• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.221-221
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• 2014

The present work proposes an improved numerical simulator for design and modification of large area capacitively coupled plasma (CCP) processing chamber. CCP, as notoriously well-known, demands the tremendously huge computational cost for carrying out transient analyses in realistic multi-dimensional models, because electron dissociations take place in a much smaller time scale (${\Delta}t{\approx}10-8{\sim}10-10$) than time scale of those happened between neutrals (${\Delta}t{\approx}10-1{\sim}10-3$), due to the rf drive frequencies of external electric field. And also, for spatial discretization of electron flux (Je), exponential scheme such as Scharfetter-Gummel method needs to be used in order to alleviate the numerical stiffness and resolve exponential change of spatial distribution of electron temperature (Te) and electron number density (Ne) in the vicinity of electrodes. Due to such computational intractability, it is prohibited to simulate CCP deposition in a three-dimension within acceptable calculation runtimes (<24 h). Under the situation where process conditions require thickness non-uniformity below 5%, however, detailed flow features of reactive gases induced from three-dimensional geometric effects such as gas distribution through the perforated plates (showerhead) should be considered. Without considering plasma chemistry, we therefore simulated flow, temperature and species fields in three-dimensional geometry first, and then, based on that data, boundary conditions of two-dimensional plasma discharge model are set. In the particular case of SiH4-NH3-N2-He CCP discharge to produce deposition of SiNxHy thin film, a cylindrical showerhead electrode reactor was studied by numerical modeling of mass, momentum and energy transports for charged particles in an axi-symmetric geometry. By solving transport equations of electron and radicals simultaneously, we observed that the way how source gases are consumed in the non-isothermal flow field and such consequences on active species production were outlined as playing the leading parts in the processes. As an example of application of the model for the prediction of the deposited thickness uniformity in a 300 mm wafer plasma processing chamber, the results were compared with the experimentally measured deposition profiles along the radius of the wafer varying inter-electrode gap. The simulation results were in good agreement with experimental data.

• Korean Chemical Engineering Research
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• v.46 no.4
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• pp.697-700
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• 2008

The underpotential deposited Bi on Pt($Bi_{upd}/Pt$) anode for formic acid fuel cells (FAFCs) was developed using multi-layered preparation method for better electrocatalytic utilization of Pt. The electron probe microanalysis (EPMA) result indicated that $Bi_{upd}$ remains through the catalyst layer during stability test. In performance test, the multilayered $Bi_{upd}$ on Pt black showed superior performance by approximately 200 mV at current density of $150mA/cm^2$ compared with PtRu black anode catalyst. Based on preparation condition of $Bi_{upd}/Pt$ black, carbon supported $Bi_{upd}/Pt/C$ electrode was prepared and it showed enhanced performance and stability.

• Journal of Adhesion and Interface
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• v.15 no.1
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• pp.1-8
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• 2014

Ion exchange membrane is widely used in various fields such as electro dialysis, diffusion dialysis, redox flow battery, fuel cell. PVC cation exchange membrane using ultrasonic modification was prepared by sulfonation reaction in various sulfonation times. Sulfuric acid was used as a sulfonating agent with ultrasonic condition. We've characterized basic structure of sulfonated PVC cation exchange membrane by FT-IR, EDX, water uptake, ion exchange capacity (IEC), electrical resistance (ER), conductivity, ion transport number and surface morphology (SEM). The presence of sulfonic groups in the sulfonated PVC cation exchange membrane was confirmed by FT-IR. The maximum values of water uptake, IEC, electrical resistance and ion transport number were 40.2%, 0.87 meq/g, $35.2{\Omega}{\cdot}cm^2$ and 0.88, respectively.

• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.2
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• pp.93-101
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• 2002

We have proposed and fabricated two lateral type field emission diodes, poly-Si emitter by utilizing the local oxidation of silicon (LOCOS) and GaN emitter using metal organic chemical vapor deposition (MOCVD) process. The fabricated poly-Si diode exhibited excellent electrical characteristics such as a very low turn-on voltage of 2 V and a high emission current of $300{\;}\bu\textrm{A}/tip$ at the anode-to-cathode voltage of 25 V. These superior field emission characteristics was speculated as a result of strong surface modification inducing a quasi-negative electron affinity and the increase of emitting sites due to local sharp protrusions by an appropriate activation treatment. In respect, two kinds of procedures were proposed for the fabrication of the lateral type GaN emitter: a selective etching method with electron cyclotron resonance-reactive ion etching (ECR-RIE) or a simple selective growth by utilizing $Si_3N_4$ film as a masking layer. The fabricated device using the ECR-RIE exhibited electrical characteristics such as a turn-on voltage of 35 V for $7\bu\textrm{m}$ gap and an emission current of~580 nA/l0tips at anode-to-cathode voltage of 100 V. These new field emission characteristics of GaN tips are believed to be due to a low electron affinity as well as the shorter inter-electrode distance. Compared to lateral type GaN field emission diode using ECR-RIE, re-grown GaN emitters shows sharper shape tips and shorter inter-electrode distance.

