• Proceedings of the IEEK Conference
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• 1999.11a
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• pp.905-908
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• 1999

In this paper, we present a polysilicon actuator on silicon wafer using surface micromachining technology which employs an electrostatic stepwise driven Scratch Drive Actuator to generate a force that can move an external object. For optical applications, we propose wavelength selector using distributed feedback structures and this micro actuator.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.1089-1092
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• 1995

A planar vibratory gyroscope using electrostatic actuation and electromagnetic detection is proposed. The gyroscope has large sensitivity and can be fabricated by using surface micrimachining, bulk micromachining and conventional machining technology. In this paper, the gyroscope and the electromagnetic detecting system equations are derived to determine the output characteristics for the planar vibratory gyroscope using electrostatic acturation and electromagnetic detection. The maximum output is obtained when the driving frequencyequals to the detecting frequency. The resonant frequencies of the resonator are determined by the beam stiffness, i.e. the material constants and spring dimensions. The dimensions of the beams are determined using the analytic vibration modelling. The expected resonant frequencies are 200Hz both and the sensitivity is 62mV/deg/sec with 4000 electronic circuit amplifying coefficient for an AC drive voltage of 3V bias voltage of 15V and DC field current of 50 mA.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.11
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• pp.1796-1801
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• 2001

For micro-machines, very few design methodologies based on optimization hale been developed so far. To overcome the difficulties of design optimization of micro-machines, the search method for multi-dimensional design window (DW)s is proposed. The proposed method is defined as areas of satisfactory design solutions in a design parameter space, using both continuous evolutionary algorithms (CEA) and the modified K-means clustering algorithm . To demonstrate practical performance of the proposed method, it was applied to an optimal shape design of micro electrostatic actuator of optical memory. The shape design problem has 5 design parameters and 5 objective functions, and finally shows 4 specific design shapes and design characters based on the proposed DWs.

• Proceedings of the KIEE Conference
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• 1993.11a
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• pp.207-209
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• 1993

In this paper, an electrostatic silicon micro actuator has been designed and fabricated using the micro machining technology. The actuator consists of two counter electrodes. One is an Al film deposited on a pyrex glass, and the other is a circular corrugated diaphragm with boron doped. The diaphragm is fabricated by boron etch stop technique using an anisotropic etchant, EPW.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.911-916
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• 2003

Microactuator is frequently used in some optical or electrical applications such as light modulators and spatial scanner devices. When microactuator is implemented, it should be operated at accurate positions proportional to input voltage. Therefore in order to obtain rapid responses and reduced errors, a position control technique is used. In the paper, design procedure for the mems actuator and a typical PID controller is adapted to improve performance of microactuator as well. Also electrostatic force for the torsional microactuator is calculated via well-known Hornbeck's method.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.05a
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• pp.298-302
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• 2002

Equivalent volume estimation of the coupler and two coupled microphones has a key role in standard microphone pressure calibration. The equivalent volume of the microphone is determined by the dynamic characteristics of the diaphragm system and front cavity. Therefore the modal parameters of diaphragm system - natural frequency and damping fatter - should be measured explicitly for the estimation of the equivalent volume. The diaphragm system is composed of the vibrating diaphragm, back slit behind diaphragm, pressure equalization vent, and front cavity which are acoustically coupled. In the measurement, the electrostatic actuator was used to excite the system with the swept sine, and the frequency response was obtained. The close actuator in front of the diaphragm must influence the radiation impedance of the system, and then the modal parameters. From the measured frequency response, the natural frequency and the damping factor could be estimated with the Complex exponential method based on the Prony model and the zero crossing real and imaginary plot.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2236-2238
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• 2000

The paper represents the fabrication of an electrostatic micro actuator for optical devices. The micro actuator consists of a plate suspended four p+ silicon cantilevers and an electrode on a glass substrate. The cantilever curls down because of the residual stress gradient in p+ silicon. When input voltage is applied between the p+ cantilevers and the electrode. the cantilevers are pulled toward the electrode by the electrostatic force. The displacement of the plate is measured with a laser displacement meter for various input voltage and frequencies.

• The Journal of Korea Robotics Society
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• v.16 no.1
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• pp.17-22
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• 2021

Soft robot research has been actively conducted due to the advantages of soft materials that have less motion restrictions and higher energy efficiency compared to rigid robots. In particular, soft robots are being applied in more and more diverse fields, and the need for soft robots is increasing, especially when dealing with soft or deformable objects that rigid robots cannot perform. Various soft robots are being developed, and studies on artificial muscles with versatility, seamless integration with sensing, and self-healing capabilities are being proposed. In this study, we propose one of the most simple rectangular shaped HASEL (Hydraulically amplified self-healing electrostatic) actuators and compare the performance according to shape deformation such as the size or ratio of actuators and electrodes. Developing these actuators can be used in many ways for artificial muscles in soft robotics.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1198-1201
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• 2005

A new foxtail actuator driven by V-shape beam deflection using electrostatic force has been designed, fabricated and characterized for nano-resolution manipulators. The proposed foxtail mechanism was implemented using a pair of electrostatic actuators and a pair of holding actuators, which was analyzed based on the electromechanically coupled motion of voltage - displacement relation. The proposed actuator was fabricated onto Silicon-on-Insulator (SOI) wafer and its stepping characteristics were measured by micro optical interferometer consisting of integrated micromirror and optical fiber. The fabricated foxtail microactuator was successfully operated from 1nm to 76nm, and the magnitude of step displacement was controllable up from 26nm/cycles to 53nm/cycle by changing the voltage.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.591-592
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• 2008