• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.34-42
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• 2021

Recent cleaning technologies of mask in extremely ultraviolet semiconductor processes were reviewed, focused on newly developed issues such as particle size determination or hydrocarbon and tin contaminations. In detail, critical particle size was defined and proposed for mask cleaning where nanosized particles and its various shapes would result in surface atomic ratio increase vigorously. A new cleaning model also was proposed with amphoteric behavior of electrolytically ionized water which had already shown excellent particle removing efficiency. Having its non-equilibrium and amphoteric properties, electrolyzed ion water seemed to oxidize contaminant surface selectively in nano-scale and then to lift up oxidized ones from mask surface very effectively. This assumption should be further investigated in future in junction with hydrogen bonding and cluster of water molecules.

• Food Science and Preservation
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• v.12 no.6
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• pp.558-564
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• 2005

This study was carried out to investigate the cleaning effect of sesame leaf, the sterilization effect and physicochemical properties, treated with various electrolyzed water. Initial physicochemical properties could be kept more than 1 month in electrolyzed oxidizing water(EW-1) of diaphragm type and 15 days in electrolyzed water(EW-2 and EW-3) of non-diaphragm system, there was no significant difference by storage temperature. 4 kinds of microorganism (initial total counts, $10^7\~10^9$ CFU/mL) were sterilized within $0.5\~1$ minutes by electrolyzed water. In fresh sesame leaves, total viable cell count and coliform group in the treatment of electolyzed water were decreased to about $2\~3$ log scale comparing non-treated ones. Especially Bacillus cereus was not detected until 13th day when treated with EW-l. Decaying ratio of sesame leaf appears on day 6 of storage in the untreated but the treatments of electrolyzed water has no sign until day 10 of storage. Change in color difference(${\Delta}E$) during storage was observed the treatments of electrolyzed low-alkaline water(EW-2) and electrolyzed neutral water(EW-3) were very desirable at the level $1\~2$ after day 13 of storage comparative to the untreated Change of Chlorophyll content was biggest decreased to 6.8 $mg\%$ on the untreated and decreased least to 8.35 $mg\%$ on EW-3 treated group on 13th day from initial value of $9.0\~10.3\;mg\%$ The overall sensory evaluation appeared most acceptable in the treatments of EW-2 and EW-3.

• Korean Journal of Food Science and Technology
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• v.44 no.5
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• pp.628-633
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• 2012

This study investigated the washing efficiency of electrolyzed water for the removal of microorganisms and pesticide residues from Chinese cabbage. Initial total bacteria and coliform counts were 6.64 and 3.56 log cfu/g respectively. After washing, total bacteria count of tap water (TW) were 5.97 log cfu/g and low alkaline electrolyzed water (LAlEW) and strong acidic electrolyzed water (SAcEW) were 1.63-4.67 log cfu/g. Especially SAcEW-100 was found to the most effective method of washing the cabbages. After washing, the coliform count was dramatically reduced. The removal rate of pesticide residues by NaClO treatment (36.93-50.13%) was greater than that of TW treatment (32.28-38.46%). The removal rate of LAlEW-100 and SAcEW-100 was 63.79 and 78.30% respectively, and was higher than those of TW and NaClO treatments. The vitamin C content of the Chinese cabbages after all treatments did not differ significantly. Consequentially, the electrolyzed water was found to be effective to remove bacteria and pesticide residues from Chinese cabbage without affecting quality.

• Journal of the Korean Society of Food Science and Nutrition
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• v.39 no.12
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• pp.1846-1853
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• 2010

The storage attributes of green juice prepared by washing Angelica keiskei with various washing solutions using air bubble method were investigated. The washing solutions were distilled water (DW), sodium hypochlorite electrolyzed water (SHEW), and slightly acidic electrolyzed water (SAEW). During storage at $4^{\circ}C$, the number of bacteria after 1 day was $>10^5$ CFU/mL when DW was used, whereas bacterial growth was $<10^5$ CFU/mL after 4 days when SHEW or SAEW was used. The pH and color were not changed, and the polyphenol content, electron donating ability and total antioxidant ability were decreased slowly with the increase of storage time. No significant difference in any of the measured properties was found among washing methods (p<0.05). Consequently, these results suggest the possible use of electrolyzed water for washing to enhance the shelf life of green juice with A. keiskei because SHEW and SAEW decreased bacterial growth without affecting other properties of the green juice.

