• Title/Summary/Keyword: Electrical engineering

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The Changes in the Electrical Properties of $\textrm{BaTiO}_3$-based PTCR Materials due to the addition of (Ca, Sr)$\textrm{TiO}_3$ ($\textrm{TiO}_3$첨가에 의한 $\textrm{BaTiO}_3$계 PTCR 물질의 전기적 특성변화에 대한 연구)

  • Joo, Ji-Won;Kim, Jong-Hwan;Kim, Hwan;Park, Soon-Ja
    • Korean Journal of Materials Research
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    • v.7 no.4
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    • pp.347-353
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    • 1997
  • BaTiO$_{3}$물질은 뛰어난 유전체로 널리 알려져 왔으며 특히 Heywang등이 제안한 PTCR특성은 이 물질의 응용범위를 세라믹 필터, 회로보호소자, 온도감지소자 및 저항가열장치 등으로 확대시켰다. 이러한 특성의 발현기구는 아직까지 밝혀지지 않은 상태이지만 제 특성을 향상시키기 위한 노력은 계속되어왔다. 특히 개발목적에 맞게 온도에 따른 정저항 특성(PTCR; Positive temperature constnat of resistivity phenomena)을 설계하려는 시도가 계속되어 왔으며 그 중에서도 페로브스카아트계의 2가와 4가의 양이온 자리를 등가나 원자가가 다른 양이온으로 치환하여 특성을 개선하려는 시도가 계속되어 왔다. 특히 $Ca^{2+}$나 Sr$^{2+}$$Ba^{2+}$자리를 치환할 수 있는 물질로 개별적인 첨가에 대한 연구는 많은 연구자들에 의해 진행된 상태이지만 최종적인 영향이나 해석에 대해서는 연구자들간에 이견이 많은 상태이다. 이번 실험에서는 BaTiO$_{3}$계에 합성한 (Ca, Sr)TiO$_{3}$를 Ca와 Sr의 상대적인 비를 변화시키면서 전체적인 첨가량을 변화시켜 그에 따른 전기적 특성 및 미세구조를 살펴보았다. (Ca, Sr)TiO$_{3}$의 첨가로 상온저항 및 PTCR특성을 변화시킬 수 있었으며 이를 통해 PTCR물질의 활용범위를 넓힐 수 있는 발판을 마련할 계기가 되었다. 특히 기존의 연구가 주로 개별적인 Ca나 Sr의 첨가에 의한 미세구조와 전기적 특성변화의 연구에 치중해 있었던 것과는 달리 Sr과 Ca을 함께 치환하여 상대적인 비가 특성에 더 중요한 영향을 끼치는 것을 확인하였으며 적절한 합성비를 선택하면 퀴리온도에서의 저항변화폭을 유지하면서 상온저항을 낮출 수 있음을 확인하였다.문했던 연구소인 Shanghai Research Center of Biotechnology, Shanghai Institute of Industrial Microbiology 및 Scientific Research Institute of Food and Fermentation Industry을 소개하고저 한다. 짧은 기간의 방문이라 주로 해당연구소의 자체소개 자료를 중심으로 방문하면서 느낀점을 기술하고저 한다.초염기성암 기원의 사문암이 열수변질작용을 받아 생성되었음을 명확하게 지시하며, 따라서 활석 광석내에 존재하는 녹니석은 활석의 근원 광물로서 녹니석편암 및 녹니석 편마암 매의 녹니석이 활석화되고 남은 잔존광물이 아니라, 주변암에 의해 성분상의 영향을 받은 열수와 사문암과의 변질교대작용에 의한 활석화과정 중에 주로 생성된 것으로 추정된다. 이러한 결과는 연구지역의 활석광상이 초염기성암의 사문암화 작용과 활석화 작용의 두 가지 변질작용에 의해 형성되어졌음을 알려준다.농도 증가 없이 폐 조직에 약 50배 정도의 고농도 cisplatin을 투여할 수 있었으며, 또한 분리 폐 관류 시 cisplatin에 의한 직접적 폐 독성은 발견되지 않았다이 낮았으나 통계학적 의의는 없었다[10.0%(4/40) : 8.2%(20/244), p>0.05]. 결론: 비디오흉강경술에서 재발을 낮추기 위해 수술시 폐야 전체를 관찰하여 존재하는 폐기포를 놓치지 않는 것이 중요하며, 폐기포를 확인하지 못한 경우와 이차성 자연기흉에 대해서는 흉막유착술에 더 세심한 주의가 필요하다는 것을 확인하였다. 비디오흉강경수술은 통증이 적고, 입원기간이 짧고, 사회로의 복귀가 빠르며, 고위험군에 적용할 수 있고, 무엇보다도 미용상의 이점이 크다는 면에서 자연기흉에 대해 유용한 치료방법임에는 틀림이 없으나 개흉술에 비해 재발율이 높고 비용이 비싸다는 문제가 제기되고 있는 만큼 더 세심한 주의와 장기 추적관찰이 필요하리라 사료된다.

