• Title/Summary/Keyword: Electron Probe

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Direct Sealing Glass-Ceramics to Metal (직접 결합방법에 의한 Glass-Ceramics과 금속의 접합)

  • Kim, Hwan;Lee, Ki-Kang
    • Journal of the Korean Ceramic Society
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    • v.18 no.2
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    • pp.99-104
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    • 1981
  • Glass-ceramics possessed a number of characteristics which suggested their suggested their use for sealing to metals. The choice of particular glass-ceramics compositions for this application is governed by various factors, including workability of the glasses, thermal expansion characteristics and the matching of these to appropriate metals. Other properties, such as mechanical strength, determined the performance of glass-ceramics to metal seals. The purpose of the present study was to investigate direct sealing behaviour of copper to $Li_2O-ZnO-SiO_2$ system glass-ceramics. The design of the seal was a concentric seal which might contribute to the strong bond formation by providing compressive stress during thermal excursions. Tensile strengths of sealing layers were measured by Instron test machine. The layers were examined by electron probe microanalyzer. Crsystallization rate was increased with the amount of ZnO or $Li_2O$, and ZnO increased the sealing strength, but $Li_2O$ lowered it. Sealing mechanism was due to the formation of metal oxides, which acted as binder between copper and glass-ceramics. The nickle-plated copper seal with 10% $Li_2O$ and 30% ZnO was the most strong seal, and its sealing strength was more than 56kg/$\textrm{cm}^2$.

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Characterization of Electrical Resistance for SABiT Technology-Applied PCB : Dependence of Bump Size and Fabrication Condition (SABiT 공법적용 인쇄회로기판의 은 페이스트 범프 크기 및 제작 조건에 따른 전기 저항 특성)

  • Song, Chul-Ho;Kim, Young-Hun;Lee, Sang-Min;Mok, Jee-Soo;Yang, Yong-Suk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.4
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    • pp.298-302
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    • 2010
  • We investigated the resistance change behavior of SABiT (Samsung Advanced Bump interconnection Technology) technology-applied PCB (Printed Circuit Board) with the various bump sizes and fabrication conditions. Many testing samples with different bump size, prepreg thickness, number of print on the formation of Ag paste bump, were made. The resistance of Ag paste bump itself was calculated from the Ag paste resistivity and bump size, measured by using 4-point probe method and FE-SEM (Field Emission Scanning Electron Microscope), respectively. The contact resistance between Ag paste bump and conducting Cu line were obtained by subtracting the Cu line and bump resistances from the measured total resistance. It was found that the contact resistance drastically changed with the variation of Ag paste bump size and the contact resistance had the largest influence on total resistance. We found that the bump size and contact resistance obeyed the power law relationship. The resistance of a circuit in PCB can be estimated from this kind of relationship as the bump size and fabrication technique vary.

Effect of thermal annealing on optical and electrical properties of VOx deposited by magnetron sputtering (마그네트론 스퍼터링법으로 증착한 VOx 박막의 열처리에 따른 광학적.전기적 특성 변화)

  • Kong, Young-Joo;Park, Yong-Seob;Park, Jae-Wook;Lee, Sung-Uk;Hong, Byung-You
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.247-247
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    • 2008
  • In this work, VOx thin films have been deposited by DC magnetron sputtering method on glass substrate using argon and oxygen gases. We examined the effects of the post annealing temperature on the structural, optical, and electrical variations of VOx films. The films were annealed at temperatures ranging from 300 to $500^{\circ}C$ in steps of $100^{\circ}C$ using RTA equipment in air ambient. The thickness of the film and interface between film and substrate were observed by field emission scanning electron microscopy (FESEM). To analysis the structural properties of VOx with various annealng temperatures, we used XRD method. Also, we investigated the electrical and optical properties of VOx thin films using hall measurement, 4-point probe, and UV-visible methods.

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Preparation of Electromagnetic Wave Shielding Fabrics by Electroless Plating (무전해 도금법에 의한 전자파 차단 의류소재의 제조)

  • Kim Su Mi;Song Wha Soon
    • Journal of the Korean Society of Clothing and Textiles
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    • v.29 no.1 s.139
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    • pp.149-156
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    • 2005
  • The purpose of this study was to produce the high quality of electromagnetic wave shielding fabrics. In this study, we have produced polyester fabrics by electroless Ag plating. The untreated polyester was etched with $4\%$ NaOH solution added accelerant(Benzyl Dimethyl Dodecyl Ammonium Chloride) then it was catalyzed by $SnCl_2$ solution and activated by $PdCl_2$ solution. Electroless Ag plating was carried out by changing conditions such as temperature. time, weight loss rate of polyester and kind of reducing agents. The electromagnetic wave shielding effectiveness of polyester fabric by electroless Ag plating was measured by RF Impedance Analyzer and element of electromagnetic wave shielding substance was measured using Electron probe micro analyzer. The results were as follows; The plating bath using potassium sodium tartrate by reducing agent was excellent electromagnetic wave shielding effectiveness. Element of electromagnetic wave shielding substance was silver. Electromagnetic wave shielding effectiveness was shown over 64dB at the temperature of $40^{\circ}C$, treating time 30min., weight loss rate $20\%$.

