• Title/Summary/Keyword: Electro chemical deposition

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Electro-chemical Mechanical Deposition for Planarization of Cu Interconnect (Cu 배선의 평탄화를 위한 ECMD에 관한 연구)

  • Jeong, Sukhoon;Seo, Heondeok;Park, Boumyoung;Park, Jaehong;Park, Seungmin;Jeong, Moonki;Jeong, Haedo;Kim, Hyoungjae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.9
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    • pp.793-797
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    • 2005
  • This study introduces Electro-chemical Mechanical Deposition(ECMD) lot making Cu interconnect. ECMD is a novel technique that has ability to deposit planar conductive films on non-planar substrate surfaces. Technique involves electrochemical deposition(ECD) and mechanical sweeping of the substrate surface Preferential deposition into the cavities on the substrate surface nay be achieved through two difference mechanisms. The first mechanism is more chemical and essential. It involves enhancing deposition into the cavities where mechanical sweeping does not reach. The second mechanism involves reducing deposition onto surface that is swept. In this study, we demonstrate ECMD process and characteristic. We proceeded this experiment by changing of distribution of current density on divided water area zones and use different pad types.

Chemical Vapor Deposition Polymerization of Poly(arylenevinylene)s and Applications to Nanoscience

  • Joo, Sung-Hoon;Lee, Chun-Young;Kim, Kyung-kon;Lee, Ki-Ryong;Jin, Jung-Il
    • Bulletin of the Korean Chemical Society
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    • v.27 no.2
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    • pp.169-184
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    • 2006
  • A review is made on the chemical vapor deposition polymerization (CVDP) of insoluble and infusible poly(arylenevinylene)s and its applications to nanoscience. Poly(p-phenylenevinylene) (PPV), poly(naphthylenevinylene)s, poly(2,5-thinenylenevinylene) (PTV), and other homologous polymers containing oligothiophenes could be prepared by the CVDP method in the form of films, tubes, and fibers of nano dimensions. They would be readily converted to graphitic carbons of different structures by thermal treatment. Field emission FE) of carbonized PPV nanotubes, photoconductivity of carbonized PPV/PPV bilayer nanotubes and nanofilms also were studied.

Application of Electro-deposition Method for Crack Closing and Surface Improvement of Reinforced Concrete (철근콘크리트의 균열폐색 및 표면개선을 위한 전착의 응용)

  • 문한영;류재석
    • Journal of the Korea Concrete Institute
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    • v.11 no.6
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    • pp.79-88
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    • 1999
  • In this paper, the electro-deposition method for the rehabilitation of cracked concrete, based on the electro-chemical technique, is presented. The main purpose of this paper is to apply this technique to reinforced concrete members on land. After cracking with a specified load(crack width 0.5mm), 10$\times$10$\times$20cm concrete specimens with embedded steel bars were immersed in several solutions, then a constant current density between the embedded steel in concrete and an electrode in the solution was applied for 4~20 weeks. The results indicate that electro-deposits formed in this process are able to close concrete cracks and to coat the concrete surface and that formation of these electro-deposits is confirmed to have an effect of protection against detrimental materials. Therefore, it is demonstrated that the electro-deposition method can be usefully applied for the rehabilitation technique of concrete.

Electrochemical Properties of Graphene-vanadium Oxide Composite Prepared by Electro-deposition for Electrochemical Capacitors (양극전착을 통한 그래핀-바나듐 산화물 복합체 제조 및 전기화학적 특성평가)

  • Jeong, Heeyoung;Jeong, Sang Mun
    • Korean Chemical Engineering Research
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    • v.53 no.2
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    • pp.131-136
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    • 2015
  • The nanostructural graphene/vanadium oxide (graphene/$V_2O_5$) composite with enhanced capacitance was synthesized by the electro-deposition in 0.5 M $VOSO_4$ solution. The morphology of composites was characterized using scanning electron microscopy (SEM), x-ray diffraction pattern (XRD), and x-ray photoelectron spectroscopy (XPS). The oxidation states of the electro-deposited vanadium oxide was found to be $V^{5+}$ and $V^{4+}$. The morphology of the prepared graphene/$V_2O_5$ composite exhibits a netlike nano-structure with $V_2O_5$ nanorods in about 100 nm diameter, which could lead a better contact between electrolyte an electrode. The composite with a deposition time of 4,000 s exhibits the specific capacitance of $854mF/cm^2$ at a scan rate of 20 mV/s and the capacitance retention of 53% after 1000 CV cycles.

