• 반도체디스플레이기술학회지
• /
• 제21권1호
• /
• pp.5-11
• /
• 2022

Despite the increasing importance of manufacturing and application R&D for ultrapure deionized water and electrolyzed ion water, various and systematic studies have not been conducted until now. In this study, the electrostatic discharge (ESD) behavior of electrolyzed ion water using a proton exchange membrane(PEM) was evaluated according to the type, flow rate, and bubble of electrolyzed ion water. In addition, by observing that Oxidation Reduction Potential (ORP) value returns to the unique value of electrolyzed ion water after electrostatic discharge, the possibility of two types of ions participating in electrostatic discharge ((H₂O)_n⁺ (assumed)) and ions for maintaining the characteristics of electrolyzed water could be inferred. In order to confirm the chemical structure and characteristics of the cations, in-depth research related to water molecular orbital energy or band gap should be followed.

• 반도체디스플레이기술학회지
• /
• 제20권2호
• /
• pp.34-42
• /
• 2021

Recent cleaning technologies of mask in extremely ultraviolet semiconductor processes were reviewed, focused on newly developed issues such as particle size determination or hydrocarbon and tin contaminations. In detail, critical particle size was defined and proposed for mask cleaning where nanosized particles and its various shapes would result in surface atomic ratio increase vigorously. A new cleaning model also was proposed with amphoteric behavior of electrolytically ionized water which had already shown excellent particle removing efficiency. Having its non-equilibrium and amphoteric properties, electrolyzed ion water seemed to oxidize contaminant surface selectively in nano-scale and then to lift up oxidized ones from mask surface very effectively. This assumption should be further investigated in future in junction with hydrogen bonding and cluster of water molecules.

• 조명전기설비학회논문지
• /
• 제16권4호
• /
• pp.46-54
• /
• 2002

본 논문은 전해수 발생장치내에 이온분리집속 격막을 설치하여 비유전율이 틀리는 유전체구를 충진한 구조로 함으로써 고효율의 강전해수 발생장치를 제안하였다. 염화나트륨이 용해된 수도수와 일반수도수를 원료수로서 본 강전해수 발생장치에 인입하였을 때 충진된 유전체구의 비유전율 변화가 수중 이온분리집속성능에 미치는 영향을 연구 검토하였다. 실험결과로서 본 강전해수 발생장치에 원료수로서 수도수의 유속을 0.5[LPM]으로 인입시키고 구형파 펄스전류를 1.0[A]로 인가하였을 때 pH 3.1과 10.6의 전해수를 얻을 수 있었다. 그리고 염화나트륨이 0.1[wt%]용해된 수도수의 경우 pH 2.8과 11.7의 전해수를 얻었다. 또한 비유전율이 가장 높은 BaTiO$_3$과 같은 유전체구를 전해수 발생장치에 충진한 경우 각각 PH 2.7, 11.7과 pH 2.4, 12.0의 전해수를 얻을 수 있었다.

• Journal of Electrochemical Science and Technology
• /
• 제2권2호
• /
• pp.85-90
• /
• 2011

Active oxygen species or free radicals are considered to cause extensive oxidative damage to biological macromolecules, which brings about a variety of diseases as well as aging. Electrolyzed reduced water(ERW) has been regarded as a ideal antioxidative agent in recent years. ERW is produced by passing a diluted salt solution through an electrolytic cell, within which the anode and cathode are separated by membrane. It can be produced reactive materials in ERW near the cathode during the electrolysis of water. ERW have the following advantages over other traditional cleaning agents: effective antioxidative agent, easy preparation, inexpensive, and environmentally friendly. The main advantage of ERW is its safety and antioxidative effect. ERW with strong reducing potential can be used to remove dirt and grease from items such as cutting boards and other kitchen utensils. The primary aim of this study is the activation mechanism of oxidation reduction potentials, ion conductivity, pH, and electrochemical properties with reactive materials in ERW.

• 식품기술
• /
• 제21권1호
• /
• pp.29-31
• /
• 2008

• 대한전기학회논문지:전기물성ㆍ응용부문C
• /
• 제50권2호
• /
• pp.79-85
• /
• 2001

A conventional electrolyzing cell has been made by an ion exchange membrane inbetween parallel plate electrodes. A low dc voltage is applied to the electrodes for electrolyzing and the efficiency is remained in low. in this study, a novel electrolyzing cell with a pair of slit-type third electrodes installed inbetween parallel plate electrodes has been proposed and investigated experimentally. And pulse power wa supplied to between each electrodes. This slit type of third electrodes can concentrate the strong electric fields at the every its edges to accelerate the electrolyzing powers, and to generate oxygen bubble discharges for generating oxidants. And moreover the slits eliminate the space charge limiting action and the temperature of the water by leaking out through the slits from electrolyzing region to outside of the main electrode region. As a result, it was found that a strong electorzed water of pH 2.8 and pH 10.5 and oxidants dissolved water of 1 [ppm] in acidic water were obtained with a tap water fed at the electric current of 2 [A], which however were several times higher oxidant and ion concentration quantity compared with the conventional cell.