• Title/Summary/Keyword: ELC

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An Optical Study on ELC Process of Amorphous Silicon (비정질 실리콘의 ELC 공정에 대한 광학적 연구)

  • 김우진;윤창환;박승호;김형준
    • Laser Solutions
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    • v.6 no.2
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    • pp.9-17
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    • 2003
  • Due to the heat confinement in the shallow region of the target for a short time scale, pulsed laser annealing has received an increasing interest for the fabrication of poly-Si thin film transistors(TFTs) on glass as a low cost substrate in the flat panel displays. The formation and growth mechanisms of poly silicon(poly-Si) grains in thin films are investigated using an excimer laser crystallization system. To understand the crystallization mechanism, the grain formations are observed by FESEM photography. The optical reflectance and transmittance during the crystallization process are measured using HeNe laser optics. A two-step ELC(Excimer Laser Crystallization) process is applied to enhance the grain formation uniformity.

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Characteristics of Amorphous Si Films Fabricated by Mesh-type PECVD and Their Crystallization Behavior Using Excimer Laser (Mesh-type PECVD 방법으로 제조된 비정질 Si박막의 특성 및 레이저 결정화)

  • Han Sang-Yong;Choi Jae-Sik;Kim Yong-Su;Park Sung-Gye;Ro Jae-Sang;Kim Hyoung-June
    • Journal of the Korean Electrochemical Society
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    • v.3 no.1
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    • pp.19-24
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    • 2000
  • It is increasingly necessary to use poly-Si n's as high resolution and integration of Tn for LCD. Excimer Laser Crystallization (ELC) of a-Si is mainly used as a low temperature process. But the ELC method for the fabrication of poly-Si has the eruption problems associated with hydrogen in the a-Si film. So we need a dehydro-genation process additionally. Hydrogen in a-Si film can degrade the quality of poly-Si film and electrical properties of device due to the hydrogen eruption and voids which occur during the excimer laser annealing. In this study, we propose mesh-type PECVD as the a-Si film deposition method for achieving the low concentration hydrogen. Mesh-type PECVD was found to reduce the hydrogen content substantially. We could obtain a as-deposited a-Si film with hydrogen contents less than $1\%$ at $300^{\circ}C$. We also investigated the behavior by XeCl excimer laser annealing of a-Si fabricated by mesh-type PECVB. As a result, we were able to confirm the broad process window in contrast to the narrow process range typically obtained in ELC. Hydrogen eruption was not observed in poly-Si films after ELC These results suggests that mesh-type PECVD is a viable method to achieve the low hydrogen content a-Si and improve the process windows for ELC.

Effect of Debriefing Based on the Clinical Judgment Model on Simulation Based Learning Outcomes of End-of-Life Care for Nursing Students: A Non-Randomized Controlled Trial (임상판단모델에 근거한 디브리핑 적용이 임종간호 학습성과에 미치는 효과: 비무작위 대조시험설계)

  • Jeong, Kyung In;Choi, Ja Yun
    • Journal of Korean Academy of Nursing
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    • v.47 no.6
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    • pp.842-853
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    • 2017
  • Purpose: This study was conducted to identify effects of debriefing based on the clinical judgment model for nursing students on their knowledge, skill performance, clinical judgment, self-confidence and learner satisfaction during simulation based end-of-life care (ELC) education. Methods: Simulation based ELC education was developed in six steps as follows: selection of learning subjects and objects, development of learning tools, a trial run of simulation-based education, students' skill training, and evaluators' training. Forty-eight senior nursing students (25 in the experimental group and 23 in the control group) participated in the simulation-based ELC education using a high-fidelity simulator. Debriefing based on the clinical judgment was compared with the usual debriefing. Results: ANCOVA showed that there were differences in knowledge (F=4.81, p=.034), skill performance (F=68.33, p<.001), clinical judgment (F=18.33, p<.001) and self-confidence (F=4.85, p=.033), but no difference in satisfaction (t=-0.38, p=.704) between the experimental and control groups. Conclusion: This study found that debriefing based on the clinical judgement model is effective for supporting nursing students for reflecting on clinical judgment and improving their diverse competencies in complex clinical settings such as ELC.

