• Title/Summary/Keyword: EIS

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$Al_2O_3/SiO_2$, $HfO_2/SiO_2$ 적층 감지막의 두께 최적화를 통한 Electrolyte Insulator Semiconductor 소자의 pH 감지감도특성 비교

  • Gu, Ja-Gyeong;Jang, Hyeon-Jun;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.448-448
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    • 2012
  • 최근에 pH 감지막의 감지감도특성을 평가하기 위해 electrolyte insulator semiconductor (EIS) 구조가 유용하게 이용되고 있다. EIS는 간단한 구조와 pH 용액에 빠른 응답속도, 낮은 단가 및 집적이 용이하다는 장점이 있다. EIS 구조에서 화학적 용액에 대한 감지감도 평가 중 가장 중요하게 작용하는 부분이 감지막이다. 이 감지막은 감지 대상 물질과 물리적으로 직접 접촉되는 부분으로서 일반적으로 기계적/화학적 강도가 우수한 실리콘 산화막($SiO_2$)이 많이 사용되어져 왔다. 최근에는 기존의 $SiO_2$ 보다 성능이 향상된 감지막을 개발하기 위하여 $Al_2O_3$, $HfO_2$, $ZrO_2$, 그리고 $Ta_2O_5$와 같은 고유전 상수(high-k)를 가지는 물질들을 EIS 센서의 감지막으로 이용하는 연구가 활발하게 진행되고 있다. High-k 물질 중 $Al_2O_3$는 산성에서 알칼리성 영역까지의 넓은 화학안정성을 가지며 화학용액에 대해 내구성이 우수한 특성을 가진다. $HfO_2$은 내식성이 뛰어나며 출력특성이 높은 장점을 가진 물질이다. 본 실험에서는 특성이 다른 두 물질을 EIS의 감지막으로 각각 사용하여 두께에 따른 의존성을 평가하였다. 제작한 EIS 구조의 pH 센서를 바이오 센서에 적용하였을 때 신호대 잡음비(SNR: signal to noise)가 여전히 취약하다는 문제점이 있었다. 이런 문제점을 보완하기 위하여 감지막의 물리적 두께는 점점 얇아지게 되었고 그 결과 높은 출력 특성을 얻게 되었지만, 감지막이 얇아짐에 따라서 화학 용액 중의 이온 침투로 인한 감지막 자체의 손상 또한 심각한 문제로 대두되었다. 이로 인해 최적화 된 감지막의 두께를 얻을 필요가 있다. 결론적으로 $Al_2O_3$, $HfO_2$ 두 감지막 모두 두께가 23 nm일 때 가장 우수한 특성을 보였으며, $Al_2O_3$를 감지막으로 사용하였을 경우 화학적 용액에 대해 내구성이 뛰어났고, $HfO_2$을 사용하였을 때에는 화학적 용액에 대한 안정성 보다는 pH 용액변화에 따른 향상된 감지감도특성을 보였다.

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High-k 물질의 적층을 통한 고신뢰성 EIS pH 센서

