• Journal of Welding and Joining
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• 제20권4호
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• pp.525-534
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• 2002

During laser spot welding of the braun tube electron gun, phenomena such as serious spattering and oxidative reaction, etc. were occurred. The spatter occurred from weld pool affects the braun tube, namely it blocks up a very small hole on the shadow mask and causes short circuit between two roles of the electron gun. We guessed that high power density and oxidative reaction are main sources of these problems. So, we studied to prevent and to reduce spatter occurring in spot welding of the braun tube electron gun using pulsed Nd:YAG laser. The characteristics of laser output power was estimated, and the loss of laser energy by optical parameter and spatter was measured by powermeter. The effects of welding parameters, laser defocused distance and incident angle, were investigated on the shape and penetration depth of the laser welded bead in flare and flange joints. From these results, the laser peak power was a major factor to control penetration depth and to occur spatter. It was found that the losses of laser energy by optic parameter and sticked spatter affect seriously laser weldability of thin sheets. The deepest penetration depth is gotten on focal position, and a "bead transition" occurred with a slight displacement of focal position relative to the workpiece surface and the absorption rate of the laser energy is affected by the shape factor of the workpiece. When we changed the incident angle of laser beam, the penetration depth was decreased a little with increasing of the incident angle, and the bead width was increased. The spattering was prevented by considering laser beam energy and incident angle.ent angle.

• Journal of Korean Vacuum Science & Technology
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• 제3권1호
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• pp.59-65
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• 1999

There has been an interest to develop an efficient, compact microwave device using field-emitter-arrays (FEA)-based cathode. Toe valuate the optimum device-efficiency in a compact size, the propagation properties of the premodulated electron beam for the FEA-based cathode is studied in detail by the computer simulation using a PIC code, MAGIC. For the premodulated electron beam whose phase of the energy leads the phase of the current by $\pi$/2, the amplitude of the downstream current modulation can be kept as high as the initial modulation level. Using the beam parameters with the beam voltage of 6kV and the current of 2.0A, 30% of efficiency is predicted when the quality factor of 800 is chosen. the device length is reduced about twice compared with that of the conventional device. The design of practical planar cathode is carried out to meet the minimum diameter of the electron beam as 0.5 mm.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1288-1293
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• 2007

The present study covers the design and analysis of a thermionic scanning electron microscope (SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. In the design process, the dimension and capacity of the SEM components need to be optimally determined with the aid of finite element analyses. Considering the geometry of the filament, a three-dimensional (3D) finite element analysis is utilized. Through the analysis, the beam emission characteristics and relevant trajectories are predicted from which a systematic design of the electron optical system is enabled. The validity of the proposed 3D analysis is also discussed by comparing the directional beam spot radius. As a result, a prototype of a thermionic SEM is successfully developed with a relatively short time and low investment costs, which proves the adoptability of the proposed 3D analysis.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1997년도 제13회 학술발표회 논문개요집
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• pp.95-95
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• 1997

• Nuclear Engineering and Technology
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• 제37권2호
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• pp.185-190
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• 2005

The Korea Institute of Radiological and Medical Sciences (KIRAMS) electron microbeam system has been built with its prototype components. The system is composed of an electron gun, a beam transport chamber, and a cell image acquisition and positioning stage. Each component has been upgraded through repetitive performance tests for various parametric arrangements. This paper presents the preliminary results of the performance test on the beam control and detection parts of the system.

