• Title/Summary/Keyword: Electron Probe

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Dry etching properties of PZT thin films in $BCl_3/N_2$ plasma ($BCl_3/N_2$ 유도결합 플라즈마로 식각된 PZT 박막의 식각 특성)

  • Koo, Seong-Mo;Kim, Kyoung-Tae;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.183-186
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    • 2004
  • The dry etch behavior of PZT thin films was investigated in $BCl_3/N_2$ plasma. The experiments were carried out with measuring etch rates and selectivities of PZT to $SiO_2$ as a function of gas concentration and input rf power, chamber pressure. The maximum etch rate was 126 nm/min when 30% $N_2$ was added to $BCl_3$ chemistry. Also, as input rf power increases, the etch rate of PZT thin films was increased. Langmuir probe measurement showed the noticeable influence of $BCl_3/N_2$ mixing ratio on electron temperature and electron density as input rf power increased. The variation of Cl radical density as plasma parameters changed was examined by Optical Emission Spectroscopy (OES) analysis. According to X-ray diffraction (XRD) analysis, PZT thin films were damaged in plasma and an increase in (100), (200) and (111) phases showed the improvement in structure of the PZT thin films after the $O_2$ annealing process.

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Nano-thick Nickel Silicide and Polycrystalline Silicon on Glass Substrate with Low Temperature Catalytic CVD (유리 기판에 Catalytic CVD 저온공정으로 제조된 나노급 니켈실리사이드와 결정질 실리콘)

  • Song, Ohsung;Kim, Kunil;Choi, Yongyoon
    • Korean Journal of Metals and Materials
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    • v.48 no.7
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    • pp.660-666
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    • 2010
  • 30 nm thick Ni layers were deposited on a glass substrate by e-beam evaporation. Subsequently, 30 nm or 60 nm ${\alpha}-Si:H$ layers were grown at low temperatures ($<220^{\circ}C$) on the 30 nm Ni/Glass substrate by catalytic CVD (chemical vapor deposition). The sheet resistance, phase, microstructure, depth profile and surface roughness of the $\alpha-Si:H$ layers were examined using a four-point probe, HRXRD (high resolution Xray diffraction), Raman Spectroscopy, FE-SEM (field emission-scanning electron microscopy), TEM (transmission electron microscope) and AES depth profiler. The Ni layers reacted with Si to form NiSi layers with a low sheet resistance of $10{\Omega}/{\Box}$. The crystallinty of the $\alpha-Si:H$ layers on NiSi was up to 60% according to Raman spectroscopy. These results show that both nano-scale NiSi layers and crystalline Si layers can be formed simultaneously on a Ni deposited glass substrate using the proposed low temperature catalytic CVD process.

Effect of the Cu Composition Ratio on the Phase Transformation in Low Ni Austenite Cast Iron, Fe-3%C-16%(Ni+Mn+Cu) (Fe-3%C-16%(Ni+Mn+Cu) 주철에서 상변태에 미치는 Cu 조성비의 영향)

  • Park, Gi-Deok;Heo, Hoe-Jun;Na, He-Sung;Kang, Chung-Yun
    • Korean Journal of Metals and Materials
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    • v.50 no.6
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    • pp.419-425
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    • 2012
  • The purpose of this research was to develop a low Ni austenitic cast iron through replacing Ni by Cu and Mn because they are cheaper than Ni. The effect of the Cu content (6-12 wt%) on the microstructure characteristics was investigated in Fe-3%C-16%(Ni+Cu+Mn) cast iron. Contrary to general effect of the Cu on cast iron, the result of the microstructure analysis indicated that bainite and cementite were formed in high Cu content (>8 wt%Cu). A crystallized Cu-solution (Cu-Mn) phase and MnS in the Cu-solution were formed. The quantity of those phases increased as the Cu content increased. Consequently, the high Cu content in the composition ratio (Ni+Cu+Mn=16%) caused the formation of Cu-Mn/MnS and those phases decreased the effect of Cu and Mn on austenite formation. For this reason, bainite and cementite were formed in high Cu content.

Properties of Carbon Pastes Prepared with Mixing Ratios of Nano Carbon and Graphite Flakes

  • Kim, Kwangbae;Song, Ohsung
    • Korean Journal of Materials Research
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    • v.28 no.11
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    • pp.615-619
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    • 2018
  • To produce carbon electrodes for use in perovskite solar cells, electrode samples are prepared by mixing various weight ratios of 35 nm nano carbon(NC) and $1{\mu}m$ graphite flakes(GF), GF/(NC+GF) = 0, 0.5, 0.7, and 1, in chlorobenzene(CB) solvent with a $ZrO_2$ binder. The carbon electrodes are fabricated as glass/FTO/carbon electrode devices for microstructure characterization using transmission electron microscopy, optical microscopy, and a field emission scanning electron microscopy. The electrical characterization is performed with a four-point probe and a multi tester. The microstructure characterization shows that an electrode with excellent attachment to the substrate and no surface cracks at weight ratios above 0.5. The electrical characterization results show that the sheet resistance is <$70{\Omega}/sq$ and the interface resistance is <$70{\Omega}$ at weight ratios of 0.5 and 0.7. Therefore, a carbon paste electrode with microstructure and electrical properties similar to those of commercial carbon electrodes is proposed with an appropriate mixing ratio of NC and GF containing a CB solvent and $ZrO_2$.

