• The Journal of Korean Academy of Prosthodontics
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• v.27 no.2
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• pp.219-248
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• 1989

The purposes of this study were to analyze the microstructural and compositional changes of metal surfaces following different conditions of preoxidizing heat treatment, to investigate the composition of metal oxides, and to evaluate the effect of preoxidation and removal of surface oxides on microstructure and diffusion profiles. The techniques of EDAX (energy-dispersive analysis of x-ray), ESCA (electron spectroscopy for chemical analysis), and EPMA (electron probe micro analysis) were used, along with SEM (scanning electron microscopy). The obtained results were as follows : 1. A surface of the specimen became rough and the amount of the metal oxides increased with increasing the heat treatment time and temperature and the partial pressure of oxygen. 2. At an air pressure of 28' vacuum, the higher the temperature and the longer the time of preoxidation, the higher Ni concentration was detected. 3. Cr concentration in the specimen heat treated with air was higher than that of with vacuum. 4. The oxides in the specimens were mainly composed of Ni and Cr oxides. On the globular growth particles, significant rises in Al concentration of Rexillium III and Ti concentration of Verabond were noted. 5. Atomic diffusion occurred at the ceramic-metal interface, furthermore the amount of the flux was increased with preoxidation heat treatment.

• International Journal of Korean Welding Society
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• v.1 no.1
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• pp.58-62
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• 2001

The surface of AC8A Ah alloy was modified by adding the Cu powder using a Plasma Transferred Arc (PTA) welding process. Under the optimum fabricating conditions, the modified surface of AC8A Ah alloy was observed to possess the sound microstructure with a minimum porosity. Hardness and wear resistance properties of the as-fabricated alloy were compared with those of the 76 heat-treated one. In case of the as-fabricated alloy, the hardness of the modified layer was twice that of the matrix region. Although significant increase in the hardness of the matrix region was observed after T6 heat treatment, the hardness of the modified layer was not observed to change. The wear resistance of the modified layer was significantly increased compared to that of the matrix region. The microstructure of a weld zone and the matrix region were investigated using the optical microscope, scanning electron microscope (SEM), electron probe microanalysis (EPMA), and transmission electron microscope (TEM). The primary and eutectic silicon in the weld zone were finer and more curved than in the matrix region, while some precipitates has had been found therein. According to the TEM observation, the predominant precipitate present in the weld zone was the $\theta$'phase, which is precipitated during cooling by rapid solidification in PTA welding process. Improvement of hardness and wear properties in the weld zone in the as-fabricated condition can be explained based on the presence of $\theta$’precipitates and fine primary and eutectic silicon distribution.

• Journal of the Optical Society of Korea
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• v.17 no.6
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• pp.548-558
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• 2013

In this work, laser induced breakdown spectroscopy (LIBS) is used to investigate soil samples collected from different desert areas of Riyadh city in Saudi Arabia. Both qualitative analysis and plasma parameters are studied via the observed LIBS spectra. These experiments have been done using a Spectrolaser-7000 system with 50 mJ fundamental wavelength of Nd:YAG laser and detection delay time of 1 microsecond. Many spectral lines are highly resolved for many elements like Al, Fe, Mg, Si, Mn, Na, Ca and K. The electron temperatures Te and electron densities Ne, for the constituent of generated LIBS plasma, are determined for all the collected samples. It is found that both Te and Ne vary from one desert area to other. This variation is due to the change of the elemental concentration in different desert areas that affects the sample's matrices. Time dependent measurements have also been performed on the soil samples. While the signal-to-base ratio (SBR) reached its optimal value at 1 microsecond, the plasma parameters Ne and Te reach values of $4{\times}10^{17}cm^{-3}$ and 9235 K, respectively, at 2.5 microsecond. The later indicate that the plasma cooling processes are slow in comparison to the previously observed results for metallic samples. The observed results show also that in the future it is possible to enhance the exploitation of LIBS in the remote on-line environmental monitoring application, by following up only the values of Ne and Te for one element of the soil desert sample using an optical fiber probe.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.109-110
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• 2014