• Korean Journal of Fisheries and Aquatic Sciences
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• v.45 no.1
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• pp.11-16
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• 2012

In coastal areas that are affected by continuous, seasonal or occasional pollution sources, bivalves accumulate biological contaminants such as pathogenic bacteria. We investigated the effect of natural seawater relaying and electrolyzed seawater depuration on the bacteriological quality of artificially contaminated oysters Crassostrea gigas and short-necked clams Ruditapes philippinarum to suggest an alternative method of shellfish sanitation control.When artificially contaminated oysters and short-necked clams (fecal coliform level 1,700 MPN/100 g) were relayed into a sea area of safe bacteriological water quality, the fecal coliform level dropped to below 110 MPN/100 g after 1 day. The bacteriological quality of oysters and short-necked clams that are contaminated at a fecal coliform level of 1,700 MPN/100 g could be improved, and become appropriate for raw consumption by a single day relay under proper environmental conditions. When artificially contaminated oysters (fecal coliform level 330 MPN/100 g) were depurated with electrolyzed seawater, 94% of fecal coliform was eliminated after 12 h and fecal coliform was undetectable after 24 h. After 24 h depuration with electrolyzed seawater, the fecal coliform level of short-necked clams with initial fecal coliform of 2,400 MPN/100 g was below 20 MPN/100 g. However, the fecal coliform level of short-necked clams with initial fecal coliform of 17,000 MPN/100 g was relatively high, at 790 MPN/100 g, even after 24 h of depuration with electrolyzed seawater, because of the repeated cycle of excretion and accumulation of fecal coliform in shellfish tissue under the closed depuration environment. Such natural seawater relaying and electrolyzed seawater depuration can be restrictively applied to improve or secure the bacteriological quality of oysters and short-necked clams in accordance with safety levels for bivalves for raw consumption.

• Korean Journal of Food Science and Technology
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• v.38 no.4
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• pp.506-512
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• 2006

We investigated changes in the physicochemical characteristics and functional components of the Saengsik cereal grains-milled rice, brown rice, glutinous rice, and barley- by washing with electrolyzed water. There were no changes in the composition of all cereal grains that was dried with hot-air and freeze-dried after being washed with electrolyzed water. The L and a values were not affected by drying in milled rice, brown rice, glutinous rice, or barley, but the b value increased in milled rice and glutinous rice-this increase was greater with hot-air drying than with freeze-drying. The dietary fiber content of the all cereals increased with hot-air drying. The niacin content decreased in all cereals; the extent of this change was greater with hot-air drying than with freeze-drying. The ${\beta}-glucan$ content of barley was higher in samples that underwent freeze-drying than in those treated by hot-air drying, but was not affected by washing with electrolyzed water. Thus, other than a change in color for milled and glutinous rice, no changes in the physicochemical characteristics and functional components these products were observed with freeze-drying. Data indicate that the electrolyzed water washing could be effectively used as pasteurization step in the uncooked cereal grains.

• Korean Journal of Food Science and Technology
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• v.31 no.4
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• pp.1029-1034
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• 1999