Crystallized Nano-thick TiO2 Films with Low Temperature ALD Process (저온 원자층증착법으로 제조된 결정질 TiO2 나노 박막)

  • Park, Jongsung;Han, Jeungjo;Song, Ohsung
    • Korean Journal of Metals and Materials
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    • v.48 no.5
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    • pp.449-455
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    • 2010
  • To enhance the efficiency of dye sensitized solar cells, we proposed crystalline anatase-$TiO_{2}$ by using a low temperature process ($150^{\circ}C{\sim}250^{\circ}C$). We successfully fabricated 30 nm-$TiO_{2}$ at a fixed atomic layer deposition condition of 1.0 sec of TDMAT pulse, 20 sec of TDMAT purge, 0.5 sec of H$_{2}$O pulse, and 20 sec of H$_{2}$O purge. In order to examine the microstructure, phase, and band-gap of the TiO$_{2}$ respectively, we employed a Nano-Spec, transmission electron microscope, high resolution XRD, Auger electron spectroscopy, scanning probe microscope, and UV-VIS-NIR. We were able to fabricate a crystalline anatase-phase of 30 nm-TiO$_{2}$ successfully at temperatures above $180^{\circ}C$. Our results showed that our proposed low temperature ALD process (below $200^{\circ}C$) might be applicable to glass and flexible polymer substrates.

Fabrication of PCL/MWCNTs Nanofiber by Electrospinning (전기방사법을 이용한 PCL/MWCNTs 나노섬유 제조)

  • Choi, Jung Mi;Jang, Hyun Chul;Hyeon, Jae Young;Sok, Jung Hyun
    • Korean Journal of Metals and Materials
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    • v.50 no.10
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    • pp.763-768
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    • 2012
  • The uniform and highly smooth nanofibers of biocompatible poly(${\varepsilon}$-caprolactone) (PCL) composited with different contents of multiwalled carbon nanotubes (MWCNTs) were successfully prepared by electrospinning. Experimental parameters were MWCNTs addition to a PCL solution and applied voltages. The topographical features of the composite nanofibers were characterized by scanning electron microscopy and its electrical properties were measured by a four-point probe method. The surface resistance gradually decreased with an increasing content of MWCNTs in PCL fibers because of the excellent electrical conductivity of MWCNTs. The nanofiber diameter could be regulated by varying the solution viscosity and voltages. Our results establish that this kind of electrospinning PCL/MWCNTs nanofibers with the control of fiber diameter and electrical conductivity may be a promising candidate for the application of scaffolds in tissue engineering.

Methods of Improving Operational Reliability of Oil Well Casing

  • Sergey A. Dolgikh;Irek I. Mukhamatdinov
    • Corrosion Science and Technology
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    • v.23 no.1
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    • pp.1-10
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    • 2024
  • Oil well casing leak is caused by contact of casing outer surface with formation electrolyte. It is usually associated with an aquifer with a high salt content or absence of a cement ring behind the casing. The only way to reduce external casing corrosion is through cathodic protection. Through cathodic polarization of casing structure, electron content in crystal lattice and electron density will increase, leading to a potential shift towards the cathodic region. At Tatneft enterprises, cathodic protection is carried out according to cluster and individual schemes. The main criterion for cathodic protection is the size of protective current. For a casing, the protective current is considered sufficient if measurements with a two-contact probe show that the electric current directed to the casing has eliminated all anode sites. To determine the value of required protective current, all methods are considered in this work. In addition, an analysis of all methods used to determine the minimum protective current of the casing is provided. Results show that the method of measuring potential drop along casing is one of the most reliable methods for determining the value of protective current.