고 Mn강의 용접 열영향부에서의 기계적 특성평가

  • Yu, Jae-Hong;Kim, Sang-Hun;Park, Yeong-Hwan;Lee, Chang-Hui
    • Proceedings of the KWS Conference
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    • 2010.05a
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    • pp.25-25
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    • 2010
  • 8 wt.% 망간 (Mn) 이 함유된 마르텐사이트계 고 Mn강은 고강도용 강재로 산업현장에 적용될 수 있는 유용한 재료이다. 그러나, 다량의 망간의 함유로 인한 용접성 저하로 상용화를 위해서는 용접성 평가가 필요하다. 본 연구에서는 gleeble simulator 를 통해 열영향부를 재현한 후 local brittle zones(LBZs) 을 규명하였다. 모재는 Electron Probe Micro Analyzer (EPMA) 및 X-Ray Diffractometer(XRD) 로 분석결과 다량의 Mn 함유로 인해 lath마르텐사이트 미세조직과 소량의 잔류 오스테나이트로 구성되어 있었다. 용접부에서 모재까지 Vickers 경도계로 경도 분포를 측정한 결과 coarse-grained heat affected zone (CGHAZ) 에서 fine-grained heat affected zone (FGHAZ) 까지 경도 증가 후 subcritical heat affected zone (SCHAZ) 까지 급격한 경도 감소 거동을 보였다. 열영향부의 미세조직은 투과전자현미경 (TEM)으로 분석하였다. 연성취성천이온도 (DBTT) 측정을 위해 온도 구간을 상온, $0^{\circ}C$, $-20^{\circ}C$, $-40^{\circ}C$, $-60^{\circ}C$, $-80^{\circ}C$으로 설정하여 charpy impact test를 시행하였다. 그 결과 coarse-grained heat affected zone(CGHAZ) 에서 조대한 결정립으로 인해 낮은 충격값을 보였다.

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Inward Diffusion of Tb Ions and the Magnetic Properties of the Nd-Fe-B Magnets (열처리 조건에 따른 Tb이온의 확산 및 Nd-Fe-B 자석의 자기적 특성)

  • Oh, Seong-Uk;Kim, Dong-Whan;Gong, Gun-Seung;Heo, Young-Woo;Kim, Jeong-Joo;Lee, Joon-Hyung
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.30 no.1
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    • pp.27-31
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    • 2017
  • In this study, the effect of Tb inward diffusion on the magnetic properties of the Nd-Fe-B sintered magnets was studied. After sintering of the magnets, $TbF_3$ slurries were dip-coated on the surface of the samples, then heat-treatment was followed for $TbF_3$ diffusion. The element distribution in the magnets and the diffusion profiles of Tb ions were analyzed by an EPMA (electron probe micro-analyzer). Prolonged heat treatment resulted in a deeper diffusion length of Tb ions. Coercivity of the $1^{st}$ heat-treated sample showed 21.86 kOe, while that of the $1^{st}$, $2^{nd}$ heat-treated and annealed sample revealed 34 kOe.

Atomic Layer Deposition of Ruthenium Thin Film from Ru (cymene) (1,5-hexadiene) and O2

  • Jeong, Hyo-Jun;Jeong, Eun-Ae;Han, Jeong-Hwan;Park, Bo-Geun;Lee, Seon-Suk;Hwang, Jin-Ha;Kim, Chang-Gyun;An, Gi-Seok;Jeong, Taek-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.357.2-357.2
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    • 2014
  • Ruthenium (Ru) 박막은 우수한 화학적 열적 안정성 및 높은 일함수(4.7eV) 특성으로 인해 20 nm급 이하의 차세대 DRAM capacitor의 전극 물질 및 Cu metalization을 위한 seed layer로 각광을 받고 있다. Ru박막의 나노스케일 정보전자소자로의 적용을 위해서는 두께제어가 용이하고 3D 구조에서 우수한 단차 피복 특성을 갖는 atomic layer deposition (ALD)을 이용한 박막 형성이 필수적이다. 이에 본 연구에서는 ALD 방법을 이용하여 0가의(cymene) (1,5-hexadiene) Ru (0) (C16H24Ru) 전구체를 합성, ALD 방법을 이용하여 우수한 초기성장거동을 갖는 Ru 박막을 증착 하였다. 형성된 Ru 박막의 표면 형상, 두께, 밀도를 주사전자현미경(Scanning electron microscopy)과 X-선 반사율 측정(X-ray reflectometer)으로 조사하였다. 또한 전기적 특성을 4침법(four-point-probe)으로 측정하였고, 박막의 화학적 조성과 결정성의 정보를 X-선 광전자분광법(X-ray photoelectron spectroscopy)과 X-선 회절(X-ray diffraction)을 이용하여 확인하였다.

