• 전기화학회지
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• 제20권1호
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• pp.1-6
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• 2017

본 연구에서는 구리 배선 공정에서 구리 씨앗층 표면에 형성되는 구리 자연산화물을 제거하는 표면 전처리가 후속 구리 전착에 미치는 영향을 살펴보았다. 구리 배선 공정의 화학적 기계적 연마 공정에서 사용하는 citric acid 기반의 용액을 구리 표면 전처리 과정에 적용하여 표면에 존재하는 구리 자연 산화물을 제거하였고, 용액 조성 변화를 통해 산화물 제거의 선택성을 높여 구리 씨앗층의 손실을 최소화하였다. 또한 표면 전처리 후 구리 전해 전착과 무전해 전착을 시도하여 전착한 박막의 비저항, 표면 거칠기 등의 성질을 비교하고, 이를 통해 선택적으로 구리 산화물을 제거한 이후에 전착된 박막의 비저항과 표면 거칠기가 가장 낮게 나타남을 확인하였다.

• 한국표면공학회지
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• 제51권5호
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• pp.325-331
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• 2018

Calcium carbonate($CaCO_3$) films were formed by an eco-friendly electro-chemical technique on steel substrates in synthesized distilled water solutions containing $NaHCO_3$, $CaCl_2$ and $MgCl_2$ with different ratio respectively. It was investigated to confirm the effect of $Mg^{2+}$ concentration by Scanning Electron Microscopy(SEM), Energy Dispersive x-ray Spectroscopy(EDS) and X-Ray Diffraction(XRD) respectively. From an experimental result, only calcite crystals were found in solution containing no $Mg^{2+}$. By increasing concentration of $Mg^{2+}$, deposition rate decreased and crystal structure was transformed form calcite to aragonite. In case of including $MgCl_2$ 300mM in synthesized solutions containing $NaHCO_3$, $CaCl_2$ 60mM, it was showed over the 90% of aragonite contents which have quite high deposition rate of aragonite. Also, it was confirmed that $Mg^{2+}$ acted as inhibitor on the films which made transforming from calcite to aragonite.

• 한국초전도ㆍ저온공학회논문지
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• 제10권1호
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• pp.15-18
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• 2008

To achieve high transport current without degradation under magnetic field, it is essential to artificially generate the pinning sites at which moving magnetic flux can be pinned. In this work, $ZrO_2$ nanodots were formed on the substrate surface using electro-spray deposition method. On top of the nanodots, the extended and effective pinning centers can be created. The positively charged Zr precursor solution was sprayed out from the needle using the corona discharge phenomena. Then, the sprayed precursor was deposited onto the negatively charged substrate surface followed by the heat treatment under the controlled atmosphere. Using the electrostatic force among the charged particles of precursor, evenly distributed and nano-sized dots were formed on the substrate surface. The size and density of the nanodots were studied by Atomic Force Microscopy. Also discussed are the effect of the deposition time and solution concentration on the size and density of the nanodot and processing variables in electro-spray method for the effective flux pinning centers in the superconducting films.

• 품질경영학회지
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• 제42권2호
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• pp.179-187
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• 2014

Purpose: Since several problems were found when present non-conducting metal coating process was applied to mass production, we study and develop to improve those problems. Methods: In this paper, a couple of analysis methods such as surface hardness, XPS spectrum analysis, morphology, and reflection ratio were used. Results: This paper suggest a new possibility of Non-conducting thin metal coating method that has quality of mass production phase without UV coating process. Conclusion: By the result of analysis, we can set optimized process conditions of the electro deposition coating using electron beam.

• 한국정밀공학회지
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• 제22권12호
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• pp.170-174
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• 2005

A numerical system to extract effective elastic properties of polycrystalline thin-films for MEMS devices is developed. In this system, the statistical model based on lattice system is used for modeling the microstructure evolution simulation and the key kinetics parameters of given micrograph, grain distributions and deposition process can be extracted by inverse method proposed in the system. In this work, effects of kinetics parameters on the extraction of effective elastic properties of polycrystalline thin-films are studied by using statistical method. Effects of the fraction of the potential site($f_p$) among the parameters for deposition process of microstructure on the extraction of effective elastic properties of polycrystalline thin-films are investigated. For this research, polysilicon is applied to this system as the polycrystalline thin-films.

