• Proceedings of the KIEE Conference
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• 2003.07d
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• pp.2384-2386
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• 2003

This paper presents an image processing method to recognize object's position from images for robot control applications. The Sobel Mask and the Dialated Gradient Mask algorithms are used to extract and refine the edge of the object. The inside of the extracted edge is filled with '1's for calculation of the center of mass to identify object's position. We propose a heuristic method which averages the positions of the objects in 10 frames to reject noises, and discuss the application of the proposed method to robot control.

• Journal of Korea Multimedia Society
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• v.6 no.2
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• pp.224-229
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• 2003

In this paper, an effective skeleton method is proposed in order to obtain an enhanced digital image of skeleton line. The edge-detection method is applied in the preprocessing stage and after that, the modified Parallel method is applied to obtain the improved image of skeleton line. The existing parallel methods are Zhang, Lu and Wang, and Paul methods. Firstly, a parallel process method Is applied, and the proposed method is applied that the original is compared with the four neighbor pixels and four corner pixels of mask. In conclusion, the proposed method shows an improved connectivity and quality of skeleton line.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.12
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• pp.50-56
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• 2007

Femtosecond laser ablation of the Invar alloy and hole drilling for a shadow mask are studied. We used a regenerative amplified Ti-sapphire laser with a 1kHz repetition rate, 184fs pulse duration and 785nm wavelength. Femtosecond laser pulse was irradiated on the Invar alloy with air blowing at the condition of various laser peak power. An ablation characteristic of the Invar alloy was appeared non-linear at $125J/cm^2$ of energy fluence. For the application to a shadow mask, the hole drilling of the Invar alloy with the cross section of a trapezoidal shape was investigated. The ablated micro-holes were characterized using an atomic force microscopy(AFM). The optimal condition of hole pattern f3r a shadow mask was $4\;{\mu}m$ z-axis feed rate, 0.2mm/s circular velocity, $26.4{\mu}J$ laser peak power. With the optimal processing condition, the fine circular hole shape without burr and thermal damage was achieved. Using the femtoseocond laser system, it demonstrates excellent tool for the Invar alloy micro-hole drilling without heat effects and poor edge.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.124-124
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• 2010

Currently, extreme ultraviolet lithography (EUVL) is being investigated for next generation lithography. EUVL is one of competitive lithographic technologies for sub-22nm fabrication of nano-scale Si devices that can possibly replace the conventional photolithography used to make today's microcircuits. Among the core EUVL technologies, mask fabrication is of considerable importance due to the use of new reflective optics having a completely different configuration compared to those of conventional photolithography. Therefore, new materials and new mask fabrication process are required for high performance EUVL mask fabrication. This study investigated the etching properties of SnO2 (Tin Oxide) as a new absorber material for EUVL binary mask. The EUVL mask structure used for etching is SnO2 (absorber layer) / Ru (capping / etch stop layer) / Mo-Si multilayer (reflective layer) / Si (substrate). Since the Ru etch stop layer should not be etched, infinitely high selectivity of SnO2 layer to Ru ESL is required. To obtain infinitely high etch selectivity and very low LER (line edge roughness) values, etch parameters of gas flow ratio, top electrode power, dc self - bias voltage (Vdc), and etch time were varied in inductively coupled Cl2/Ar plasmas. For certain process window, infinitely high etch selectivity of SnO2 to Ru ESL could be obtained by optimizing the process parameters. Etch characteristics were measured by on scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) analyses. Detailed mechanisms for ultra-high etch selectivity will be discussed.

• Journal of Korea Society of Industrial Information Systems
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• v.23 no.6
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• pp.21-27
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• 2018

Wearing degree and uneven wearing detection algorithm using horizontal edge information is proposed in this paper. The noise in the input image is removed by bilateral filter, and then edges are extracted from the filtered image by using the proposed mask. As the tire is worn, grooves of tire shoulder or sipes are changed more than the vertical grooves. Therefore the edges from grooves of tire shoulder or sipes have more information about the tire wearing than the edges from vertical grooves. Proposed mask that is reflected this feature is used to extract the horizontal edges. After edge extraction, the edge image is represented in two-level system. The edge pixels of the binarization image are used to decide the wearing degree and uneven wearing. This proposed method can be used easily without any other equipments. The proposed method is conducted with a real vehicle, and the experimental results show the good performance of the proposed method in detecting wearing degree and uneven wearing.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.141-141
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• 2003

• Journal of the Korean Institute of Telematics and Electronics
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• v.24 no.1
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• pp.97-101
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• 1987

The edge, a discontinuity or abrupt change in the gray-level or color, is a fundamentally important primitive feature of an image necessary for the image analysis and classification. Two-dimensional 3x3 compass gradient operators (ex. Sobel, Prewitt, and Kirsch operators)are commonly used in the edge detection and usually detect 8 compass directional components. In this paper, we present a new interpretation of the relationships between the resulting 8 gradient magnitudes and the 8 intensity values of neighboring pixels which are covered by the two-dimensional 3x3 mask. It is expected that a new gradient edge operator may be designed by changing the eigenvalues in the transform domain and the fast optical edge operator may be implemented by using the optical system.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.16 no.8
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• pp.1773-1778
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• 2012

Nowadays, the high quality of image is required with the demand for digital image processing devices is rapidly increasing. But image always damaged by many kinds of noises and it is necessary to remove noise and the denoising becomes one of the most important fields. In many cases image is corrupted by AWGN(additive white Gaussian noise). In this paper, we proposed an improved denoising algorithm with edge preservation. The proposed algorithm averages values processed by spatial weighted filter and self adaptive weighted filter. Then we add the value which is computed by the equation considering variance of mask and the estimated noise variance. Through the experience, the proposed filter performs well on noise suppression and edge preservation properties and improves the image visual quality.

• Journal of Digital Convergence
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• v.12 no.11
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• pp.281-288
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• 2014

A method for edge detection using K-means clustering is proposed in this paper. The method is performed through there steps. Histogram equalizing is applied to the image for the uniformed intensity distribution. Pixels are clustered by K-means clustering technique. Then Sobel mask is applied to detect edges. Experiments showed that this method detected edges better than conventional method.

• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.7-12
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• 2023

The edge ring placed on the outside of the electrostatic chuck (ESC) is a key component for protecting the ESC and controlling the etching uniformity of the edge of the wafer. Therefore, it is very important to understand the etching phenomenon of edge rings for edge ring management and equipment homeostasis. In this study, a specimen with SiO₂ hard mask and underlying Si mold was installed on the edge ring surface and the etching results were measured by varying the edge ring 2MHz RF power. By developing PI-VM model with high prediction accuracy and analyzing the roles of key parameters in the model, we were able to evaluate the effect of plasma and sheath characteristics around the edge ring on edge ring erosion. This analysis method provided information necessary for edge ring maintenance and operation.