• 제목/요약/키워드: Electron energy distribution function

검색결과 109건 처리시간 0.033초

The Importance of Halogen Bonding: A Tutorial

  • Cho, Seung Joo
    • 통합자연과학논문집
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    • 제5권3호
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    • pp.195-197
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    • 2012
  • Halogen atoms in a molecule are traditionally considered as electron donors, since they have unshared electrons. Normally when they are bonded, there are three lone pair electrons. These lone pairs can function as Lewis bases. However, when they are bound to electron withdrawing groups, they can act as Lewis acids. Since the situation is similar hydrogen bonding (HB), this type of interaction is named as halogen bonding (XB). This mainly comes from the uneven distribution of electron density around the halogen atoms. Since the electron density around halogen atom opposite to ${\sigma}$-bond is depleted, its electropositive region is called ${\sigma}$-hole. This ${\sigma}$-hole can attract halogen bond acceptors, requiring more stringent directionality compared to HB. Since this interaction mainly comes from electrostatic origin, the geometry tends to be linear. Since the XB energy is comparable to corresponding HB. Still in its infancy, XB shows a broad range of applicability, with potentially more useful properties, compared to corresponding HB.

냉음극형 대면적 펄스 전자빔 가속기의 빔인출 특성 (Characteristics of Electron Beam Extraction in Cold Cathode Type Large Cross-Sectional Pulsed Electron Beam Generator)

  • 우성훈;이광식;이동인;이홍식
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 하계학술대회 논문집 C
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    • pp.1609-1611
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    • 2001
  • A large cross-section pulsed electron beam generator of cold cathode type has been developed for industrial applications, for example, waste water cleaning, flue gas cleaning, and pasteurization etc. The operational principle is based on the emission of secondary electrons from cold cathode when ions in the plasma hit the cathode, which are accelerated toward exit window by the gradient of an electric potential. The conventional electron beam generators need an electron scanning beam because the small cross section thermal electron emitter is used. The electron beam of large cross-section pulsed electron beam generator do not need to be scanned over target material because the beam cross section is large by 300$cm^2$. We have fabricated the large cross-sectional pulsed electron beam generator with the peak energy of 200keV and beam diameter of 200mm and obtained the large area electron beam in the air. The electron beam current has been investigated as a function of accelerating voltage, glow discharge current, helium pressure, distance from the exit window and radial distribution in front of the exit window.

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A simple analysis on the abnormal behavior of the argon metastable density in an inductively coupled Ar plasma

  • 박민;유신재;김정형;성대진;신용현;장홍영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.438-438
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    • 2010
  • The abnormal behavior of the argon metastable density during the E-H mode transition in argon ICP discharge was investigated. Lots of investigations including global models expected that during and after the mode transition of ICP discharge, the density of metastable increases with applied rf power (i.e. electron density). However, recent direct measurement of metastable density revealed that the metastable density of argon decreases with the applied power during and after the mode transition. This result may not be explained by the previous global model which is based on the assumption of the Maxwellian electron energy distribution function (EEDF). In this paper, to explain this abnormal behavior with simple manners, a simple global model taking account of the effect of the non-Maxwellian EEDFs incorporating into a set of coupled rate equations is proposed. The result showed that the calculated metastable density taking account of non-Maxwellian EEDF and its evolution during the transition has an abnormal behavior with electron density and is in good agreement with the previous measurement results, indicating the close coupling of electron kinetics and the behavior of metastable density. The proposed simple model is expected to provide qualitative kinetic insight to understand the behavior of the metastable density in various plasma discharges which typically exhibit non-Maxwellian distribution.

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시뮬레이션에 의한 $SF_6$-Ar혼합기체의 확산계수 (A Simulation of Diffusion coefficients for electrons in $SF_6$-Ar Gas Mixtures)

  • 성낙진;김상남
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 학술대회 논문집 전문대학교육위원
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    • pp.163-166
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    • 2006
  • Energy distribution function for electrons in $SF_6$-Ar mixtures gas used by MCS-BEq algorithm has been analysed over the E/N range 30${\sim}$300(Td) by a two term Boltzmann equation and by a Monte Carlo Simulation using a set of electron cross sections determined by other authors, experimentally the electron swarm parameters for 0.2(%) and 0.5(%) $SF_6$-Ar mixtures were measured by time-of-flight(TOF) method, The results show that the deduced longitudinal diffusion coefficients and transverse diffusion coefficients agree reasonably well with theoretical for a rang of E/N values The results obtained from Boltzmann equation method and Monte Carlo simulation have been compared with present and previously obtained data and respective set of electron collision cross sections of the molecules.

