• 제목/요약/키워드: E-beam

검색결과 1,957건 처리시간 0.029초

마이크로 칼럼의 전자 방출원 위치 오차의 영향 (Effect of the Off-axis distance of the Electron Emitting Source in Micro-column)

  • 이응기
    • 반도체디스플레이기술학회지
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    • 제9권1호
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    • pp.17-21
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    • 2010
  • Currently miniaturized electron-optical columns find their way into electron beam lithography systems. For better lithography process, it is required to make smaller spot size and longer working distance. But, the micro-columns of the multi-beam lithography system suffer from chromatic and spherical aberration, even when the electron beam is exactly on the symmetric axis of the micro-column. The off-axis error of the electron emitting source is expected to become worse with increasing off-axis distance of the focusing spot. Especially the electron beams far from the system optical axis have a non-negligible asymmetric intensity distribution in the micro-column. In this paper, the effect of the off-axis e-beam source is analyzed. To analyze this effect is to introduce a micro-column model of which the e-beam emitting source is aligned with the center of the electron beam by shifting them perpendicular to the system optical axis. The presented solution can be used to analysis the performance of the multi-electron-beam system. The performance parameters, such as the working distances and the focusing position are obtained by the computational simulations as a function of the off-axis distance of the emitting source.

전자선 조사가 베타글루칸의 항알레르기 활성에 미치는 영향 (Effect of Electron Beam Irradiation on the Anti-allergy Activity of β-Glucan)

  • 박종흠;성낙윤;변의백;송두섭;김재경;송범석;박상현;신미혜;이주운;김재훈;유영춘
    • 방사선산업학회지
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    • 제6권3호
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    • pp.267-272
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    • 2012
  • This study evaluated the change in anti-allergy activity of ${\beta}-glucan$ by electron beam irradiation. ${\beta}-Glucan$ was irradiated at dose of 50 kGy and then orally pre-treated with electron beam irradiated and non irradiated ${\beta}-Glucan$ for 7 days. After pre-treatment, allergy was induced by injection of ovalbumin (OVA). Serum total immunoglobulin E (IgE) and OVA-specific IgE levels in the allergic mice was significantly increased but the mice pre-treated 50 kGy electron beam irradiated ${\beta}-glucan$ was significantly decreased the levels of total IgE and OVA-specific IgE, respectively. Moreover, cytokine production (interleukin-4) was also decreased in the 50 kGy electron beam irradiated ${\beta}-Glucan$ pre-treated mice. These results indicate that pre-treatment of 50 kGy electron beam irradiated ${\beta}-glucan$ may elevate the anti-allergy activity. Therefore, electron beam-irradiated ${\beta}-glucan$ could be used for nutraceutical foods in food industry.

Linear Ion Beam Applications for Roll-to-Roll Metal Thin Film Coatings on PET Substrates

  • Lee, Seunghun;Kim, Do-Geun
    • Applied Science and Convergence Technology
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    • 제24권5호
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    • pp.162-166
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    • 2015
  • Linear ion beams have been introduced for the ion beam treatments of flexible substrates in roll-to-roll web coating systems. Anode layer linear ion sources (300 mm width) were used to make the linear ion beams. Oxygen ion beams having an ion energy from 200 eV to 800 eV used for the adhesion improvement of Cu thin films on PET substrates. The Cu thin films deposited by a conventional magnetron sputtering on the oxygen ion beam treated PET substrates showed Class 5 adhesion defined by ASTM D3359-97 (tape test). Argon ion beams with 1~3 keV used for the ion beam sputtering deposition process, which aims to control the initial layer before the magnetron sputtering deposition. When the discharge power of the linear ion source is 1.2 kW, static deposition rate of Cu and Ni were 7.4 and $3.5{\AA}/sec$, respectively.

Flexural behavior of partially-restrained semirigid steel connections

  • Campione, G.;Scibilia, N.
    • Steel and Composite Structures
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    • 제1권4호
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    • pp.441-458
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    • 2001
  • We analyzed the experimental and theoretical behavior of a particular type of steel joint designed to connect beam to beam and able to transfer both shear forces and bending moments. This joint is characterized by the use of steel plates and bolts enclosed in the width of the beams. The experimental investigation was carried out characterizing the constituent materials and testing in flexure beams constituted by two portions of beams connected in the middle with the joint proposed. Connections having different characteristics in terms of thickness of plates, number and type of bolts were utilized. Flexure tests allow one to determine the loaddeflection curves of the beam tested and the moment-rotation diagrams of the connections, highlighting the strength and the strain capacity of the joints. The proposed analytical model allows one to determine the moment-rotation relationship of the connections, pointing out the influence of the principal geometrical and mechanic characteristics of single constituents on the full properties of the joint.

