling which is planned at long-term plan stage in shipbuilding industry including finite capacity and variative lead time. Also, the erection process scheduling which has minimum lead time can be checked through simulation. The results of this study could be improved the accuracy of erection process scheduling by checking the main event compliance ratio by block reserve ratio and calculating the optimum erection pitch for the main event compliance.

시공 프로세스에서 발생하는 공사변동 요인 및 네트워크 분석에 관한 연구 (A Study on the Task Variation and Social Network Analysis in the Construction Process)

  • 박유나;이동덕;김재준
    • 한국건설관리학회논문집
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    • 제20권1호
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    • pp.105-113
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    • 2019
  • 하나의 건설 프로젝트에는 다양한 작업들이 상호의존적으로 진행되어 복잡한 프로세스를 이룬다. 한 작업에서 공사변동이 발생하면 추가적으로 다른 작업들도 영향을 받게 되며 신속하게 진행되는 건설현장 특성상 매번 변동에 대한 합의를 도출하기는 매우 어렵다. 이에 본 연구에서는 시공 과정에 발생하는 공사변동에 대한 근본원인을 파악하고 주요 공사변동요인에 해당하는 작업들에 대하여 인접행렬을 구축하여 네트워크 분석을 실시하였다. 이를 통해 작업들 간 관계론적 특성과 구조적 위치를 파악하였다. 이러한 시공 프로세스에서의 작업 네트워크 분석을 통해 복잡한 시공 과정에서의 작업흐름을 안정화 시키고자 하며 공정 계획의 신뢰성과 프로젝트 성과를 향상시키고자 한다.

Recovery of ammonia from wastewater by liquid-liquid membrane contactor: A review

  • Jang, Yoonmi;Lee, Wooram;Park, Jaebeom;Choi, Yongju
    • Membrane and Water Treatment
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    • 제13권3호
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    • pp.147-166
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    • 2022
  • Liquid-liquid membrane contactor (LLMC), a device that exchanges dissolved gas molecules between the two sides of a hydrophobic membrane through membrane pores, can be employed to extract ammoniacal nitrogen from a feed solution, which is transported across the membrane and accumulated in a stripping solution. This LLMC process offers the promise of improving the sustainability of the global nitrogen cycle by cost-effectively recovering ammonia from wastewater. Despite recent technological advances in LLMC processes, a comprehensive review of their feasibility for ammonia recovery is rarely found in the literature. Our paper aims to close this knowledge gap, and in addition to analyze the challenges and provide potential solutions for improvement. We begin with discussions on the operational principles of the LLMC process for ammonia recovery and membrane types and membrane configurations commonly used in the process. We then assess the performance of the process by reviewing publications that demonstrate its practical application. Challenges involved in the implementation of the LLMC process, such as membrane fouling, membrane wetting, and chemical requirements, are presented, along with discussions on potential strategies to address each. These strategies, including membrane modification, hybrid process design, and process optimization based on cost-benefit analysis, guide the reader to identify key areas of future research and development.

세라믹 막여과의 성능향상을 위한 응집 전처리의 적용 (Application of coagulation pretreatment for enhancing the performance of ceramic membrane filtration)

  • 강준석;송지영;박서경;정아영;이정준;서인석;채선하;김성수;김한승
    • 상하수도학회지
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    • 제31권6호
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    • pp.501-510
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    • 2017
  • In this study, it is estimated that ceramic membrane process which can operate stably in harsh conditions replacing existing organic membrane connected with coagulation, sedimentation etc.. Jar-test was conducted by using artificial raw water containing kaolin and humic acid. It was observed that coagulant (A-PAC, 10.6%) 4mg/l is the optimal dose. As a results of evaluation of membrane single filtration process (A), coagulation-membrane filtration process (B) and coagulation-sedimentation-membrane filtration process (C), TMP variation is stable regardless of in Flux $2m^3/m^2{\cdot}day$. But in Flux $5m^3/m^2{\cdot}day$, it show change of 1-89.3 kpa by process. TMP of process (B) and (C) is increased 11.8, 0.6 kpa each. But, the (A) showed the greatest change of TMP. When evaluate (A) and (C) in Flux $10m^3/m^2{\cdot}day$, TMP of (A) stopped operation being exceeded 120 kpa in 20 minutes. On the other hand, TMP of (C) is increased only 3 kpa in 120 minutes. Through this, membrane filtration process can be operated stably by using the linkage between the pretreatment process and the ceramic membrane filtration process. Turbidity of treated water remained under 0.1 NTU regardless of flux condition and DOC and $UV_{254}$ showed a removal rate of 65-85%, 95% more each at process connected with pretreatment. Physical cleaning was carried out using water and air of 500kpa to show the recovery of pollutants formed on membrane surface by filtration. In (A) process, TMP has increased rapidly and decreased the recovery by physical cleaning as the flux rises. This means that contamination on membrane surface is irreversible fouling difficult to recover by using physical cleaning. Process (B) and (C) are observed high recovery rate of 60% more in high flux and especially recovery rate of process (B) is the highest at 95.8%. This can be judged that the coagulation flocs in the raw water formed cake layer with irreversible fouling and are favorable to physical cleaning. As a result of estimation, observe that ceramic membrane filtration connected with pretreatment improves efficiency of filtration and recovery rate of physical cleaning. And ceramic membrane which is possible to operate in the higher flux than organic membrane can be reduce the area of water purification facilities and secure a stable quantity of water by connecting the ceramic membrane with pretreatment process.

프로세스 유사성을 이용한 워크플로우 클러스터링 (Workflow Clustering Methodology Using Structural Similarity Metrics)

  • 정재윤;배준수;강석호
    • 대한산업공학회지
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    • 제33권1호
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    • pp.99-109
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    • 2007
  • To realize process-driven management, so many companies have been launching business process managementsystems. Business process is collection of standardized and structured tasks inducing value creation of acompany. Moreover, it is recognized as one of significant intangible business assets to achieve competitiveadvantages. This research introduces a novel approach of workflow process analysis, which has more and moresignificance as process-aware information systems are spreading widely into a lot of companies, In this paper, amethodology of workflow clustering based on process similarity has been proposed. The purpose of workflowclustering is to analyze accumulated process definitions in order to assist design of new processes andimprovement of existing ones. The proposed methodology exploits measures of structural similarity of workflowprocesses.The methodology has been experimented with synthetic process models for illustrating the implicationofworkflow clustering.