• 통합자연과학논문집
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• 제8권1호
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• pp.67-74
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• 2015

Sensing characteristics for porous smart particle based on DBR smart particles were reported. Optically encoded porous silicon smart particles were successfully fabricated from the free-standing porous silicon thin films using ultrasono-method. DBR PSi was prepared by an electrochemical etch of heavily doped $p^{++}$-type silicon wafer. DBR PSi was prepared by using a periodic pseudo-square wave current. The surface-modified DBR PSi was prepared by either thermal oxidation or thermal hydrosilylation. Free-standing DBR PSi films were generated by lift-off from the silicon wafer substrate using an electropolishing current. Free-standing DBR PSi films were ultrasonicated to create DBR-structured porous smart particles. Three different surface-modified DBR smart particles have been prepared and used for sensing volatile organic vapors. For different types of surface-modified DBR smart particles, the shift of reflectivity mainly depends on the vapor pressure of analyte even though the surfaces of DBR smart particles are different. However huge difference in the shift of reflectivity depending on the different types of surface-modified DBR smart particles was obtained when the vapor pressures are quite similar which demonstrate a possible sensing application to specify the volatile organic vapors.

• 한국생산제조학회지
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• 제19권2호
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• pp.267-274
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• 2010

Recently, the magnetorheological (MR) polishing process has been examined as a new ultra-precision polishing technology for mirror surface generation in many applications, such as aspheric lenses, biochips, micro parts, etc. This method uses MR fluids which contains micro abrasives as a polishing media, and can. It is possible to obtain nano level surface roughness under suitable process conditions, however, required polishing time is highly dependent on the applied pre-polishing methods due to its very small material removal rate. Thus, in this study, a combined polishing method is presented to reduce total polishing time for SUS304. First, the electropolishing (EP) method was applied to obtain fine surface roughness, and the MR polishing was followed. Surface roughness variations were investigated according to the process conditions. As the results of this study, it was possible to reduce total polishing time for SUS304 using the proposed combined polishing method.

• 한국정밀공학회지
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• 제13권6호
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• pp.59-65
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• 1996

There are many difficulties in automatic polishing for die & mold surfaces. Even though the process has been studied in the past 15 years, it has not been achieved yet, but by the process of actual hand work of well-skilled workers. A new magentic assisted polishing process, which is one of the potential methods for automation of surface finishing has been studied in the past 10 years by colleagues. The process has many merits, but on the other hand also has demerits, one being low efficiency of grindability by comparision with wheel polish. Therefore, some attempts were tried to improve the grindability by adopting electropolishing, ultra-high speed milling, 5-axis controlled machine etc... most recently by colleagues. This paper also aims to improve the efficiency of polishing by introducing the easily-polished shape surface cutting method equalizing the tool feed per revolution to the pick feed. This cutting method was experimentally confirmed to have sufficient grindability to polish milled surface (with $10{{\mu}m}$Rmax surface roughness) into mirror surface (with $0.4{{\mu}m}$Rmax surface roughness).

• 대한기계학회논문집
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• 제10권5호
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• pp.625-634
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• 1986

본 연구에서는 알루미늄 합금인 알루미늄 2014와 6061의 이재를 V형 맞대기 이음을 한 후 정적인장하중을 가하여 모아레법에 광탄성 피복법을 조합한 방법에 의 해 변형율을 실시간(real time)에서 측정하고 유한요소법으로 해석한 결과와 비교검 토하였다.

• 한국표면공학회지
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• 제50권4호
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• pp.231-236
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• 2017

The present work addresses how to measure the amount of dissolved aluminum in phosphoric acid, based on volumetric and gravimetric measurements of the precipitates formed by reaction between the $H_3PO_4$ solution containing dissolved aluminum ions and 10 % KF solution. The volume of the precipitates increased with dilution of the dissolved aluminum-containing $H_3PO_4$ solution up to 1/4 dilution above which it decreased with further dilution. The lowered amounts of the precipitates at low dilution less than 1/4 and high dilution more than 1/4 are attributed to high acidity of the solution and decreased amount of dissolved aluminum in the solution, respectively. Volumetric measurement of the amount of precipitates was found not to be very reliable with the experiments, while weight measurement of the precipitates after drying for 80 min at $60^{\circ}C$ appeared to be very reproducible. In the present work, it is suggested that the amount of Al dissolved in 85 % $H_3PO_4$ solution can be calculated by multiplying 50 to the weight of precipitate obtained by reacting 8 ml of 1/4 diluted $H_3PO_4$ solution containing dissolved aluminum ions with 6 ml of 10 % KF solution.

