• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.5
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• pp.52-57
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• 2008

Most of the electrons emitted from the filament, are captured by the anode. The portion of the electron current that leaves the gun through the hole in the anode is called the beam current. Electron beam probe is called the focused beam on the specimen. Because of the lenes and aperture, the probe current becomes smaller than the beam current. It generate various signals(backscattered electron, secondary electron) in an interaction with the specimen atoms. Backscattered electron provide an useful signal for composition and local specimen surface inclination. Secondary electron is used far the formation of surface imagination. The steady electron beam probe is very important for the imagination formation and the brightness. In this paper, we show the results of developed elements that create electron beam probe and the measured beam probe in various acceleration voltages by Faraday cup. These data are used to analysis and improve the performance of the system in the development.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.2
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• pp.24-29
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• 2006

The use electron-beam(E-beam) manufacturing system provides a means to alleviate optic exposure equipment's problems. We are developing an E-beam manufacturing system with scanning electron microscope(SEM) function. The E-beam manufacturing system consist of high voltage generator, beam blanker, condenser lenses, object lenses, stigmator and stage. The development of E-beam manufacturing system is used on the method of remaking SEM's structure. The functions of SEM are developed. It is important for the test of E-beam performance. In E-beam manufacturing system and SEM, beam focus is important function. In this paper, we propose intelligent remote control function for beam focus in E-beam manufacturing system. The function extends the user's function and gives convenience.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.16 no.8
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• pp.719-731
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• 1991

This paper introduces a relatively simple computer simulation method for analyzing trajectory of electron beam in cylindrical electrode of the CRT, which outputs the cutoff voltag, beam current, spot size and plots out the trajectory, rom the input data on physical construction and applied voltages of electron gun. In order to improve computing speed in obtaining potential distibution, the authors have ivided the space into seveal setos and allocated different mesh sizes epending on the acuracy required to each sector and applied the finite difference method in calculation. The plot of trajectoy obtained from the simulation provided useful insight into the focusing mechanism of the CRT. The computed and measured result including beam curent. spot sizs and cutoff voltages for several model guns have ageed within eperimental error. The simulation program enables the designer to compare the effects of varied electrode shpe without the epense of building an actual gun and may be appli in esigning and implementing the electron gun assemply.

• The Journal of Korean Institute of Information Technology
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• v.16 no.11
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• pp.43-49
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• 2018

Computer simulation was performed using the SIMION program to develop an electron gun for MCP cleaning. The target, MCP, is located 180mm from the source of the electron gun, and the diameter of the MCP is approximately 20mm. Therefore, we tried to find the condition that the beam diameter of electrons reaching the MCP is to be 20mm using four variables such as E, ${\phi}$, d1, d2, where the E is the energy of the electron reaching the MCP, the ${\phi}$ is the diameter of the extractor, and the d1 and the d2 are the distance from the electron source to the end of the extractor tube, and to the wall of chamber, respectively. As a result of simulation, we figuried out that the E and the d2 have little effect on the beam diameter. On the other hand, we also found that the beam diameters were very sensitive to the d1 and varied relatively large with respect to the ${\phi}$, and the d1 was the secondary order function of the ${\phi}$. Therefore we found that this function will allow us to design electron guns that are suitable for the purposes of this study.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.401-404
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• 2004

The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. To achieve small spot size as 1-2 nm for higher power of electron beam, magnetic lenses should be designed considering their magnetic field distribution. In this paper, the magnetic field at two condenser lenses and object lens are calculated with finite element method and discussed its performances.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1552-1553
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• 2006

A thermionic gun of injector linac for pohang accelerator laboratory is required to generate beam pulse width less than 1 nsec. The gun uses cathode-grid assembly(EIMAC Y824) and operates up to 80 kV anode voltage. In order research characteristics of the electron gun, emission current from gun wear measured by the wall current monitor. In this paper the pulser system and characteristics of the emission current in region from 30 mA to 15 A are described.

• Laser Solutions
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• v.1 no.1
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• pp.11-17
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• 1998

The electron beam welding system has the advantages of the high power density, narrow welding section, and small thermal distortion of a workpiece. Recently, the electron beam welding system is widely used to the airplane engineering, nuclear power plant, and automobile industry. In the present paper, the structural analyses on the vacuum chamber of the electron beam welding system are performed by the F.E.M. analysis. The stiffening characteristics on the geometric shape, stiffener height and stiffener span are investigated. The deflection of the stiffened vacuum chamber under pressure is minimized by longitudinal and transverse stiffeners which are continuous in both direction.

• Progress in Medical Physics
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• v.27 no.1
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• pp.25-30
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• 2016

The dosimetric characteristics were experimentally evaluated for electron beams from the prototype linac developed for radiotherapy units. This paper focuses on the electron beam output and energy variations as a function of electron gun heater current. The electron energy was derived from its mean and most probable energies measured by film dosimetry. The electron beam output at the maximum electron energy was measured with the plane parallel ionization chamber in water using TRS-398 dosimetry protocol. The mean energy and the most probable energy of the electron beam were 6.54~3.31 MeV and 5.94~2.80 MeV at electron gun current of 2.02~2.50 A respectively. The output dose rate for an electron beam of mean energy 6.54 MeV was 5.41 Gy/min ${\pm}1.5%$ at the reference depth in water.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.149-153
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• 2005

The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. The polepieces of these lenses are usually made with high purity iron which is hard to fabricate and very expensive. In this paper, the possibility of using polepiece of object lens composed with pure iron and low carbon steel was examined to reduce cost. The magnetic field at object lens was calculated with finite element method, and practical focusing qualities of SEM pictures were observed comparing for the object lens polepieces with pure iron and two type of composed with low carbon steel.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.153-158
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• 2007

The present study covers numerical analysis of a thermionic scanning electron microscope(SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. For a systematic design of the electron optical system, the beam trajectories are investigated through numerical analyses by tracing the ray path of the electron beams, and the quality of resulting image is evaluated from the analysis results.