• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.3
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• pp.477-484
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• 2000

Microcontamination caused by particle deposition on the head disk interface threatens the reliability of hard disk drive. Design of slider rail to control contamination becomes an important issue in magnetic recording. In this paper, how particles adhere to the slider and the disk is examined. To investigate accumulation mechanism of the particles, trajectory of the particles in a slider/disk interface is simulated with considering various forces including drag force, gravitational force, Saffman lift force, and electrostatic force. It is found that the charged particles can easily adhere to the slider or disk surface, if an electric field exists between the slider and the disk. It is supposed that the vertical motion of the particles should be related with not only Saffman force but also electrostatic force.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.1 s.244
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• pp.82-86
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• 2006

Carbon nanotubes have attracted much attention as future mechanical and electronic materials. However, manipulating techniques are not well developed yet. Here we propose to use electrostatic drop-on-demand devices to eject micro-droplets containing micelle-suspended single-walled carbon nanotubes. A simple electrostatic force analysis and photographic studies of droplet ejection process are presented. The analytical analysis shows that semiconducting species have higher electrostatic force density. However, enrichment of specific electronic types is not clear at large size droplets produced in this study. A micro-scale jetting device is being produced to prove the suggested behavior.

• Applied Microscopy
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• v.44 no.3
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• pp.100-104
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• 2014

As decreasing device size, probing of nanoscale surface properties becomes more significant. In particular, nanoscale probing of surface potential has paid much attention for understanding various surface phenomena. In this article, we review different atomic force microscopy techniques, including electrostatic force microscopy and Kelvin probe force microscopy, for measuring surface potential at the nanoscale. The review could provide fundamental information on the probing method of surface potential using atomic force microscopy.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10a
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• pp.311-314
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• 1996

In contactless disk handling systems based on electrostatic suspension in which the stator is to be transferred, the limited stiffness in lateral direction severely restricts the achievable translational acceleration. In existing stator electrode pattern designs, the magnitude of the lateral force is determined by the magnitude of the control voltages which are applied to the individual electrodes to levitate the disk stably. As a result, the lateral force cannot be set arbitrarily. A new stator electrode pattern is presented for the electrostatic levitation of disk-shaped objects, in particular silicon wafers and aluminum hard disks, which allows the lateral forces to be controlled independently from the levitation voltages. Therefore, greater lateral forces can be obtained, compared with the existing stator designs. Experimental results will be presented for a 4-inch silicon wafer that clearly reveal the increased lateral stiffness by using the proposed stator electrode compared to the conventional electrode pattern.

• Journal of Sensor Science and Technology
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• v.8 no.6
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• pp.481-486
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• 1999

Alumina electrostatic chucks for silicon wafer process with wide range of electrical resistivity were fabricated by controlling the amount of $TiO_2$ addition(0, 1.3, 2.0, 2.8 wt%). The dependence of electrostatic force on applied voltage, temperature and humidity was investigated. In addition, response characteristics on applied voltage and relationship between electrical resistivity and electrostatic force characteristics such as Coulomb force and Johnsen-Rahbeck force were discussed.

• Proceedings of the KSME Conference
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• 2001.06a
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• pp.854-859
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• 2001

An eigenvalue analysis of a tunable micro-mechanical actuator is presented. The actuator is modeled as a continuum structure. The eigenvalue modified by the tuning voltage is computed through the linearization of the relation between the electrostatic force and the displacement at the equilibrium. A staggered algorithm is employed to perform the coupled analysis of the electrostatic and elastic fields. The stiffness matrix of the actuator is modified at this equilibrium state. The displacement field is perturbed using an eigenmode profile of the actuator. The configuration change of the actuator due to perturbation modifies the electrostatic field and thus the electrostatic force. The equivalent stiffness matrix corresponding to the perturbation and the change in the electrostatic force is then added to stiffness matrix in order to explain natural frequency shifting. The numerical examples are presented and compared with the experiments in the literatures.

• Journal of the Korean Vacuum Society
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• v.9 no.2
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• pp.172-178
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• 2000

We developed the model equations to investigate the particle movement and growth theoretically in a-Si plasma CVD reactor, where those particles act as the source of contamination. We included the effects of fluid convection, particle diffusion and external forces (ion drag force, electrostatic force and gravitational force) onto the particles to analyze the movements of particles in plasma reactor. Taking into account the particle charge distribution, the particle growth by coagulation between the charged particles was investigated. Most of those particles are located in the region near the sheath boundaries by the balance between the ion drag and electrostatic forces. The particle concentrations in the sheath region and in the bulk plasma region are almost zero. The sizes of the predator particles increase with time by the coagulation with protoparticles and, as a result, the surface area and the average charge of predator particles also increase with time.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.2
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• pp.60-69
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• 2005

In electrostatic suspension system of thin plates like a silicon wafer or an aluminum disk for hard disk applications, the lateral restoring force exerted on a suspended object plays an important role since the lateral motion of the suspended object, owing to the inherently stable restoring forces, can be passively stabilized without any active control of it. This paper reports about the measurement apparatus of the lateral restoring force originating from a relative translation of the suspended object with respect to the electrodes-for-suspension. An approximate calculation of the lateral force in disk-shaped objects, the structure of the measurement apparatus, a measurement method, stabilization condition and the guideline in designing the measurement apparatus are described. Experimental results obtained by using a 3.5-inch aluminum disk as a suspended object are presented as well in order to assess the magnitude of lateral force and stiffness, and also verify the usefulness of the measurement apparatus.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.8
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• pp.1259-1265
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• 2003

We present a new post-fabrication frequency tuning method for laterally driven electrostatic microresonators using a DC-biased electrostatic comb array of linearly varied finger-length. The electrostatic tuning force and the equivalent stiffness, adjusted by the DC-biased tuning-comb array, have been formulated as functions of geometry and DC tuning voltage. A set of frequency-turnable microresonators has been designed and fabricated by 4-mask surface-micromachining process. The resonant frequency of the microfabricated microresonator has been measured for a varying tuning voltage at the reduced pressure of 1 torr. The maximum 3.3% reduction of the resonant frequency is achieved at the tuning voltage increase of 20V.

• Journal of Institute of Convergence Technology
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• v.1 no.2
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• pp.16-24
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• 2011

The angular electrostatic microactuator using skewed electrode array (SEA) scheme was proposed. The moving and fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, electrostatic FE analysis were carried out and the empirical force model was established for SEA. Simulation was performed to make the comparison between conventional actuators and SEA. The proposed SEA generates actuating torque 2 times greater than a comb-drive and stable actuator displacement 40% greater than a parallel plate type actuator. The angular electrostatic microactuator using skewed SEA scheme was designed and fabricated using SoG process.