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Geochemical Occurrence of Uranium and Radon-222 in Groundwater at Test Borehole Site in the Daejeon area (대전지역 시험용 시추공 지하수내 우라늄 및 라돈-222의 지화학적 산출특성)

  • Jeong, Chan Ho;Ryu, Kun Seok;Kim, Moon Su;Kim, Tae Sung;Han, Jin Suk;Jo, Byung Uk
    • The Journal of Engineering Geology
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    • v.23 no.2
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    • pp.171-186
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    • 2013
  • A drilling project was undertaken to characterize the geochemical relationship and the occurrence of radioactive materials at a test site among public-use groundwaters previously known to have high occurrence of uranium and radon-222 in the Daejeon area. A borehole (121 m deep) was drilled and core rocks mainly consist of two-mica granite, and associated with pegmatite and dykes of intermediate composition. The groundwater samples collected at six different depths in the borehole by a double-packed system showed the pH values ranging from neutral to alkaline (7.10-9.3), and electrical conductivity ranging from 263 to 443 ${\mu}S/cm$. The chemical composition of the borehole groundwaters was of the $Ca-HCO_3(SO_4+Cl)$ type. The uranium and Rn-222 contents in the groundwater were 109-1,020 ppb and 9,190-32,800 pCi/L, respectively. These levels exceed the regulation guidelines of US EPA. The zone of the highest groundwater uranium content occurred at depths of 45 to 55m. The groundwater chemistry in this zone (alkaline, oxidated, and high in bicarbonate) is favorable for the dissolution of uranium into groundwater. The dominant uranium complex in groundwater is likely to be $(UO_2CO_3)^0$ or $(UO_2HCO_3)^+$. Radon-222 content in groundwater shows an increasing trend with depth. The uranium and thorium contents in the core were 0.372-47.42 ppm and 0.388-11.22 ppm, respectively. These levels are higher values than those previously been reported in Korea. Microscopic observations and electron microprobe analysis(EPMA) revealed that the minerals containing U and Th are monazite, apatite, epidote, and feldspar. U and Th in these minerals are likely to substitute for major elements in crystal lattice.

Effects of Column Diameter on the Holdups of Bubble, Wake and Continuous Liquid Phase in Bubble Columns with Viscous Liquid Medium (점성액체 기포탑에서 탑의 직경이 기포, wake 및 연속액상 체류량에 미치는 영향)

  • Lim, Dae Ho;Jang, Ji Hwa;Kang, Yong;Jun, Ki Won
    • Korean Chemical Engineering Research
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    • v.49 no.5
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    • pp.582-587
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    • 2011
  • Holdup characteristics of bubble, wake and continuous liquid phases were investigated in bubble columns with viscous liquid media. Effects of column diameter(0.051, 0.076, 0.102 and 0.152 m ID), gas velocity($U_G$=0.02~0.16 m/s) and liquid viscosity(${\mu}_L$=0.001~0.050 $Pa{\cdot}s$) of continuous liquid media on the holdups of bubble, wake and continuous liquid phases were discussed. The three phase such as bubble, wake and continuous liquid phases were classified successfully by adapting the dual electrical resistivity probe method. Compressed filtered air and water or aqueous solutions of CMC(Carboxy Methyl Cellulose) were used as a gas and a liquid phase, respectively. To detect the wake as well as bubble phases in the bubble column continuously, a data acquisition system(DT 2805 Lab Card) with personal computer was used. The analog signals obtained from the probe circuit were processed to produce the digital data, from which the wake phase was detected behind the multi-bubbles as well as single bubbles rising in the bubble columns. The holdup of bubble and wake phases decreased but that of continuous liquid media increased, with an increase in the column diameter or liquid viscosity. However, the holdup of bubble and wake phases increased but that of continuous media decreased with an increase in the gas velocity. The holdup ratio of wake to wake to bubble phase decreased with an increase in the column diameter or gas velocity, however, increased with an increase in the viscosity of con-tinuous liquid media. The holdups of bubble, wake and continuous liquid media could be correlated in terms of operating variables within this experimental conditions as: ${\varepsilon}_B=0.043D^{-0.18}U_G^{0.56}{\mu}_L^{-0.13}$, ${\varepsilon}_W=0.003D^{-0.85}U_G^{0.46}{\mu}_L^{-0.10}$, ${\varepsilon}_C=1.179D^{0.09}U_G^{-0.13}{\mu}_L^{0.04}$.