• Carbon letters
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• 제10권3호
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• pp.213-216
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• 2009

The electrochemical deposition of Pt nanoparticles on carbon nanotubes (CNTs) supports and their catalytic activities for methanol electro-oxidation were investigated. Pt catalysts of 4~12 nm average crystalline size were grown on supports by potential cycling methods. Electro-plating of 12 min time by potential cycling method was sufficient to obtain small crystalline size 4.5 nm particles, showing a good electrochemical activity. The catalysts' loading contents were enhanced by increasing the deposition time. The crystalline sizes and morphology of the Pt/support catalysts were evaluated using X-ray Diffraction (XRD) and Transmission Electron Microscopy (TEM). The electrochemical behaviors of the Pt/support catalysts were investigated according to their characteristic current-potential curves in a methanol solution. In the result, the electrochemical activity increased with increased plating time, reaching the maximum at 12 min, and then decreased. The enhanced electroactivity for catalysts was correlated to the crystalline size and dispersion state of the catalysts.

• 한국세라믹학회지
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• 제42권7호
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• pp.521-524
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• 2005

ZnO 2-D nanowall structure with around 100 nm thickness, which is composed of tens of nm scale ZnO single crystals, was fabricated through the low temperature chemical solution growth method. Electro Chemical Deposition (ECD) technique was applied to attach the ZnO seed crystals on ITO coated glass substrate. The ZnO nanowall structure was grown in the 0.015 mol$\%$ of aqueous solution of zinc nitrate and hexamethenamine at 60$^{\circ}C$ for 20 - 40 h. The nanowall structure depends on the ECD condition or the applied voltage and duration time. The nanowall shows a photoluminescence around 550 - 700 nm spectrum range.

• JSTS:Journal of Semiconductor Technology and Science
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• 제5권2호
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• pp.127-130
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• 2005

The structural and electrical properties of InN/GaN multiple quantum wells, which were grown by metalorganic chemical vapor deposition, were characterized by transmission electron microscopy and electroluminescence measurements. As the quantum well growth time was changed, the wavelength was varied from 451 to 531 nm. In the varied current conditions, the blue LED with the InN MQW structures did not have the wavelength shift. With this result, we can expect that the white LEDs with the InN MQW structures do not show the color temperature changes with the variations of applied currents.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.1560-1563
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• 2009

We fabricated Dye-Sensitized Solar Cells(DSSCs) which are modified by using liquid crystals(LCs) and electro-deposition on cathode electrode in order to apply to flexible DSSCs. We deposited Pt metal layers on ITO electrode through the method of electro-deposition process during low-temperature. We could expect the long-term stability by using ionic liquid(IL) and liquid crystals(LCs). We can also see the enhancement of efficiency through orientation of LCs in gel-state electrolyte using liquid crystals at the DSSCs.

• 한국정밀공학회지
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• 제30권6호
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• pp.567-572
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• 2013

In many electro-devices, the vacuum process is used as the manufacturing process. However, the vacuum process has a problem, it is difficult to apply to a continuous process such as a R2R(roll to roll) printing process. In this paper, we propose an ESD (electro static deposition) printing process has been used to apply an organic solar cell of thin film forming. ESD is a method of liquid atomization by electrical forces, an electrostatic atomizer sprays micro-drops from the solution injected into the capillary with electrostatic force generated by electric potential of about several tens kV. The organic solar cell based on a P3HT/PCBM active layer and a PEDOT:PSS electron blocking layer prepared from ESD method shows solar-to-electrical conversion efficiency of 1.42% at AM 1.5G 1sun light illumination, while 1.86% efficiency is observed when the ESD deposition of P3HT/PCBM is performed on a spin-coated PEDOT:PSS layer.