Use of homogenization theory to build a beam element with thermo-mechanical microscale properties

  • Schrefler, B.A.;Lefik, M.
    • Structural Engineering and Mechanics
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    • 제4권6호
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    • pp.613-630
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    • 1996
  • The homogenization method is used to develop a beam element in space for thermo-mechanical analysis of unidirectional composites. Local stress and temperature field in the microscale are described using the function of homogenization. The global (macroscopic) behaviour of the structure is supposed to be that of a beam. Beam-type kinematical hypotheses (including independent shear rotations) are hence applied and superposed on the microdescription. A macroscopic stiffness matrix for such a beam element is then developed which contains the microscale properties of the single cell of periodicity. The presented model enables us to analyse without too much computational effort complicated composite structures such as e.g. toroidal coils of a fusion reactor. We need only a FE mesh sufficiently fine for a correct description of the local geometry of a single cell and a few of the newly developed elements for the description of the global behaviour. An unsmearing procedure gives the stress and temperature field in the different materials of a single cell.

Measurement of Energy bands of the MgO Layer in AC-PDPs

  • Jeoung, S.J.;Lee, H.J.;Son, C.G.;Kim, J.H.;Park, E.Y.;Hong, Y.J.;You, N.L.;Lee, S.B.;Han, Y.G.;Jeoung, S.H.;Song, K.B.;Moon, M.W.;Oh, P.Y.;Choi, E.H.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.906-909
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    • 2006
  • The secondary electron emission coefficient $({\gamma})$ of the cathode is an important factor for improving the discharge characteristics of AC-PDPs because of its close relationship to discharge voltage. In AC-PDPs, MgO is most widely used as a surface protective layer. In this experimental, we have investigated the electronic structure of the energy band structure of the MgO layer responsible for the high ${\gamma}$. The MgO layers have been deposited by electron beam evaporation method, where the $O_2$ partial pressures have been varied as 0, $5.2{\times}10^{-5}$ torr, $1.0{\times}10^{-4}$ torr, and $4.1{\times}10^{-4}$ torr, in this experiment. It is noted that work function that is energy gap between surface and first defect level of MgO layer has the lowest value for the highest O2 partial pressure of $4.1^{\ast}10^{-4}$ Torr.

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철근 콘크리트 기둥과 철골보의 합성구조 접합부 성능에 관한 연구 (Structural Behavior of Reinforced Concrete column and Steel beam Joints)

  • 이원규;신동대;송진규;정혜교;최완철
    • 한국콘크리트학회:학술대회논문집
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    • 한국콘크리트학회 1999년도 학회창립 10주년 기념 1999년도 가을 학술발표회 논문집
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    • pp.575-578
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    • 1999
  • The main objective of this study was to examine structural behavior of reinforced concrete column and steel beam joint. composite specimens about 3/4 of the actual beam column connection assembly were tested by applying cyclic load through actuators. Test variables include face bearing plate(FBP), extended face bearing plate(E-FBP), VIR, U-bar and sub beam. There is not much differenced between specimens with sub beam and without sub beam. Test results also show that the joint strength of test specimen is close to the predicted strength by ASCE guideline.

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하이브리드 보의 휨성능에 관한 실험적 연구 (An Experimental Study on the Flexural Strength of Hybrid Beam)

  • 홍성걸;양동현;임병호;류재천
    • 한국콘크리트학회:학술대회논문집
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    • 한국콘크리트학회 2006년도 춘계학술발표회 논문집(I)
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    • pp.398-401
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    • 2006
  • This study investigates the behaviour of Hybrid Beam with reinforced concrete encased steel center and reinforced concrete end. Two types of encased steel shape and two sections are examined in this study. Test results showed that H-Hybrid beam is stronger than Honey-comb Hybrid beam, and the behaviour of composite beam embedded steel at the elastic state is same as that of simple beam.

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E-beam 조사하에서 유리의 전하 측정 (Charge Accumulation in Glass under E-beam irradiation)

  • 김대열;최용성;황종선;이경섭
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.268-269
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    • 2008
  • Charging of spacecraft occurs in plasma and radiation environment. Especially, we focused on an accident caused by internal charging in a glass material that was used as the cover plate of solar panel array, and tried to measure the charge distribution in glass materials under electron beam irradiation by using a PEA (Pulsed Electro-Acoustic method) system. In the case of a quartz glass (pure $SiO_2$), no charge accumulation was observed either during or after the electron beam irradiation. On the contrary, positive charge accumulation was observed in glass samples containing metal-oxide components. It is found that the polarity of the observed charges depends on the contents of the impurities. To identify which impurity dominates the polarity of the accumulated charge, we measured charge distributions in several glass materials containing various metal-oxide components and calculated the trap energy depths from the charge decay characteristics of all glass samples.

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