• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권5호
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• pp.191-195
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• 2002

Chemical mechanical Polishing (CMP) process is widely used for the global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP process, deionized water (DIW) pressure, purified $N_2$ ($PN_2$) gas, point of use (POU) slurry filler and high spray bar (HSB) were installed. Our experimental results show that DW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• 전기학회논문지
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• 제58권10호
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• pp.1916-1922
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• 2009

Introducing distributed generators(DGs) to utility distribution system can cause malfunction of relay on the grid when ground faults or severe load unbalances are occurred on the system. Because DGs interconnected to the grid can contribute fault currents and make bidirectional power flows on the system, fault currents from DGs can cause an interference of relay operation. A directional over current relay(DOCR) can determine the direction of power flow whether a fault occurs at the source side or load side through detecting the phases of voltage and current simultaneously. However, it is identified in this paper that the contributed fault current(Ifdg) from the ground source when was occurred to contribute single-line-to-ground(SLG) fault current, has various phases according to the distances from the ground source. It means that the directionality of Ifdg may not be determined by simply detecting the phases of voltage and current in some fault conditions. The magnitude of Ifdg can be estimated approximately as high as 3 times of a phase current and its maximum is up to 2,000 A depending on the capacity of generation facilities. In order to prevent malfunction of relay and damage of DG facilities from the contribution of ground fault currents, Ifdg should be limited within a proper range. Installation of neutral ground reactor (NGR) at a primary neutral of interconnection transformer was suggested in the paper. Capacity of the proposed NGR can be adjusted easily by controlling taps of the NGR. An algorithm for unidirectional relay was also proposed to prevent the malfunction of relay due to the fault current, Ifdg. By the algorithm, it is possible to determine the directionality of fault from measuring only the magnitude of fault current. It also implies that the directionality of fault can be detected by unidirectional relay without replacement of relay with the bidirectional relay.

• 한국전기전자재료학회논문지
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• 제23권2호
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• pp.169-173
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• 2010

Because of power consumption increase, global warming, and limitation of installation, not only high reliability and interruption capability but also compact and light power apparatuses are needed. In this paper, E field calculation and experiment were processed to identify the influence of the shape of end shield and gap distance. It is expected that the results of FEM simulation and experiments could be the basic data to develop VI. the results of FEM simulation and experiments are as following. Firstly, maximum E fields were compared by means of finite element method as a function of the shape of end shield. 3 types of models were used to analyze maximum E field of each model and the influence of shape of shield could be identified. As a result, proposed L type shield could reduce the maximum E field by 20%. Secondly, the influence of the gap distance between end shields on E field was analyzed. As the gap distance become short the gap distance between inner walls of ceramic also become short. And the maximum E field concentrated on inner wall of ceramic finally increased. Thirdly, the experiment was conducted by fabricating each prototype. As a result, no creepage occurred in shieldless model. In other words, creepage occurred in the shield-installed models. And creepage inception voltages were different from each other because of the difference of maximum E field. Fourthly, The equation that shows relation between calculated E field and measured creepage inception voltage was proposed as a result of FEM analysis and experiment. It is concluded that when designing VI this equation could be important data to reduce time and cost by identifying indirectly the optimal gap distance and the shape of shield required to prevent creepage.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 제38회 하계학술대회
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• pp.210-211
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• 2007

Amid booming PV(photovoltaic) industry, BIPV(Building Integrated PV) is one of the best fascinating PV application technologies. To apply PV in building, variable factors should be reflected such as installation position, shading, temperature effect and so on. Especially a temperature should be considered, for it affects both electrical efficiency of PV module and heating and cooling load in building. Transparent PV modules were designed as finished material for spandrels are presented in this paper. The temperature variation of the modules with and without air gap and insulation were compared and analyzed. The results showed that the module with air gap and insulation has a much larger temperature variation than another transparent module. The temperature of the module reached by 55degree C under vertical irradiance of lower 500$W/m^2$. And the temperature difference between these modules was about 15degree C. To analyze the output performance of module according to temperature variation, separate module was manufactured and measured by sun-simulator. The results showed that 1 degree temperature rise reduced about 0.45% of output power.

• 전기학회논문지
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• 제67권9호
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• pp.1216-1223
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• 2018

As field of application of AMI, AMR uses the power line as the primary means of communication. PLC has a big merit without installation of the new network for communication in a field using the power line which is the existing equipment. However, there is a serious obstacle in commercialization for the instability by noise and communication environment. Therefore, the technical method for maintaining the communication state which overcome such demerit and was stabilized is required essentially. PLC routing technology is applied with the alternative plan now. The routing technology currently managed by field includes many problems by applying the algorithm of an elementary level. PLC routing path search problem can be modeled with the problem of searching for optimal solution as similar to such as optimal routing problem and TSP(Travelling salesman problem). In this paper, in order to search for a PLC routing path efficiently and to choose the optimal path, GA(Genetic Algorithm) was applied. Although PLC was similar in optimal solution search as compared with typical GA, it also has a difference point by the characteristic of communication, and presented the new methodology over this. Moreover, the validity of application technology was verified by showing the experimental result to which GA is applied and analyzing as compared with the existing algorithm.

• 한국태양에너지학회 논문집
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• 제33권3호
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• pp.58-66
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• 2013

Recently, PV module that the most important part of the photovoltaic system is more widened to lower manufacturing costs for module. However, the broad PV module results to the serious mechanical damage corning from installation circumstances such as snow, wind etc of snow and finally lead to the dramatic degradation of the electrical behavior of PV module. In this paper, 3 kinds of PV modules that consist of the different thickness and area of front glass and the diverse cross sectional structures of the frame are prepared for this experiment. The drooped length and electrical outputs of the PV modules are measured by means of applying 600Pa mechanical load to the PV modules from 1200Pa to 5400Pa base on the mechanical load test procedure of K SC IEG 61215 standard. The simulation data are obtained by the simulation tool as ANSYS and those are validate by comparing with the those experimental results figure out relations between the deformation and the constituent part of PV module.