Feasibility Test on Automatic Control of Soil Water Potential Using a Portable Irrigation Controller with an Electrical Resistance-based Watermark Sensor (전기저항식 워터마크센서기반 소형 관수장치의 토양 수분퍼텐셜 자동제어 효용성 평가)

  • Kim, Hak-Jin;Roh, Mi-Young;Lee, Dong-Hoon;Jeon, Sang-Ho;Hur, Seung-Oh;Choi, Jin-Yong;Chung, Sun-Ok;Rhee, Joong-Yong
    • Journal of Bio-Environment Control
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    • v.20 no.2
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    • pp.93-100
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    • 2011
  • Maintenance of adequate soil water potential during the period of crop growth is necessary to support optimum plant growth and yields. A better understanding of soil water movement within and below the rooting zone can facilitate optimal irrigation scheduling aimed at minimizing the adverse effects of water stress on crop growth and development and the leaching of water below the root zone which can have adverse environmental effects. The objective of this study was to evaluate the feasibility of using a portable irrigation controller with an Watermark sensor for the cultivation of drip-irrigated vegetable crops in a greenhouse. The control capability of the irrigation controller for a soil water potential of -20 kPa was evaluated under summer conditions by cultivating 45-day-old tomato plants grown in three differently textured soils (sandy loam, loam, and loamy sands). Water contents through each soil profile were continuously monitored using three Sentek probes, each consisting of three capacitance sensors at 10, 20, and 30 cm depths. Even though a repeatable cycling of soil water potential occurred for the potential treatment, the lower limit of the Watermark (about 0 kPa) obtained in this study presented a limitation of using the Watermark sensor for optimal irrigation of tomato plants where -20 kPa was used as a point for triggering irrigations. This problem might be related to the slow response time and inadequate soil-sensor interface of the Watermark sensor as compared to a porous and ceramic cup-based tensiometer with a sensitive pressure transducer. In addition, the irrigation time of 50 to 60 min at each of the irrigation operation gave a rapid drop of the potential to zero, resulting in over irrigation of tomatoes. There were differences in water content among the three different soil types under the variable rate irrigation, showing a range of water contents of 16 to 24%, 17 to 28%, and 24 to 32% for loamy sand, sandy loam, and loam soils, respectively. The greatest rate increase in water content was observed in the top of 10 cm depth of sandy loam soil within almost 60 min from the start of irrigation.

Novel LTE based Channel Estimation Scheme for V2V Environment (LTE 기반 V2V 환경에서 새로운 채널 추정 기법)

  • Chu, Myeonghun;Moon, Sangmi;Kwon, Soonho;Lee, Jihye;Bae, Sara;Kim, Hanjong;Kim, Cheolsung;Kim, Daejin;Hwang, Intae
    • Journal of the Institute of Electronics and Information Engineers
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    • v.54 no.3
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    • pp.3-9
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    • 2017
  • Recently, in 3rd Generation Partnership Project(3GPP), there is a study of the Long Term Evolution(LTE) based vehicle communication which has been actively conducted to provide a transport efficiency, telematics and infortainment. Because the vehicle communication is closely related to the safety, it requires a reliable communication. Because vehicle speed is very fast, unlike the movement of the user, radio channel is rapidly changed and generate a number of problems such as transmission quality degradation. Therefore, we have to continuously updates the channel estimates. There are five types of conventional channel estimation scheme. Least Square(LS) is obtained by pilot symbol which is known to transmitter and receiver. Decision Directed Channel Estimation(DDCE) scheme uses the data signal for channel estimation. Constructed Data Pilot(CDP) scheme uses the correlation characteristic between adjacent two data symbols. Spectral Temporal Averaging(STA) scheme uses the frequency-time domain average of the channel. Smoothing scheme reduces the peak error value of data decision. In this paper, we propose the novel channel estimation scheme in LTE based Vehicle-to-Vehicle(V2V) environment. In our Hybrid Reliable Channel Estimation(HRCE) scheme, DDCE and Smoothing schemes are combined and finally the Linear Minimum Mean Square Error(LMMSE) scheme is applied to minimize the channel estimation error. Therefore it is possible to detect the reliable data. In simulation results, overall performance can be improved in terms of Normalized Mean Square Error(NMSE) and Bit Error Rate(BER).