• 전자공학회논문지D
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• 제35D권9호
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• pp.26-34
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• 1998

본 논문은 주사전자현미경(SEM)의 전자총을 이용하여 MCM 또는 PCB 회로기판의 신호연결선에서 전압차를 유도시켜 개방/단락 등의 결함을 측정 검사하는 방법을 제시한다. 본 실험에서는 주사전자현미경의 구조를 변형시키지 알고 회로기판의 개방/단락 검사를 실시할 수 있는 이중전위전자빔(Dual Potential) 검사방법을 사용한다. 이중전위전자빔(Dual Potential) 측정검사 방법은 이차전자수율 값 δ의 차이를 유기시키는 δ < 1 인 충전 전자빔과 δ > 1 인 읽기 전자빔을 사용하여 한 개의 전자총이 각각 다른 가속전압에 의해 생성된 두 개의 전자빔으로 측정하는 방법으로 특정 회로네트에 대한 개방/단락 등의 측정 검사가 가능하다. 또한 읽기 전자빔을 이용할 경우 검사한 회로 네트를 방전시킬 수 있어 기판 도체에 유기된 전압차를 없앨 수 있는 방전시험도 실시할 수 있어, 많은 수의 회로네트를 지닌 회로 기판에 대해 측정 검사할 때 충전되어 있는 회로네트에 대한 측정오류를 줄일 수 있다. 측정검사를 실시한 결과 glass-epoxy 회로기판 위에 실장된 구리(Cu) 신호연결선은 7KeV의 충전 전자빔으로 충전시키고 10초 이내에 주사전자현미경을 읽기 모드로 바꾸어 2KeV의 읽기 전자빔으로 구리표면에서의 명암 밝기 차이를 읽어 개방/단락 상태를 검사할 수 있었다. 또한 IC 칩의 Au 패드와 BGA의 Au 도금된 Cu 회로패드를 검사한 결과도 7KeV 충전 전자빔과 2KeV 읽기 전자빔으로 IC칩 내부회로에서의 개방 단락 상태를 쉽게 검사할 수 있었다. 이 검사방법은 주사전자현미경에 있는 한 개의 전자총으로 비파괴적으로 회로 기판의 신호 연결선의 개방/단락 상태를 측정 검사할 수 있음을 보여 주었다.

• 한국레이저가공학회지
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• 제2권2호
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• pp.1-7
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• 1999

• 한국진공학회지
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• 제8권4A호
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• pp.456-460
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• 1999

Experimental studies of laser micromachining on Mo diaphragm using piezo Q-switched Nd:YAZ laser have been performed. Application of miniaturized micorcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope (SEM) application have recently extensively examined. The conventional microcolumn fabrication technique would give a limitation on the minimization of aberration, In this paper, we obtained 20~30 $\mu \textrm m$aperture of laser micromachining on Mo diaphragm using piezo Q-swithed Nd:YAG laser. The geometrical figures, such as the diameter and the preciseness of the drilled aperture are dependent upon the total energy of the laser pulse train, laser pulse width, and the diameter of laser spot in addition to the materials-dependent parameters.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.78-78
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• 1999

Experimental studies of laser micromachining on Mo metal using piezo Q-switched Nd:YAG laser have been performed. Miniaturized microcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope application have recently extensively examined. For these purpose, the electro-static electron lens and deflector system called microcolumn has to be assembled. The conventional microcolumn fabrication technique would gave a limitation on the minimization of aberration. The current technique of a 1 $\mu$m misalignment would lead to ~1.3 nm coma. In order to reduce aberration, assembling the microcolumn component followed by laser drilling should be very beneficial. In this report, we will address the preliminary report of laser micromachining on Mo substrate using piezo Q-switched Nd:YAG laser. The geometrical figures, such as the diameter and the depth of the frilled aperture are dependent upon the total energy of the laser pulse train, laser pulsewidth, and the diameter of laser beam in addition to the materials-dependent parameters.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.379-381
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• 2002

Mitsubishi Electric Corporation has marketed a series of multimedia CRTs enabling bright picture windows in a high-resolution date display screen. The key components of the multimedia CRTs named Diamondtran $M^2$ are a high-gm (low drive-voltage) electron gun and an aperture grille mask. A high-gm electron gun has been developed by designing a beam forming region with high-gm configuration combining with a high current-density cathode. The development of next generation high-gm guns are also introduced