  • Jang, Hyeon-Jun;Kim, Min-Su;Jeong, Hong-Bae;Lee, Yeong-Hui;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.129-129
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    • 2011
  • ISFET (ion sensitive field effect transistor)는 용액 중의 각종 이온 농도를 측정하는 반도체 이온 센서이다. ISFET는 작은 소자 크기, 견고한 구조, 즉각적인 반응속도, 기존의 CMOS공정과 호환이 가능하다는 장점이 있다. ISFET의 기본 구조는 기존의 MOSFET (metal oxide semiconductor field effect transistor)에서 고안되었으며, ISFET는 기존의 MOSFET의 게이트 전극 부분이 기준전극과 전해질로 대체되어진 구조를 가지고 있다. ISFET소자의 pH 감지 메커니즘은 감지막의 표면에서 pH용액 속의 이온들이 감지막의 표면에서 속박되어 막의 표면전위의 변화를 유발하는 것을 이용한다. 그 결과, ISFET의 문턱전압의 변화를 일으키게 되고 드레인 전류의 양 또한 달라지게 된다. ISFET의 높은 pH감지능력을 얻기 위하여 높은 high-k물질 들이 감지막으로서 연구되었다. Al2O3와 HfO2는 높은 유전상수, non-ideal 효과에 대한 immunity 그리고 높은 pH 감지능력 등 많은 장점을 가지고 있는 물질로 알려졌다. 본 연구에서는, SiO2/HfO2/Al2O3 (OHA) 적층막을 이용한 EIS (electrolyte- insulator-silicon) pH센서를 제작하였다. EIS구조는 ISFET로의 적용이 용이하며 ISFET보다 제작 방법과 소자 구조가 간단하다는 장점이 있다. HfO2은 22~25의 높은 유전상수를 가지며 높은 pH 감지능력으로 인하여 감지막으로서 많은 연구가 이루어지고 있는 물질이다. 하지만 HfO2의 물질이 가진 고유의 특성상 화학적 용액에 대한 non-ideal 효과는 다른 금속계열 산화막에 비하여 취약한 모습을 보인다. 반면에 Al2O3의 유전상수는 HfO2보다 작지만 화학용액으로 인한 손상에 대하여 강한 immunity가 있는 재료이다. 이러한 물질들의 성질을 고려하여 OHA의 새로운 감지막의 적층구조를 생각하였다. 먼저 Si과 high-k물질의 양호한 계면상태를 이루기 위하여 5 nm의 얇은 SiO2막을 완충막으로서 성장시켰다. 다음으로 높은 유전상수를 가지고 있는 8 nm의 HfO2을 증착시킴으로서 소자의 물리적 손상에 대한 안정성을 향상시켰다. 최종적으로 화학용액과 직접적인 접촉이 되는 부분은 non-ideal 효과에 강한 Al2O3을 적층하여 소자의 화학적 손상에 문제점을 개선시켰다. 결론적으로 감지막의 적층 모델링을 통하여 각각의 high-k 물질이 가진 고유의 특성에 대한 한계점을 극복함으로써 높은 pH 감지능력뿐만 아니라 신뢰성 있는 pH 센서가 제작 되었다.

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A Portable Impedance Spectroscopy Instrument for the Measurement of the Impedance Spectrum of High Voltage Battery Pack (고압 배터리 팩의 임피던스 스펙트럼 측정용 휴대용 임피던스 분광기)

  • Rahim, Gul;Choi, Woo-Jin
    • The Transactions of the Korean Institute of Power Electronics
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    • v.26 no.3
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    • pp.192-198
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    • 2021
  • The battery's State of Health (SOH) is a critical parameter in the process of battery use, as it represents the Remaining Useful Life (RUL) of the battery. Electrochemical Impedance Spectroscopy (EIS) is a widely used technique in observing the state of the battery. The measured impedance at certain frequencies can be used to evaluate the state of the battery, as it is intimately tied to the underlying chemical reactions. In this work, a low-cost portable EIS instrument is developed on the basis of the ARM Cortex-M4 Microcontroller Unit (MCU) for measuring the impedance spectrum of Li-ion battery packs. The MCU uses a built-in DAC module to generate the sinusoidal sweep perturbation signal. Moreover, it performs the dual-channel acquisition of voltage and current signals, calculates impedance using a Digital Lock-in Amplifier (DLA), and transmits the result to a PC. By using LabVIEW, an interface was developed with the real-time display of the EIS information. The developed instrument was suitable for measuring the impedance spectrum of the battery pack up to 1000 V. The measurement frequency range of the instrument was from 1 hz to 1 Khz. Then, to prove the performance of the developed system, the impedance of a Samsung SM3 battery pack and a Bexel pouch module were measured and compared with those obtained by the commercial instrument.

