• Korean Journal of Materials Research
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• v.20 no.12
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• pp.629-635
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• 2010

Abstract In this study characteristics of Al-doped ZnO thin film by HIPIMS (High power impulse sputtering) are discussed. Deposition speed of HIPIMS with conventional balanced magnetic field is measured at about 3 nm/min, which is 30% of that of conventional RF sputtering process with the same working pressure. To generate additional magnetic flux and increase sputtering speed, electromagnetic coil is mounted at the back side of target. Under unbalanced magnetic flux from electromagnet with 1.5A coil current, deposition speed of AZO thin film is increased from 3 nm/min to 4.4 nm/min. This new value originates from the decline of particles near target surface due to the local magnetic flux going toward substrate from electromagnet. AZO film sputtered by HIPIMS process shows very smooth and dense film surface for which surface roughness is measured from 0.4 nm to 1 nm. There are no voids or defects in morphology of AZO films with varying of magnetic field. When coil current is increased from 0A to 1A, transmittance of AZO thin film decreases from 80% to 77%. Specific resistance is measured at about $2.9{\times}10-2\Omega{\cdot}cm$. AZO film shows C-axis oriented structure and its grain size is calculated at about 5.3 nm, which is lower than grain size in conventional sputtering.

• Journal of Institute of Convergence Technology
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• v.3 no.2
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• pp.11-15
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• 2013

These days, the quality of goods is required to improve in the process of manufacturing the semiconductor through the short working hours and clean transportation. The non-contact transport device using magnetic levitation can be a solution in the manufacturing process. The non-contact transport device, using electromagnetic actuation, is the system that can actually transport them by only using attraction force from the electromagnetic source without authentic contact. Moreover, the system using electromagnetic force has a substantial number of benefits ranging from unrestricted design to unlimited expansion. Especially, the price is competitive. The non-contact transport device, using electromagnetic force, has another merits in controlling by giving the same amount of attraction force to ferromagnetic body. By controlling the currents given to coil, the operator is able to decide the direction of the transportation. In order to design the optimal system, we implemented five different things such as the presence of the links below the electromagnetic, the electromagnet changes due to coupling method, the change according to the thickness of the links below electromagnet, due to changes in between electromagnetic distance direction, and the size of the current. Through simulations and the optimum design, it seems to control easily and figure out the exact size of power. It might definitely be the non-contact transport that can sharply reduce tiny scratches and particles in the process of manufacturing the semiconductor.

• Advances in Computational Design
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• v.7 no.1
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• pp.57-68
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• 2022

A simulation study of the distribution of magnetic flux induced by a U-shaped electromagnet into a two-layer massive object with variations in the depth and properties of the surface layer has been carried out. It has been established that the hardened surface layer "pushes" the magnetic flux into the bulk of the magnetized object and the magnetic flux penetration depth monotonically increases with increasing thickness of the hardened layer. A change in the thickness and magnetic properties of the surface layer leads to a redistribution of magnetic fluxes passing between the poles of the electromagnet along with the layer and the bulk of the steel object. In this case, the change in the layer thickness significantly affects the magnitude of the tangential component of the field on the surface of the object in the interpolar space, and the change in the properties of the layer affects the magnitude of the magnetic flux in the magnetic "transducer-object" circuit. This difference in magnetic parameters can be used for selective testing of the surface hardening quality. It has been shown that the hardened layer pushes the magnetic flux into the depth of the magnetized object. The nominal depth of penetration of the flow monotonically increases with an increase in the thickness of the hardened layer.

• Proceedings of the KSR Conference
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• 2011.05a
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• pp.824-829
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• 2011

EMS-type Maglev vehicle maintains constant levitation air-gap between electromagnet and guideway by using gap sensor. The other words, when Maglev vehicles levitating over the guideway, mass of the vehicle effects through 1st (electromagnetic air-gap control) and 2nd (air-spring) suspension to grider. Resonace between electromagnetic suspension and grider could be occurred, which causes instability and poor ridecomfort. This paper is to test the dymanic interaction between levitation air-gap and switching system grider that has less mass and high natural frequencies than other type of general girders.