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SiH4-Ar혼합기체의 전자분포함수 해석 (The analysis on the Energy Distribution Function for Electron in SiH4-Ar Gas Mixtures)

  • 김상남
    • 전기학회논문지P
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    • 제53권2호
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    • pp.65-69
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    • 2004
  • This paper calculates and gives the analysis of electron swarm transport coefficients as described electric conductive characteristics of pure Ar, pure $SiH_4$, Ar-$SiH_4$ mixture gases($SiH_4$-0.5%, 2.5%, 5%) over the range of E/N = 0.01~300[Td], P = 0.1, 1, 5.0 [Torr] by Monte Carlo the backward prolongation method of the Boltzmann equation using computer simulation without using expensive equipment. The results have been obtained by using the electron collision cross sections by TOF, PT, SST sampling, compared with the experimental data determined by the other author. It also proved the reliability of the electron collision cross sections and shows the practical values of computer simulation. Electron swann parameters in argon were drastically changed by adding a small amount of mono-silane. The electron drift velocity in these mixtures showed unusual behaviour against E/N. It had negative slope in the medium range of E/N, yet the slope was not smooth but contained a small hump. The longitudinal diffusion coefficient also showed a corresponding feature in its dependence on E/N. A two-tenn approximation of the Boltzmann equation analysis and Monte Carlo simulation have been used to study electron transport coefficients.

$SF_6$-Ar 혼합기체에서의 전리와부착계수 (Ionization and Attachment Coefficients in Mixtures of $SF_6$ and Ar)

  • 김상남;하성철
    • 한국전기전자재료학회논문지
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    • 제14권9호
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    • pp.773-778
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    • 2001
  • In this dissertation the results of the combined experimental and theoretical studies designed to understand and predict the spatial growth and transport coefficients for electrons in SF$_{6}$ and SF$_{6}$-Ar mixtures have described. The ionization and attachment coefficients in pure SF$_{6}$ and SF$_{6}$-Ar mixtures have been calculated over the range of 10$_{6}$ molecule and for Ar atom proposed by other authors. The transport coefficients for electrons in (0.2%)SF$_{6}$-Ar and (0.5%)SF$_{6}$-Ar mixtures were measured by time-of-flight method, and the electron energy distribution function and the parameters of the velocity and the diffusion were determined by the variation of the collision cross-sections with energy. The results obtained in this work will provide valuable information on the fundamental haviors of electrons in weakly ionized gases and the role of electron attachment in the choice of better gases and unitary gas dielectrics or electro negative components in dielectric gas mixtures. gas mixtures.

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측정된 원통형 전리함 반응함수의 몬테카를로 시뮬레이션 보정 (The ionization chamber response function from the measured and the corrected by Monte Carlo simulation.)

  • 이병용;김미화;조병철;나상균;김종훈;최은경;장혜숙
    • 한국의학물리학회지:의학물리
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    • 제7권1호
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    • pp.9-17
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    • 1996
  • 방사선 측정기로 사용되는 원통형 전리함의 위치별 반응 함수를 좁은 방사선장에서 측정하였다. 광자선 에너지 4MV, 6MV, 15MV, 전리함 내경 0.5cm~3.05cm 인 전리함들에 대하여 방사선면의 크기를 0.2$\times$20$\textrm{cm}^2$로 하여 물속 10cm 깊이에서 전리함 반응함수를 측정하였다. 좁은 방사선면의 선량분포 profile 을 EGS4(Electron Gamma Shower 4) 몬테카를로 시뮬레이션 코드를 이용하여 계산하였고, 이 결과를 측정된 전리함의 반응 함수 값에서 되겹말림 (deconvolution) 기법으로 제거하여 순수하게 $\delta$함수 모양의 방사선장으로부터 측정된 반응함수로 보정하였다. 전리함 반응함수는 보정전에는 에너지에 따라 다르게 나타났으나 EGS4 계산으로 얻어진 선량분포 프로파일 (profile)을 보정한 결과 전리함 반응 함수는 에너지와 무관한 것으로 나타났다.

