• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.79-80
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• 2007

Copper has been used as an interconnect material in the fabrication of semiconductor devices, because of its higher electrical conductivity and superior electro-migration resistance. Chemical mechanical polishing (CMP) technique is required to planarize the overburden Cu film in an interconnect process. Various problems such as dishing, erosion, and delamination are caused by the high pressure and chemical effects in the Cu CMP process. But these problems have to be solved for the fabrication of the next generation semiconductor devices. Therefore, new process which is electro-chemical mechanical planarization/polishing (ECMP) or electro-chemical mechanical planarization was introduced to solve the. technical difficulties and problems in CMP process. In the ECMP process, Cu ions are dissolved electrochemically by the applying an anodic potential energy on the Cu surface in an electrolyte. And then, Cu complex layer are mechanically removed by the mechanical effects between pad and abrasive. This paper focuses on the manufacturing of ECMP system and its process. ECMP equipment which has better performance and stability was manufactured for the planarization process.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.9
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• pp.86-94
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• 2007

The design process must be planned carefully and executed systematically in order to support designers who are faced with many engineering design problems. In particular, conceptual design stage is very important than other stages such as detailed design or manufacturing stage on designing engineering systems. When designers are faced contradictory situation in task, conceptual design usually requires inventive thinking which depends on their creativity. And in order to develop good concepts, it is necessary to resolve contradictory situations during conceptual design. This paper presents a structure of systematic conceptual design process for designing engineering systems. And we developed the automatic feeding screw device using the proposed design process structure.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.8
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• pp.172-179
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• 2002

In this paper, an efficient reverse engineering method for free-formed surfaces is proposed based on the integration of a repetitive digitizing method and vision system. In recent reverse engineering process, the equi-interval digitization method is being used since the surface information is not known. If more accurate results are required, the number of measuring point should be increased appropriately. Thus, such measuring process tends to result in too dense data including useless information, and cause excessive measuring time. This problem can be improved by applying repetitive digitizing method and image process technique, which is proposed in this paper. The proposed methods are validated through appropriate simulation and experiments.

• Journal of the Korean Society of Systems Engineering
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• v.7 no.1
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• pp.53-56
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• 2011

Configuration management plays a key role in systems engineering process for any project from earlier stage of development. It consists of five major activities, ie., configuration management planing, configuration identification, configuration control, configuration status accounting and configuration verification and audit, and is essential to control system design, development and operation throughout entire life cycle of the system development. And it is directly associated with other part of systems engineering management process, ie., technical data management which provides traceability of important decisions and changes during development. In this paper, we describe how to apply CASE(Computer-aided Systems Engineering) tool-Cradle for the configuration management to achieve effectiveness of Technical Management process.

• Proceedings of the KIEE Conference
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• 2003.07d
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• pp.2798-2800
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• 2003

Active contour models(called Snakes) are methods for the image segmentation. Many researchers have developed snake algorithms and then published such as GVF, GGF snake. In this paper, we present a pre-process for GGF snake algorithm. This process removes noise so that snakes can flow smoothly. In experiment, we compared a image removed noise with a image corrupted by noise. In result, the pre-process produced a good image for GGF Snake and is necessary.

• International journal of advanced smart convergence
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• v.9 no.4
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• pp.149-155
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• 2020

In the software industry of Korean Small and Medium-sized Enterprise(SME)s, the development process is often not mature. This may lead to failures in quality control and output management. As a result, the quality of the software can be degraded. To solve the problem, the software visualization technique, which is from the National IT Industry Promotion Agency Software Engineering Center can be applied. We have experienced with mentoring not only the visualization of software development process, but also various visualization process of SMEs. However, the existing software visualization method was difficult to install environment and its time cost was high. This paper proposes a software visualization environment through a cloud service along with a case of building a software visualization environment. We expect that this method will make it easier to build a visualization environment and improve the quality of SME software.

• International conference on construction engineering and project management
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• 2011.02a
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• pp.209-212
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• 2011

Selection of finishing materials in the design stage is an important management factor in terms of use safety and satisfaction, and work cost and process. However, selection of materials in the design stage is usually conducted without related guidelines or a set process, but depends on the experience of the architect or advice of materials company employees. Therefore, the aim of this study was to develop a finishing materials selection process that can be used by a architect. Materials selection related rules collected through interview with experts and five office building cases were used as knowledge. In addition, another aim of the study was to propose a prototype system interface for use in the field.

• Transactions on Control, Automation and Systems Engineering
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• v.2 no.3
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• pp.196-200
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• 2000

A neural controller for process control is proposed that combines a conventional multi-loop PID controller with a neural network. The concept of target signal based on feedback error is used fur on-line learning of the neural network. This controller is applied to distillation column control to illustrate its effectiveness. The result shows that the proposed neural controller can cope well with disturbance, strong interactions, time delays without any prior knowledge of the process.

• 한국생물공학회:학술대회논문집
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• 2005.10a
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• pp.757-758
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• 2005

• Transactions on Control, Automation and Systems Engineering
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• v.2 no.2
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• pp.136-139
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• 2000

A neural controller for process control is proposed that combines a conventional multi-loop PID controller with a neural network. The concept of target signal based on feedback error is used for on-line learning of the neural network. This controller is applied to distillation column control to illustrate its effectiveness. The result shows that the proposed neural controller can cope well with disturbance, strong interactions, time delays without any prior knowledge of the process.