• Proceedings of the KSR Conference
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• 2011.10a
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• pp.2609-2614
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• 2011

A proportional integral derivative (PID) controller is designed and applied to a magnetic levitation conveyor system to control the levitation gap length of the electromagnet constantly. The PID gain parameters are optimized by response surface methods (RSM). The controller is verified with the state-space model of electromagnetic suspension by MATLAB/SIMULINK program. And, the controller and the state-space model are also verified experimentally. Simulation and experimental results shows the effectiveness of the PID gain tuning by RSM as compared with the classical PID tuning.

• Proceedings of the Acoustical Society of Korea Conference
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• spring
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• pp.385-388
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• 2000

Electromagnet ic wave falling on solid surface acts on the medium with a force. This force brings about a redistribution of surface charges and the surface potential is varied. By measuring this potential variations, the surface electrical properties on conductors, semicionductors and dielectrics can be tested. In this paper, two dimensional photocharge voltage on the $LiNbO_3$ wafer induced by He-Ne laser beam, the temperature characteristics and the capacitive coupling test structure for the photocharge voltage measurement for the dielectrical materials are shown.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.52 no.5
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• pp.197-202
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• 2003

When a high-speed train reduces its operating velocity while decelerating from a maximum of 350 to 50 [km/h], the train applies eddy-current brakes, which results in a deceleration time of approximately 3minutes. Therefore, a high current is utilized in order to obtain a large braking force. Consequently, the temperature of the electromagnet and rail increases significantly. In this paper, The thermal characteristics on a single magnet pole with convection heat transfer coefficient are simulated by using 2D-FEM. To verify the analysis results, the computed temperatures are compared with the experimentally measured temperature at stationary state. Furthermore, transient-state thermal analysis is performed to predict the magnet temperatures as the train is decelerating.

• Progress in Superconductivity and Cryogenics
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• v.6 no.1
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• pp.43-48
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• 2004

This paper deals with design and fabrication of heater-triggered switching system for the high-Tc superconducting (HTS) power supply with series-connected double-pancake load. Amongst all components, heater triggering is the most important element for the performance of HTS power supply. To fabricate the optimal heater-triggered system, its characteristics have been analysed through the simulation and expriment. The thermal analysis of switching parts of the Bi-2223 solenoid according to the heater input was carried out. Based upon the analysis, 8A electromagnet current and 1.5A DC Heater current were optimally derived, and 8s and 20s for the pumping period were selected in this experiment. In the experiment. the maximum pumping current reached about 24A with Bi-2223 pancake load of 6mH.

• Transactions of the Korean Society of Mechanical Engineers
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• v.11 no.1
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• pp.124-131
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• 1987

The parameteric instability of the cantilever beam carrying two concentrated masses subjected to a periodic follower force is investigated theoretically and experimentally. The effects of the constant follower force and the periodic follower force the mass ratio and the location of the concentrated mass on the parametric instability of the system are discussed. In experiment, the nonconservative follower force is produced by the magnetic force of the electromagnet. The theoretical and the experimental results on the parameteric instability are in good agreement each other.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.11a
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• pp.727-730
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• 2007

Coil inductor has been used widely as an electromagnet, because of the high magnetic filed resulting from the voltage applied to the coil. In this study the coils were used in vibration suppression as an actuator. The control system consists of a coil attached in aluminum beam and a permanent magnet set at its bottom. This actuation method is easy to be incorporated into the system and allows significant forces to be applied without contacting with the structure. Three types of coils (cylindrical type, square type, Circular sheet type) were employed in vibration suppression of cantilever beam. The positive position feedback (PPF) controller was applied to the magnet-coil actuator to suppress the first mode of vibration. Experimental results showed that the cylindrical type and square type coil made good vibration suppression efficiency under PPF controller than their eddy current damper. However, there was minimal difference for the circular sheet type coil if compared with its eddy current damper.