• Journal of the Semiconductor & Display Technology
• /
• 제21권3호
• /
• pp.101-104
• /
• 2022

Mist-CVD is known to have advantages of low cost and high productivity compared to ALD and PECVD methods. It is capable of reacting to the substrate by misting an aqueous solution using ultrasonic waves under vacuum-free conditions of atmospheric pressure. In particular, Ga₂O₃ is regarded as advanced power semiconductor material because of its high quality of transmittance, and excellent electrical conductivity through N-type doping. In this study, Computational Fluid Dynamics were used to predict the uniformity of the thin film on a large-area substrate. And also the deposition pattern and uniformity were analyzed using the flow velocity and particle tracking method. The uniformity was confirmed by quantifying the deposition cross section with an FIB-SEM, and the consistency of the uniformity prediction was secured through the analysis of the CFD distribution. With the analysis and experimental results, the match rate of deposition area was 80.14% and the match rate of deposition thickness was 55.32%. As the experimental and analysis results were consistent, it was confirmed that it is possible to predict the deposition thickness uniformity of Mist-CVD.

• International Journal of Control, Automation, and Systems
• /
• 제2권2호
• /
• pp.256-262
• /
• 2004

Conventionally, profile non-uniformity has been characterized by relying on approximated profile with angle or anisotropy. In this study, a new non-uniformity model for etch profile is presented by applying a discrete wavelet to the image obtained from a scanning electron microscopy (SEM). Prediction models for wavelet-transformed data are then constructed using a back-propagation neural network. The proposed method was applied to the data collected from the etching of tungsten material. Additionally, 7 experiments were conducted to obtain test data. Model performance was evaluated in terms of the average prediction accuracy (APA) and the best prediction accuracy (BPA). To take into account randomness in initial weights, two hundred models were generated for a given set of training factors. Behaviors of the APA and BPA were investigated as a function of training factors, including training tolerance, hidden neuron, initial weight distribution, and two slopes for bipolar sig-moid and linear function. For all variations in training factors, the APA was not consistent with the BPA. The prediction accuracy was optimized using three approaches, the best model based approach, the average model based approach and the combined model based approach. Despite the largest APA of the first approach, its BPA was smallest compared to the other two approaches.

• Journal of the Korean Society for Precision Engineering
• /
• 제31권3호
• /
• pp.261-268
• /
• 2014

Precision screws have a wide range of industrial applications such as electrical and automotive products. To produce screw threads with high precision, not only high precision manufacturing technology but also reliable measurement technology is required. Machine vision systems have been used in the automatic inspection of screw threads based on backlight illumination, which cannot detect defects on the thread surface. Recently, an omnidirectional inspection system for screw threads was developed to obtain $360^{\circ}$ images of screws, based on front light illumination. In this study, the illumination design for the omnidirectional inspection system was modified by adding a light shield to improve the image uniformity. Optical simulation for various shield designs was performed to analyze image uniformity of the obtained images. The simulation results were analyzed statistically using response surface method, from which optical performance of the omnidirectional inspection system could be optimized in terms of image quality and uniformity.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
• /
• 제18권4호
• /
• pp.372-378
• /
• 2007

This paper presents an improvement of field uniformity in a reverberation chamber with QRDs(Quadratic Residue Diffuser) and also shows the optimal dimension of the QRDs. The QRD is designed for $1{\sim}3\;GHz$ frequency band and the FDTD(finite-Difference Time-Domain) method is used to analyze the field characteristics. At 2 GHz, the standard deviation of test volume in the reverberation chamber is the smallest when the QRD has $30{\sim}60\;%$ coverage of one side of the reverberation chamber and the field uniformity is worsened when the coverage of the QRD is either below 20 % or above 70 % of the area of the side wall. Particularly, the standard deviation of test volume in the reverberation chamber with 30 % coverage of QRD is improved by 1.53 dB compared to that of the reference chamber with no QRDs.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• 제24권7호
• /
• pp.578-583
• /
• 2011

