• 한국전기전자재료학회논문지
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• 제26권3호
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• pp.171-176
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• 2013

In this paper, we present a MEMS (micro-electro-mechanical system) implantable blood pressure sensor which has designed and fabricated with consideration of size, design flexibility, and wireless detection. Mechanical and electrical characterizations of the sensor were obtained by mathematical analysis and computer aided simulation. The sensor is composed of two coils and a air gap capacitor formed by separation of the coils. Therefore, the sensor produces its resonant frequency which is changed by external pressure variation. This frequency movement is detected by inductive coupling between the sensor and an external antenna coil. Theoretically analyzed resonant frequency of the sensor under 760 mmHg was calculated to 269.556 MHz. Fused silica was selected as sensor material with consideration of chemical and electrical reaction of human body to the material. $2mm{\times}5mm{\times}0.5mm$ pressure sensors fitted to radial artery were fabricated on the substrates by consecutive microfabrication processes: sputtering, etching, photolithography, direct bonding and laser welding. Resonant frequencies of the fabricated sensors were in the range of 269~284 MHz under 760 mmHg pressure.

• 항공우주시스템공학회지
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• 제16권6호
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• pp.129-137
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• 2022

최근 항공기용 구동기는 전기식 구동기의 높은 정밀도 및 유지관리의 용이성 등으로 인해 기존 유압 중심의 기계시스템에서 전기구동 중심(More/All Electric)으로 기술이 변화하고 있다. 따라서 항공기의 전기 전동기 고장은 치명적인 결함을 넘어 인명피해로도 이어질 수 있다. 전기 전동기의 고장진단은 항공기의 안전성을 보장하는데 필수적인 요소이다. 이에 따라 효율적이고 적절한 고장진단이 요구되며 이러한 고장진단 기술 연구가 활발히 이루어지고 있다. 본 논문에서는 전기 전동기 중 영구자석 동기전동기의 고장 유형과 고장진단 기술 동향에 대해 소개하고 분석한다.

• Steel and Composite Structures
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• 제42권5호
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• pp.699-710
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• 2022

This work presents a comprehensive study on the surface energy effect on the axial frequency analyses of AFGM nanorods in cylindrical coordinates. The AFGM nanorods are considered to be thin, relatively thick, and thick. In thin nanorods, effects of the inertia of lateral motions and the shear stiffness are ignored; in relatively thick nanorods, only the first one is considered; and in thick nanorods, both of them are considered in the kinetic energy and the strain energy of the nanorod, respectively. The surface elasticity theory which includes three surface parameters called surface density, surface stress, and surface Lame constants, is implemented to consider the size effect. The power-law form is considered for variation of the material properties through the axial direction. Hamilton's principle is used to derive the governing equations and boundary conditions. Due to considering the surface stress, the governing equation and boundary condition become inhomogeneous. After homogenization of them using an appropriate change of variable, axial natural frequencies are calculated implementing harmonic differential quadrature (HDQ) method. Comprehensive results including effects of geometric parameters and various material properties are presented for a wide range of boundary condition types. It is believed that this study is a comprehensive one that can help posterities for design and manufacturing of nano-electro-mechanical systems.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 B
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• pp.706-708
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• 2002

Vibration, giving rise to acoustical noise, is an important index of motor performance. The unbalance force due to rotor eccentricity caused by manufacturing imprecision or bearing defects is one possible source of excitation to vibration. With the advent of new high-energy magnetic material together with high precision motor applications, magnetic sources of vibration are becoming more serious. This paper introduces two types of high-speed slotless permanent magnet (PM) machine for electro-mechanical battery and investigates unbalance force due to static eccentricity with finite element method.

• 한국소음진동공학회논문집
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• 제21권12호
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• pp.1152-1158
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• 2011

In this paper a configuration of the load evaluation device for the tilting actuator using hydraulic power is presented, which makes it possible to measure the force action on the tilting actuator. It is possible to measure only current using the conventional electro-mechanical actuator when the bogie is in the process of the tilting. This makes impossible to measure the force acting on the tilting actuator. In order to overcome this problem a kinetic mechanism test system using hydraulic cylinder is proposed. The system are consisted of hydraulic cylinder for the tilting actuation, control system to control hydraulic power, sensors to measure for force and displacement and monitoring system for the user interface.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.1146-1151
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• 2003

Pneumatic servo valve is an electro-mechanical device which change electric signals to a proper pneumatic signals, that is, flowrate and pressure. In this study, a pneumatic servo valve was designed and each simulation was conducted on any variation in the flowrate depending upon the magnetic force of the linear force motor and the displacement of the spool. And permanent magnet was used as a material for the plunger of the servo valve. Thereby, a low electrical power consumption type coil was desinged. And a modeling for the coil design was conducted by using the magnetic circuit. also, the feasibility of the modeling was verified by using a commercial magnetic field analysis program. The designed and fabrication of the spool and sleeve, position sensor, servo controller and the dynamic characteristic verified by the experiment.

• 융복합기술연구소 논문집
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• 제1권2호
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• pp.16-24
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• 2011

The angular electrostatic microactuator using skewed electrode array (SEA) scheme was proposed. The moving and fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, electrostatic FE analysis were carried out and the empirical force model was established for SEA. Simulation was performed to make the comparison between conventional actuators and SEA. The proposed SEA generates actuating torque 2 times greater than a comb-drive and stable actuator displacement 40% greater than a parallel plate type actuator. The angular electrostatic microactuator using skewed SEA scheme was designed and fabricated using SoG process.

• 전기학회논문지
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• 제63권8호
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• pp.1075-1079
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• 2014

In this paper, we describe the analysis and the compensation method of the g-sensitivity error for MEMS vibratory gyroscopes. Usually, the g-sensitivity error has been ignored in the commercial MEMS gyroscope, but it deserves our attention to apply for the missile application as a tactical grade performance. Thus, it is necessary to compensate for the g-sensitivity error to reach a tactical grade performance. Generally, the g-sensitivity error seems intuitively to be a gyroscope bias error proportional to the linear acceleration. However, we assert that the g-sensitivity error mainly causes not a bias error but a scale-factor error. And we verify that the g-sensitivity scale-factor error occurs due to the non-linearity of parallel plate electrodes. Therefore, we propose the compensation method to remove the g-sensitivity scale-factor error. The experimental result showed that a proposed compensation method improved successfully the performance of the MEMS vibratory gyroscope.

• Journal of Biosystems Engineering
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• 제36권5호
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• pp.314-318
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• 2011

Arm-type implements of tractor are mainly utilized for the slope land operation. The proposed hydraulic system was implemented to arm-type implements of tractor. An experiment was conducted to evaluate response characteristics of the designed arm-type implement control system attached by three-point hitch of tractor at various conditions, such as engine speed, pumping rate and cylinder input flow. Effects of the valve response time didn't affect engine speed. The flow rate of pump and cylinder changed to the pressure loss. Also, the pressure loss was within 2 MPa and the response characteristic was sufficient enough to use as the arm-type implement system.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1369-1371
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• 2001

This paper describes on thinning SDB SOI substrates by SDB technology and Electro-chemical etch-stop. The surface of the fabricated SDB SOI substrates is more uniform than that grinding or polishing by mechanical method, and this process is possible to accurate SOI thickness control. During Electrochemical etch-stop, leakage current versus voltage curves were measured for analysis of the open current potential (OCP) point and the passivation potential (PP) poin and determinated to anodic passivation potential. The surface roughness and selectively controlled thickness of the fabricated SOI substrates were analyzed by using AFM and SEM, respectively.