Design of High-Sensitivity Compact Resonator using Interdigital-Capacitor Structure for Chipless RFID Applications (인터디지털-커패시터 구조를 이용한 Chipless RFID용 고감도 소형 공진기 설계)

  • Yeo, Junho;Lee, Jong-Ig
    • Journal of Advanced Navigation Technology
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    • v.25 no.1
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    • pp.90-95
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    • 2021
  • In this paper, the design method for a high-sensitivity compact resonator for chipless RFID tags is proposed. Proposed high-sensitivity compact resonator uses an interdigital-capacitor structure instead of a capacitor-shaped strip structure in a conventional ELC resonator. The length of the electrode plate of the IDC structure is longer than that of the conventional capacitor-shaped structure, resulting in a larger equivalent capacitance of the resonator. This can lower the resonant peak frequency of the RCS characteristic. Two resonators with the same length of the square loop and the width of the strip are fabricated on an RF-301 substrate with a thickness of 0.8 mm. The experiment results show that the resonant peak frequency and value of the bistatic RCS for the ELC resonator were 4.305 GHz and -30.39 dBsm, whereas those of the proposed IDC resonator were 3.295 GHz and -36.91 dBsm. Therefore, the size of the resonator is reduced by 23.5% based on the measured resonant peak frequency of the RCS characteristic.

Design of a Metamaterial Absorber for ISM Applications

  • Tak, Jinpil;Lee, Youngki;Choi, Jaehoon
    • Journal of electromagnetic engineering and science
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    • v.13 no.1
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    • pp.1-7
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    • 2013
  • This paper proposes a metamaterial (MTM) absorber for 2.45 GHz band applications. The unit cell of the proposed absorber consists of an electric LC (ELC) resonator and a strip line, which are printed on opposite sides of the substrate. The ELC resonator comprises two split ring resonators (SRRs) and a connecting line with a resistor. The designed absorber exhibits an absorption of 94 % and a half-max bandwidth of 0.16 GHz at 2.45 GHz.

Design of a Microcontroller Based Electronic Load Controller for a Self Excited Induction Generator Supplying Single-Phase Loads

  • Gao, Sarsing;Murthy, S. S.;Bhuvaneswari, G.;Gayathri, M. Sree Lalitha
    • Journal of Power Electronics
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    • v.10 no.4
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    • pp.444-449
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    • 2010
  • The generation of electric power using self excited induction generation (SEIG) is a viable option in remote and rural areas where grid electricity is not available. The generated voltage and frequency of these machines, however, varies with varying loads. This characteristic can be resolved either by adjusting the values of the excitation capacitance or by controlling the prime mover speed. Further, in a single-point constant power application, where the machines deliver a fixed amount of power, the electronic load controller (ELC) can be used to switch-in or switch-out a dump load whenever the consumer load decreases or increases respectively. This paper presents a detailed analysis and the design of a microcontroller based SEIG -ELC system intended for stand-alone pico hydro power generation. The simulated performance of the controller is supplemented by experimental results.

A Broad-Band Metamaterial Absorber Using Flexible Substrate (유연성 기판을 사용한 광대역 메타 흡수체)

  • Lee, Hong-Min
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.25 no.3
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    • pp.339-347
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    • 2014
  • In this paper, the authors present a new design for a broad-band metamaterial(MTM) absorber that utilizes flexible substrate. The proposed MTM unit cell is constructed by a electric-inducive-capacitive(ELC) resonator and a cut-wire on the same side of the flexible polyimide substrate. To reduce the radar cross section at frequencies other than the targeted frequency bands, the metallic pattern layer of the proposed structure is placed facing toward the incident wave propagation direction. A prototype absorber was fabricated with a planar array of $33{\times}45$ unit cells. Our experiments showed that the proposed absorber exhibits a peak absorption rate of 92 % and 93 % at 9.06 GHz and 15.0 GHz, respectively, and 75 % of the full-width at half-maximum(FWHM) bandwidth is achieved. The proposed backplane-less MTM structure can be used for a broad-band microwave absorber and irregular surface applications.

Relationships between Myosin Light Chain Isoforms, Muscle Fiber Characteristics, and Meat Quality Traits in Porcine Longissimus Muscle

  • Choi, Young-Min;Ryu, Youn-Chul;Lee, Sang-Hoon;Kim, Byoung-Chul
    • Food Science and Biotechnology
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    • v.14 no.5
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    • pp.639-644
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    • 2005
  • The aim of this study was to investigate the effect of the myosin light chain (MLC) isoforms on the muscle fiber characteristics and meat quality traits in porcine longissimus muscle. Pale, soft, exudative (PSE) samples had a lower content of essential light chain (ELC) 1S isoforms and a higher proportion of the fiber type IIB than the reddish-pink, firm, non-exudative (RFN) samples. These compositions suggest that the PSE pork has a higher glycolytic and a lower oxidative capacity than the RFN pork. Therefore, these characteristics of PSE pork might affect the metabolic rate and meat quality traits, including protein solubility. In addition, the indicator traits of the postmortem metabolic rate were related to the ELC 1F/3F ratio ($pH_{45\;min}$: r = -0.43, P < 0.001; R-value: r = 0.53, P < 0.001). These results suggest that the MLC isoform composition can affect the postmortem metabolic rate and meat quality traits.

