• 제목/요약/키워드: Electro chemical deposition

검색결과 88건 처리시간 0.024초

Cu 배선의 평탄화를 위한 ECMD에 관한 연구 (Electro-chemical Mechanical Deposition for Planarization of Cu Interconnect)

  • 정석훈;서헌덕;박범영;박재홍;박성민;정문기;정해도;김형재
    • 한국전기전자재료학회논문지
    • /
    • 제18권9호
    • /
    • pp.793-797
    • /
    • 2005
  • This study introduces Electro-chemical Mechanical Deposition(ECMD) lot making Cu interconnect. ECMD is a novel technique that has ability to deposit planar conductive films on non-planar substrate surfaces. Technique involves electrochemical deposition(ECD) and mechanical sweeping of the substrate surface Preferential deposition into the cavities on the substrate surface nay be achieved through two difference mechanisms. The first mechanism is more chemical and essential. It involves enhancing deposition into the cavities where mechanical sweeping does not reach. The second mechanism involves reducing deposition onto surface that is swept. In this study, we demonstrate ECMD process and characteristic. We proceeded this experiment by changing of distribution of current density on divided water area zones and use different pad types.

Chemical Vapor Deposition Polymerization of Poly(arylenevinylene)s and Applications to Nanoscience

  • Joo, Sung-Hoon;Lee, Chun-Young;Kim, Kyung-kon;Lee, Ki-Ryong;Jin, Jung-Il
    • Bulletin of the Korean Chemical Society
    • /
    • 제27권2호
    • /
    • pp.169-184
    • /
    • 2006
  • A review is made on the chemical vapor deposition polymerization (CVDP) of insoluble and infusible poly(arylenevinylene)s and its applications to nanoscience. Poly(p-phenylenevinylene) (PPV), poly(naphthylenevinylene)s, poly(2,5-thinenylenevinylene) (PTV), and other homologous polymers containing oligothiophenes could be prepared by the CVDP method in the form of films, tubes, and fibers of nano dimensions. They would be readily converted to graphitic carbons of different structures by thermal treatment. Field emission FE) of carbonized PPV nanotubes, photoconductivity of carbonized PPV/PPV bilayer nanotubes and nanofilms also were studied.

철근콘크리트의 균열폐색 및 표면개선을 위한 전착의 응용 (Application of Electro-deposition Method for Crack Closing and Surface Improvement of Reinforced Concrete)

  • 문한영;류재석
    • 콘크리트학회논문집
    • /
    • 제11권6호
    • /
    • pp.79-88
    • /
    • 1999
  • In this paper, the electro-deposition method for the rehabilitation of cracked concrete, based on the electro-chemical technique, is presented. The main purpose of this paper is to apply this technique to reinforced concrete members on land. After cracking with a specified load(crack width 0.5mm), 10$\times$10$\times$20cm concrete specimens with embedded steel bars were immersed in several solutions, then a constant current density between the embedded steel in concrete and an electrode in the solution was applied for 4~20 weeks. The results indicate that electro-deposits formed in this process are able to close concrete cracks and to coat the concrete surface and that formation of these electro-deposits is confirmed to have an effect of protection against detrimental materials. Therefore, it is demonstrated that the electro-deposition method can be usefully applied for the rehabilitation technique of concrete.

양극전착을 통한 그래핀-바나듐 산화물 복합체 제조 및 전기화학적 특성평가 (Electrochemical Properties of Graphene-vanadium Oxide Composite Prepared by Electro-deposition for Electrochemical Capacitors)

  • 정희영;정상문
    • Korean Chemical Engineering Research
    • /
    • 제53권2호
    • /
    • pp.131-136
    • /
    • 2015
  • 본 연구에서는 전극 활물질로서 그래핀-바나듐 산화물 복합체를 pH 1.8 조건에서 0.5M $VOSO_4$ 수용액을 이용하여 전기화학적 전착을 이용해 합성하였다. 전착공정 후 다공성 바나듐 산화물이 작업전극에 생성된 것을 SEM, XRD, XPS를 통해 확인하였으며 생성된 바나듐 산화물은 $V^{5+}$$V^{4+}$로 존재한다. 그래핀에 전착된 바나듐 산화물의 직경 약 100 nm의 나노로드로 이루어진 망상 구조는 전극과 전해질과의 접촉을 향상시킨다. 4000 초의 전착공정을 거친 그래핀-바나듐 산화물 복합체를 작업전극으로 하여 3전극 셀에서 전기화학적 특성을 평가한 결과 20 mV/s의 주사속도에서 $854mF/cm^2$의 높은 정전용량을 나타내었고 1000회 충방전 후 초기 용량의 53%가 유지되었다.