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Fabrication of Electro-active Polymer Actuator Based on Transparent Graphene Electrode

  • Park, Yunjae;Choi, Hyonkwang;Im, Kihong;Kim, Seonpil;Jeon, Minhyon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.386.1-386.1
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    • 2014
  • The ionic polymer-metal composite (IPMC), a type of electro-active polymer material, has received enormous interest in various fields such as robotics, medical sensors, artificial muscles because it has many advantages of flexibility, light weight, high displacement, and low voltage activation, compare to traditional mechanical actuators. Mostly noble metal materials such as gold or platinum were used to form the electrode of an IPMC by using electroless plating process. Furthermore, carbon-based materials, which are carbon nanotube (CNT) and reduced graphene-CNT composite, were used to alter the electrode of IPMC. To form the electrode of IPMC, we employ the synthesized graphene on copper foil by chemical vapor deposition method and use the transfer process by using a support of PET/silicone film. The properties of graphene were evaluated by Raman spectroscopy, UV/Vis spectroscopy, and 4-point probe. The structure and surface of IPMC were analyzed via field emission scanning electron microscope. The fabricated IPMC performance such as displacement and operating frequency was measured in underwater.

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A Study on the Characteristics of Ammonia Doped Plasma Polymer Thin Film with a Controlled Plasma Power

  • Seo, Hyeon-Jin;Hwang, Gi-Hwan;Ju, Dong-U;Yu, Jeong-Hun;Lee, Jin-Su;Jeon, So-Hyeon;Nam, Sang-Hun;Yun, Sang-Ho;Bu, Jin-Hyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.242.2-242.2
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    • 2014
  • Plasma-polymer thin films (PPTF) have been deposited on a Si(100) wafer and glass under several conditions such as different RF power by using plasma-enhanced chemical vapor deposition (PECVD) system. Ethylcyclohexane, ammonia gas, hydrogen and argon were utilized as organic precursor, doping gas, bubbler gas and carrier gases, respectively. PPTFs were grown up with RF (ratio frequency using 13.56 MHz) powers in the range of 20~60 watt. PPTFs were characterized by FT-IR (Fourier Transform Infrared), FE-SEM (Scanning Electron Microscope), AFM (Atomic Force Microscope), Contact angle and Probe station. The result of FT-IR measurement showed that the PPTFs have high cross-link density nitrogen doping ratio was also changed with a RF power increasing. AFM and FE-SEM also showed that the PPTFs have smooth surface and thickness. Impedance analyzer was utilized for the measurements of C-V curves having different dielectric constant as RF power.

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인가된 압력에 의한 탄소나노튜브 전극 특성 향상

  • Jeon, Ju-Hui;Choe, Ji-Hyeok;Mun, Gyeong-Ju;Gang, Yun-Hui;Lee, Tae-Il;Myeong, Jae-Min
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2010.05a
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    • pp.57.2-57.2
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    • 2010
  • 대표적인 투명 전극 재료indium tin oxide(ITO)의 경우, 우수한 투과성과 낮은 면저항을 기반으로 차세대 디스플레이용 전극으로 각광 받고 있다. 하지만 제조 단가가 높으며 brittle 하여 유연 디스플레이에 적용이 어려우며 대면적 제조가 어렵다는 단점이 있어 이를 대체할 수 있는 새로운 물질이 필요한 실정이다. 대표적인 후보 물질로는 탄소 육각형이 서로 연결된 관 형태인 탄소나노튜브가 있으며 뛰어난 전기 전도도와 물리적 특성을 투명 전극에 적용하기 위한 연구가 활발히 진행 중이다. 본 연구에서는 탄소나노튜브 투명 전극 제조 시 잔여 분산제 제거 및 doping의 효과를 위해 수행되는 산처리 공정을 하지 않고 투명 전극의 특성을 향상 시키는 연구를 진행하였다. 제작된 박막에 압력을 인가하여 탄소나노튜브 네트워킹의 향상과 두께의 감소를 얻을 수 있었다. 실험에 사용된 탄소나노튜브는 아크 방전 공정으로 합성된 2nm의 single wall 탄소나노튜브이며 이를 분산제인 sodium dodecyl sulfate(SDS)에 분산하여 용액형태로 제작하여 사용하였다. 분산제를 제거하기 위해 탈이온수를 사용하였으며 고분자 mold를 사용하여 압력을 인가하여 그에 따른 전기적, 광학적 변화를 관찰하였다. 제조된SWCNT 박막은 four point probe measurement를 이용하여 sheet resistance를 측정하였고 UV-vis를 이용하여 투과도와 반사도 등의 광학적 특성을 측정하였다. 박막의 표면은 field emission scanning electron microscope (FESEM)과 Atomic force microscope(AFM)를 이용하여 관찰하였다.

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