• 제목/요약/키워드: Engineered barrier system

검색결과 82건 처리시간 0.029초

$SiO_2/HfO_2/Al_2O_3$ 적층구조 터널링 절연막을 적용한 차세대 비휘발성 메모리의 제작 (Fabrication of engineered tunnel-barrier memory with $SiO_2/HfO_2/Al_2O_3$ tunnel layer)

  • 오세만;박군호;김관수;정종완;정홍배;조원주
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.129-130
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    • 2009
  • The P/E characteristics of $HfO_2$ CTF memory capacitor with $SiO_2/HfO_2/Al_2O_3$(OHA) engineered tunnel barrier were investigated. After a growth of thermal oxide with a thickness of 2 nm, 1 nm $HfO_2$ and 3 $Al_2O_3$ layers were deposited by atomic layer deposition (ALD) system. The band offset was calculated by analysis of conduction mechanisms through Fowler-Nordheim (FN) plot and Direct Tunneling (DT) plot. Moreover the PIE characteristics of $HfO_2$ CTF memory capacitor with OHA tunnel barrier was presented.

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Electrical characteristics of SiC thin film charge trap memory with barrier engineered tunnel layer

  • Han, Dong-Seok;Lee, Dong-Uk;Lee, Hyo-Jun;Kim, Eun-Kyu;You, Hee-Wook;Cho, Won-Ju
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.255-255
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    • 2010
  • Recently, nonvolatile memories (NVM) of various types have been researched to improve the electrical performance such as program/erase voltages, speed and retention times. Also, the charge trap memory is a strong candidate to realize the ultra dense 20-nm scale NVM. Furthermore, the high charge efficiency and the thermal stability of SiC nanocrystals NVM with single $SiO_2$ tunnel barrier have been reported. [1-2] In this study, the SiC charge trap NVM was fabricated and electrical properties were characterized. The 100-nm thick Poly-Si layer was deposited to confined source/drain region by using low-pressure chemical vapor deposition (LP-CVD). After etching and lithography process for fabricate the gate region, the $Si_3N_4/SiO_2/Si_3N_4$ (NON) and $SiO_2/Si_3N_4/SiO_2$ (ONO) barrier engineered tunnel layer were deposited by using LP-CVD. The equivalent oxide thickness of NON and ONO tunnel layer are 5.2 nm and 5.6 nm, respectively. By using ultra-high vacuum magnetron sputtering with base pressure 3x10-10 Torr, the 2-nm SiC and 20-nm $SiO_2$ were successively deposited on ONO and NON tunnel layers. Finally, after deposited 200-nm thick Al layer, the source, drain and gate areas were defined by using reactive-ion etching and photolithography. The lengths of squire gate are $2\;{\mu}m$, $5\;{\mu}m$ and $10\;{\mu}m$. The electrical properties of devices were measured by using a HP 4156A precision semiconductor parameter analyzer, E4980A LCR capacitor meter and an Agilent 81104A pulse pattern generator system. The electrical characteristics such as the memory effect, program/erase speeds, operation voltages, and retention time of SiC charge trap memory device with barrier engineered tunnel layer will be discussed.

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Chinese buffer material for high-level radiawaste disposal --Basic features of GMZ-l

  • WEN Zhijian
    • 한국방사성폐기물학회:학술대회논문집
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    • 한국방사성폐기물학회 2005년도 Proceedings of The 6th korea-china joint workshop on nuclear waste management
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    • pp.236-244
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    • 2005
  • Radioactive wastes arising from a wide range of human activities are in many different physical and chemical forms, contaminated with varying radioactivity. Their common feature is the potential hazard associated with their radioactivity and the need to manage them in such a way as to protect the human environment. The geological disposal is regarded as the most reasonable and effective way to safely disposal high-level radioactive wastes in the world. The conceptual model of geological disposal in China is based on a multi-barrier system that combines an isolating geological environment with an engineered barrier system. The buffer is one of the main engineered barriers for HLW repository. The buffer material is expected to maintain its low water permeability, self-sealing property, radio nuclides adsorption and retardation property, thermal conductivity, chemical buffering property, overpack supporting property, stress buffering property over a long period of time. Benotite is selected as the main content of buffer material that can satisfy above. GMZ deposit is selected as the candidate supplier for Chinese buffer material of High Level Radioactive waste repository. This paper presents geological features of GMZ deposit and basic property of GMZ Na bentonite. GMZ bentonite deposit is a super large scale deposits with high content of Montmorillonite (about $75\%$) and GMZ-l, which is Na-bentonite produced from GMZ deposit is selected as reference material for Chinese buffer material study.