The Effect of External DC Electric Field on the Atmospheric Corrosion Behaviour of Zinc under a Thin Electrolyte Layer

  • Liang, Qinqin;YanYang, YanYang;Zhang, Junxi;Yuan, Xujie;Chen, Qimeng
    • Corrosion Science and Technology
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    • v.17 no.2
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    • pp.54-59
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    • 2018
  • The effect of external DC electric field on atmospheric corrosion behavior of zinc under a thin electrolyte layer (TEL) was investigated by measuring open circuit potential (OCP), cathodic polarization curve, and electrochemical impedance spectroscopy (EIS). Results of OCP vs. time curves indicated that the application of external DC electric field resulted in a negative shift of OCP of zinc. Results of cathodic polarization curves measurement and EIS measurement showed that the reduction current of oxygen increased while charge transfer resistance ($R_{ct}$) decreased under the external DC electric field. Variation of OCP negative shift, reduction current of oxygen, and $R_{ct}$ increase with increasing of external DC electric field strength as well as the effect of external DC electric field on double-layer structure in the electrode/electrolyte interface and ions distribution in thin electrolyte layer were analyzed. All results showed that the external DC electric field could accelerate the corrosion of zinc under a thin electrolyte layer.

The study on the influence of surface cleanness and water soluble salt on corrosion protection of epoxy resin coated carbon steel

  • Shon, MinYoung
    • Corrosion Science and Technology
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    • v.13 no.5
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    • pp.163-169
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    • 2014
  • The corrosion resistance of epoxy-coated carbon steel was evaluated. The carbon steel surface was subjected to different treatment methods such as steel grit blasting and power tool treatment as well as contamination of water soluble salt. To study the effect of the surface treatments and contamination, the topology of the treated surface was observed by confocal microscopy and a pull-off adhesion test was conducted. The corrosion resistance of the epoxy-coated carbon steel was further examined by electrochemical impedance spectroscopy (EIS) combined with immersion test of 3.5 wt% of NaCl solution. Consequently, the surface contamination by sodium chloride with $16mg/m^2$, $48mg/m^2$ and $96mg/m^2$ didn't affect the adhesion strength for current epoxy coated carbon steel and blister and rust were not observed on the surface of epoxy coating contaminated by various concentration of sodium chloride after 20 weeks of immersion in 3.5 wt% NaCl aqueous solutions. In addition, the results of EIS test showed that the epoxy-coated carbon steel treated with steel grit blasting and power tool showed similar corrosion protection performance and surface cleanness such as Sa 3 and Sa 2.5 didn't affect the corrosion protectiveness of epoxy coated carbon steel.

Comparative analysis for the corrosion susceptibility of copper alloys in sandy soil

  • Galai, Mouhsine;Benqlilou, Hanane;Touhami, Mohamed Ebn;Belhaj, Tounsi;Berrami, Khalifa;El Kafssaoui, Hassan
    • Environmental Engineering Research
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    • v.23 no.2
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    • pp.164-174
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    • 2018
  • Corrosion of copper alloys (copper, bronze and brass) in soil was evaluated at ambient temperature using various methods such as electrochemical impedance spectroscopy (EIS), polarization curves and Scanning Electron Microscopy (SEM) coupled with Energy Dispersive Spectroscopy microanalysis measurements. Three equivalent circuits were separately used to interpret the obtained impedance spectra. The EIS measurements indicated that the polarization resistance of all electrodes increases with increasing the immersion time. SEM showed a presence of three layers of corrosion products with various composition and morphology covering each electrode. In addition, it was found that at 20% of moisture content the $R_p$ values and the current density of all electrodes in the studied soil give the following order: copper > bronze > brass. Good consistency between the data obtained from EIS and PP measurements was observed.

Development of Framework for Effective Integration of RFID Systems with Enterprise Information Systems (기업정보시스템과 RFID 시스템의 효과적인 연동을 위한 프레임워크 개발)

  • Kang, Yong-Shin;Kim, Sang-Hee;Lee, Yong-Han;Kim, Hoon-Tae
    • The Journal of Society for e-Business Studies
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    • v.16 no.2
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    • pp.73-89
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    • 2011
  • RFID technology enables companies to precisely manage their inventories at the item level. Recently, due to the wide spread of RFID data-exchange standards, RFID systems are being recognized as separate information systems, each of which is consist of RFID hardwares, a middleware and data repositories, thereby RFID systems become common targets for system integration. In this paper, we proposed an effective integration framework between RFID systems and existing enterprise information systems (EIS). We also surveyed the current state of the RFID-EIS system integration practices. The proposed framework will be helpful for system developers to effectively integrate RFID systems with EIS's.