An Optical Analysis of Viewing-angle Switchable Display Using ELC Lens (액정 전계 렌즈 기반의 시청구간 전환가능 디스플레이의 광학적 해석)

  • Jeong, Shin-Yong;Park, Woo-Sang
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.30 no.4
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    • pp.241-245
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    • 2017
  • This paper proposes a private display that can adjust viewing angles by using an electric-field-driven (EFD) LC Lens. The EFD LC Lens design and simulation were analyzed by using the Extended Jones Matrix Method. The conventional method for attaching a private film to the display was difficult. In order to solve this problem, in this study, by using the EFD LC Lens, we devised a method that can view images more conveniently. We analyzed the luminance and illumination of the optical viewing distance by using the Extended Jones Matrix Method. We also measured the intensity of the viewing angles. The simulation attached the EFD LC Lens to the 14" Full HD RGB stripe wide panel. We calculated the relative luminance distribution and the luminance distribution on the viewing angle of the image at the optimum viewing distance of 60 cm, using the EFD LC Lens and the lenticular lens. The proposed method could be used to design private displays that can adjust the viewing angle of the EFD LC Lens.

Joul-heating induced crystallization (JIC) for LTPS TFT-Backplanes

  • Hong, Won-Ui;No, Jae-Sang
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.244-244
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    • 2010
  • 최근 활발히 연구되고 있는 AMOLED는 평판 디스플레이 분야를 이끌어 갈 차세대 선두 주자로 크게 주목 받고 있다. AMOLED는 전압 구동 방식인 AMLCD와 다르게 전류 구동 방식으로 a-Si TFT 보다 LTPS-TFT 사용이 요구되며, 대면적 기판으로 갈수록 결정립의 균일도가 매우 중요한 인자로 작용한다. 현재 양산이 가능한 AMOLED는 핸드폰이나 15인치 TV정도로 크기가 소형이며 대형 TV나 컴퓨터 모니터 등을 양산하기 위해 많은 방법이 시도되고 있다. 양산체제에서 사용되는 결정화 방법으로는 ELC가 가장 많은 부분을 차지하고 있다. 그러나 레이저를 사용하는 ELC 방법은 대면적으로 갈수록 레이저 빔 자체의 불균일성, shot to shot 불균일성, 레이저빔 중첩의 부정확도 등으로 인한 균일도의 부정확성이 커짐으로 인한 mura 현상이 나타나고 레이저 장비의 사용에 대한 비용 부담을 피할 수 없다. 따라서 non-laser 방식에 결정화 방법이 요구되나 SPC 경우는 상대적으로 고온에서 장시간이 걸리고, MIC 뿐만 아니라 MIC 응용 방법들은 금속 오염에 대한 문제가 발생하고 있는 실정이다. 이러한 문제로 인하여 결정립 크기의 균일도가 우수한 다결정 실리콘 박막을 제조하는 신기술에 대한 필요성이 매우 높은 실정이다. 본 연구에서는 비정질 실리콘 박막 상부 혹은 하부에 도전층을 개재하고, 상기 도전층에 전계를 인가하여 그것의 주울 가열에 의해 발생한 고열로 비정질 실리콘 박막을 급속 고온 고상 결정화하는 방법에 관한 기술인 JIC (Joule-heating Induced Crystallization) 결정화 공정을 개발하였다. 본 공정은 상온에서 수 micro-second 내에 결정화를 수행하는 것이 가능하며 도전층과 실리콘 박막 사이에 barrier층 삽입를 통하여 금속 오염을 막을 수 있으며 공정적인 측면에서도 별도의 chamber가 필요하지 않는 장점을 가지고 있다. 본 논문에서는 JIC 결정화 공정 조건에 따른 결정화 기구 및 JIC poly-Si의 미세구조 및 물리적 특성에 관한 논의가 이루어질 것이다.

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