Fabrication of 2-Dimensional ZnO Nanowall Structure (2차원 ZnO 나노벽 구조 제조)

  • Kim, Young-Jung;Cao, Guozhong;Kim, Yeong-Cheol;Ahn, Seung-Joon;Min, Joon-Won
    • Journal of the Korean Ceramic Society
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    • v.42 no.7 s.278
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    • pp.521-524
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    • 2005
  • ZnO 2-D nanowall structure with around 100 nm thickness, which is composed of tens of nm scale ZnO single crystals, was fabricated through the low temperature chemical solution growth method. Electro Chemical Deposition (ECD) technique was applied to attach the ZnO seed crystals on ITO coated glass substrate. The ZnO nanowall structure was grown in the 0.015 mol$\%$ of aqueous solution of zinc nitrate and hexamethenamine at 60$^{\circ}C$ for 20 - 40 h. The nanowall structure depends on the ECD condition or the applied voltage and duration time. The nanowall shows a photoluminescence around 550 - 700 nm spectrum range.

Facile Chemical Growth of Cu(OH)2 Thin Film Electrodes for High Performance Supercapacitors (간단한 화학적 합성을 통한 고성능 슈퍼캐패시터용 수산화 구리 전극)

  • Patil, U.M.;Nam, Min Sik;Shinde, N.M.;Jun, Seong Chan
    • KEPCO Journal on Electric Power and Energy
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    • v.1 no.1
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    • pp.175-180
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    • 2015
  • A facile soft chemical synthesis route is used to grow nano-buds of copper hydroxide [$Cu(OH)_2$] thin films on stainless steel substrate[SS]. Besides different chemical methods for synthesis of $Cu(OH)_2$ nanostructure, the chemical bath deposition (CBD) is attractive for its simplicity and environment friendly condition. The structural, morphological, and electro-chemical properties of $Cu(OH)_2$ thin films are studied by means of X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), field emission scanning electron microscopy (FESEM), cyclic voltammetry (CV) and galvanostatic charge-discharge (GCD) measurement techniques. The results showed that, facile chemical synthesis route allows to form the polycrystalline, granular nano-buds of $Cu(OH)_2$ thin films. The electrochemical properties of $Cu(OH)_2$ thin films are studied in an aqueous 1 M KOH electrolyte using cyclic voltammetry. The sample exhibited supercapacitive behavior with $340Fg^{-1}$ specific capacitance. Moreover, electrochemical capacitive measurements of $Cu(OH)_2/SS$ electrode exhibit a high specific energy and power density about ${\sim}83Wh\;kg^{-1}$ and ${\sim}3.1kW\;kg^{-1}$, respectively, at $1mA\;cm^{-2}$ current density. The superior electrochemical properties of copper hydroxide ($Cu(OH)_2/SS$) electrode with nano-buds like structure mutually improves pseudocapacitive performance. This work evokes scalable chemical synthesis with the enhanced supercapacitive performance of $Cu(OH)_2/SS$ electrode in energy storage devices.

Conductive Polymer Coated Electro-active Paper (EAPap) as Hybrid Actuator (전도성 폴리머와 셀룰로오스 종이를 결합한 EAPap 작동기)

  • Yun, Sung-Ryul;Kim, Jae-Hwan;Ounaies, Zoubeida;Deshpande, S.D.
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2004.11a
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    • pp.275-278
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    • 2004
  • Electro-Active Paper (EAPap) is attractive for EAP actuator due to its merit in terms of light weight, dry condition, large displacement output, low actuation voltage and low power consumption. The EAPap is based on cellulose paper, and is shown to involve primarily transport of ions in response to an external electric field. This actuating mechanism is similar to conductive polymer based actuators. For performance improvement of EAPap, hybrid actuators are tried. The actuators based on cellulose paper attached conducting polypyrrole, polyaniline and single wall carbon nanotube/polyaniline(emeraldine base) have been achieved by Electro chemical deposition and mechanical deposition of the polymers onto cellulose paper.

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Synthesis and electrochemical analysis of Pt-loaded, polypyrrole-decorated, graphene-composite electrodes

  • Park, Jiyoung;Kim, Seok
    • Carbon letters
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    • v.14 no.2
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    • pp.117-120
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    • 2013
  • In this study, an electro-catalyst of Pt nanoparticles supported by polypyrrole-functionalized graphene (Pt/PPy-reduced graphene oxide [RGO]) is reported. The Pt nanoparticles are deposited on the PPy-RGO composite by chemical reduction of H2PtCl6 using NaBH4. The presence of graphene (RGO) caused higher activity. This might have been due to increased electro-chemically accessible surface areas, increased electronic conductivity, and easier charge-transfer at polymer-electrolyte interfaces, allowing higher dispersion and utilization of the deposited Pt nano-particles. Microstructure, morphology and crystallinity of the synthesized materials were investigated using X-ray diffraction and transmission electron microscopy. The results showed successful deposition of Pt nano-particles, with crystallite size of about 2.7 nm, on the PPy-RGO support film. Catalytic activity for methanol electro-oxidation in fuel cells was investigated using cyclic voltammetry. The fundamental electrochemical test results indicated that the electro-catalytic activity, for methanol oxidation, of the Pt/PPy-RGO combination was much better than for commercial catalyst.