Fabrication and Characterization of a One-dimensional Fiber-optic Dosimeter for Electron Beam Therapy Dosimetry (치료용 전자선 계측을 위한 1차원 광섬유 방사선량계의 제작 및 특성분석)

  • Jang, Kyoung-Won;Cho, Dong-Hyun;Shin, Sang-Hun;Yoo, Wook-Jae;Jun, Jae-Hun;Lee, Bong-Soo;Moon, Joo-Hyun;Park, Byung-Gi
    • Progress in Medical Physics
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    • v.19 no.4
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    • pp.285-290
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    • 2008
  • In this study, we have fabricated a one-dimensional fiber-optic dosimeter for electron beam therapy dosimetry. Each fiber-optic dosimeter has an organic scintillator with a plastic optical fiber and it is embedded and arrayed in the plastic phantom to measure one-dimensional high energy electron beam profile of clinical linear accelerator. The scintillating lights generated from each sensor probe are guided by plastic optical fibers to the multi-channel photodiode amplifier system. We have measured one-dimensional electron beam profiles in a PMMA phantom according to different field sizes and energies of electron beam. Also, the isodose and three-dimensional percent depth dose curves in a PMMA phantom are obtained using a one-dimensional fiber-optic dosimeter with different electron beam energies.

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Development and Performance Test of Preamplifier and Amplifier for Gamma Probe (감마프로브용 전단증폭기와 주증폭기의 개발과 성능 평가)

  • Bong, Jung-Kyun;Kim, Hee-Joung;Lee, Jong-Doo;Kwon, Soo-Il
    • The Korean Journal of Nuclear Medicine
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    • v.33 no.1
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    • pp.100-109
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    • 1999
  • Purpose: Preamplifier and amplifier are very important parts for developing a portable counting or imaging gamma probe. They can be used for analyzing pulses containing energy and position information for the emitted radiations. The commercial Nuclear Instrument Modules (NIMs) can be used for processing these pulses. However, it may be improper to use NIMs in developing a portable gamma probe, because of its size and high price. The purpose of this study was to develop both preamplifier and amplifier and measure their performance characteristics. Materials and Methods: The preamplifier and amplifier were designed as a charge sensitive device and a capacitor resistor-resistor capacitor (CR-RC) electronic circuit, respectively, and they were mounted on a print circuit board (PCB). We acquired and analyzed energy spectra for Tc-99m and Cs-137 using both PCB and NIMs. Multichannel analyzer (Accuspec/A, Canberra Industries Inc., Meriden Connecticut, U.S.A) and scintillation detectors (EP-047(Bicron Saint-Gobain/Norton Industrial EP-047 (Ceramics Co., Ohio, U.S.A) with $2"{\times}2"$ NaI(T1) crystal and R1535 (Hamamatsu Photonics K.K., Electron Tube Center, Shizuoka-ken, Japan) with $1"{\times}1"$ NaI(T1) crystal were used for acquiring the energy spectra. Results: Using PCB, energy resolutions of EP-047 detectors for Tc-99m and Cs-137 were 12.92% and 5.01%, respectively, whereas R1535 showed 13.75% and 5.19% of energy resolution. Using the NIM devices, energy resolutions of EP-047 detector for Tc-99m and Cs-137 were measured as 14.6% and 7.58%, respectively. However, reliable energy spectrum of R1535 detector could not be acquired, since its photomultiplier tube (PMT) requires a specific type of preamplifier. Conclusion: We developed a special preamplifier and amplifier suitable for a small sized gamma probe that showed good energy resolutions independent of PMT types. The results indicate that the PCB can be used in developing both counting and imaging gamma probe.

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Scientific Objectives and Mission Design of Ionospheric Anomaly Monitoring by Magnetometer And Plasma-Probe (IAMMAP) for a Sounding Rocket in Low-Altitude Ionosphere (저고도 전리권 관측을 위한 사운딩 로켓 실험용 IAMMAP(Ionospheric Anomaly Monitoring by Magnetometer And Plasma-Probe)의 과학적 목표와 임무 설계)

  • Jimin Hong;Yoon Shin;Sebum Chun;Sangwoo Youk;Jinkyu Kim;Wonho Cha;Seongog Park;Seunguk Lee;Suhwan Park;Jeong-Heon Kim;Kwangsun Ryu
    • Journal of Space Technology and Applications
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    • v.4 no.2
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    • pp.153-168
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    • 2024
  • Sounding rockets are cost-effective and rapidly deployable tools for directly exploring the ionosphere and microgravity environments. These rockets achieve their target altitudes quickly and are equipped with various scientific instruments to collect real-time data. Perigee Aerospace plans its inaugural test launch in the first half of 2024, followed by a second performance test launch in January 2025. The second launch, scheduled off the coast of Jeju Island, aims to reach an altitude of approximately 150 km with a payload of 30 kg, conducting various experiments in the suborbital region. Particularly in mid-latitude regions, the ionosphere sporadically exhibits increased electron densities in the sporadic E layers and magnetic fluctuations caused by the equatorial electrojet. To measure these phenomena, the sounding rocket version of ionospheric anomaly monitoring by magnetometer and plasma-probe (IAMMAP), currently under development at the KAIST Satellite Research Center, will be onboard. This study focuses on enhancing our understanding of the mid-latitude ionosphere and designing observable missions for the forthcoming performance tests.