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MCS-BEq 알고리즘에 의한 $SF_6-Ar$ 혼합기체의 확산계수 (Diffusion Coefficients in $SF_6-Ar$ Gas used by MCS-BE Algorithm)

  • 김상남
    • 한국조명전기설비학회:학술대회논문집
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    • 한국조명전기설비학회 2006년도 춘계학술대회 논문집
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    • pp.298-301
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    • 2006
  • This paper describes the electron energy distribution function characteristics in $SF_6-Ar$ gas calculated for range of E/N values from $50\sim700[Td]$ by the Monte Carlo simulation(MCS) and Boltzmann equation(BE) method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained by time of flight(TOF) method. In this dissertation the results of the combined experimental and theoretical studies designed to understand and predict the spatial growth and transport coefficients for electrons in $SF_6$ and $SF_6-Ar$ mixtures have described. The ionization and attachment coefficients in pure $SF_6$ and $SF_6-Ar$ mixtures have been calculated over the range of 10$SF_6$ molecule and for Ar atom proposed by other authors. The results obtained in this work will provide valuable information on the fundamental behaviors of electrons in weakly ionized gases and the role of electron attachment in the choice of better gases and unitary gas dielectrics or electro negative components in dielectric gas mixtures.

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Ag Paste bump 구조를 갖는 인쇄회로기판의 Ag migration 발생 안전성 평가 (Investigation of Ag Migration from Ag Paste Bump in Printed Circuit Board)

  • 송철호;김영훈;이상민;목지수;양용석
    • 한국재료학회지
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    • 제20권1호
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    • pp.19-24
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    • 2010
  • The current study examined Ag migration from the Ag paste bump in the SABiT technology-applied PCB. A series of experiments were performed to measure the existence/non-existence of Ag in the insulating prepreg region. The average grain size of Ag paste was 30 nm according to X-ray diffraction (XRD) measurement. Conventional XRD showed limitations in finding a small amount of Ag in the prepreg region. The surface morphology and cross section view in the Cu line-Ag paste bump-Cu line structure were observed using a field emission scanning electron microscope (FE-SEM). The amount of Ag as a function of distance from the edge of Ag paste bump was obtained by FE-SEM with energy dispersive spectroscopy (EDS). We used an electron probe micro analyzer (EPMA) to improve the detecting resolution of Ag content and achieved the Ag distribution function as a function of the distance from the edge of the Ag paste bump. The same method with EPMA was applied for Cu filled via instead of Ag paste bump. We compared the distribution function of Ag and Cu, obtained from EPMA, and concluded that there was no considerable Ag migration effect for the SABiT technology-applied printed circuit board (PCB).

Modeling and Experimental Study of Radio-frequency Glow Discharges and Applications for Plasma Processing

  • Kang, Nam-Jun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.179-179
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    • 2012
  • Low pressure radio-frequency glow discharges are investigated using theoretical modeling and various experimental diagnostic methods. In the calculations, global models and transformer models are developed to understand the chemical kinetics as well as the electrical properties such as the effective collision frequency, the heating mechanism and the power transferred to the plasma electrons. In addition, Boltzmann equation solver is used to compensate the effect of the electron energy distribution function (EEDF) shape in the global model, and the general expression of energy balance for non-Maxwellian electrons is developed. In the experiments, a number of traditional plasma diagnostic methods are used to compare with calculated results such as Langmuir probe, optical emission spectroscopy (OES), optical absorption spectroscopy (OAS) and two-photon absorption laser-induced fluorescence (TALIF). These theoretical and experimental methods are applied to understand several interesting phenomena in low pressure ICP discharges. The chemical and physical properties of low pressure ICP discharges are described and the applications of these methods are discussed.

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