주사전자현미경(Scanning Electron Microscopy: SEM)은 고체상태에서 미세조직과 형상을 관찰하는 데에 가장 다양하게 쓰이는 분석기기로서 최근에 판매되고 있는 고분해능 SEM은 수 나노미터의 분해능을 가지고 있다. 그리고 SEM의 초점심도가 크기 때문에 3차원적인 영상의 관찰이 용이해서 곡면 혹은 울퉁불퉁한 표면의 영상을 육안으로 관찰하는 것처럼 보여준다. 활용도도 매우 다양해서 금속파면, 광물과 화석, 반도체 소자와 회로망의 품질검사, 고분자 및 유기물, 생체시료 nnnnnnnnn와 유가공 제품 등 모든 산업영역에 걸쳐 있다(Fig. 1). 입사된 전자빔이 시료의 원자와 탄성, 비탄성 충돌을 할 때 2차 전자(secondary electron)외에 후방산란전자(back scattered electron), X선, 음극형광 등이 발생하게 되는 이것을 통하여 topography (시료의 표면 형상), morphology(시료의 구성입자의 형상), composition(시료의 구성원소), crystallography (시료의 원자배열상태)등의 정보를 얻을 수 있다. SEM은 2차 전자를 이용하여 시료의 표면형상을 측정하고 그 외에는 SEM을 플랫폼으로 하여 EDS (Energy Dispersive X-ray Spectroscopy), WDS (Wave Dispersive X-ray Spectroscope), EPMA (Electron Probe X-ray Micro Analyzer), FIB (Focus Ion Beam), EBIC (Electron Beam Induced Current), EBSD (Electron Backscatter Diffraction), PBMS (Particle Beam Mass Spectrometer) 등의 많은 분석장치들이 SEM에 부가적으로 장착되어 다양한 시료의 측정이 이루어진다. 이 중 결정구조, 조성분석을 쉽고 효과적으로 할 수 있게 하는 X선 분석장치인 EDS를 SEM에 일체화시킨 장비와 EDS 및 PBMS를 SEM에 장착하여 반도체 공정 중 발생하는 나노입자의 형상, 성분, 크기분포를 측정하는 PCDS(Particle Characteristic Diagnosis System)에 대해 소개하고자 한다. - EDS와 통합된 SEM 시스템 기본적으로 SEM과 EDS는 상호보완적인 기능을 통하여 매우 밀접하게 사용되고 있으나 제조사와 기술적 근간의 차이로 인해 전혀 다른 방식으로 운영되고 있다. 일반적으로 SEM과 EDS는 별개의 시스템으로 스캔회로와 이미지 프로세싱 회로가 개별적으로 구현되어 있지만 로렌츠힘에 의해 발생하는 전자빔의 왜곡을 보정을 위해 EDS 시스템은 SEM 시스템과 연동되어 운영될 수 밖에 없다. 따라서, 각각의 시스템에서는 필요하지만 전체 시스템에서 보면 중복된 기능을 가지는 전자회로들이 존재하게 되고 이로 인해 SEM과 EDS에서 보는 시료의 이미지의 차이로 인한 측정오차가 발생한다(Fig. 2). EDS와 통합된 SEM 시스템은 중복된 기능인 스캔을 담당하는 scanning generation circuit과 이미지 프로세싱을 담당하는 FPGA circuit 및 응용프로그램을 SEM의 회로와 프로그램을 사용하게 함으로 SEM과 EDS가 보는 시료의 이미지가 정확히 일치함으로 이미지 캘리브레이션이 필요없고 측정오차가 제거된 EDS 측정이 가능하다. - PCDS 공정 중 발생하는 입자는 반도체 생산 수율에 가장 큰 영향을 끼치는 원인으로 파악되고 있으며, 생산수율을 저하시키는 원인 중 70% 가량이 이와 관련된 것으로 알려져 있다. 현재 반도체 공정 중이나 반도체 공정 장비에서 발생하는 입자는 제어가 되고 있지 않은 실정이며 대부분의 반도체 공정은 저압환경에서 이루어지기에 이 때 발생하는 입자를 제어하기 위해서는 저압환경에서 측정할 수 있는 측정시스템이 필요하다. 최근 국내에서는 CVD (Chemical Vapor Deposition) 시스템 내 파이프내벽에서의 오염입자 침착은 심각한 문제점으로 인식되고 있다(Fig. 3). PCDS (Particle Characteristic Diagnosis System)는 오염입자의 형상을 측정할 수 있는 SEM, 오염입자의 성분을 측정할 수 있는 EDS, 저압환경에서 기체에 포함된 입자를 빔 형태로 집속, 가속, 포화상태에 이르게 대전시켜 오염입자의 크기분포를 측정할 수 있는 PBMS가 일체화 되어 반도체 공정 중 발생하는 나노입자 대해 실시간으로 대처와 조치가 가능하게 한다.

