• The Journal of the Convergence on Culture Technology
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• v.7 no.1
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• pp.662-667
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• 2021

Vibrotactile feedback is a major function of the latest touch displays, which greatly improves the user's operability and immersion when interacting with the interface on the screen. In this study, we propose a vibrotactile actuator suitable for mounting on the back side of a mid- to large-sized display because it can generate a strong vibration output by applying an electrostatic force-based mechanism and can be manufactured in a thin flat panel type. The proposed actuator was developed in a structure capable of amplifying the vibration force by alternating up and down with electrostatic force by the upper and lower electrodes that are spaced apart from the electrically grounded mass suspended from a radial leaf spring. As a result of the performance evaluation, the developed bar-type module with two built-in actuators showed excellent vibration output of up to 3.3 g at 170 Hz, confirming the possibility of providing haptic feedback in medium and large touch displays.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.315-319
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• 2004

Static and dynamic responses of micro cantilever beam structures undertaking electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as resonant frequencies are estimated for several sets of beam properties and applied voltages. It is shown that the applied voltage influences the deflection and the modal characteristics significantly. Such information can be usefully employed for the design of MEMS structures.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.11
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• pp.581-588
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• 2001

This paper presents theoretical and experimental study on the quality-factor of the laterally oscillated electrostatic microactuator, driven by a lateral repulsive-force generated by the asymmetry of planar electric field. The quality-factor of the repulsive-force microactuator using a creeping flow model of the ambient air is evaluated. By filling the simulation results of damping force, we evaluate the dimensionless damping force, $\alpha$, thereby obtaining an analytical damping force, F, in the form of $F=\mu\; \alphaUL,\; where\; \mu,$ U and L denote the air viscosity, the velocity and the characteristic length of the movable electrodes. The measured quality-factor increases from 12 to 13 for the DC bias voltage increased from 60V to 140v. The theoretical quality-factor estimated from the creeping flow model increases from 14.9 to 18.7. Characteristics of quality-factor of the repulsive-force microactuator have been discussed and compared with those of the conventional attractive-force microactuator.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.6
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• pp.567-572
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• 2013

In many electro-devices, the vacuum process is used as the manufacturing process. However, the vacuum process has a problem, it is difficult to apply to a continuous process such as a R2R(roll to roll) printing process. In this paper, we propose an ESD (electro static deposition) printing process has been used to apply an organic solar cell of thin film forming. ESD is a method of liquid atomization by electrical forces, an electrostatic atomizer sprays micro-drops from the solution injected into the capillary with electrostatic force generated by electric potential of about several tens kV. The organic solar cell based on a P3HT/PCBM active layer and a PEDOT:PSS electron blocking layer prepared from ESD method shows solar-to-electrical conversion efficiency of 1.42% at AM 1.5G 1sun light illumination, while 1.86% efficiency is observed when the ESD deposition of P3HT/PCBM is performed on a spin-coated PEDOT:PSS layer.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10a
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• pp.267-270
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• 1996

This paper reports about the successful suspension of a glass plate by electrostatic forces. In order to implement a stable suspension, the electrostatic forces exerted on the glass plate are actively controlled on the basis of the gap lengths between the glass plate and the stator electrodes. In this paper, the dynamic model of the suspension system and the influence of the resistivity of glass on the system stability are described, followed by stator electrode design, the experimental apparatus and a stabilizing controller. Experimental results show that the glass plate can be suspended at a gap length of about 0.3 mm. The influence of air humidity on the suspension initiation time, and the lateral dynamic characteristic are also described.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.373-378
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• 2004

Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probebased Storage Device). However, most of them have low area efficiency, which is undesirable as data storage devices, since all of the components (springs, comb electrodes, anchors, platform, etc.) are placed in-plane. In this paper, we present a novel structure of electrostatic 2-axis MEMS stage that is characterized by having large area platform. For large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. In this article, the structures and operational principle of the MEMS stages are described, followed by design procedure, structural and modal analysis using FEM(Finite Element Method). The area efficiency of the MEMS stage was designed to be about 55％, that is very large compared with conventional ones having a few percentage.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.1063-1066
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• 1995

This paper presents a precition control of an electrostatic microactuator. For the generation of sufficient electrostatic force, a donse comb-type electrostatic microactuator is designed and manufactureed via MEMS (micro-electro-mechanical systems) process. The nonlinear plant and the linear plant of the microactuator are established through the comparison of experimental results and simulation results. A feedforward controller is designed via MATLAB simulation using the inverse function of the nonlinear plant. the experiment for the precise position tracking control is undertaken to show the control efficiency of the proposed controller.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.3
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• pp.82-90
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• 2006

Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probe-based Storage Device). However, all of the components(platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficienceis, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having large area platform. for obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design procedure, structural and modal analyses using FEM(Finite Element Method). The areal efficiency of the MEMS stage was designed to be about 25%, which is very large compared with the conventional ones having a few percentage.

• Journal of Power System Engineering
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• v.20 no.2
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• pp.43-50
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• 2016

This research proposal is based on a novel non-contact technique of micro-sized bead injection process for fabrication of electronic paper display. This non-contact injection process is based on the principle of electrostatic force and uses micro-sized metal-coated beads dispersed in a solution. The dispersion retention times of three different solutions with viscosities of 10 cps, 100 cps, and 1000 cps were measured by optical equipment showing the retention times of 5 mins, 10 mins, and 30 mins respectively. The dispersion retention rate dropped as the time passed. The dispersion retention characteristic of 1000 cps solution was more stable as compared to those of 10 cps and 100 cps meaning that higher viscosity has better retention properties. The experimental results of bead injection at different viscosity levels of the solution were also measured and a stable injection result was achieved by using 1000 cps solution. This results show that stable injection is dependent on solution viscosity and dispersion.

• Particle and aerosol research
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• v.19 no.4
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• pp.101-110
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• 2023

In order to reduce particulate matters (PM) from marine diesel engines, we developed novel electrostatic diesel particulate matter filtration system. Electrostatic diesel particulate filtration (DPF) system consists of electrostatic charger and filtration part. The electrostatic charger and filtration part are composed of a metal discharge electrode and a metal fiber filter (porosity: 68.1-86.1%), respectively. In the electrostatic charger part, diesel soot particles are reduced by electrostatic force. The filtration part after electrostatic charger part reduces diesel soot particles through inertial and diffusion forces. The filtration efficiency of electrostatic DPF system was examined through the experiments using engine dynamometer system (300 kW) and ship (200 kW). The PM reduction efficiencies due to inertial and electrostatic forces showed about 70-75% and 80-90%, respectively, according to the RPM of the engine. The differential pressure of the electrostatic DPF system applied to the ship was about 1-9 mbar, which was less than the allowable differential pressure for ship engines in South Korea (100 mbar). The results show that the electrostatic DPF system is suitable for application to the PM reduction emitted from ships.