• Proceedings of the KSME Conference
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• 2000.11b
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• pp.174-179
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• 2000

Ultrafine particles have been used widely in many high technology industrial areas. The spherical nonagglomerated and uniform nanometer-size $SiO_2$ particles are synthesized by the direct injection of TEOS(Tetraethyorthosilicate) using electro-hydrodynamic spray ins method. Electro-hydrodynamic spray can generate in the range of submicron-size TEOS particles with high electric charge by applying a high electric field between the liquid injection nozzle and the reaction tube. This TEOS particles are thermally decomposed or oxidized to produce nanometresized $SiO_2$ particles in the reaction tube. Spherical, nonagglomerated and ultrafine particle generated and examined at furnaced temperature, $800^{\circ}C$ and TEOS flowrate of 0.49 or $1.00cm^3/hr$ using SEM and SMPS. As the total gas flowrate changes from 1.51pm to 5.01pm, the mean diameter of $SiO_2$ particle decreases from 120 nm to 68nm.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.25 no.5
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• pp.660-665
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• 2001

Ultrafine particles have been widely used in many high technology industrial areas. The spherical nonagglomerated and uniform nanometer-size SiO$_2$particles are synthesized by the direct injection of TEOS(Tetraethyorthosilicate) using electro-hydrodynamic spraying method. Electro-hydrodynamic spraying can generate submicron-size TEOS droplets having high electric charges by applying a high electric field between the liquid injection nozzle and the reaction tube. These TEOS droplets are evaporated, and thermally decomposed or oxidized to produce nanometresized SiO$_2$particles in the reaction tube. Spherical, nonagglomerated and ultrafine particles are generated in various conditions and examined by using SEM and SMPS. As the total gas flow rate in the furnace changes from 1.5 lpm, the mean diameter of SiO$_2$particle decreases from 120 nm to 68 nm. The synthesized particle charging fractions are also investigated.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2000.11a
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• pp.22-22
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• 2000

DRAM의 고접적화에 따라 기존의 반도체 공정에서 사용중인 여러 가지 기술들이 대부분 그 한계를 보이고 었으며, 대표적인 것이 캐퍼시터 형성기술이다. 따라서 1G DRAM급 이상의 초고집적 회로를 실용화하기 위해서 유전율이 높은 BST ($BrSrTiO_3$) 박막을 이용하여 캐패시터를 제조하려는 기술도 반드시 해결되어야 현재 활발히 실용화 연구가 진행중에 있다. BST 박막을 제조하는 방법은 RF magnetron sputtering, Ion beam reactive co-evaporation, LSM (Liquid Source Misted) CVD, MOCVD 등의 법으로 제조되고 있다. 본 연구에서는 전기-수력 학적 분무(Electro-Hydrodynamic Spray)현상을 이용한 MOCVD에 BaO, SrO, $TiO_2$ 박막을 증착 하여 전기장세기, 기판온도, 시간 등에 따른 특성을 조사하였다. 전기수력학적 분무를 이용한 증착법은 원료를 함유하는 용액을 이용함으로써 이송관의 가열이 필요 없이 장치를 간단하게 할 수 있고, 용액의 유량과 전기장의 세기에 따라 초미세 입자제어도 가능하며, 박막의 조성을 출발 용액으로 부터 조절하는 등의 특징을 가지고 있다. 증착한 박막의 표면, 단면 형상 및 조성을 분석하였고 결정화 여부 및 우선 배향성을 조사하였다. 현재는 개별 박막의 표현 형상과 조성에 대한 연구 결과를 얻었으며, 계속해서 박 막의 여러 특성에 대하 연구할 계획이다.

• Journal of ILASS-Korea
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• v.11 no.1
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• pp.7-16
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• 2006

Performance of thin films fabricated with the electrostatic spray deposition (ESD) technique is strongly governed by surface morphology, which depends on deposition parameters such as deposition time and temperature, solution properties, and surface characteristics of substrates. In this article, the state of the art on the relationships between the surface morphology and the deposition parameters is presented. Also studies on the electro-hydrodynamic atomization process and the motion of drops relevant to the ESD technique are briefly reviewed, and the future research works are suggested.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2004.04a
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• pp.55-56
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• 2004

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1322-1327
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• 2004

In the present work, a series of experiments have been performed on electro-hydrodynamic atomization of non-conducting liquid using a charge injection type nozzle. Effects of liquid flow rate, input voltage, and distance between the needle and the ground electrode (nozzle-embedded metal plate) have been examined. For fixed electrode distances, total and spray currents increase with increase of liquid flow rate and input voltage. When the distance between the needle and the ground electrode becomes closer, total, leakage and spray current increase, but the onset voltage for dielectric breakdown decreases. When the electric field strength of the liquid jet exceeds that for the air breakdown, a portion of the electric charges in the liquid jet is dissipated into the ambient air, and the charge density shows a limiting value. Atomization quality can be improved by increasing the flow rate because the higher charge density is achieved with the larger liquid velocity in addition to the enhanced aerodynamic effect.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.11
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• pp.1376-1383
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• 2004

In the present work, a series of experiments have been performed on electro-hydrodynamic atomization of non-conducting liquid using a charge injection type nozzle. Effects of liquid flow rate, input voltage, and distance between the needle and the ground electrode (nozzle-embedded metal plate) have been examined. For fixed electrode distances, total and spray currents increase with the increase of liquid flow rate and input voltage. When the distance between the needle tip and the ground electrode becomes closer, the total, leakage and spray currents increase, while the onset voltage for the dielectric breakdown decreases. When the electric field strength of the liquid jet exceeds that for the air breakdown, a portion of the electric charges in the liquid jet is dissipated into the ambient air, and the charge density shows a limiting value. Atomization quality can be improved by increasing the liquid flow rate due to the higher charge density and the enhanced aerodynamic effect.