Critical Research on Bruner's EIS Theory (Bruner의 EIS 이론에 대한 비판적 고찰)

  • 홍진곤
    • Journal of Educational Research in Mathematics
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    • v.8 no.2
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    • pp.553-563
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    • 1998
  • In this thesis, I examined Bruner's EIS theory from the viewpoint of epistemology based on Piaget's genetic epistemology. Although Bruner's ideal thought which insisted ‘to teach the structure’accepted Piaget's theory in the methodology of realization, it is different from Piaget in understanding knowledge. The difference is shown from understanding the meaning of ‘structure’. Piaget's concept of structure is something that has overcome the realistic viewpoint of the traditional epistemology and is reconstructed through endless self-regulative transformational process. However Bruner's is used as a realistic meaning as we can see in the Plato's recollection theory. Therefore Piaget's ‘stage of development’means the difference of structure which lies in the generative process and it includes the qualitive difference of level. On the other hand, Bruner, who is trying to translate and suggest the fixed structure to the children understood Piaget's stage of development as the difference in the ways of representation. Piaget's operational constructivism insists that the children should ‘construct’the knowledge through their activity, and especially in case of the lohico-mathematical recognition, the source should be internalized activity, that is, operation. In view of this assertion, Burner's idea which insists to accept the structure of knowledge as a fixed reality and to suggest the translated representation proper to the cognitive structure of the children to teach them, has a danger of emphasizing only the functional aspects to deliver the given knowledge ‘quickly’. And it also has the danger of damaging ‘the nature of the knowledge’in the translated knowledge.

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Electrochemical Impedance Spectroscopy and Cyclic Voltammetry Methods for Monitoring SmCl3 Concentration in Molten Eutectic LiCl-KCl

  • Shaltry, Michael R.;Allahar, Kerry N.;Butt, Darryl P.;Simpson, Michael F.;Phongikaroon, Supathorn
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.18 no.1
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    • pp.1-18
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    • 2020
  • Molten salt solutions consisting of eutectic LiCl-KCl and concentrations of samarium chloride (0.5 to 3.0 wt%) at 500℃ were analyzed using both cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS). The CV technique gave the average diffusion coefficient for Sm3+ over the concentration range. Equipped with Sm3+ diffusion coefficient, the Randles-Sevcik equation predicted Sm3+ concentration values that agree with the given experimental values. From CV measurements; the anodic, cathodic, and half-peak potentials were identified and subsequently used as a parameter to acquire EIS spectra. A six-element Voigt model was used to model the EIS data in terms of resistance-time constant pairs. The lowest resistances were observed at the half-peak potential with the associated resistance-time constant pairs characterizing the reversible reaction between Sm3+ and Sm2+. By extrapolation, the Voigt model estimated the polarization resistance and established a polarization resistance-concentration relationship.

Evaluation and Prediction of Corrosion Resistance of Epoxy Systems and Epoxy/Polyurethane Systems in Seawater Environment

  • Lee, Chul-Hwan;Shin, Chil-Seok;Baek, Kwang-Ki
    • Corrosion Science and Technology
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    • v.5 no.1
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    • pp.33-38
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    • 2006
  • Current coating practice requires the thickness of anti-corrosion organic coatings to be over $250{\mu}m$ for immersion parts of ships and offshore structures and the corrosion resistance of these coatings has been evaluated by destructive and qualitative analysis. Recently, Electrochemical Impedance Spectroscopy(EIS) method has been employed, as an alternative, to evaluate corrosion resistance of organic coatings. This method is characterized as being nondestructive, reproducible, and quantitative in evaluating aging of organic coatings. In this study, EIS method was adopted to quantitatively and effectively select the coating systems having optimized protective performance. Evaluations of several epoxy and epoxy/polyurethane coating systems typically used for ships and offshore structures were carried out in wet($50^{\circ}C$, $90^{\circ}C$) and dry(room temp.) environments to accelerate the degradation of the organic coatings. These results were compared with the conventional scribed(scratched) test results. The plausible prediction model for determining the remaining life-time of coating systems was also proposed based on variations of impedance data, FT-IR and $T_g$ measurements results.