We report on the design of a holographic homogenizer composed of a periodic hologram and a condensing lens. If the hologram is periodic, the homogenizer is free from the alignment error of the incident laser beam. Holographic homogenizer also has an advantage of the flexibility in the size of the target beam. We calculated theoretically the Fraunhofer diffracted wave function when a rectangular laser beam is incident on a periodic hologram. The diffracted wave is the sum of sinc functions at regular distance. The width of each sinc function depends on the size of the incident laser beam and the distance between the sinc functions depends on the period of the hologram. We calculated numerically the diffracted light intensity for various ratios of the size of the incident laser beam to the period of the hologram. The results show that it is possible to make the diffracted beam uniform at a certain value of the ratio. The uniformity is high at the central part of the target area and low near the edge. The more sinc functions are included in the target area, the larger portion of the area becomes uniform and the higher is the uniformity at the central part. Therefore, we can make efficient homogenizer if we design a hologram so that the maximum number of the diffracted beams may be included in the target area.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
• /
• 제17권1호
• /
• pp.74-80
• /
• 2006

This paper presents the characteristics of electromagnetic field uniformity in a reverberation chamber that can be used alternatively for the analysis, test and evaluation of electromagnetic interference and immunity. The dual-band diffuser, which can be used at two different frequency bands in a reverberation chamber, is applied, and it is made of two different single-band Schroeder's Quadratic Residue Diffusers. The FDTD method is used to analyze the field characteristics. Compared with single-band diffuser, the dual-band diffuser shows the improvement in not only expansion of test frequency band but also in characteristics of the field uniformity, polarity, power efficiency, and tolerance. Therefore, the reverberation chamber with the dual-band diffuser is a better facility, for the analysis and measurement of electromagnetic interference and immunity, than the reverberation chamber with a single-band diffuser.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 한국전기전자재료학회 2000년도 춘계학술대회 논문집 디스플레이 광소자 분야
• /
• pp.173-176
• /
• 2000

we analyzed multiple ray tracing in the highly scattering optical transmission(HSOT) polymer plate by means of the Monte carlo simulation. Light transmission behavior in the light guide was simulated by a 3-dimensional ray tracing program considering scattering angle given by the Mie theory and mean free path. To improve the uniformity of the conventional HSOT backlight unit, We employed additionally dot patterns. For the proposed structure, we calculated the light transmission behavior and obtained a bright and uniform backlight unit for a large size LCD panel of more than 12 inch.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• 제59권1호
• /
• pp.134-137
• /
• 2010

An LED sensor luminaire for visual function improvement necessitates the control algorithm for light level adjustment and the appropriate lens design. The control algorithm adapts to surround lighting condition, and thus has the advantages of energy saving and glare reduction. The multi-cell lens design improves color temperature uniformity and spatial light distribution of the luminaire. Experimental and simulated results show that this approach contributes noticeably to energy saving and color temperature uniformity of the LED sensor luminaire.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• 제31권3호
• /
• pp.177-181
• /
• 2018

We prepared ZnS thin films via chemical bath deposition (CBD) in an aqueous solution of ammonia ($NH_3$) and hydrazine ($N_2H_4$). The composition ratio of hydrazine used was 0%, 17%, 22%, 29%, or 50%. We investigated the effects of hydrazine and ammonia on the growth, and the structural and optical properties of ZnS in terms of surface uniformity, voids, and grain size. We found that during the growth of ZnS films, hydrazine was very effective for improving the surface morphology and layer uniformity with fast layer formation, while it had no effect on the bandgap energy, $E_g$.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
• /
• 한국조명전기설비학회 2004년도 학술대회 논문집
• /
• pp.163-168
• /
• 2004

The improvement of perspectives on dark and limited underground space could be an important factor in successful underground space development. Current trend in the apartment underground parking lot requires not only quantitatively energy efficient design and operation, but also qualitative improvement of the space. For this, we need to consider two factors: Firstly, to understand the characteristics of the fluorescent lamp. Secondly, to improve the uniformity ratio of illuminance. In winter season, a way to keep the uniformity and a method not to lower the indoor illuminance level by cold ambient air. Therefore, a change in interval and arrangement of the lighting fixtures is required. Also, in their operation, current time-fixed control method needs to be changed into the control that method considers the use pattern.