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Prediction Model for Saturated Hydraulic Conductivity of Bentonite Buffer Materials for an Engineered-Barrier System in a High-Level Radioactive Waste Repository

  • Gi-Jun Lee;Seok Yoon;Bong-Ju Kim
    • 방사성폐기물학회지
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    • 제21권2호
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    • pp.225-234
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    • 2023
  • In the design of HLW repositories, it is important to confirm the performance and safety of buffer materials at high temperatures. Most existing models for predicting hydraulic conductivity of bentonite buffer materials have been derived using the results of tests conducted below 100℃. However, they cannot be applied to temperatures above 100℃. This study suggests a prediction model for the hydraulic conductivity of bentonite buffer materials, valid at temperatures between 100℃ and 125℃, based on different test results and values reported in literature. Among several factors, dry density and temperature were the most relevant to hydraulic conductivity and were used as important independent variables for the prediction model. The effect of temperature, which positively correlates with hydraulic conductivity, was greater than that of dry density, which negatively correlates with hydraulic conductivity. Finally, to enhance the prediction accuracy, a new parameter reflecting the effect of dry density and temperature was proposed and included in the final prediction model. Compared to the existing model, the predicted result of the final suggested model was closer to the measured values.

Simulation of the Migration of 3H and 14C Radionuclides on the 2nd Phase Facility at the Wolsong LILW Disposal Center

  • Ha, Jaechul;Son, Yuhwa;Cho, Chunhyung
    • 방사성폐기물학회지
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    • 제18권4호
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    • pp.439-455
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    • 2020
  • Numerical model was developed that simulates radionuclide (3H and 14C) transport modeling at the 2nd phase facility at the Wolsong LILW Disposal Center. Four scenarios were simulated with different assumptions about the integrity of the components of the barrier system. For the design case, the multi-barrier system was shown to be effective in diverting infiltration water around the vaults containing radioactive waste. Nevertheless, the volatile radionuclide 14C migrates outside the containment system and through the unsaturated zone, driven by gas diffusion. 3H is largely contained within the vaults where it decays, with small amounts being flushed out in the liquid state. Various scenarios were examined in which the integrity of the cover barrier system or that of the concrete were compromised. In the absence of any engineered barriers, 3H is washed out to the water table within the first 20 years. The release of 14C by gas diffusion is suppressed if percolation fluxes through the facility are high after a cover failure. However, the high fluxes lead to advective transport of 14C dissolved in the liquid state. The concrete container is an effective barrier, with approximately the same effectiveness as the cover.

고준위폐기물처분시스템 공학적 방벽에서의 지하수 포화공정 해석 (An Analysis of the Water Saturation Processes in the Engineered Barrier of a High Level Radioactive Waste Disposal System)

  • 박정화;이재완;권상기
    • 방사성폐기물학회지
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    • 제9권1호
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    • pp.23-32
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    • 2011
  • 한국형 기준 처분시스템의 공학적 방벽에서의 열-수리-역학 복합 현상을 실증하기 위한 공학적 규모 실증실험 장치인 KENTEX에서 얻은 열, 수리, 역학적 실험 데이터를 이용하여 벤토나이트의 포화공정을 해석하였다. ABAQUS를 사용한 모델계산의 함수율과 실험 결과의 비교에서 불포화 영역에서는 온도상승으로 인해 초기 수분이 감소하는 수분 재분포 공정을 모델에 포함시키지 않아 함수율의 차가 컸다. 포화 영역에서는 실험에서 초기 수분보다 낮은 함수율에서부터 지하수로 포화가 진행되지만 모델과 실험에서 얻은 함수율 값의 차이가 점점 감소해 완전포화에 도달할 때에는 두 함수율 값이 거의 비슷한 결과를 보여주였다. 포화도 약 95%에 이르는 시간은 실험결과와 계산 결과가 서로 비슷한 약 500일 정도로 예측할 수 있었다. 그리고 불포화 영역의 수분 재분포가 벤토나이트의 완전포화에 도달하는 시간에는 큰 영향을 미치지 않는 것으로 분석되었다. 따라서 본 해석기법을 사용하면 지하처분연구시설의 완충재인 벤토나이트의 포화시간을 예측할 수 있을 것으로 판단된다.