To enhance the cleaning and sterilization effect of cooled electrolyzed acid water on lettuce, several kinds of polysorbates were used at various concentrations in immersion washing process. In case of the treatment containing polysorbate 20, coliform count of lettuce was reduced to about 1/40 level of that in non-treated lettuce. The treatment containing polysorbate 60 did not show a significant sterilization effect. Otherwise, the total and coliform counts of lettuce during immersion in electrolyzed acid water containing 1 ppm of polysorbate 80 was reduced to about 1/300 and 1/1,700 level of those in non-treated one. And, the changes of ORP(oxidation-reduction potential), pH and color value of lettuce in electrolyzed acid water containing 1 ppm of polysorbate 80 were not quite different during 60 min. immersion, but HCIO content decreased from 10.28 ppm to 8.51 ppm after 20 min. immersion. Also, total and coliform count of lettuce immersed in electrolyzed acid water containing 1 ppm of polysorbate 80 was lower to about 1/1,800 after 20 min. and 1/5,550 after 30 min, compared with non-treated lettuce.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.1
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• pp.78-82
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• 2005

Display manufacturing process has adopted RCA cleaning, applying to larger area and coping with environmental issue for last ten years. However, the approaching concept of ozonized, hydrogenised, or electrolyzed water cleaning technologies is within RCA clean paradigm. In this work, only electrolyzed anode water was applied to clean particles and organics as well as metals based on Pourbaix concept, and as a test vehicle, MgO particles were introduced to prove the new concept. The electrolyzed anode water is very oxidative with high oxidation reduction potential (ORP) and low in pH of more than 900 mV and 3.1, respectively. MgO particles were immersed in the anode water and its weight losses due to dissolution were measured with time. Weight losses were in the ranges of 100 to 500 micrograms in 250 ml anode water depending on their ORP and pH. Therefore it was concluded that the cleaning radicals in the anode water was at least in the range of 1 to $5{\times}10^{20}$ ea per 250 ml anode water equivalent to $1{\times}10^{18} ea/cm^2$. Hence it can be assumed that the anode water applied to display cleaning from now on $1{\times}10^{10}$ to $1{\times}10^{15} ea/cm^2$ ranges of contaminants are being treated. In addition, it was observed that anode water did not develop micro-roughness on hydrophobic surface while it did on the native silicon oxide.

• Food Science and Preservation
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• v.11 no.2
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• pp.160-169
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• 2004

This study was carried out to investigate the efficacy of electrolyzed water manufactured with or without diaphragm on sterilization and preservation of cut-celery and shelled raw oyster. In cut-celery, total viable cell count and coliform group in the treatment of electrolyzed water were decreased to about 1/200∼1/1,000 level and about 1/100 level comparing non-treated ones. But moisture content, pH, hardness, vitamin C and residual chlorine content were showed a little difference among treatments up to 10 days at 10$^{\circ}C$. L and a color values were gradually increased in all treatments, and color differences($\Delta$E) were remarkable between treatment and untreatment sample. In overall acceptability, cut-celery treated with electrolyzed water showed somewhat higher score than that of other ones treated with tap water and 100 ppm NaClO solution until 5 days of storage. After 48 hours of storage, it was showed that VBN, total viable cell count and coliform count of shelled raw oyster treated with electrolyzed alkali water produced by non-diaphragm system are lower by about 3 mg%, 1∼2 log cycle and 2 log cycle respectively than that of ones treated with sea water. Total viable cell count of shelled raw oyster just after treatment was lower by about 1 log cycle than that of ones treated with sea water, and any significant increment was not found after 24∼48 hours of storage.

• Journal of the Korean Society of Food Science and Nutrition
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• v.25 no.5
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• pp.761-767
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• 1996

To lessen the initial level of microorganisms, electrolyzed acid-water was used as washing and brine water in the manufacturing process. On the washing and salting processes, application of electrolyzed acid-water showed a possibility to lessen the microorganism level of Chinese cabbage effectively. Microbial level of Chinese cabbage was reduced to about 1/4 level by salting and washing process with electrolyzed acid-water while Chinese cabbage salted with tap water increased to about 1.7 times. And no coliform and E. coli were detected. However significant differences between seasoning mixtures prepared with electrolyzed acid-water and with tap water were not observed in microbial levels. Relatively low level of total count in kimchi prepared with electroyzed acid-water was kept until 15 days of fermentation at $10^{\circ}C.$ Any significant difference between them was not observed after 20 days of fermentation. pH and acidity were showed the same tendencies as microbial count.