2차원 ZnO 나노벽 구조 제조 (Fabrication of 2-Dimensional ZnO Nanowall Structure)

  • 김영정;;김영철;안승준;민준원
    • 한국세라믹학회지
    • /
    • 제42권7호
    • /
    • pp.521-524
    • /
    • 2005
  • ZnO 2-D nanowall structure with around 100 nm thickness, which is composed of tens of nm scale ZnO single crystals, was fabricated through the low temperature chemical solution growth method. Electro Chemical Deposition (ECD) technique was applied to attach the ZnO seed crystals on ITO coated glass substrate. The ZnO nanowall structure was grown in the 0.015 mol$\%$ of aqueous solution of zinc nitrate and hexamethenamine at 60$^{\circ}C$ for 20 - 40 h. The nanowall structure depends on the ECD condition or the applied voltage and duration time. The nanowall shows a photoluminescence around 550 - 700 nm spectrum range.

간단한 화학적 합성을 통한 고성능 슈퍼캐패시터용 수산화 구리 전극 (Facile Chemical Growth of Cu(OH)2 Thin Film Electrodes for High Performance Supercapacitors)

  • ;남민식;;전성찬
    • KEPCO Journal on Electric Power and Energy
    • /
    • 제1권1호
    • /
    • pp.175-180
    • /
    • 2015
  • 본 연구에서는 간단한 화학적 합성 방법을 통하여 스테인레스 기판 위에 nano-bud 형태의 수산화 구리 박막을 형성하였다. 그리고 또 다른 합성 방법인 chemical bath deposition을 이용하여 수산화 구리 나노 구조를 간단하고 친환경적으로 형성하였다. 수산화 구리 박막의 구조적 연구는 X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), field emission scanning electron microscopy (FESEM) 방법을 통하여 이루어졌으며 다결정의 nano-bud 형상을 확인할 수 있었다. 또한 나노 구조로 합성된 수산화구리 전극의 전기화학적 측정은 1M KOH의 전해질 조건에서 cyclic voltammetry (CV) and galvanostatic charge-discharge (GCD)에서 측정되었으며 $340Fg^{-1}$의 높은 비 용량을 보였다. 또한 $1mA\;cm^{-2}$ 의 전력 밀도에서 ${\sim}83Wh\;kg^{-1}$의 높은 에너지 밀도와 ${\sim}3.1kW\;kg^{-1}$의 높은 출력 밀도를 가지며 향상된 전극의 성능을 보였다. 이러한 뛰어난 의사 캐패시터의 성능은 수산화 구리의 nano-bud 형상에 의한 효과로 확인할 수 있었다. 본 연구를 통하여 화학적 합성 방법의 확장을 통하여 수산화 구리 전극의 에너지 저장 장치로써의 성능을 확인할 수 있었다.

전도성 폴리머와 셀룰로오스 종이를 결합한 EAPap 작동기 (Conductive Polymer Coated Electro-active Paper (EAPap) as Hybrid Actuator)

  • 윤성률;김재환
    • 한국소음진동공학회:학술대회논문집
    • /
    • 한국소음진동공학회 2004년도 추계학술대회논문집
    • /
    • pp.275-278
    • /
    • 2004
  • Electro-Active Paper (EAPap) is attractive for EAP actuator due to its merit in terms of light weight, dry condition, large displacement output, low actuation voltage and low power consumption. The EAPap is based on cellulose paper, and is shown to involve primarily transport of ions in response to an external electric field. This actuating mechanism is similar to conductive polymer based actuators. For performance improvement of EAPap, hybrid actuators are tried. The actuators based on cellulose paper attached conducting polypyrrole, polyaniline and single wall carbon nanotube/polyaniline(emeraldine base) have been achieved by Electro chemical deposition and mechanical deposition of the polymers onto cellulose paper.

  • PDF

Synthesis and electrochemical analysis of Pt-loaded, polypyrrole-decorated, graphene-composite electrodes

  • Park, Jiyoung;Kim, Seok
    • Carbon letters
    • /
    • 제14권2호
    • /
    • pp.117-120
    • /
    • 2013
  • In this study, an electro-catalyst of Pt nanoparticles supported by polypyrrole-functionalized graphene (Pt/PPy-reduced graphene oxide [RGO]) is reported. The Pt nanoparticles are deposited on the PPy-RGO composite by chemical reduction of H2PtCl6 using NaBH4. The presence of graphene (RGO) caused higher activity. This might have been due to increased electro-chemically accessible surface areas, increased electronic conductivity, and easier charge-transfer at polymer-electrolyte interfaces, allowing higher dispersion and utilization of the deposited Pt nano-particles. Microstructure, morphology and crystallinity of the synthesized materials were investigated using X-ray diffraction and transmission electron microscopy. The results showed successful deposition of Pt nano-particles, with crystallite size of about 2.7 nm, on the PPy-RGO support film. Catalytic activity for methanol electro-oxidation in fuel cells was investigated using cyclic voltammetry. The fundamental electrochemical test results indicated that the electro-catalytic activity, for methanol oxidation, of the Pt/PPy-RGO combination was much better than for commercial catalyst.