• 한국표면공학회지
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• 제41권1호
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• pp.38-42
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• 2008

316L stainless steel welding tube was electrolytically polished and the inner surface characteristics of the tube were tested. Electro-polishing variables such as current, voltage, concentration of electrolyte and electropolishing time were changed to seek for optimum condition. These makes a optimum conditions for the electro-polishing as 4000 A, 9 V, 1.7 specific gravity of electrolyte, and 30 minute of electro-polishing time. It makes the surface roughness as Ra < $0.25{\mu}m$. XPS test resulted as the ratio of CrO/FeO equals or more to 3/1. AES test resulted as the thickness of CrO film of $38{\AA}$. DTA test resulted as the tube did not react with $N_2,\;H_2\;and\;O_2$ gas below 1073K. As summarize above results, the electro- polished 316L stainless steel welding tube satisfied the conditions to apply as a pipeline for semi- conductor production facility and clean room.

• 마이크로전자및패키징학회지
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• 제8권3호
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• pp.19-24
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• 2001

반도체 패키지에 사용되는 주요 재료인 리드프레임은 반도체 제품의 소형화, 박형화, 고집적 화에 대응하기 위해서 리드 및 피치의 미세화가 요구되며 제조 과정에서 발생되는 버(burr)의 제거와 잔류응력 제거에 대한 노력이 필요하다. 본 논문은 리드프레임의 제작 시 스탬핑 공정 중에 발생하는 버와 잔류응력을 제거하기 위해 전해연마를 적용하였다. 전해연마를 적용한 리드프레임은 표면의 버 등이 제거되었으며, 잔류음력은 실험에 사용된 전해액의 종류에 따라 차이가 있으나, 과염소산계의 경우에는 잔류응력을 23%제거하여 리드프레임의 신뢰성을 높일 수 있었다.

• 한국재료학회지
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• 제14권2호
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• pp.133-140
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• 2004

We carried out anodic aluminum oxide (AAO) on a Si and a sapphire substrate. For anodic oxidation of Al two types of specimens prepared were Al(0.5 $\mu\textrm{m}$)!Si and Al(0.5 $\mu\textrm{m}$)/Ti(0.1 $\mu\textrm{m}$)$SiO_2$(0.1 $\mu\textrm{m}$)/GaN(2 $\mu\textrm{m}$)/Sapphire. Surface morphology of Al film was analyzed depending on the deposition methods such as sputtering, thermal evaporation, and electron beam evaporation. Without conventional electron lithography, we obtained ordered nano-pattern of porous alumina by in- situ process. Electropolishing of Al layer was carried out to improve the surface morphology and evaluated. Two step anodizing was adopted for ordered regular array of AAO formation. The applied electric voltage was 40 V and oxalic acid was used as an electrolyte. The reference electrode was graphite. Through the optimization of process parameters such as electrolyte concentration, temperature, and process time, a regular array of AAO was formed on Si and sapphire substrate. In case of Si substrate the diameter of pore and distance between pores was 50 and 100 nm, respectively. In case of sapphire substrate, the diameter of pore and distance between pores was 40 and 80 nm, respectively

• 한국정밀공학회지
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• 제26권9호
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• pp.121-126
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• 2009

Stainless steel 316L (STS 316L) is widely used as a material of biopsy needle. However it has a side effect that tissue can be damaged by electrochemical operation between tissue and STS 316L. Many studies have been made on the ceramic coating of biopsy needle to reduce the side effect. In this study, STS 316L was coated with three bioceramics, $Al_2O_3$, $SiO_2$ and $ZrO_2$ using a RF magnetron sputtering method. The effects of ceramic coating on the electrical conductivity and coating strength of ceramic-coated STS 316L were investigated. The results showed that the electrical conductivity of ceramic-coated STS 316L was much lower than that of uncoated STS 316L. The coating strength of $ZrO_2$-coated STS 316L was 30% and 70% higher, respectively than those of $Al_2O_3$-coated STS 316L and $SiO_2_3$-coated STS 316L.

• 한국재료학회지
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• 제32권4호
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• pp.230-236
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• 2022

The formation behavior of a passive state film on the surface of STS304 in electrolytic solution was analyzed to determine its metallic ion composition. The properties of passive state films vary depending on the Fe and Cr ions in the electrolytic solution. It was observed that the passive state film surface became flat and glossy as the concentration of Fe and Cr ions in the electrolytic solution increased. The corrosion resistance property of the passive state film was proportional to the amount of Fe and Cr in the electrolytic solution. An initial passive state film with high Fe concentration was formed on the surface of STS304 during early electrolytic polishing. Osmotic pressure of Fe ions occurs between the passive state film and electrolytic solution due to the Fe ion concentration gradient. The Fe in the passive state film is dissolved into the electrolyte, and Cr fills up the Fe ion vacancies. As a result, a good corrosion-resistant floating film was formed. The more Fe ions in the electrolytic solution, the faster the film is formed, and as a result, a flat passive state film containing a large amount of Cr can be formed.