• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.1
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• pp.16-24
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• 2001

This paper presents an electromagnetic microactuator using the copper coil electroplated on the p+silicon diaphragm. The microactuator generates a vertical motion of the diaphragm using the radial direction, we propose a new actuator structure with twin magnets. The microactuator field in the radial direction, we propose a new actuator structure with twin magnets. The microactator shows a values of resonant frequency and quality factor in the ranges of 10.51${\pm}$0.22kHz and 46.6${\pm}$3.3, respectively. The twin magnet microactuator generates the maximum peak-to-peak amplitude of 4.4$\mu\textrm{m}$ for the AC rms current of 26.8mA, showing 2.4 times larger amplitude than the single magnet microactuator.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.10 s.175
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• pp.195-201
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• 2005

A laterally driven electromagnetic microactuator (LaDEM) is presented, and a micro-optical switch is designed and fabricated as a possible application. LaDEM provides parallel actuation of the microactuator to the silicon substrate surface (in-plane mode) by the Lorentz force. Poly-silicon-on-insulator (Poly-SOI) wafers and a reactive ion etching (RIE) process were used to fabricate high-aspect-ratio vertical microstructures, which allowed the equipment of a vertical micro mirror. A fabricated arch-shaped leaf spring has a thickness of $1.8{\mu}m$, width of $16{\mu}m$, and length of $800{\mu}m$. The resistance of the fabricated structure fer the optical switch was approximately 5$\Omega$. The deflection of the leaf springs increases linearly up to about 400 mA and then it demonstrates a buckling behavior around the current value. Owing to this nonlinear phenomenon, a large displacement of $60{\mu}m$ could be measured at 566 mA. The displacement-load relation and some dynamic characteristics are analyzed using the finite element simulations.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.8
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• pp.1119-1127
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• 2010

In this paper, the design and nonlinear simulation of a multistable electromagnetic microactuator, which provides four stable equilibrium positions within its operating range, have been discussed. Quadstable actuator motion has been made possible by using both X- and Y-directional bistable structures with snapping curved beams. Two pairs of the curved beams are attached to an inner frame in both X- and Y-directions to realize independent bistable behavior in each direction. For the actuation of the actuator at the micrometer scale, an electromagnetic actuation method in which Lorentz force is taken into consideration was used. By using this method, micrometer-stroke quadstability in a plane parallel to a substrate was possible. The feasibility of designing an actuator that can realize quadstable motion by using the electromagnetic actuation method has been thoroughly clarified by performing nonlinear static and dynamic analyses and electrothermal coupled-field analysis of the multistable microactuator.