Study on the Whitening Efficacy and Skin Barrier by Lysosome-related Organelle Extract (LOE) from Egg White (난백(Egg White)에서 추출한 리소좀 추출물(LOE)의 미백 효능 및 피부장벽에 관한 연구)

  • Choi, Da Hee;Jeon, Gyeongchan;Yoon, Jihee;Min, Jiho;Park, Si Jun;Kim, Jung Su;Hwang, Ee Taek;Hwang, Hyung Seo
    • Journal of the Society of Cosmetic Scientists of Korea
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    • v.45 no.4
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    • pp.389-397
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    • 2019
  • Lysosomes are cellular organelles involved in energy metabolism and intracellular digestion in eukaryotic cells, including protease, nuclease, glycosidase, lipase, and phosphatase. Our previous studies have confirmed that egg white lysosomes had melanin decolorization and reduction activity. However, there have been few studies on skin barrier and skin regeneration as well as inhibition of melanin production by egg white lysosomes on B16F10 melanocyte cell line. In this study, we attempted to identify the effect of lysosome-related organelle extract (LOE) extracted from egg white on the melanin content change and skin barrier enhancement in cells. First, cytotoxicity evaluation was performed on B16F10 melanocyte cell line to confirm the whitening efficacy of LOE. Cytotoxicity by LOE was not observed at 20 mg/mL concentration, but cytotoxicity was observed at 40 mg/mL, and the maximum concentration value was set to 20 mg/mL in all subsequent experiments. LOE samples of 5, 10, 20 mg/mL inhibited melanin production by 61.5 ± 4.0%, 61.4 ± 7.3%, 58.3 ± 8.3%, respectivly, compared to α-MSH, a negative control in melanin contents assay. MITF mRNA expression was reduced by about 39.7 ± 3.2% compared to the α-MSH treatment group. TEER assay using HaCaT showed that LOE increased TEER resistance in a dose-dependent manner, indicating that LOE is involved in strengthening the skin barrier. LOE also increased the TEER resistance under TNF-α treatment. Skin barrier was normally restored by LOE even under the condition of inflammation. LOE had a positive effect on cell division and cell migration promotion, confirmed by the observing the effect of promoting cell migration by LOE through cell migration assay. Taken together, we expect that LOE can be developed as a cosmetic material to enhance has effects on skin regeneration and skin barrier strengthening as well as whitening function if enzyme stabilization and formulation technology are combined.

Hydrochemistry and Origin of Noble Gases and $CO_2$ Gas Within Carbonated Mineral Waters in the Kyeoungbuk-Kangwon Province, Korea (경북-강원일대 탄산약수의 수질화학과 탄산 및 영족기체 기원)

  • Jeong, Chan-Ho;Yoo, Sang-Woo;Kim, Kyu-Han;Nagao, Keisuke
    • The Journal of Engineering Geology
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    • v.21 no.1
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    • pp.65-77
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    • 2011
  • Hydrochemical and carbon isotopic (${\delta}^{13}C_{DIC}$) analyses of 11 water samples, and noble gas isotopic analyses of 8 water samples collected in the Kyeoungbuk and Kangwon areas of Korea were performed to determine their hydrochemical characteristics and to interpret the source of noble gases and $CO_2$ gas in the water. The carbonated mineral waters are weakly acidic (PH = 5.59-6.04), and electrical conductivity ranges from 302 to $864\;{\mu}S/cm$. The chemical composition of all the water samples is Ca-$HCO_3$ type. The high contents of Fe and Mn exceed the safe limits for drinking water. The ${\delta}^{13}C_{DIC}$ values of the samples range from -5.30‰ to -2.84‰, indicating that the carbon is supplied mainly from a deep-seated source and to a lesser degree from an inorganic carbonate source. The $^3He/^4He$ ratios of the samples range from $1.51{\times}10^{-6}$ to $6.45{\times}10^{-6}$. The samples plot into three groups on a $^3He/^4He$ versus $^4He/^{20}Ne$ diagram: the deep-seated field (e.g., a mantle source), the atmospheric field, and the air-mantle mixing field. A wide range of $^4He/^{20}Ne$ ratios is observed ($0.036{\times}10^{-6}$ to $1.76{\times}10^{-6}$), indicating that while radiogenic $^4He$ is dominant in these water samples, mantle-origin He is also present. The supply of $CO_2$ gas and noble gases from a deep-seated source to carbonated waters is inferred to be controlled by geological structures such as faults and geological boundaries.