• 한국융합학회논문지
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• 제12권7호
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• pp.263-271
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• 2021

거총부터 격발까지 총구 움직임의 궤적을 추적하여, 사격의 정확성을 향상시킬 목적으로 광전자 기반 사격 훈련 시스템이 사격 훈련 현장에서 활용되어 왔다. 광전자 기반 시스템은 설치가 복잡하고, 표적의 파손 위험이 존재하며, 고가의 장비로 선수들의 접근성이 떨어진다는 단점이 있다. 이에 본 연구는 저비용의 가속도 센서 모듈을 이용하여 체위 떨림을 측정하고 피드백할 수 있는 사격 훈련 시스템을 개발하고, 이의 활용성을 검증하였다. 가속도 센서 모듈은 총기의 에어 실린더에 부착할 수 있도록 제작되었다. 체위 떨림은 가속도 센서 데이터를 이용하여 진폭, 주파수, 공간적 패턴 지표로서 분석되었다. 가속도 센서와 기존의 광전자 기반 시스템에서 측정된 사격시 체위 떨림 진폭 지표 간에는 높은 상관관계(좌우 방향: r=0.76; 상하 방향: r=0.70)가 나타났다. 또한, 사격 선수를 대상으로 진행한 시스템의 유효성 평가에서는 선수의 사격 점수(최상, 최하 격발)에 따라 계산된 체위 떨림 지표가 유의한 차이(p<0.05)가 있음을 독립 표본 t-검증을 이용하여 검증하였다.

• 한국산학기술학회논문지
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• 제20권3호
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• pp.470-475
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• 2019

본 논문에서는 진동수주형(OWC: Oscillating Water Column) 파력발전시스템을 위한 30kW 급 계통연계형 PCS(Power Conversion System)을 다룬다. 해양에너지 중 파력 발전은 삼면이 바다인 반도의 특성을 지닌 한국에 적용하기 적합하고 연안재해 시 파력 발전기가 방파제 역할을 하여 피해를 감소시킬 수 있고, 다른 해상 발전과 개발 대상 적지가 일치하므로 통합하여 효율을 증대 시킬 수 있다. 파력발전 방식은 작동 원리에 따라 가동 물체형과 진동수주형, 월파형 등 여러 형태로 구분하며, 설치 형태에 따라 고정식과 부유식으로 구분된다. 본 논문에서는 구조적으로 안정되고 터빈과 발전기의 유지 보수가 비교적 쉬운 진동수주형을 채택하여, 파력발전용 30kW 계통연계형 PCS 토폴로지 및 모델을 제안하고 계통에 안정적으로 전압을 공급할 수 있는 DC link 전압 제어 등 계통연계 시 필요한 제어방법에 대해 설명하였다. 또한 이를 검증하기 위해 시뮬레이션을 수행하였다.

• 한국태양에너지학회 논문집
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• 제39권3호
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• pp.67-79
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• 2019

The reliable Typical Meteorological Year (TMY) data, sometimes called Test Reference Year (TRY) data, are necessary in the feasibility study of renewable energy installation as well as zero energy building. In Korea, there are available TMY data; TMY from Korea Institute of Energy Research (KIER), TRY from the Korean Solar Energy Society (KSES) and TRY from Passive House Institute Korea (PHIKO). This study aims at examining their characteristics by using Principle Component Analysis (PCA) at six ground observing stations. First step is to investigate the annual averages of meteorological elements from TMY data and their standard deviations. Then, PCA is done to find which principle components are derived from different TMY data. Temperature and solar irradiance are determined as the main principle component of TMY data produced by KIER and KSES at all stations whereas TRY data from PHIKO does not show similar result from those by KIER and KSES.

• 대한방사선기술학회지:방사선기술과학
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• 제45권2호
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• pp.127-134
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• 2022

In order to overcome the image quality limitations of the conventional C-arm, a flat panel detector (FPD) is used to enhance spatial resolution, detective quantum efficiency, frame rate, and dynamic range. Three-dimensional (3D) visualized information can be obtained from C-arm computed tomography (CT) equipped with an FPD, which can reduce patient discomfort and provide various medical information to health care providers by conducting procedures in the interventional procedure room without moving the patient to the CT scan room. Unlike a conventional C-arm device, a C-arm CT requires different basic safety and essential performance evaluation criteria; therefore, in this study, basic safety and essential performance evaluation criteria to protect patients, medical staff, and radiologists were derived based on International Electrotechnical Commission (IEC) standards, the Ministry of Food and Drug Safety (MFDS) standards in Korea, and the rules on the installation and operation of special medical equipment in Korea. As a result of the study, six basic safety evaluation criteria related to electrical and mechanical radiation safety (leakage current, collision protection, emergency stopping device, overheating, recovery management, and ingress of water or particulate matter into medical electrical (ME) equipment and ME systems: footswitches) and 14 essential performance evaluation criteria (accuracy of tube voltage, accuracy of tube current, accuracy of loading time, accuracy of current time product, reproducibility of radiation output, linearity and consistency in radiography, half layer value in X-ray equipment, focal size and collimator, relationship between X-ray field and image reception area, consistency of light irradiation versus X-ray irradiation, performance of the mechanical device, focal spot to skin distance accuracy, image quality evaluation, and technical characteristic of cone-beam computed tomography) were selected for a total of 20 criteria.