• Bulletin of the Korean Chemical Society
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• v.32 no.8
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• pp.2771-2775
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• 2011

Poly-ethylenedioxypyrrole (PEDOP) coated thiolated multiwall carbon nanotubes palladium nanoparticles (MWCNTs-Pd) modified glassy carbon electrode (GCE) [PEDOP/MWCNTs-Pd/GCE] for the determination of hydroquinone (HQ) and it’s isomer catechol (CA) were synthesized and compared with bare GCE and thiolated multiwall carbon nanotubes (MWCNTs-SH/GCE). The modification could be made by simple processes on a GCE with MWCNTs-Pd covered by PEDOP in a 0.05 M tetrabutylammonium perchlorate (TBAP)/MeCN solution system. A well-defined peak potential evaluation of the oxidation of hydroquinone to quinone at 0.05 V (vs. Ag/AgCl), and electrochemical reduction back to hydroquinone were found by cyclic voltammetry (CV) in phosphate buffered saline (PBS) at pH 7.4. Peak current values increased linearly with increasing hydroquinone contents. The peak separation between the anodic and cathodic peaks at the PEDOP/MWCNTs-Pd/GCE was ${\Delta}Ep$ = 40 mV for HQ and ${\Delta}Ep$ = 70 mV for CA, resulting in a higher electron transfer rate. Moreover, good reproducibility, excellent storage stability, a wide linear range (0.1 ${\mu}M$ - 5 mM for HQ and 0.01 ${\mu}M$ - 6 mM for CA), and low detection limits ($2.9{\times}10^{-8}$ M for HQ and $2.6{\times}10^{-8}$ M for CA; S/N = 3) were determined using differential pulse voltammetry (DPV) and amperometric responses; this makes it a promising candidate as a sensor for determination of HQ and CA.

• Journal of the korean academy of Pediatric Dentistry
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• v.23 no.3
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• pp.631-639
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• 1996

Electrosurgical technique have been used in dentistry as an aid to soft tissue management for nearly 60 years. However, it was not until the late 1960s that the principles of electrosurgery were understood and improved equipment became available. Electrosurgery is a surgical procedure performed on soft tissue utilizing controlled high frequency electricaI(radio-frequency) currents in the range of 1,500,000 to 7,500,000 cyclesper second. The radio-frequency energy used in electrosurgery is able to cut and coagulate tissue because it focuses the energy at the small, active electrode. Advantages of electrosurgery for soft-tissue management during dental procedures include improved hemostasis, ease of tissue modification, improved visibility and so on, but adverse healing responses-including necrosis of soft tissue and sequestration of alveolar bone-have been reported. The present report provides examples of treatment of soft tissue and pulp tissue of primary teeth by electrosurgery. The results are as follows; 1. Electrosurgical techniques can be used for various procedures in pedodontics. 2. Electrosurgical procedures provide improved hemostasis and visibility in the operating field, which enable to remove, reshape, and contour soft tissues easily. 3. In pulpotomy technique, it was difficult to expect the variable pulpal response based on the degree of heat accumulation and the conditions of pulp tissues. Therefore, electrosurgical pulpotomy could not be considered as a method superior to formocresol pulpotomy. 4. A greater degree of dexterity and experiences in manipulation of the electrode is required compared with the conventional scalpel surgery.

• Applied Chemistry for Engineering
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• v.25 no.6
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• pp.592-597
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• 2014

The graphite/$SiO_2$ composites as anode materials for lithium-ion batteries were prepared by sol-gel method to improve the graphite's electrochemical characteristics. The prepared graphite/$SiO_2$ composites were analysed by XRD, FE-SEM and EDX. The graphite surface modified by silicon dioxide showed several advantages to stabilize SEI layer. The electrochemical characteristics were investigated for lithium ion battery using graphite/$SiO_2$ as the working electrode and Li metal as the counter electrode. Electrochemical behaviors using organic electrolytes ($LiPF_6$, EC/DMC) were characterized by charge/discharge, cycle, cyclic voltammetry and impedance tests. The lithium ion battery using graphite/$SiO_2$ electrodes had better capacity than that of using graphite electrodes and was able to deliver a discharge capacity with 475 mAh/g at a rate of 0.1 C. Also, the capacity retention ratio of the modified graphite reaches 99% at a rate of 0.8 C.