Evaluation of Metabolic Abnormality in Brain Tumors by In Viuo $^1$H MR Spectroscopy at 3 Tesla (3T 양성자 자기공명분광에 의한 뇌종양의 대사물질 이상소견)

  • Choe, Bo-Young;Jeun, Sin-Soo;Kim, Bum-Soo;Lee, Jae-Mun;Chung, Sung-Taek;Ahn, Chang-Beom;Oh, Chang-Hyun;Kim, Sun I.;Lee, Hyoung-Koo
    • Progress in Medical Physics
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    • v.13 no.3
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    • pp.120-128
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    • 2002
  • To investigate differences between the metabolic ratios of normal controls and brain tumors such as astrocytomas and glioblastoma multiforme (GM) by proton MR spectroscopy (MRS) at 37 high field system. Using 3T MRI/MRS system, localized water-suppressed single-voxel technique in patients with brain tumors was employed to evaluate spectra with peaks of N-acetyl aspartate (NAA), choline-containing compounds (Cho), creatine/phosphocreatine (Cr) and lactate. On the basis of Cr, these peak areas were quantificated as a relative ratio. The variation of metabolites measurements of the designated region in 10 normal volunteers was less than 10%. Normal ranges of NAA/Cr and Cho/Cr ratios were 1.67$\pm$018 and 1.16$\pm$0.15, respectively. NAA/Cr ratio of all tumor tissues was significantly lower than that of the normal tissues (P=0.005). Cho/Cr ratio of glioblastoma multiforme was significantly higher than that of astrocytomas (P=0.001). Lactate was observed in all tumor cases. The present study demonstrated that the neuronal degradation or loss was observed in all tumor tissues. Higher grade of brain tumors was correlated with higher Cho/Cr ratio, indicating a significant dependence of Cho levels on malignancy of gliomas. This results suggest that clinical proton MR spectroscopy could be useful to predict tumor malignancy.

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Computerized Multiple 15-hue tests for Quantifying Color Vision Acuity (색각 능력의 정량적 평가를 위한 전산화된 다중 15-색상 배열 검사법)

  • Ko S.T.;Hong S.C.;Choi M.J.
    • Journal of Biomedical Engineering Research
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    • v.21 no.3 s.61
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    • pp.321-331
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    • 2000
  • Multiple 15-hue tests were designed and implemented on a PC in the study so as to quickly and quantitatively evaluate color vision acuity. Difficulty of the test was control)ed by the value of CDBACC (color difference between adjacent color chips) calculated using a CIELAB formula. The multiple 15-hue tests consist of eight of the hue tests (test 3-10) and three of the basic color (red, green, blue) tests (test 11-13). The 15 colors used for the hue tests were specified by the 15 color coordinates that were located at a constant distance (d = 2. 3. 5. 7, 10, 20, 30. 40) from white reference in the CIE chromaticity coordinate system and were separated by a constant color difference (CDBACC = 0.75, 1.1, 1.8. 2.5. 3.5. 7.5. 11, 14) from the adjacent chips. The color coordinates for the 15 chips for the basic color tests were the same as those of the 15 points spaced equally by a constant color difference (6.87 for the green color test. 7.27 for the red color test, 7.86 for the blue color test) from the white reference along the axis of red, green and blue. Thirty normal subjects who were not color blind were taken to undergo the multiple 15-hue tests. It was observed that most of the subjects correctly arranged color chips for the tests with CDBACC greater than 5, whereas no one correctly answered for those with CDBACC less than 2. Rapid changes in the number of the subjects correctly arranged took place when CDBACC of the tests was between 2 and 4.5. In the basic color tests, unlike the hue tests having similar values of CDBACC, it was seen that the subjects arranged color chips even less correctly. It was found that JNCD (just noticeable color difference) - a measure of color vision acuity was about 3 in average for the subjects. The JNCD was chosen as the value of the CDBACC of the test for which about $50\%$ of the subjects failed to successfully arrange color chips. ERCCA (error rate of color chips arrangement) for the test with CDBACC the same as the JNCD was shown to be about $20\%$. It is expected that the multi 15-hue tests implemented on a PC in the study will be an economical tool to quickly and quantitatively evaluate color vision acuity and, accordingly, the tests can be used for early diagnosis to massive potential patients suffering from diseases (ex. diabetes, glaucoma) which may induce changes in color vision acuity.

