• Journal of the Semiconductor & Display Technology
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• v.21 no.1
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• pp.5-11
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• 2022

Despite the increasing importance of manufacturing and application R&D for ultrapure deionized water and electrolyzed ion water, various and systematic studies have not been conducted until now. In this study, the electrostatic discharge (ESD) behavior of electrolyzed ion water using a proton exchange membrane(PEM) was evaluated according to the type, flow rate, and bubble of electrolyzed ion water. In addition, by observing that Oxidation Reduction Potential (ORP) value returns to the unique value of electrolyzed ion water after electrostatic discharge, the possibility of two types of ions participating in electrostatic discharge ((H₂O)_n⁺ (assumed)) and ions for maintaining the characteristics of electrolyzed water could be inferred. In order to confirm the chemical structure and characteristics of the cations, in-depth research related to water molecular orbital energy or band gap should be followed.

• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.34-42
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• 2021

Recent cleaning technologies of mask in extremely ultraviolet semiconductor processes were reviewed, focused on newly developed issues such as particle size determination or hydrocarbon and tin contaminations. In detail, critical particle size was defined and proposed for mask cleaning where nanosized particles and its various shapes would result in surface atomic ratio increase vigorously. A new cleaning model also was proposed with amphoteric behavior of electrolytically ionized water which had already shown excellent particle removing efficiency. Having its non-equilibrium and amphoteric properties, electrolyzed ion water seemed to oxidize contaminant surface selectively in nano-scale and then to lift up oxidized ones from mask surface very effectively. This assumption should be further investigated in future in junction with hydrogen bonding and cluster of water molecules.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.16 no.4
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• pp.46-54
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• 2002

A dielectric pellets bedded parallel plates with a membrane centered have been proposed as an ion separation and collection system in water. and effects of the relative dielectric constant and the applied square wave pulse voltage on the characteristics of ion separation and collection in tap water and NaCl dissolved tap water have been investigated. As a result, electrolyzed water of pH 3.1 and 10.6 were obtained with only tap water at the pulse current of 1.0[A] and flow rate of 0.5[LPM]. And the higher ionized water of pH 2.8 and pH 11.7 ware obtained in 0.1[%wt] NaCl dissolved water. When the dielectric pellets of BaTiO$_3$ having the highest dielectric constant were bedded in the ion separation and collection cell, the ionized water of pH 2.7 and pH 11.7 were obtained with only tap water. And the ionized water of pH 2.4 and pH 12.0 were obtained in 0.1[wt%] NaCl dissolved tap water with the dielectrics pellets bedded ones.

• Journal of Electrochemical Science and Technology
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• v.2 no.2
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• pp.85-90
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• 2011

Active oxygen species or free radicals are considered to cause extensive oxidative damage to biological macromolecules, which brings about a variety of diseases as well as aging. Electrolyzed reduced water(ERW) has been regarded as a ideal antioxidative agent in recent years. ERW is produced by passing a diluted salt solution through an electrolytic cell, within which the anode and cathode are separated by membrane. It can be produced reactive materials in ERW near the cathode during the electrolysis of water. ERW have the following advantages over other traditional cleaning agents: effective antioxidative agent, easy preparation, inexpensive, and environmentally friendly. The main advantage of ERW is its safety and antioxidative effect. ERW with strong reducing potential can be used to remove dirt and grease from items such as cutting boards and other kitchen utensils. The primary aim of this study is the activation mechanism of oxidation reduction potentials, ion conductivity, pH, and electrochemical properties with reactive materials in ERW.

• Bulletin of Food Technology
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• v.21 no.1
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• pp.29-31
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• 2008

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.2
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• pp.79-85
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• 2001

A conventional electrolyzing cell has been made by an ion exchange membrane inbetween parallel plate electrodes. A low dc voltage is applied to the electrodes for electrolyzing and the efficiency is remained in low. in this study, a novel electrolyzing cell with a pair of slit-type third electrodes installed inbetween parallel plate electrodes has been proposed and investigated experimentally. And pulse power wa supplied to between each electrodes. This slit type of third electrodes can concentrate the strong electric fields at the every its edges to accelerate the electrolyzing powers, and to generate oxygen bubble discharges for generating oxidants. And moreover the slits eliminate the space charge limiting action and the temperature of the water by leaking out through the slits from electrolyzing region to outside of the main electrode region. As a result, it was found that a strong electorzed water of pH 2.8 and pH 10.5 and oxidants dissolved water of 1 [ppm] in acidic water were obtained with a tap water fed at the electric current of 2 [A], which however were several times higher oxidant and ion concentration quantity compared with the conventional cell.