• Journal of Korean Vacuum Science & Technology
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• v.6 no.2
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• pp.71-75
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• 2002

GaAs polycrystalline thin films with good performance were prepared on conducting glass by hot wall epitaxy (HWE), which were used for solar cell. Electron probe micro-analyzer (EPMA) was applied for the composition, morphology of surface and cross-section of grown films, and X-ray diffraction (XRD) for their phase structure; Raman scattering spectum (RSS) and photoluminescence (PL) were used for evaluating their optical characteristics. The results show that, there is textured structure on the surface of grown GaAs polycrystalline films, which is greatly promised to be suitable for the candidate of solar cell with low cost and high efficiency. It is concluded that the source and substrate at temperature of 900 ~ 930 $\^{C}$ and 500 $\^{C}$ respectively would be beneficial for such films.

• Korean Journal of Materials Research
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• v.11 no.12
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• pp.1074-1079
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• 2001

To study the distribution of boron and the boron effect for nucleation of graphite in high carbon steel, neutron induced autoradiography method is used. High carbon steel is easy to make the graphitization by addition of boron. It is easy to analysis of boron distribution using neutron radiography with neutron fluence of $1.9$\times${\times}10^{13}/cm^2$in the boron added high carbon steel. By the neutron induced autoradiography technique, it was found that the distribution of boron depended on boron content, graphitiging temperature and time. And by the analysis of secondary ion mass spectroscopy (SIMS) and electron probe micro analysis (EPMA), boron or boride were acted at nucleation site of graphite in high carbon steel.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.10a
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• pp.213-216
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• 2009

In this study, three cold-rolled TRIP steels containing different Al content (0.04wt%, 1.0 wt.% and 2.00wt%) were fabricated to understand the complex effects of Al in TRIP steel. The influences of Al on microstructural evolution of cold-rolled TRIP steels have been analyzed by using advanced analysis techniques, such as transmission electron microscope (TEM) and three dimensional atom probe tomography (3D-APT). TEM results revealed that second phases such as bainte and retained austenite decrease with increase of Al content. In addition, 3D-APT was used to characterize atomic-scale distribution of alloying elements at the constituent phases. Through these analysis techniques, the advanced characteristics of constituent microstructure in TRIP steels were identified depending on Al contents in TRIP steels.

• Corrosion Science and Technology
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• v.19 no.5
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• pp.231-238
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• 2020

Radioactive corrosion product specimens were analyzed using an electron probe microanalyzer (EPMA) and X-ray image mapping. It is difficult to analyze the composition of radioactive corrosion products using an EPMA due to the size and rough shape of the surfaces. It is particularly challenging to analyze the composition of radioactive corrosion products in the form of piled up, small grains. However, useful results can be derived by applying a semi-quantitative analysis method using an EPMA with X-ray images. A standard-less, semi-quantitative method for wavelength dispersive spectrometry. EPMA analysis was developed with the objective of simplifying the analytical procedure required. In this study, we verified the reasonable theory of semi-quantitative analysis and observed the semi-quantitative results using a sample with a good surface condition. Based on the validated results, we analyzed highly rough-surface radioactive corrosion products and assessed their composition. Finally, the usefulness of the semi-quantitative analysis was reviewed by verifying the results of the analysis of radioactive corrosion products collected from spent nuclear fuel rods.

• Proceedings of the IEEK Conference
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• 2000.06b
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• pp.290-293
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• 2000

Low frequency(<100Hz) weak magnetic field(<20gauss) is applied axially to an inductively coupled oxygen plasma(ICP), and its plasma characteristics are monitored by OES(Optical Emission Spectroscopy) and Langmuir probe. It is found that periodic magnetic field enhances ashing rate by 25％ and improves its uniformity upto 4.5％ over 8" wafer. From electron energy distribution function, both low and high energy electrons are identified and relative abundancy is found to be controlled by the applied frequency. Moreover, it is observed that ionization and dissociation species are varied with applied frequency. We insert an aluminium baffle in the chamber to get better uniformity and less plasma damage.

• The Journal of Advanced Prosthodontics
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• v.9 no.2
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• pp.138-142
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• 2017

In restorative treatment using fixed dental prostheses, dentists should select appropriate restoration material among various types of dental materials. The strength, marginal fit, esthetics, wear resistance, biocompatibility, and cost are important factors in the choice of restoration materials. The present case showed a surface stain on a monolithic zirconia restoration that was due to wear between the monolithic zirconia restoration and the base metal alloy restoration. This phenomenon was confirmed by surface roughness measurement and electron probe micro-analysis.