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PREPARATION OF AMORPHOUS CARBON NITRIDE FILMS AND DLC FILMS BY SHIELDED ARC ION PLATING AND THEIR TRIBOLOGICAL PROPERTIES

  • Takai, Osamu
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2000.11a
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    • pp.3-4
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    • 2000
  • Many researchers are interested in the synthesis and characterization of carbon nitride and diamond-like carbon (DLq because they show excellent mechanical properties such as low friction and high wear resistance and excellent electrical properties such as controllable electical resistivity and good field electron emission. We have deposited amorphous carbon nitride (a-C:N) thin films and DLC thin films by shielded arc ion plating (SAIP) and evaluated the structural and tribological properties. The application of appropriate negative bias on substrates is effective to increase the film hardness and wear resistance. This paper reports on the deposition and tribological OLC films in relation to the substrate bias voltage (Vs). films are compared with those of the OLC films. A high purity sintered graphite target was mounted on a cathode as a carbon source. Nitrogen or argon was introduced into a deposition chamber through each mass flow controller. After the initiation of an arc plasma at 60 A and 1 Pa, the target surface was heated and evaporated by the plasma. Carbon atoms and clusters evaporated from the target were ionized partially and reacted with activated nitrogen species, and a carbon nitride film was deposited onto a Si (100) substrate when we used nitrogen as a reactant gas. The surface of the growing film also reacted with activated nitrogen species. Carbon macropartic1es (0.1 -100 maicro-m) evaporated from the target at the same time were not ionized and did not react fully with nitrogen species. These macroparticles interfered with the formation of the carbon nitride film. Therefore we set a shielding plate made of stainless steel between the target and the substrate to trap the macropartic1es. This shielding method is very effective to prepare smooth a-CN films. We, therefore, call this method "shielded arc ion plating (SAIP)". For the deposition of DLC films we used argon instead of nitrogen. Films of about 150 nm in thickness were deposited onto Si substrates. Their structures, chemical compositions and chemical bonding states were analyzed by using X-ray diffraction, Raman spectroscopy, X-ray photoelectron spectroscopy and infrared spectroscopy. Hardness of the films was measured with a nanointender interfaced with an atomic force microscope (AFM). A Berkovich-type diamond tip whose radius was less than 100 nm was used for the measurement. A force-displacement curve of each film was measured at a peak load force of 250 maicro-N. Load, hold and unload times for each indentation were 2.5, 0 and 2.5 s, respectively. Hardness of each film was determined from five force-displacement curves. Wear resistance of the films was analyzed as follows. First, each film surface was scanned with the diamond tip at a constant load force of 20 maicro-N. The tip scanning was repeated 30 times in a 1 urn-square region with 512 lines at a scanning rate of 2 um/ s. After this tip-scanning, the film surface was observed in the AFM mode at a constant force of 5 maicro-N with the same Berkovich-type tip. The hardness of a-CN films was less dependent on Vs. The hardness of the film deposited at Vs=O V in a nitrogen plasma was about 10 GPa and almost similar to that of Si. It slightly increased to 12 - 15 GPa when a bias voltage of -100 - -500 V was applied to the substrate with showing its maximum at Vs=-300 V. The film deposited at Vs=O V was least wear resistant which was consistent with its lowest hardness. The biased films became more wear resistant. Particularly the film deposited at Vs=-300 V showed remarkable wear resistance. Its wear depth was too shallow to be measured with AFM. On the other hand, the DLC film, deposited at Vs=-l00 V in an argon plasma, whose hardness was 35 GPa was obviously worn under the same wear test conditions. The a-C:N films show higher wear resistance than DLC films and are useful for wear resistant coatings on various mechanical and electronic parts.nic parts.

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