• Korean Chemical Engineering Research
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• v.52 no.1
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• pp.52-57
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• 2014

The MCMB-$Li_4Ti_5O_{12}$ with core-shell structure was prepared by sol-gel process to improve low cycle capability of MCMB in this study. The electrochemical characteristics were investigated for hybrid capacitor using MCMB-$Li_4Ti_5O_{12}$ as the negative electrode and $LiMn_2O_4$, Active carbon fiber as the positive electrode. The electrochemical behaviors of hybrid capacitor using organic electrolytes ($LiPF_6$, EC/DMC/EMC) were characterized by charge/discharge, cyclic voltammetry, cycle and impedance tests. The hybrid capacitor using MCMB-$Li_4Ti_5O_{12}/LiMn_2O_4$ electrodes had better capacitance than MCMB hybrid systems and was able to deliver a specific energy with 67 Wh/kg at a specific power of 781 W/kg.

• Nuclear Engineering and Technology
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• v.54 no.12
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• pp.4441-4448
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• 2022

The electrochemical oxidation process has been widely studied in the field of wastewater treatment for the decomposition of organic materials through oxidation using ·OH generated on the anode. Pt anode electrodes with high durability and long-term operability have a low oxygen evolution potential, making them unsuitable for electrochemical oxidation processes. Therefore, to apply Pt electrodes that are suitable for long-term operation and large-scale processes, it is necessary to develop a new method for improving the decomposition rate of organic materials. This study introduces a method to improve the decomposition rate of organic materials when using a Pt anode electrode in the electrochemical oxidation process for the treatment of organic decontamination liquid waste. Electrochemical decomposition tests were performed using sodium dodecylbenzenesulfonate (SDBS) as a representative organic material and a Pt mesh as the anode electrode. Y₂O₃ particles were introduced into the electrolytic cell to improve the decomposition rate. The decomposition rate significantly improved from 21% to 99%, and the current efficiency also improved. These results can be applied to the electrochemical oxidation process without additional system modification to enhance the decomposition rate and current efficiency.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.146-147
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• 2011

Processing a large area substrate for liquid crystal display (LCD) or solar panel applications in a capacitively coupled plasma (CCP) reactor is becoming increasingly challenging because of the size of the substrate size is no longer negligible compared to the wavelength of the applied radio frequency (RF) power. The situation is even worse when the driving frequency is increased to the Very High Frequency (VHF) range. When the substrate size is still smaller than 1/8 of the wavelength, one can obtain reasonably uniform process results by utilizing with methods such as tailoring the precursor gas distribution by adjustingthrough shower head hole distribution or hole size modification, locally adjusting the distance between the substrate and the electrode, and shaping shower head holes to modulate the hollow cathode effect modifying theand plasma density distribution by shaping shower head holes to adjust the follow cathode effect. At higher frequencies, such as 40 MHz for Gen 8.5 (2.2 m${\times}$2.6 m substrate), these methods are not effective, because the substrate is large enough that first node of the standing wave appears within the substrate. In such a case, the plasma discharge cannot be sustained at the node and results in an extremely non-uniform process. At Applied Materials, we have studied several methods of modifying the standing wave pattern to adjusting improve process non-uniformity for a Gen 8.5 size CCP reactor operating in the VHF range. First, we used magnetic materials (ferrite) to modify wave propagation. We placed ferrite blocks along two opposing edges of the powered electrode. This changes the boundary condition for electro-magnetic waves, and as a result, the standing wave pattern is significantly stretched towards the ferrite lined edges. In conjunction with a phase modulation technique, we have seen improvement in process uniformity. Another method involves feeding 40 MHz from four feed points near the four corners of the electrode. The phase between each feed points are dynamically adjusted to modify the resulting interference pattern, which in turn modulate the plasma distribution in time and affect the process uniformity. We achieved process uniformity of <20% with this method. A third method involves using two frequencies. In this case 40 MHz is used in a supplementary manner to improve the performance of 13 MHz process. Even at 13 MHz, the RF electric field falls off around the corners and edges on a Gen 8.5 substrate. Although, the conventional methods mentioned above improve the uniformity, they have limitations, and they cannot compensate especially as the applied power is increased, which causes the wavelength becomes shorter. 40 MHz is used to overcome such limitations. 13 MHz is applied at the center, and 40 MHz at the four corners. By modulating the interference between the signals from the four feed points, we found that 40 MHz power is preferentially channeled towards the edges and corners. We will discuss an innovative method of controlling 40 MHz to achieve this effect.